JP2514577Y2 - 光学式表面粗さ測定装置 - Google Patents
光学式表面粗さ測定装置Info
- Publication number
- JP2514577Y2 JP2514577Y2 JP1990022394U JP2239490U JP2514577Y2 JP 2514577 Y2 JP2514577 Y2 JP 2514577Y2 JP 1990022394 U JP1990022394 U JP 1990022394U JP 2239490 U JP2239490 U JP 2239490U JP 2514577 Y2 JP2514577 Y2 JP 2514577Y2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- polarized light
- objective
- measured
- lens holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 33
- 230000003746 surface roughness Effects 0.000 title claims description 23
- 238000005259 measurement Methods 0.000 claims description 37
- 230000010287 polarization Effects 0.000 claims description 10
- 230000035559 beat frequency Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910021532 Calcite Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990022394U JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990022394U JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03113110U JPH03113110U (en, 2012) | 1991-11-19 |
| JP2514577Y2 true JP2514577Y2 (ja) | 1996-10-23 |
Family
ID=31525404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990022394U Expired - Lifetime JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514577Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100947464B1 (ko) * | 2008-02-13 | 2010-03-17 | 에스엔유 프리시젼 주식회사 | 두께 측정장치 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616707U (ja) * | 1984-06-18 | 1986-01-16 | 株式会社 小坂研究所 | 微細形状測定器 |
| US4959552A (en) * | 1988-02-09 | 1990-09-25 | Carl-Zeiss-Stiftung | Microscope arranged for measuring microscopic structures |
| JPH0742087Y2 (ja) * | 1988-07-20 | 1995-09-27 | ブラザー工業株式会社 | 光学式表面粗さ測定装置 |
-
1990
- 1990-03-06 JP JP1990022394U patent/JP2514577Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03113110U (en, 2012) | 1991-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment |
Free format text: PAYMENT UNTIL: 20081221 Year of fee payment: 7 |
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| FPAY | Renewal fee payment |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20091221 |
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| FPAY | Renewal fee payment |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20091221 |
|
| FPAY | Renewal fee payment |
Free format text: PAYMENT UNTIL: 20101221 Year of fee payment: 9 |
|
| LAPS | Cancellation because of no payment of annual fees |