JP2516824Z - - Google Patents
Info
- Publication number
- JP2516824Z JP2516824Z JP2516824Z JP 2516824 Z JP2516824 Z JP 2516824Z JP 2516824 Z JP2516824 Z JP 2516824Z
- Authority
- JP
- Japan
- Prior art keywords
- piezo stack
- valve
- lower movable
- valve body
- piezo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Family
ID=
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