JP2024014744A - シーズニング方法及びプラズマ処理装置 - Google Patents
シーズニング方法及びプラズマ処理装置 Download PDFInfo
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- JP2024014744A JP2024014744A JP2023102510A JP2023102510A JP2024014744A JP 2024014744 A JP2024014744 A JP 2024014744A JP 2023102510 A JP2023102510 A JP 2023102510A JP 2023102510 A JP2023102510 A JP 2023102510A JP 2024014744 A JP2024014744 A JP 2024014744A
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- plasma
- ring assembly
- electrostatic chuck
- chamber
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW112127092A TW202420390A (zh) | 2022-07-22 | 2023-07-20 | 陳化方法及電漿處理裝置 |
| CN202310892186.5A CN117438273A (zh) | 2022-07-22 | 2023-07-20 | 陈化方法以及等离子体处理装置 |
| KR1020230095295A KR20240013700A (ko) | 2022-07-22 | 2023-07-21 | 시즈닝 방법 및 플라즈마 처리 장치 |
| US18/225,077 US20240030014A1 (en) | 2022-07-22 | 2023-07-21 | Seasoning method and plasma processing apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022117515 | 2022-07-22 | ||
| JP2022117515 | 2022-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024014744A true JP2024014744A (ja) | 2024-02-01 |
| JP2024014744A5 JP2024014744A5 (https=) | 2026-04-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023102510A Pending JP2024014744A (ja) | 2022-07-22 | 2023-06-22 | シーズニング方法及びプラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2024014744A (https=) |
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2023
- 2023-06-22 JP JP2023102510A patent/JP2024014744A/ja active Pending
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Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20260327 |
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Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20260327 |