JP2024501694A5 - - Google Patents

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Publication number
JP2024501694A5
JP2024501694A5 JP2023540104A JP2023540104A JP2024501694A5 JP 2024501694 A5 JP2024501694 A5 JP 2024501694A5 JP 2023540104 A JP2023540104 A JP 2023540104A JP 2023540104 A JP2023540104 A JP 2023540104A JP 2024501694 A5 JP2024501694 A5 JP 2024501694A5
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JP
Japan
Prior art keywords
layer
concentration gradient
concentration
junction
cadmium
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JP2023540104A
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English (en)
Japanese (ja)
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JP2024501694A (ja
JP7814393B2 (ja
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Priority claimed from FR2014308A external-priority patent/FR3118532B1/fr
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Publication of JP2024501694A publication Critical patent/JP2024501694A/ja
Publication of JP2024501694A5 publication Critical patent/JP2024501694A5/ja
Application granted granted Critical
Publication of JP7814393B2 publication Critical patent/JP7814393B2/ja
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JP2023540104A 2020-12-31 2021-12-30 フォトダイオード構造の製造方法およびフォトダイオード構造 Active JP7814393B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR2014308A FR3118532B1 (fr) 2020-12-31 2020-12-31 Procede de fabrication d’une structure photodiode et structure photodiode
FR2014308 2020-12-31
PCT/EP2021/087850 WO2022144419A1 (fr) 2020-12-31 2021-12-30 Procédé de fabrication d'une structure photodiode et structure photodiode

Publications (3)

Publication Number Publication Date
JP2024501694A JP2024501694A (ja) 2024-01-15
JP2024501694A5 true JP2024501694A5 (https=) 2024-12-13
JP7814393B2 JP7814393B2 (ja) 2026-02-16

Family

ID=75339874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023540104A Active JP7814393B2 (ja) 2020-12-31 2021-12-30 フォトダイオード構造の製造方法およびフォトダイオード構造

Country Status (7)

Country Link
US (1) US12514022B2 (https=)
EP (1) EP4272264A1 (https=)
JP (1) JP7814393B2 (https=)
KR (1) KR20230122673A (https=)
FR (1) FR3118532B1 (https=)
IL (1) IL304045B1 (https=)
WO (1) WO2022144419A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118335849B (zh) * 2024-06-12 2024-10-11 中国电子科技集团公司第十一研究所 低暗电流p on n型碲镉汞器件、制备方法及红外探测器

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902924A (en) 1973-08-30 1975-09-02 Honeywell Inc Growth of mercury cadmium telluride by liquid phase epitaxy and the product thereof
US4376663A (en) 1980-11-18 1983-03-15 The United States Of America As Represented By The Secretary Of The Army Method for growing an epitaxial layer of CdTe on an epitaxial layer of HgCdTe grown on a CdTe substrate
JPH04258180A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp 赤外線検知素子
JPH05226685A (ja) * 1992-02-14 1993-09-03 Fujitsu Ltd 光検知素子の製造方法
JPH06260675A (ja) * 1993-03-09 1994-09-16 Fujitsu Ltd 光検知素子およびその製造方法
US5846850A (en) 1995-09-05 1998-12-08 Raytheon Ti Systems, Inc. Double sided interdiffusion process and structure for a double layer heterojunction focal plane array
US5998809A (en) 1995-10-06 1999-12-07 Raytheon Company Room temperature 3-5 micrometer wavelength HgCdTe heterojunction emitter
US5861321A (en) 1995-11-21 1999-01-19 Texas Instruments Incorporated Method for doping epitaxial layers using doped substrate material
JPH09232617A (ja) * 1996-02-21 1997-09-05 Fujitsu Ltd 赤外線検知素子及びその製造方法
JPH09246576A (ja) * 1996-03-11 1997-09-19 Toshiba Corp 半導体光電変換素子及びその製造方法
FR2754107B1 (fr) 1996-10-01 1998-10-30 Commissariat Energie Atomique Detecteur de rayonnement photonique de grandes dimensions
JP2001274451A (ja) * 2000-03-27 2001-10-05 Toshiba Corp 半導体撮像素子およびその製造方法
US20140217540A1 (en) 2013-02-04 2014-08-07 Teledyne Scientific & Imaging, Llc Fully depleted diode passivation active passivation architecture
CN103681937B (zh) * 2013-11-21 2015-11-25 中国科学院上海技术物理研究所 基于光子晶体限光效应的焦平面探测器结构的设计方法
FR3020176B1 (fr) * 2014-04-22 2017-09-29 Commissariat Energie Atomique Matrice de photodiodes en cdhgte
FR3050572B1 (fr) * 2016-04-26 2018-04-13 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de photo-detection a reseau inter-diodes sur-dope et procede de fabrication
WO2021205102A1 (fr) * 2020-04-09 2021-10-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives PROCÉDÉ DE FABRICATION D'UN DISPOSITIF DE PHOTODÉTECTION À FAIBLE BRUIT DANS UN SUBSTRAT EN CdHgTe
US12532552B2 (en) * 2021-07-15 2026-01-20 Sivananthan Laboratories, Inc. Metasurface-coupled single photon avalanche diode for high temperature operation

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