JP2024510161A - 中空コアフォトニック結晶ファイバベースの多波長光源デバイス - Google Patents

中空コアフォトニック結晶ファイバベースの多波長光源デバイス Download PDF

Info

Publication number
JP2024510161A
JP2024510161A JP2023554333A JP2023554333A JP2024510161A JP 2024510161 A JP2024510161 A JP 2024510161A JP 2023554333 A JP2023554333 A JP 2023554333A JP 2023554333 A JP2023554333 A JP 2023554333A JP 2024510161 A JP2024510161 A JP 2024510161A
Authority
JP
Japan
Prior art keywords
radiation
light source
wavelength
source device
frequency component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023554333A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024510161A5 (https=
Inventor
ニー，ヨンフェン
ポンジャーズ，ウィレム，リチャード
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of JP2024510161A publication Critical patent/JP2024510161A/ja
Publication of JP2024510161A5 publication Critical patent/JP2024510161A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3536—Four-wave interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/392—Parametric amplification
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/395—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves in optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/32—Photonic crystals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
JP2023554333A 2021-03-16 2022-02-09 中空コアフォトニック結晶ファイバベースの多波長光源デバイス Pending JP2024510161A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP21162934.0A EP4060403A1 (en) 2021-03-16 2021-03-16 Hollow-core photonic crystal fiber based multiple wavelength light source device
EP21162934.0 2021-03-16
PCT/EP2022/053157 WO2022194456A1 (en) 2021-03-16 2022-02-09 Hollow-core photonic crystal fiber based multiple wavelength light source device

Publications (2)

Publication Number Publication Date
JP2024510161A true JP2024510161A (ja) 2024-03-06
JP2024510161A5 JP2024510161A5 (https=) 2025-02-13

Family

ID=74947008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023554333A Pending JP2024510161A (ja) 2021-03-16 2022-02-09 中空コアフォトニック結晶ファイバベースの多波長光源デバイス

Country Status (9)

Country Link
US (1) US20240142853A1 (https=)
EP (2) EP4060403A1 (https=)
JP (1) JP2024510161A (https=)
KR (1) KR20230154204A (https=)
CN (1) CN117063117A (https=)
DK (1) DK4060404T3 (https=)
IL (1) IL305662A (https=)
TW (1) TWI850632B (https=)
WO (1) WO2022194456A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12493225B2 (en) * 2023-08-27 2025-12-09 Ledlas Corp. Single-material-double-process parametric laser-wavelength converter
EP4664194A3 (en) * 2025-09-29 2026-04-22 ASML Netherlands B.V. A radiation source and method for generating output radiation

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
KR100434690B1 (ko) 2002-07-19 2004-06-04 소광섭 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법
KR100585476B1 (ko) 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
SG125101A1 (en) 2003-01-14 2006-09-29 Asml Netherlands Bv Level sensor for lithographic apparatus
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
JP5584689B2 (ja) 2008-10-06 2014-09-03 エーエスエムエル ネザーランズ ビー．ブイ． ２次元ターゲットを用いたリソグラフィの焦点及びドーズ測定
EP2228685B1 (en) 2009-03-13 2018-06-27 ASML Netherlands B.V. Level sensor arrangement for lithographic apparatus and device manufacturing method
JP5545782B2 (ja) 2009-07-31 2014-07-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置の焦点測定方法、散乱計、リソグラフィシステム、およびリソグラフィセル
WO2012022584A1 (en) 2010-08-18 2012-02-23 Asml Netherlands B.V. Substrate for use in metrology, metrology method and device manufacturing method
WO2014019846A2 (en) 2012-07-30 2014-02-06 Asml Netherlands B.V. Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
US9160137B1 (en) 2014-05-09 2015-10-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. Method and device for creating supercontinuum light pulses
WO2016083076A1 (en) 2014-11-26 2016-06-02 Asml Netherlands B.V. Metrology method, computer product and system
WO2016102127A1 (en) 2014-12-22 2016-06-30 Asml Netherlands B.V. Level sensor, lithographic apparatus and device manufacturing method
IL256196B (en) 2015-06-17 2022-07-01 Asml Netherlands Bv Recipe selection based on inter-recipe consistency
EP3136143B1 (en) 2015-08-26 2020-04-01 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Hollow-core fibre and method of manufacturing thereof
KR102217258B1 (ko) * 2016-04-28 2021-02-18 에이에스엠엘 네델란즈 비.브이. Hhg 소스, 검사 장치, 및 측정 수행 방법
IL299683B2 (en) 2017-01-09 2025-08-01 Max Planck Gesellschaft Broadband light source device and method of creating broadband light pulses

