JP2513179Y2 - 縦型ｃｖｄ装置 - Google Patents

縦型ｃｖｄ装置

Info

Publication number
JP2513179Y2
JP2513179Y2 JP1986155206U JP15520686U JP2513179Y2 JP 2513179 Y2 JP2513179 Y2 JP 2513179Y2 JP 1986155206 U JP1986155206 U JP 1986155206U JP 15520686 U JP15520686 U JP 15520686U JP 2513179 Y2 JP2513179 Y2 JP 2513179Y2
Authority
JP
Japan
Prior art keywords
gas
sample
sample stage
pipe
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986155206U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361119U (enrdf_load_stackoverflow
Inventor
努 中沢
雄二 古村
文健 三重野
喜久雄 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1986155206U priority Critical patent/JP2513179Y2/ja
Publication of JPS6361119U publication Critical patent/JPS6361119U/ja
Application granted granted Critical
Publication of JP2513179Y2 publication Critical patent/JP2513179Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986155206U 1986-10-09 1986-10-09 縦型ｃｖｄ装置 Expired - Lifetime JP2513179Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986155206U JP2513179Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986155206U JP2513179Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6361119U JPS6361119U (enrdf_load_stackoverflow) 1988-04-22
JP2513179Y2 true JP2513179Y2 (ja) 1996-10-02

Family

ID=31075705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986155206U Expired - Lifetime JP2513179Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JP2513179Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS566428A (en) * 1979-06-28 1981-01-23 Sanyo Electric Co Ltd Epitaxial growth apparatus
JPH0618340B2 (ja) * 1984-10-12 1994-03-09 日本電気株式会社 チャンネルの有効利用を実現したメッセ−ジ受信が可能な無線選択呼出受信機

Also Published As

Publication number Publication date
JPS6361119U (enrdf_load_stackoverflow) 1988-04-22

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