JP2501809Y2 - ウエハ―保持装置 - Google Patents

ウエハ―保持装置

Info

Publication number
JP2501809Y2
JP2501809Y2 JP9594889U JP9594889U JP2501809Y2 JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2 JP 9594889 U JP9594889 U JP 9594889U JP 9594889 U JP9594889 U JP 9594889U JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2
Authority
JP
Japan
Prior art keywords
wafer
holding means
cooling
outer peripheral
mounting surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9594889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336135U (enExample
Inventor
淳一 佐藤
雅和 室山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9594889U priority Critical patent/JP2501809Y2/ja
Publication of JPH0336135U publication Critical patent/JPH0336135U/ja
Application granted granted Critical
Publication of JP2501809Y2 publication Critical patent/JP2501809Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP9594889U 1989-08-16 1989-08-16 ウエハ―保持装置 Expired - Fee Related JP2501809Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9594889U JP2501809Y2 (ja) 1989-08-16 1989-08-16 ウエハ―保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9594889U JP2501809Y2 (ja) 1989-08-16 1989-08-16 ウエハ―保持装置

Publications (2)

Publication Number Publication Date
JPH0336135U JPH0336135U (enExample) 1991-04-09
JP2501809Y2 true JP2501809Y2 (ja) 1996-06-19

Family

ID=31645179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9594889U Expired - Fee Related JP2501809Y2 (ja) 1989-08-16 1989-08-16 ウエハ―保持装置

Country Status (1)

Country Link
JP (1) JP2501809Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4505420B2 (ja) * 2006-02-13 2010-07-21 武郎 吉田 濾過器
US11109948B2 (en) 2015-03-19 2021-09-07 Kuraray Noritake Dental Inc. Workpiece unit and method of producing same
WO2016148288A1 (ja) * 2015-03-19 2016-09-22 クラレノリタケデンタル株式会社 被加工ユニット及びその製造方法
EP4049616B1 (en) * 2015-03-19 2023-12-20 Kuraray Noritake Dental Inc. Workpiece unit and method for producing same

Also Published As

Publication number Publication date
JPH0336135U (enExample) 1991-04-09

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