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
BENOIT, A. ET AL.: ""Parametric four-wave mixing sidebands in strongly driven Raman molecular D2-filled HC-PCF"", 2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/, JPN6025045855, June 2017 (2017-06-01), ISSN: 0005795120 *
CHOLAN, N A ET AL.: ""Self-seeded four-wave mixing cascades with low power consumption"", JOURNAL OF OPTICS, vol. 16, no. 10, JPN6025045858, 27 August 2014 (2014-08-27), pages 105203, ISSN: 0005795124 *
DEBORD, B. ET AL.: ""7.7 dB/km losses in inhibited coupling with hollow-core photonic crystal fibers"", 2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), JPN6026005369, 2016, pages 1 - 2, ISSN: 0005795125 *
KATSURAGAWA, M. ET AL.: ""Efficient generation of broad Raman sidebands in a kagome-lattice-type photonic crystal fiber"", CONFERENCE ON LASERS AND ELECTRO-OPTICS 2010, JPN6025045857, 2010, pages 6, ISSN: 0005795123 *
KEYSER, CHRISTIAN ET AL.: ""Tunable mid-IR emission through four-wave mixing in Xe-filled hollow-core photonic crystal fiber"", 2017 IEEE PHOTONICS CONFERENCE (IPC), JPN6025045856, October 2017 (2017-10-01), pages 589 - 590, ISSN: 0005795122 *
LI, YING ET AL.: ""Cascaded four-wave mixing seeded by two continuous wave signals"", APPLIED OPTICS, vol. 53, no. 8, JPN6025045854, 5 March 2014 (2014-03-05), pages 1583 - 1590, ISSN: 0005795119 *
WAN, YING ET AL.: ""Effect of Mode-Area Dispersion on Ultrafast Nonlinear Dynamics in Gas-Filled Anti-Resonant Hollow-", 2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), JPN6026005368, 2020, pages 1 - 2, ISSN: 0005795121 *

Also Published As

Publication number Publication date
KR20230154204A (ko) 2023-11-07
TW202240315A (zh) 2022-10-16
TWI850632B (zh) 2024-08-01
WO2022194456A1 (en) 2022-09-22
DK4060404T3 (da) 2026-01-12
EP4060404A1 (en) 2022-09-21
CN117063117A (zh) 2023-11-14
IL305662A (en) 2023-11-01
US20240142853A1 (en) 2024-05-02
EP4060403A1 (en) 2022-09-21
EP4060404B1 (en) 2025-12-10

Similar Documents

Publication Publication Date Title
TWI777551B (zh) 超連續輻射源及相關的度量衡裝置
TWI785352B (zh) 輻射源
JP7844496B2 (ja) 中空コア光ファイバベースの放射源
WO2023237264A1 (en) Method of producing photonic crystal fibers
TWI850632B (zh) 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置
TWI858380B (zh) 在光子晶體或高度非線性光纖之改良寬帶輻射生成
JP2025539714A (ja) 広帯域放射源
CN115398329B (zh) 包括非线性元件的组件及其使用方法
TW202209008A (zh) 用於產生寬帶輻射之方法與相關聯寬帶源及度量衡裝置
US20250251641A1 (en) Hollow-core optical fiber based radiation source
EP4273622A1 (en) Hollow-core optical fiber based radiation source
EP4163715A1 (en) Improved broadband radiation generation in photonic crystal or highly non-linear fibres
JP2025507257A (ja) スーパーコンティニウム放射源及び関連計測デバイス
TW202441270A (zh) 超連續譜輻射源
TW202450368A (zh) 用於產生超連續輻射之系統及方法
WO2026017352A1 (en) A broadband radiation source

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250204

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250204

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20251107

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251211

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260212

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260427