JP2024108448A - 検出器台座及びｘ線回折装置 - Google Patents

検出器台座及びｘ線回折装置 Download PDF

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Publication number
JP2024108448A
JP2024108448A JP2023012826A JP2023012826A JP2024108448A JP 2024108448 A JP2024108448 A JP 2024108448A JP 2023012826 A JP2023012826 A JP 2023012826A JP 2023012826 A JP2023012826 A JP 2023012826A JP 2024108448 A JP2024108448 A JP 2024108448A
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JP
Japan
Prior art keywords
arrangement
ray detector
detector
adjustment mechanism
axis
Prior art date
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Pending
Application number
JP2023012826A
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English (en)
Japanese (ja)
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JP2024108448A5 (enExample
Inventor
勇士 白又
Yuji Shiromata
惇史 久慈
Atsushi Kuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Priority to JP2023012826A priority Critical patent/JP2024108448A/ja
Priority to US18/407,503 priority patent/US12487195B2/en
Publication of JP2024108448A publication Critical patent/JP2024108448A/ja
Publication of JP2024108448A5 publication Critical patent/JP2024108448A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/321—Accessories, mechanical or electrical features manipulator for positioning a part
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP2023012826A 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置 Pending JP2024108448A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023012826A JP2024108448A (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置
US18/407,503 US12487195B2 (en) 2023-01-31 2024-01-09 Detector stand and X-ray diffraction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023012826A JP2024108448A (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置

Publications (2)

Publication Number Publication Date
JP2024108448A true JP2024108448A (ja) 2024-08-13
JP2024108448A5 JP2024108448A5 (enExample) 2025-03-31

Family

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JP2023012826A Pending JP2024108448A (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置

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US (1) US12487195B2 (enExample)
JP (1) JP2024108448A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024108448A (ja) * 2023-01-31 2024-08-13 株式会社リガク 検出器台座及びｘ線回折装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01187441A (ja) * 1988-01-22 1989-07-26 Rigaku Denki Kk Ｘ線回折装置の三軸回転ゴニオメータ
JP2984232B2 (ja) * 1996-10-25 1999-11-29 株式会社テクノス研究所 Ｘ線分析装置およびｘ線照射角設定方法
US6744850B2 (en) * 2001-01-11 2004-06-01 Therma-Wave, Inc. X-ray reflectance measurement system with adjustable resolution
US6895075B2 (en) * 2003-02-12 2005-05-17 Jordan Valley Applied Radiation Ltd. X-ray reflectometry with small-angle scattering measurement
DE10340072A1 (de) * 2003-08-30 2005-03-31 Bruker Axs Gmbh Virtueller 2-dimensionaler Detektor
US7120228B2 (en) * 2004-09-21 2006-10-10 Jordan Valley Applied Radiation Ltd. Combined X-ray reflectometer and diffractometer
US7190762B2 (en) * 2004-10-29 2007-03-13 Broker Axs, Inc Scanning line detector for two-dimensional x-ray diffractometer
DE102006011004B4 (de) * 2006-03-09 2008-12-04 Siemens Ag Röntgensystem mit Röntgen-Flachdetektoren
US7920676B2 (en) * 2007-05-04 2011-04-05 Xradia, Inc. CD-GISAXS system and method
RU2419088C1 (ru) * 2010-02-01 2011-05-20 Учреждение Российской академии наук Физический институт им. П.Н. Лебедева РАН (ФИАН) Рентгеновский спектрометр
JP2014089143A (ja) * 2012-10-31 2014-05-15 Rigaku Corp Ｘ線検出器およびｘ線回折装置
US9557282B1 (en) * 2013-06-17 2017-01-31 U.S. Department Of Energy High precision detector robot arm system
DE112017003580T5 (de) * 2016-07-15 2019-05-09 Rigaku Corporation Röntgeninspektionsvorrichtung, Röntgendünnfilminspektionsverfahren und Verfahren zum Messen einer Rocking-Kurve
US10794844B2 (en) * 2016-08-10 2020-10-06 Proto Manufacturing, Ltd. Mounting system and sample holder for X-ray diffraction apparatus
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置
US10295484B2 (en) * 2017-04-05 2019-05-21 Bruker Axs, Inc. Method and apparatus for extending angular coverage for a scanning two-dimensional X-ray detector
JP2018205247A (ja) * 2017-06-08 2018-12-27 富士通株式会社 Ｘ線回折分析方法及びｘ線回折分析装置
US11867595B2 (en) * 2019-10-14 2024-01-09 Industrial Technology Research Institute X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate
US12336851B2 (en) * 2022-04-20 2025-06-24 Arion Diagnostics, Inc. Diffractive analyzer of patient tissue
JP2024108448A (ja) * 2023-01-31 2024-08-13 株式会社リガク 検出器台座及びｘ線回折装置

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Publication number Publication date
US12487195B2 (en) 2025-12-02
US20240255446A1 (en) 2024-08-01

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