DK4060404T3 - Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne - Google Patents

Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne

Info

Publication number
DK4060404T3
DK4060404T3 DK22155985.9T DK22155985T DK4060404T3 DK 4060404 T3 DK4060404 T3 DK 4060404T3 DK 22155985 T DK22155985 T DK 22155985T DK 4060404 T3 DK4060404 T3 DK 4060404T3
Authority
DK
Denmark
Prior art keywords
hollow
light source
source device
device based
photonic crystal
Prior art date
Application number
DK22155985.9T
Other languages
Danish (da)
English (en)
Inventor
Yongfeng Ni
Willem Richard Pongers
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Application granted granted Critical
Publication of DK4060404T3 publication Critical patent/DK4060404T3/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3536—Four-wave interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/392—Parametric amplification
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/395—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves in optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/32—Photonic crystals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
DK22155985.9T 2021-03-16 2022-02-09 Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne DK4060404T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP21162934.0A EP4060403A1 (en) 2021-03-16 2021-03-16 Hollow-core photonic crystal fiber based multiple wavelength light source device

Publications (1)

Publication Number Publication Date
DK4060404T3 true DK4060404T3 (da) 2026-01-12

Family

ID=74947008

Family Applications (1)

Application Number Title Priority Date Filing Date
DK22155985.9T DK4060404T3 (da) 2021-03-16 2022-02-09 Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne

Country Status (9)

Country Link
US (1) US20240142853A1 (https=)
EP (2) EP4060403A1 (https=)
JP (1) JP2024510161A (https=)
KR (1) KR20230154204A (https=)
CN (1) CN117063117A (https=)
DK (1) DK4060404T3 (https=)
IL (1) IL305662A (https=)
TW (1) TWI850632B (https=)
WO (1) WO2022194456A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12493225B2 (en) * 2023-08-27 2025-12-09 Ledlas Corp. Single-material-double-process parametric laser-wavelength converter
EP4664194A3 (en) * 2025-09-29 2026-04-22 ASML Netherlands B.V. A radiation source and method for generating output radiation

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
KR100434690B1 (ko) 2002-07-19 2004-06-04 소광섭 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법
KR100585476B1 (ko) 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
SG125101A1 (en) 2003-01-14 2006-09-29 Asml Netherlands Bv Level sensor for lithographic apparatus
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
JP5584689B2 (ja) 2008-10-06 2014-09-03 エーエスエムエル ネザーランズ ビー．ブイ． ２次元ターゲットを用いたリソグラフィの焦点及びドーズ測定
EP2228685B1 (en) 2009-03-13 2018-06-27 ASML Netherlands B.V. Level sensor arrangement for lithographic apparatus and device manufacturing method
JP5545782B2 (ja) 2009-07-31 2014-07-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置の焦点測定方法、散乱計、リソグラフィシステム、およびリソグラフィセル
WO2012022584A1 (en) 2010-08-18 2012-02-23 Asml Netherlands B.V. Substrate for use in metrology, metrology method and device manufacturing method
WO2014019846A2 (en) 2012-07-30 2014-02-06 Asml Netherlands B.V. Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
US9160137B1 (en) 2014-05-09 2015-10-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. Method and device for creating supercontinuum light pulses
WO2016083076A1 (en) 2014-11-26 2016-06-02 Asml Netherlands B.V. Metrology method, computer product and system
WO2016102127A1 (en) 2014-12-22 2016-06-30 Asml Netherlands B.V. Level sensor, lithographic apparatus and device manufacturing method
IL256196B (en) 2015-06-17 2022-07-01 Asml Netherlands Bv Recipe selection based on inter-recipe consistency
EP3136143B1 (en) 2015-08-26 2020-04-01 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Hollow-core fibre and method of manufacturing thereof
KR102217258B1 (ko) * 2016-04-28 2021-02-18 에이에스엠엘 네델란즈 비.브이. Hhg 소스, 검사 장치, 및 측정 수행 방법
IL299683B2 (en) 2017-01-09 2025-08-01 Max Planck Gesellschaft Broadband light source device and method of creating broadband light pulses

Also Published As

Publication number Publication date
KR20230154204A (ko) 2023-11-07
TW202240315A (zh) 2022-10-16
TWI850632B (zh) 2024-08-01
WO2022194456A1 (en) 2022-09-22
JP2024510161A (ja) 2024-03-06
EP4060404A1 (en) 2022-09-21
CN117063117A (zh) 2023-11-14
IL305662A (en) 2023-11-01
US20240142853A1 (en) 2024-05-02
EP4060403A1 (en) 2022-09-21
EP4060404B1 (en) 2025-12-10

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