JP2501809Y2 - ウエハ―保持装置 - Google Patents
ウエハ―保持装置Info
- Publication number
- JP2501809Y2 JP2501809Y2 JP9594889U JP9594889U JP2501809Y2 JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2 JP 9594889 U JP9594889 U JP 9594889U JP 9594889 U JP9594889 U JP 9594889U JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding means
- cooling
- outer peripheral
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 230000008602 contraction Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 102
- 238000001816 cooling Methods 0.000 description 27
- 238000001020 plasma etching Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004380 ashing Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9594889U JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9594889U JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0336135U JPH0336135U (enrdf_load_stackoverflow) | 1991-04-09 |
| JP2501809Y2 true JP2501809Y2 (ja) | 1996-06-19 |
Family
ID=31645179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9594889U Expired - Fee Related JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501809Y2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4505420B2 (ja) * | 2006-02-13 | 2010-07-21 | 武郎 吉田 | 濾過器 |
| EP3272306B1 (en) | 2015-03-19 | 2020-06-10 | Kuraray Noritake Dental Inc. | Workpiece unit and method for producing same |
| US11185397B2 (en) | 2015-03-19 | 2021-11-30 | Kuraray Noritake Dental Inc. | Workpiece unit and method for producing same |
| US12178674B2 (en) | 2015-03-19 | 2024-12-31 | Kuraray Noritake Dental Inc. | Workpiece unit and producing method thereof |
-
1989
- 1989-08-16 JP JP9594889U patent/JP2501809Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336135U (enrdf_load_stackoverflow) | 1991-04-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |