JP2025504573A5 - - Google Patents
Info
- Publication number
- JP2025504573A5 JP2025504573A5 JP2024545103A JP2024545103A JP2025504573A5 JP 2025504573 A5 JP2025504573 A5 JP 2025504573A5 JP 2024545103 A JP2024545103 A JP 2024545103A JP 2024545103 A JP2024545103 A JP 2024545103A JP 2025504573 A5 JP2025504573 A5 JP 2025504573A5
- Authority
- JP
- Japan
- Prior art keywords
- transfer method
- donor substrate
- embedded
- support substrate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR2200842 | 2022-01-31 | ||
| FR2200842A FR3132384B1 (fr) | 2022-01-31 | 2022-01-31 | Procede de transfert d’une couche mince sur un substrat support |
| PCT/EP2022/086726 WO2023143818A1 (fr) | 2022-01-31 | 2022-12-19 | Procede de transfert d'une couche mince sur un substrat support |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2025504573A JP2025504573A (ja) | 2025-02-12 |
| JP2025504573A5 true JP2025504573A5 (https=) | 2025-10-01 |
Family
ID=81325210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024545103A Pending JP2025504573A (ja) | 2022-01-31 | 2022-12-19 | 薄膜を支持基板上に転写するための方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20250391704A1 (https=) |
| EP (1) | EP4473553B1 (https=) |
| JP (1) | JP2025504573A (https=) |
| KR (1) | KR20240140160A (https=) |
| CN (1) | CN118591862A (https=) |
| FR (1) | FR3132384B1 (https=) |
| TW (1) | TW202335092A (https=) |
| WO (1) | WO2023143818A1 (https=) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6540827B1 (en) * | 1998-02-17 | 2003-04-01 | Trustees Of Columbia University In The City Of New York | Slicing of single-crystal films using ion implantation |
| FR2839385B1 (fr) * | 2002-05-02 | 2004-07-23 | Soitec Silicon On Insulator | Procede de decollement de couches de materiau |
-
2022
- 2022-01-31 FR FR2200842A patent/FR3132384B1/fr active Active
- 2022-12-19 CN CN202280088314.4A patent/CN118591862A/zh active Pending
- 2022-12-19 EP EP22836231.5A patent/EP4473553B1/fr active Active
- 2022-12-19 JP JP2024545103A patent/JP2025504573A/ja active Pending
- 2022-12-19 US US18/834,441 patent/US20250391704A1/en active Pending
- 2022-12-19 KR KR1020247029081A patent/KR20240140160A/ko active Pending
- 2022-12-19 WO PCT/EP2022/086726 patent/WO2023143818A1/fr not_active Ceased
- 2022-12-20 TW TW111148934A patent/TW202335092A/zh unknown
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