JP2515719Y2 - 着脱式の放電電極 - Google Patents
着脱式の放電電極Info
- Publication number
- JP2515719Y2 JP2515719Y2 JP1990000916U JP91690U JP2515719Y2 JP 2515719 Y2 JP2515719 Y2 JP 2515719Y2 JP 1990000916 U JP1990000916 U JP 1990000916U JP 91690 U JP91690 U JP 91690U JP 2515719 Y2 JP2515719 Y2 JP 2515719Y2
- Authority
- JP
- Japan
- Prior art keywords
- bottom plate
- discharge electrode
- mold
- groove
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000036964 tight binding Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 28
- 239000010408 film Substances 0.000 description 12
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000916U JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000916U JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0395630U JPH0395630U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-30 |
| JP2515719Y2 true JP2515719Y2 (ja) | 1996-10-30 |
Family
ID=31504852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990000916U Expired - Lifetime JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2515719Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59148348A (ja) * | 1983-02-15 | 1984-08-25 | Nec Corp | 半導体装置およびその製造方法 |
| JP2601488B2 (ja) * | 1987-10-13 | 1997-04-16 | 三井東圧化学株式会社 | 膜形成装置 |
| JP2602881B2 (ja) * | 1988-03-08 | 1997-04-23 | 三井東圧化学株式会社 | 成膜装置 |
-
1990
- 1990-01-11 JP JP1990000916U patent/JP2515719Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0395630U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-30 |