JP2501809Y2 - ウエハ―保持装置 - Google Patents
ウエハ―保持装置Info
- Publication number
- JP2501809Y2 JP2501809Y2 JP9594889U JP9594889U JP2501809Y2 JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2 JP 9594889 U JP9594889 U JP 9594889U JP 9594889 U JP9594889 U JP 9594889U JP 2501809 Y2 JP2501809 Y2 JP 2501809Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding means
- cooling
- outer peripheral
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9594889U JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9594889U JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0336135U JPH0336135U (US06623731-20030923-C00052.png) | 1991-04-09 |
| JP2501809Y2 true JP2501809Y2 (ja) | 1996-06-19 |
Family
ID=31645179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9594889U Expired - Fee Related JP2501809Y2 (ja) | 1989-08-16 | 1989-08-16 | ウエハ―保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501809Y2 (US06623731-20030923-C00052.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4505420B2 (ja) * | 2006-02-13 | 2010-07-21 | 武郎 吉田 | 濾過器 |
| US11109948B2 (en) | 2015-03-19 | 2021-09-07 | Kuraray Noritake Dental Inc. | Workpiece unit and method of producing same |
| EP4049616B1 (en) | 2015-03-19 | 2023-12-20 | Kuraray Noritake Dental Inc. | Workpiece unit and method for producing same |
| WO2016148288A1 (ja) * | 2015-03-19 | 2016-09-22 | クラレノリタケデンタル株式会社 | 被加工ユニット及びその製造方法 |
-
1989
- 1989-08-16 JP JP9594889U patent/JP2501809Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336135U (US06623731-20030923-C00052.png) | 1991-04-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |