JP2024503352A - スキューマッチングのために構成されたコア層中に相互接続を備える基板 - Google Patents

スキューマッチングのために構成されたコア層中に相互接続を備える基板 Download PDF

Info

Publication number
JP2024503352A
JP2024503352A JP2023540569A JP2023540569A JP2024503352A JP 2024503352 A JP2024503352 A JP 2024503352A JP 2023540569 A JP2023540569 A JP 2023540569A JP 2023540569 A JP2023540569 A JP 2023540569A JP 2024503352 A JP2024503352 A JP 2024503352A
Authority
JP
Japan
Prior art keywords
match
interconnect
interconnects
dielectric layer
electrical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023540569A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024503352A5 (enExample
Inventor
パティル、アニケット
ブオト、ジョアン・レイ・ビラーバ
ウィ、ホン・ボク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualcomm Inc
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of JP2024503352A publication Critical patent/JP2024503352A/ja
Publication of JP2024503352A5 publication Critical patent/JP2024503352A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/685Shapes or dispositions thereof comprising multiple insulating layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/20Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0237High frequency adaptations
    • H05K1/0248Skew reduction or using delay lines
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/115Via connections; Lands around holes or via connections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/021Manufacture or treatment of interconnections within wafers or substrates
    • H10W20/023Manufacture or treatment of interconnections within wafers or substrates the interconnections being through-semiconductor vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/20Electrical arrangements for controlling or matching impedance at high-frequency [HF] or radio frequency [RF]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/401Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4688Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H05K3/4694Partitioned multilayer circuits having adjacent regions with different properties, e.g. by adding or inserting locally circuit layers having a higher circuit density
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/20Electrical arrangements for controlling or matching impedance at high-frequency [HF] or radio frequency [RF]
    • H10W44/203Electrical connections
    • H10W44/209Vertical interconnections, e.g. vias
    • H10W44/212Coaxial feed-throughs in substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/20Electrical arrangements for controlling or matching impedance at high-frequency [HF] or radio frequency [RF]
    • H10W44/203Electrical connections
    • H10W44/223Differential pair signal lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Structure Of Printed Boards (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Combinations Of Printed Boards (AREA)
JP2023540569A 2021-01-13 2021-12-10 スキューマッチングのために構成されたコア層中に相互接続を備える基板 Pending JP2024503352A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/148,257 2021-01-13
US17/148,257 US11955409B2 (en) 2021-01-13 2021-01-13 Substrate comprising interconnects in a core layer configured for skew matching
PCT/US2021/062859 WO2022154914A1 (en) 2021-01-13 2021-12-10 Substrate comprising interconnects in a core layer configured for skew matching

Publications (2)

Publication Number Publication Date
JP2024503352A true JP2024503352A (ja) 2024-01-25
JP2024503352A5 JP2024503352A5 (enExample) 2024-11-20

Family

ID=79283142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023540569A Pending JP2024503352A (ja) 2021-01-13 2021-12-10 スキューマッチングのために構成されたコア層中に相互接続を備える基板

Country Status (7)

Country Link
US (1) US11955409B2 (enExample)
EP (1) EP4278381A1 (enExample)
JP (1) JP2024503352A (enExample)
KR (1) KR20230130628A (enExample)
CN (1) CN116686396A (enExample)
BR (1) BR112023013292A2 (enExample)
WO (1) WO2022154914A1 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001298273A (ja) * 2000-04-17 2001-10-26 Hitachi Ltd 電子部品内蔵実装基板及びそれを用いた半導体パッケージ
US7180011B1 (en) * 2006-03-17 2007-02-20 Lsi Logic Corporation Device for minimizing differential pair length mismatch and impedance discontinuities in an integrated circuit package design
JP2014032978A (ja) * 2012-07-31 2014-02-20 Ibiden Co Ltd インダクタ部品、インダクタ部品の製造方法及び配線板
WO2019194200A1 (ja) * 2018-04-04 2019-10-10 太陽誘電株式会社 部品内蔵基板

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8319111B2 (en) 2006-10-04 2012-11-27 Ngk Spark Plug Co., Ltd. Wiring board having wiring laminate portion with via conductors embedded in resin insulating layers
JP2012009510A (ja) 2010-06-22 2012-01-12 Sumitomo Bakelite Co Ltd 金属微細パターン付き基材、プリント配線板、及び半導体装置、並びに、金属微細パターン付き基材及びプリント配線板の製造方法
JP2013093405A (ja) 2011-10-25 2013-05-16 Ngk Spark Plug Co Ltd 配線基板及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001298273A (ja) * 2000-04-17 2001-10-26 Hitachi Ltd 電子部品内蔵実装基板及びそれを用いた半導体パッケージ
US7180011B1 (en) * 2006-03-17 2007-02-20 Lsi Logic Corporation Device for minimizing differential pair length mismatch and impedance discontinuities in an integrated circuit package design
JP2014032978A (ja) * 2012-07-31 2014-02-20 Ibiden Co Ltd インダクタ部品、インダクタ部品の製造方法及び配線板
WO2019194200A1 (ja) * 2018-04-04 2019-10-10 太陽誘電株式会社 部品内蔵基板

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
(社)エレクトロニクス実装学会, プリント回路技術便覧, vol. 第3版, JPN6025045802, 2006, pages 335 - 336, ISSN: 0005828879 *

Also Published As

Publication number Publication date
WO2022154914A1 (en) 2022-07-21
TW202232703A (zh) 2022-08-16
BR112023013292A2 (pt) 2023-10-31
CN116686396A (zh) 2023-09-01
EP4278381A1 (en) 2023-11-22
US11955409B2 (en) 2024-04-09
KR20230130628A (ko) 2023-09-12
US20220223499A1 (en) 2022-07-14

Similar Documents

Publication Publication Date Title
JP7824965B2 (ja) 基板の表面と整合された表面相互接続を備える基板を有するパッケージ
US11502049B2 (en) Package comprising multi-level vertically stacked redistribution portions
US12400966B2 (en) Package comprising integrated devices and bridge coupling top sides of integrated devices
TWI907407B (zh) 包括具有在阻焊層之上的互連佈線的基板的封裝
US10804195B2 (en) High density embedded interconnects in substrate
EP4122003B1 (en) Substrate comprising a high-density interconnect portion embedded in a core layer
CN116261783B (zh) 包括嵌入阻焊层中的互连件的衬底
US11876085B2 (en) Package with a substrate comprising an embedded capacitor with side wall coupling
JP6956095B2 (ja) 集積回路(ic)パッケージ間にフレキシブルコネクタを備える集積デバイス
US10157824B2 (en) Integrated circuit (IC) package and package substrate comprising stacked vias
JP2024503352A (ja) スキューマッチングのために構成されたコア層中に相互接続を備える基板
TWI918797B (zh) 在芯層中包括被配置用於偏斜匹配的互連的基板、封裝、和設備及其製造方法
TW202213654A (zh) 具有包括可變厚度阻焊層的基板的封裝
TWI911255B (zh) 包括具有半圓平面形狀及/或梯形平面形狀的互連的封裝和基板
US20250300134A1 (en) Package substrate having stacked electronic component structure disposed in a cavity of a core
TW202516715A (zh) 包含位於金屬化部分之間的橋的封裝
TW202543004A (zh) 由堆疊的嵌入式跡線基材形成的多層無核心基材
JP2024505488A (ja) 周辺相互接続を備える基板をもつパッケージ
KR20240050351A (ko) 고밀도 상호연결부를 갖는 기판을 포함하는 패키지
CN121773771A (zh) 包括具有嵌入式无源器件的衬底的封装件
HK1260183B (zh) 包括集成电路(ic)封装之间的柔性连接器的集成器件

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241111

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20241111

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20251031

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20251111

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260128

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20260331

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260424