CN116368298A - 低温泵和用于低温泵的入口限流器 - Google Patents
低温泵和用于低温泵的入口限流器 Download PDFInfo
- Publication number
- CN116368298A CN116368298A CN202180074311.0A CN202180074311A CN116368298A CN 116368298 A CN116368298 A CN 116368298A CN 202180074311 A CN202180074311 A CN 202180074311A CN 116368298 A CN116368298 A CN 116368298A
- Authority
- CN
- China
- Prior art keywords
- cryopump
- restrictor
- inlet
- gas
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims abstract description 4
- 238000010168 coupling process Methods 0.000 claims abstract description 4
- 238000005859 coupling reaction Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 10
- 238000005057 refrigeration Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 72
- 238000005086 pumping Methods 0.000 description 18
- 238000009825 accumulation Methods 0.000 description 8
- 230000008929 regeneration Effects 0.000 description 7
- 238000011069 regeneration method Methods 0.000 description 7
- 239000003463 adsorbent Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/003—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by throttling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B41/00—Fluid-circulation arrangements
- F25B41/40—Fluid line arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/44—Fluid-guiding means, e.g. diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2017345.6 | 2020-11-02 | ||
| GB2017345.6A GB2600479A (en) | 2020-11-02 | 2020-11-02 | Cryopumps and inlet flow restrictors for cryopumps |
| PCT/IB2021/059877 WO2022090923A1 (en) | 2020-11-02 | 2021-10-26 | Cryopumps and inlet flow restrictors for cryopumps |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116368298A true CN116368298A (zh) | 2023-06-30 |
Family
ID=73776440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180074311.0A Pending CN116368298A (zh) | 2020-11-02 | 2021-10-26 | 低温泵和用于低温泵的入口限流器 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20230392838A1 (ko) |
| EP (1) | EP4237686A1 (ko) |
| JP (1) | JP2023546494A (ko) |
| KR (1) | KR20230097024A (ko) |
| CN (1) | CN116368298A (ko) |
| GB (1) | GB2600479A (ko) |
| IL (1) | IL302376A (ko) |
| TW (1) | TW202227717A (ko) |
| WO (1) | WO2022090923A1 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2613595A (en) * | 2021-12-08 | 2023-06-14 | Edwards Vacuum Llc | A cryopump with increased capacity |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2112037A (en) * | 1937-03-27 | 1938-03-22 | Rca Corp | Vacuum diffusion pump |
| US3103108A (en) * | 1961-07-17 | 1963-09-10 | Gen Electric | Shielded thermal gradient member |
| GB1066971A (en) * | 1963-05-30 | 1967-04-26 | Edwards High Vacuum Int Ltd | Improvements in or relating to vacuum pumps |
| US3390536A (en) * | 1967-02-01 | 1968-07-02 | Gca Corp | Cryogenic pumping apparatus |
| US4466252A (en) * | 1982-09-29 | 1984-08-21 | Cvi Incorporated | Cryopump |
| JP2996079B2 (ja) * | 1993-11-16 | 1999-12-27 | ダイキン工業株式会社 | クライオポンプ |
| US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
| JPH11343972A (ja) * | 1998-06-01 | 1999-12-14 | Daikin Ind Ltd | クライオポンプ、クライオポンプの再生装置および再生方法、並びに、クライオポンプの制御方法 |
| DE10317837A1 (de) * | 2003-04-16 | 2004-11-04 | Leybold Vakuum Gmbh | Vakuumkammer |
| JP5193786B2 (ja) * | 2008-10-01 | 2013-05-08 | 住友重機械工業株式会社 | クライオポンプ |
| JP6031451B2 (ja) * | 2011-02-09 | 2016-11-24 | ブルックス オートメーション インコーポレイテッド | クライオポンプ |
| CN207111346U (zh) * | 2017-07-03 | 2018-03-16 | 京东方科技集团股份有限公司 | 低温泵 |
-
2020
- 2020-11-02 GB GB2017345.6A patent/GB2600479A/en active Pending
-
2021
- 2021-10-26 IL IL302376A patent/IL302376A/en unknown
- 2021-10-26 CN CN202180074311.0A patent/CN116368298A/zh active Pending
- 2021-10-26 US US18/249,641 patent/US20230392838A1/en active Pending
- 2021-10-26 JP JP2023524912A patent/JP2023546494A/ja active Pending
- 2021-10-26 KR KR1020237014169A patent/KR20230097024A/ko active Search and Examination
- 2021-10-26 EP EP21805625.7A patent/EP4237686A1/en active Pending
- 2021-10-26 WO PCT/IB2021/059877 patent/WO2022090923A1/en active Application Filing
- 2021-11-02 TW TW110140688A patent/TW202227717A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP4237686A1 (en) | 2023-09-06 |
| WO2022090923A1 (en) | 2022-05-05 |
| IL302376A (en) | 2023-06-01 |
| GB202017345D0 (en) | 2020-12-16 |
| US20230392838A1 (en) | 2023-12-07 |
| JP2023546494A (ja) | 2023-11-02 |
| KR20230097024A (ko) | 2023-06-30 |
| TW202227717A (zh) | 2022-07-16 |
| GB2600479A (en) | 2022-05-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |