JP2516946Y2 - ウエハー固定装置 - Google Patents

ウエハー固定装置

Info

Publication number
JP2516946Y2
JP2516946Y2 JP1990085767U JP8576790U JP2516946Y2 JP 2516946 Y2 JP2516946 Y2 JP 2516946Y2 JP 1990085767 U JP1990085767 U JP 1990085767U JP 8576790 U JP8576790 U JP 8576790U JP 2516946 Y2 JP2516946 Y2 JP 2516946Y2
Authority
JP
Japan
Prior art keywords
wafer
slide
base
fixing
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990085767U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444150U (en, 2012
Inventor
弘行 石田
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP1990085767U priority Critical patent/JP2516946Y2/ja
Publication of JPH0444150U publication Critical patent/JPH0444150U/ja
Application granted granted Critical
Publication of JP2516946Y2 publication Critical patent/JP2516946Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990085767U 1990-08-13 1990-08-13 ウエハー固定装置 Expired - Lifetime JP2516946Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990085767U JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990085767U JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Publications (2)

Publication Number Publication Date
JPH0444150U JPH0444150U (en, 2012) 1992-04-15
JP2516946Y2 true JP2516946Y2 (ja) 1996-11-13

Family

ID=31817130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990085767U Expired - Lifetime JP2516946Y2 (ja) 1990-08-13 1990-08-13 ウエハー固定装置

Country Status (1)

Country Link
JP (1) JP2516946Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5950164B2 (ja) * 2012-10-03 2016-07-13 日新イオン機器株式会社 基板ホルダ
JP6243229B2 (ja) * 2014-01-15 2017-12-06 株式会社荏原製作所 回転保持装置及び基板洗浄装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100769A (ja) * 1982-11-30 1984-06-11 東レ株式会社 酸性染料可染性繊維構造物

Also Published As

Publication number Publication date
JPH0444150U (en, 2012) 1992-04-15

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