JP2023546494A - クライオポンプ及びクライオポンプのための入口流量制限器 - Google Patents

クライオポンプ及びクライオポンプのための入口流量制限器 Download PDF

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Publication number
JP2023546494A
JP2023546494A JP2023524912A JP2023524912A JP2023546494A JP 2023546494 A JP2023546494 A JP 2023546494A JP 2023524912 A JP2023524912 A JP 2023524912A JP 2023524912 A JP2023524912 A JP 2023524912A JP 2023546494 A JP2023546494 A JP 2023546494A
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JP
Japan
Prior art keywords
cryopump
flow restrictor
inlet
flow
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023524912A
Other languages
English (en)
Japanese (ja)
Inventor
ジョン カセロ
Original Assignee
エドワーズ バキューム リミテッド ライアビリティ カンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ バキューム リミテッド ライアビリティ カンパニー filed Critical エドワーズ バキューム リミテッド ライアビリティ カンパニー
Publication of JP2023546494A publication Critical patent/JP2023546494A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/40—Fluid line arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/003—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by throttling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2023524912A 2020-11-02 2021-10-26 クライオポンプ及びクライオポンプのための入口流量制限器 Pending JP2023546494A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2017345.6 2020-11-02
GB2017345.6A GB2600479A (en) 2020-11-02 2020-11-02 Cryopumps and inlet flow restrictors for cryopumps
PCT/IB2021/059877 WO2022090923A1 (en) 2020-11-02 2021-10-26 Cryopumps and inlet flow restrictors for cryopumps

Publications (1)

Publication Number Publication Date
JP2023546494A true JP2023546494A (ja) 2023-11-02

Family

ID=73776440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023524912A Pending JP2023546494A (ja) 2020-11-02 2021-10-26 クライオポンプ及びクライオポンプのための入口流量制限器

Country Status (9)

Country Link
US (1) US20230392838A1 (ko)
EP (1) EP4237686A1 (ko)
JP (1) JP2023546494A (ko)
KR (1) KR20230097024A (ko)
CN (1) CN116368298A (ko)
GB (1) GB2600479A (ko)
IL (1) IL302376A (ko)
TW (1) TW202227717A (ko)
WO (1) WO2022090923A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2112037A (en) * 1937-03-27 1938-03-22 Rca Corp Vacuum diffusion pump
US3103108A (en) * 1961-07-17 1963-09-10 Gen Electric Shielded thermal gradient member
GB1066971A (en) * 1963-05-30 1967-04-26 Edwards High Vacuum Int Ltd Improvements in or relating to vacuum pumps
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus
US4466252A (en) * 1982-09-29 1984-08-21 Cvi Incorporated Cryopump
JP2996079B2 (ja) * 1993-11-16 1999-12-27 ダイキン工業株式会社 クライオポンプ
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
JPH11343972A (ja) * 1998-06-01 1999-12-14 Daikin Ind Ltd クライオポンプ、クライオポンプの再生装置および再生方法、並びに、クライオポンプの制御方法
DE10317837A1 (de) * 2003-04-16 2004-11-04 Leybold Vakuum Gmbh Vakuumkammer
JP5193786B2 (ja) * 2008-10-01 2013-05-08 住友重機械工業株式会社 クライオポンプ
JP6031451B2 (ja) * 2011-02-09 2016-11-24 ブルックス オートメーション インコーポレイテッド クライオポンプ
CN207111346U (zh) * 2017-07-03 2018-03-16 京东方科技集团股份有限公司 低温泵

Also Published As

Publication number Publication date
EP4237686A1 (en) 2023-09-06
WO2022090923A1 (en) 2022-05-05
IL302376A (en) 2023-06-01
GB202017345D0 (en) 2020-12-16
US20230392838A1 (en) 2023-12-07
KR20230097024A (ko) 2023-06-30
TW202227717A (zh) 2022-07-16
CN116368298A (zh) 2023-06-30
GB2600479A (en) 2022-05-04

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