TWI850632B - 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 - Google Patents

光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 Download PDF

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Publication number
TWI850632B
TWI850632B TW111107908A TW111107908A TWI850632B TW I850632 B TWI850632 B TW I850632B TW 111107908 A TW111107908 A TW 111107908A TW 111107908 A TW111107908 A TW 111107908A TW I850632 B TWI850632 B TW I850632B
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TW
Taiwan
Prior art keywords
radiation
light source
wavelength
source device
frequency component
Prior art date
Application number
TW111107908A
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English (en)
Chinese (zh)
Other versions
TW202240315A (zh
Inventor
永鋒 倪
威廉 里察 邦德
Original Assignee
荷蘭商Ａｓｍｌ荷蘭公司
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Publication of TW202240315A publication Critical patent/TW202240315A/zh
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Publication of TWI850632B publication Critical patent/TWI850632B/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3536—Four-wave interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/392—Parametric amplification
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/395—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves in optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/32—Photonic crystals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
TW111107908A 2021-03-16 2022-03-04 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 TWI850632B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP21162934.0A EP4060403A1 (en) 2021-03-16 2021-03-16 Hollow-core photonic crystal fiber based multiple wavelength light source device
EP21162934.0 2021-03-16

Publications (2)

Publication Number Publication Date
TW202240315A TW202240315A (zh) 2022-10-16
TWI850632B true TWI850632B (zh) 2024-08-01

Family

ID=74947008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111107908A TWI850632B (zh) 2021-03-16 2022-03-04 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置

Country Status (9)

Country Link
US (1) US20240142853A1 (https=)
EP (2) EP4060403A1 (https=)
JP (1) JP2024510161A (https=)
KR (1) KR20230154204A (https=)
CN (1) CN117063117A (https=)
DK (1) DK4060404T3 (https=)
IL (1) IL305662A (https=)
TW (1) TWI850632B (https=)
WO (1) WO2022194456A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12493225B2 (en) * 2023-08-27 2025-12-09 Ledlas Corp. Single-material-double-process parametric laser-wavelength converter
EP4664194A3 (en) * 2025-09-29 2026-04-22 ASML Netherlands B.V. A radiation source and method for generating output radiation

Citations (1)

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CN109313390A (zh) * 2016-04-28 2019-02-05 Asml荷兰有限公司 Hhg源、检查设备和用于执行测量的方法

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DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
KR100434690B1 (ko) 2002-07-19 2004-06-04 소광섭 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법
KR100585476B1 (ko) 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
SG125101A1 (en) 2003-01-14 2006-09-29 Asml Netherlands Bv Level sensor for lithographic apparatus
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
JP5584689B2 (ja) 2008-10-06 2014-09-03 エーエスエムエル ネザーランズ ビー．ブイ． ２次元ターゲットを用いたリソグラフィの焦点及びドーズ測定
EP2228685B1 (en) 2009-03-13 2018-06-27 ASML Netherlands B.V. Level sensor arrangement for lithographic apparatus and device manufacturing method
JP5545782B2 (ja) 2009-07-31 2014-07-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置の焦点測定方法、散乱計、リソグラフィシステム、およびリソグラフィセル
WO2012022584A1 (en) 2010-08-18 2012-02-23 Asml Netherlands B.V. Substrate for use in metrology, metrology method and device manufacturing method
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Non-Patent Citations (2)

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Title
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期刊 Ciriolo et al., "Generation of ultrashort pulses by four wave mixing in a gas-filled hollow core fiber", Journal of Optics, Volume 20, Number 12, Institute of Physics Publishing, Bristol GB, 14 November 2018, pages 125503-1 to 125503-9;期刊 Li et al., "Cascaded four-wave mixing seeded by two continuous wave signals", Applied Optics, Volume 53, Number 8, Optical Society of America, Washington, DC, US, 10 March 2014, pages 1583 to 1590;期刊 Cholan et al., "Self-seeded four-wave mixing cascades with low power consumption", Journal of Optics, Volume 16, Number 10, Institute of Physics Publishing, Bristol GB, 27 August 2014, pages 105203-1 to 105203-6 *

Also Published As

Publication number Publication date
KR20230154204A (ko) 2023-11-07
TW202240315A (zh) 2022-10-16
WO2022194456A1 (en) 2022-09-22
JP2024510161A (ja) 2024-03-06
DK4060404T3 (da) 2026-01-12
EP4060404A1 (en) 2022-09-21
CN117063117A (zh) 2023-11-14
IL305662A (en) 2023-11-01
US20240142853A1 (en) 2024-05-02
EP4060403A1 (en) 2022-09-21
EP4060404B1 (en) 2025-12-10

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