JP2024040302A5 - - Google Patents
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- Publication number
- JP2024040302A5 JP2024040302A5 JP2024017225A JP2024017225A JP2024040302A5 JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5 JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- holder according
- porous member
- hole
- dense layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024017225A JP7802835B2 (ja) | 2019-11-25 | 2024-02-07 | 試料保持具 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019212440A JP7433857B2 (ja) | 2019-11-25 | 2019-11-25 | 試料保持具 |
| JP2024017225A JP7802835B2 (ja) | 2019-11-25 | 2024-02-07 | 試料保持具 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019212440A Division JP7433857B2 (ja) | 2019-11-25 | 2019-11-25 | 試料保持具 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2024040302A JP2024040302A (ja) | 2024-03-25 |
| JP2024040302A5 true JP2024040302A5 (cg-RX-API-DMAC7.html) | 2024-04-02 |
| JP7802835B2 JP7802835B2 (ja) | 2026-01-20 |
Family
ID=76088123
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019212440A Active JP7433857B2 (ja) | 2019-11-25 | 2019-11-25 | 試料保持具 |
| JP2024017225A Active JP7802835B2 (ja) | 2019-11-25 | 2024-02-07 | 試料保持具 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019212440A Active JP7433857B2 (ja) | 2019-11-25 | 2019-11-25 | 試料保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP7433857B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023006679A (ja) * | 2021-06-30 | 2023-01-18 | Toto株式会社 | 静電チャック |
| JP7514815B2 (ja) * | 2021-12-22 | 2024-07-11 | 日本碍子株式会社 | 半導体製造装置用部材 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5633766B2 (ja) | 2013-03-29 | 2014-12-03 | Toto株式会社 | 静電チャック |
| US10770270B2 (en) | 2016-06-07 | 2020-09-08 | Applied Materials, Inc. | High power electrostatic chuck with aperture-reducing plug in a gas hole |
| JP6865145B2 (ja) | 2016-12-16 | 2021-04-28 | 日本特殊陶業株式会社 | 保持装置 |
| KR102438888B1 (ko) | 2017-07-06 | 2022-08-31 | 엔지케이 인슐레이터 엘티디 | 반도체 제조 장치용 부재 및 그 제조법 |
| WO2019082875A1 (ja) | 2017-10-26 | 2019-05-02 | 京セラ株式会社 | 試料保持具 |
| JP6489277B1 (ja) | 2018-03-14 | 2019-03-27 | Toto株式会社 | 静電チャック |
| JP6504532B1 (ja) | 2018-03-14 | 2019-04-24 | Toto株式会社 | 静電チャック |
| JP7002014B2 (ja) | 2018-10-30 | 2022-01-20 | Toto株式会社 | 静電チャック |
| JP7441402B2 (ja) | 2019-03-05 | 2024-03-01 | Toto株式会社 | 静電チャック、および処理装置 |
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2019
- 2019-11-25 JP JP2019212440A patent/JP7433857B2/ja active Active
-
2024
- 2024-02-07 JP JP2024017225A patent/JP7802835B2/ja active Active