JP2024545563A5 - - Google Patents

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Publication number
JP2024545563A5
JP2024545563A5 JP2024524631A JP2024524631A JP2024545563A5 JP 2024545563 A5 JP2024545563 A5 JP 2024545563A5 JP 2024524631 A JP2024524631 A JP 2024524631A JP 2024524631 A JP2024524631 A JP 2024524631A JP 2024545563 A5 JP2024545563 A5 JP 2024545563A5
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JP
Japan
Prior art keywords
module
interpolation
waveform
real
data package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024524631A
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English (en)
Japanese (ja)
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JP2024545563A (ja
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Publication date
Priority claimed from US17/509,539 external-priority patent/US12300464B2/en
Application filed filed Critical
Publication of JP2024545563A publication Critical patent/JP2024545563A/ja
Publication of JP2024545563A5 publication Critical patent/JP2024545563A5/ja
Pending legal-status Critical Current

Links

JP2024524631A 2021-10-25 2022-10-18 ロバストなテンソル化成形設定点波形ストリーミング制御 Pending JP2024545563A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/509,539 2021-10-25
US17/509,539 US12300464B2 (en) 2021-10-25 2021-10-25 Robust tensorized shaped setpoint waveform streaming control
PCT/US2022/047059 WO2023076079A1 (en) 2021-10-25 2022-10-18 Robust tensorized shaped setpoint waveform streaming control

Publications (2)

Publication Number Publication Date
JP2024545563A JP2024545563A (ja) 2024-12-10
JP2024545563A5 true JP2024545563A5 (https=) 2025-10-30

Family

ID=86057270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024524631A Pending JP2024545563A (ja) 2021-10-25 2022-10-18 ロバストなテンソル化成形設定点波形ストリーミング制御

Country Status (5)

Country Link
US (2) US12300464B2 (https=)
EP (1) EP4423792A4 (https=)
JP (1) JP2024545563A (https=)
TW (1) TW202324149A (https=)
WO (1) WO2023076079A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12360512B2 (en) 2022-03-03 2025-07-15 Advanced Energy Industries, Inc. Multi-step predictive control system
US12272536B2 (en) * 2022-03-03 2025-04-08 Advanced Energy Industries, Inc. Systems and methods for delay and amplitude correction

Family Cites Families (23)

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Publication number Priority date Publication date Assignee Title
JP2008218898A (ja) * 2007-03-07 2008-09-18 Hitachi High-Technologies Corp プラズマ処理装置
US8258874B2 (en) 2008-12-31 2012-09-04 Advanced Energy Industries, Inc. Dual-mode control of a power generator
US8040068B2 (en) 2009-02-05 2011-10-18 Mks Instruments, Inc. Radio frequency power control system
US8659335B2 (en) 2009-06-25 2014-02-25 Mks Instruments, Inc. Method and system for controlling radio frequency power
US8716984B2 (en) 2009-06-29 2014-05-06 Advanced Energy Industries, Inc. Method and apparatus for modifying the sensitivity of an electrical generator to a nonlinear load
US8916793B2 (en) * 2010-06-08 2014-12-23 Applied Materials, Inc. Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
US9309594B2 (en) * 2010-04-26 2016-04-12 Advanced Energy Industries, Inc. System, method and apparatus for controlling ion energy distribution of a projected plasma
US8773019B2 (en) * 2012-02-23 2014-07-08 Mks Instruments, Inc. Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing
JP6063776B2 (ja) * 2013-03-04 2017-01-18 東京エレクトロン株式会社 基板搬送経路の決定方法、基板搬送装置、基板処理装置及びプログラム
US10049857B2 (en) 2014-12-04 2018-08-14 Mks Instruments, Inc. Adaptive periodic waveform controller
US9721758B2 (en) 2015-07-13 2017-08-01 Mks Instruments, Inc. Unified RF power delivery single input, multiple output control for continuous and pulse mode operation
US10395895B2 (en) 2015-08-27 2019-08-27 Mks Instruments, Inc. Feedback control by RF waveform tailoring for ion energy distribution
CN107219478A (zh) * 2016-03-22 2017-09-29 西门子(深圳)磁共振有限公司 一种磁共振成像系统的谱仪和信号处理板
US10571551B2 (en) * 2016-05-05 2020-02-25 Rohde & Schwarz Gmbh & Co. Kg Signal generation device and method
US10546724B2 (en) * 2017-05-10 2020-01-28 Mks Instruments, Inc. Pulsed, bidirectional radio frequency source/load
US10396601B2 (en) * 2017-05-25 2019-08-27 Mks Instruments, Inc. Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
CN115662868A (zh) * 2017-07-07 2023-01-31 先进能源工业公司 等离子体功率输送系统的周期间控制系统及其操作方法
JP7121506B2 (ja) * 2018-03-14 2022-08-18 株式会社日立ハイテク 探索装置、探索方法及びプラズマ処理装置
JP7170422B2 (ja) * 2018-05-15 2022-11-14 東京エレクトロン株式会社 処理装置
US11042140B2 (en) 2018-06-26 2021-06-22 Mks Instruments, Inc. Adaptive control for a power generator
US11626907B2 (en) * 2019-06-19 2023-04-11 Analogic Corporation Radio frequency generators, and related systems, methods, and devices
WO2022169518A1 (en) * 2021-02-05 2022-08-11 Lam Research Corporation Duty cycle control to achieve uniformity
US11715624B2 (en) * 2021-08-09 2023-08-01 Mks Instruments, Inc. Adaptive pulse shaping with post match sensor

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