JP2023540531A5 - - Google Patents
Info
- Publication number
- JP2023540531A5 JP2023540531A5 JP2023514883A JP2023514883A JP2023540531A5 JP 2023540531 A5 JP2023540531 A5 JP 2023540531A5 JP 2023514883 A JP2023514883 A JP 2023514883A JP 2023514883 A JP2023514883 A JP 2023514883A JP 2023540531 A5 JP2023540531 A5 JP 2023540531A5
- Authority
- JP
- Japan
- Prior art keywords
- heater
- temperature
- electrical energy
- energy
- target temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063074520P | 2020-09-04 | 2020-09-04 | |
| US63/074,520 | 2020-09-04 | ||
| PCT/US2021/048884 WO2022051509A1 (en) | 2020-09-04 | 2021-09-02 | Method and system for controlling an electric heater using control on energy |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023540531A JP2023540531A (ja) | 2023-09-25 |
| JP2023540531A5 true JP2023540531A5 (enExample) | 2024-08-30 |
| JP7753347B2 JP7753347B2 (ja) | 2025-10-14 |
Family
ID=78032517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023514883A Active JP7753347B2 (ja) | 2020-09-04 | 2021-09-02 | エネルギーの制御を使用した電気ヒーターの制御のための方法およびシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11921526B2 (enExample) |
| EP (2) | EP4209112B1 (enExample) |
| JP (1) | JP7753347B2 (enExample) |
| KR (2) | KR20250053229A (enExample) |
| IL (1) | IL301030B1 (enExample) |
| TW (1) | TWI806147B (enExample) |
| WO (1) | WO2022051509A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11083050B2 (en) * | 2017-11-21 | 2021-08-03 | Watlow Electric Manufacturing Company | Integrated heater and method of manufacture |
| US12351917B2 (en) * | 2020-12-01 | 2025-07-08 | Applied Materials, Inc. | Multi-zone heater tuning in substrate heater |
| CN121704584B (zh) * | 2026-02-11 | 2026-04-17 | 扬州市优珂电气有限公司 | 一种高效节能电加热器温度智能控制方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62114003A (ja) * | 1985-11-13 | 1987-05-25 | Kokusai Electric Co Ltd | 高速応答制御装置 |
| US4737617A (en) * | 1987-07-22 | 1988-04-12 | General Electric Company | Power control for cooking appliance with transient operating modes |
| US5397515A (en) * | 1992-10-30 | 1995-03-14 | Allen-Bradley Company, Inc. | Injection molding machine temperature control system |
| DE4319652C2 (de) | 1993-06-14 | 2002-08-08 | Perkin Elmer Bodenseewerk Zwei | Verfahren zur Temperatursteuerung |
| JPH09258601A (ja) * | 1996-03-26 | 1997-10-03 | Tec Corp | 加熱定着装置の温度制御方法及び装置 |
| JP2000164499A (ja) | 1998-11-27 | 2000-06-16 | Komatsu Ltd | 基板温度制御装置及びそのコントローラ |
| US6768084B2 (en) | 2002-09-30 | 2004-07-27 | Axcelis Technologies, Inc. | Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile |
| US7035694B2 (en) * | 2003-05-13 | 2006-04-25 | National Instruments Corporation | Automatic tuning of motion controllers using search techniques |
| US7196295B2 (en) | 2003-11-21 | 2007-03-27 | Watlow Electric Manufacturing Company | Two-wire layered heater system |
| US7398693B2 (en) | 2006-03-30 | 2008-07-15 | Applied Materials, Inc. | Adaptive control method for rapid thermal processing of a substrate |
| US20070251939A1 (en) * | 2006-04-27 | 2007-11-01 | Applied Materials, Inc. | Control scheme for cold wafer compensation on a lithography track |
| JP4901486B2 (ja) | 2007-01-04 | 2012-03-21 | 日本フェンオール株式会社 | Ｐｉｄ制御方法及びｐｉｄ制御装置 |
| WO2008154503A2 (en) | 2007-06-08 | 2008-12-18 | Pressco Technology Inc. | A method and system for wavelength specific thermal irradiation and treatment |
| CN103792973B (zh) | 2007-06-18 | 2017-10-27 | 翱泰温控器（惠州）有限公司 | 液体加热容器及其控制器 |
| US7848840B2 (en) * | 2008-01-04 | 2010-12-07 | Applied Materials, Inc. | Method of controlling process parameters for semiconductor manufacturing apparatus |
| KR20110026513A (ko) * | 2008-07-02 | 2011-03-15 | 그라코 미네소타 인크. | 히터 및 모터 제어 |
| US8867908B2 (en) | 2011-08-31 | 2014-10-21 | General Electric Company | Self-programming water heater |
| JP5805509B2 (ja) * | 2011-11-30 | 2015-11-04 | トヨタ紡織株式会社 | ヒータ制御装置及び車両用シートヒータ |
| KR20160042810A (ko) | 2013-03-15 | 2016-04-20 | 페이스컨트롤스, 엘엘씨 | 듀티 사이클 기반 hvac＆r 장비의 자동 제어를 위한 제어기, 및 그를 사용하는 시스템 및 방법 |
| WO2015100375A1 (en) | 2013-12-26 | 2015-07-02 | Kateeva, Inc. | Thermal treatment of electronic devices |
| US10728956B2 (en) | 2015-05-29 | 2020-07-28 | Watlow Electric Manufacturing Company | Resistive heater with temperature sensing power pins |
| WO2017035604A1 (en) | 2015-09-03 | 2017-03-09 | Commonwealth Scientific And Industrial Research Organisation | Microwave heating apparatus and method of heating |
| US10641507B2 (en) * | 2015-09-16 | 2020-05-05 | Siemens Industry, Inc. | Tuning building control systems |
| TWI606242B (zh) | 2015-09-17 | 2017-11-21 | 旺矽科技股份有限公司 | 溫度控制系統及其方法 |
| WO2017223418A2 (en) | 2016-06-24 | 2017-12-28 | Hatco Corporation | Food product temperature regulation unit |
| US10525638B2 (en) | 2017-08-29 | 2020-01-07 | The Boeing Company | Heater system for fiber placement machine |
| JP6974131B2 (ja) | 2017-11-20 | 2021-12-01 | アズビル株式会社 | 推定装置および方法 |
| US11183400B2 (en) | 2018-08-08 | 2021-11-23 | Lam Research Corporation | Progressive heating of components of substrate processing systems using TCR element-based heaters |
| US11545375B2 (en) | 2019-06-17 | 2023-01-03 | Applied Materials, Inc. | Hybrid control system for workpiece heating |
-
2021
- 2021-09-02 KR KR1020257012095A patent/KR20250053229A/ko active Pending
- 2021-09-02 KR KR1020237011417A patent/KR102799668B1/ko active Active
- 2021-09-02 WO PCT/US2021/048884 patent/WO2022051509A1/en not_active Ceased
- 2021-09-02 EP EP21783639.4A patent/EP4209112B1/en active Active
- 2021-09-02 JP JP2023514883A patent/JP7753347B2/ja active Active
- 2021-09-02 IL IL301030A patent/IL301030B1/en unknown
- 2021-09-02 US US17/465,441 patent/US11921526B2/en active Active
- 2021-09-02 EP EP25158400.9A patent/EP4531497A3/en active Pending
- 2021-09-03 TW TW110132897A patent/TWI806147B/zh active
-
2024
- 2024-02-15 US US18/442,379 patent/US20240264616A1/en active Pending
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