JP2024071103A - 弾性波デバイス、及び、弾性波デバイスの製造方法 - Google Patents

弾性波デバイス、及び、弾性波デバイスの製造方法 Download PDF

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Publication number
JP2024071103A
JP2024071103A JP2022181860A JP2022181860A JP2024071103A JP 2024071103 A JP2024071103 A JP 2024071103A JP 2022181860 A JP2022181860 A JP 2022181860A JP 2022181860 A JP2022181860 A JP 2022181860A JP 2024071103 A JP2024071103 A JP 2024071103A
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JP
Japan
Prior art keywords
acoustic wave
wave device
device chip
support layer
cover layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022181860A
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English (en)
Japanese (ja)
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JP2024071103A5 (https=
Inventor
鉄 李
Tetsu Ri
伸一 塩井
Shinichi Shioi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanan Japan Technology Corp
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Sanan Japan Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanan Japan Technology Corp filed Critical Sanan Japan Technology Corp
Priority to JP2022181860A priority Critical patent/JP2024071103A/ja
Priority to CN202311434211.1A priority patent/CN118074659A/zh
Publication of JP2024071103A publication Critical patent/JP2024071103A/ja
Publication of JP2024071103A5 publication Critical patent/JP2024071103A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/058—Holders or supports for surface acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022181860A 2022-11-14 2022-11-14 弾性波デバイス、及び、弾性波デバイスの製造方法 Pending JP2024071103A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022181860A JP2024071103A (ja) 2022-11-14 2022-11-14 弾性波デバイス、及び、弾性波デバイスの製造方法
CN202311434211.1A CN118074659A (zh) 2022-11-14 2023-10-31 弹性波装置及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022181860A JP2024071103A (ja) 2022-11-14 2022-11-14 弾性波デバイス、及び、弾性波デバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2024071103A true JP2024071103A (ja) 2024-05-24
JP2024071103A5 JP2024071103A5 (https=) 2025-11-13

Family

ID=91094410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022181860A Pending JP2024071103A (ja) 2022-11-14 2022-11-14 弾性波デバイス、及び、弾性波デバイスの製造方法

Country Status (2)

Country Link
JP (1) JP2024071103A (https=)
CN (1) CN118074659A (https=)

Also Published As

Publication number Publication date
CN118074659A (zh) 2024-05-24

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