JP2025026477A5 - - Google Patents

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Publication number
JP2025026477A5
JP2025026477A5 JP2024205736A JP2024205736A JP2025026477A5 JP 2025026477 A5 JP2025026477 A5 JP 2025026477A5 JP 2024205736 A JP2024205736 A JP 2024205736A JP 2024205736 A JP2024205736 A JP 2024205736A JP 2025026477 A5 JP2025026477 A5 JP 2025026477A5
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JP
Japan
Prior art keywords
gas
sample
plasma
detector
sample chamber
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Pending
Application number
JP2024205736A
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English (en)
Japanese (ja)
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JP2025026477A (ja
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Publication date
Priority claimed from PCT/JP2022/038848 external-priority patent/WO2023074480A1/ja
Application filed filed Critical
Publication of JP2025026477A publication Critical patent/JP2025026477A/ja
Publication of JP2025026477A5 publication Critical patent/JP2025026477A5/ja
Pending legal-status Critical Current

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JP2024205736A 2021-10-29 2024-11-26 ガス分析装置および制御方法 Pending JP2025026477A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2021178175 2021-10-29
JP2021178175 2021-10-29
PCT/JP2022/038848 WO2023074480A1 (ja) 2021-10-29 2022-10-19 ガス分析装置および制御方法
JP2023556354A JP7599755B2 (ja) 2021-10-29 2022-10-19 ガス分析装置および制御方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2023556354A Division JP7599755B2 (ja) 2021-10-29 2022-10-19 ガス分析装置および制御方法

Publications (2)

Publication Number Publication Date
JP2025026477A JP2025026477A (ja) 2025-02-21
JP2025026477A5 true JP2025026477A5 (https=) 2025-09-05

Family

ID=86157780

Family Applications (2)

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JP2023556354A Active JP7599755B2 (ja) 2021-10-29 2022-10-19 ガス分析装置および制御方法
JP2024205736A Pending JP2025026477A (ja) 2021-10-29 2024-11-26 ガス分析装置および制御方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2023556354A Active JP7599755B2 (ja) 2021-10-29 2022-10-19 ガス分析装置および制御方法

Country Status (4)

Country Link
US (1) US20250006476A1 (https=)
JP (2) JP7599755B2 (https=)
KR (1) KR20240088888A (https=)
WO (1) WO2023074480A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240339309A1 (en) * 2023-04-10 2024-10-10 Tokyo Electron Limited Advanced OES Characterization
KR20250064334A (ko) * 2023-11-02 2025-05-09 피에스케이 주식회사 기록매체에 저장된 프로그램 및 기판 처리 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5495107A (en) * 1994-04-06 1996-02-27 Thermo Jarrell Ash Corporation Analysis
JPH0992200A (ja) * 1995-09-27 1997-04-04 Hitachi Ltd プラズマイオン源質量分析装置
TWI888050B (zh) * 2019-03-25 2025-06-21 日商亞多納富有限公司 製程系統

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