JP2023523945A5 - - Google Patents

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Publication number
JP2023523945A5
JP2023523945A5 JP2022564501A JP2022564501A JP2023523945A5 JP 2023523945 A5 JP2023523945 A5 JP 2023523945A5 JP 2022564501 A JP2022564501 A JP 2022564501A JP 2022564501 A JP2022564501 A JP 2022564501A JP 2023523945 A5 JP2023523945 A5 JP 2023523945A5
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JP
Japan
Prior art keywords
gas line
temperature
oven
heating element
delivery module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022564501A
Other languages
English (en)
Japanese (ja)
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JP2023523945A (ja
JP7691439B2 (ja
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Priority claimed from PCT/US2021/029452 external-priority patent/WO2021222292A1/en
Publication of JP2023523945A publication Critical patent/JP2023523945A/ja
Publication of JP2023523945A5 publication Critical patent/JP2023523945A5/ja
Application granted granted Critical
Publication of JP7691439B2 publication Critical patent/JP7691439B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022564501A 2020-04-30 2021-04-27 化学物質送達システム用のヒーター設計ソリューション Active JP7691439B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063018288P 2020-04-30 2020-04-30
US63/018,288 2020-04-30
PCT/US2021/029452 WO2021222292A1 (en) 2020-04-30 2021-04-27 Heater design solutions for chemical delivery systems

Publications (3)

Publication Number Publication Date
JP2023523945A JP2023523945A (ja) 2023-06-08
JP2023523945A5 true JP2023523945A5 (enExample) 2024-05-09
JP7691439B2 JP7691439B2 (ja) 2025-06-11

Family

ID=78332189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022564501A Active JP7691439B2 (ja) 2020-04-30 2021-04-27 化学物質送達システム用のヒーター設計ソリューション

Country Status (6)

Country Link
US (1) US12460294B2 (enExample)
JP (1) JP7691439B2 (enExample)
KR (1) KR20230005931A (enExample)
CN (1) CN115485412A (enExample)
TW (1) TWI902792B (enExample)
WO (1) WO2021222292A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI129734B (en) * 2019-04-25 2022-08-15 Beneq Oy Precursor supply chamber
JP7691439B2 (ja) 2020-04-30 2025-06-11 ラム リサーチ コーポレーション 化学物質送達システム用のヒーター設計ソリューション
CN114318300B (zh) * 2021-12-30 2024-05-10 拓荆科技股份有限公司 一种半导体加工设备及其反应腔室、工艺管路穿腔模块
KR102728765B1 (ko) 2024-01-10 2024-11-13 포이스주식회사 기체상태 화학약품 공급라인의 온도제어시스템
KR102770119B1 (ko) 2024-01-10 2025-02-20 포이스주식회사 기체상태 화학약품 공급라인의 퍼지시스템

Family Cites Families (18)

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US3651240A (en) * 1969-01-31 1972-03-21 Trw Inc Heat transfer device
US3677329A (en) * 1970-11-16 1972-07-18 Trw Inc Annular heat pipe
JPH02210822A (ja) 1989-02-10 1990-08-22 Toshiba Corp 気相成長装置
US5451258A (en) 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JPH0897160A (ja) 1994-09-29 1996-04-12 Fujitsu Ltd ガス吹き出し装置及びガス混合装置及び半導体装置製造方法
US5714738A (en) * 1995-07-10 1998-02-03 Watlow Electric Manufacturing Co. Apparatus and methods of making and using heater apparatus for heating an object having two-dimensional or three-dimensional curvature
WO2000036640A1 (en) 1998-12-16 2000-06-22 Tokyo Electron Limited Method of forming thin film
US6915592B2 (en) 2002-07-29 2005-07-12 Applied Materials, Inc. Method and apparatus for generating gas to a processing chamber
KR20080070893A (ko) 2007-01-29 2008-08-01 (주)티티에스 블록히터가 장착된 가스라인을 갖는 반도체 제조장치
JP2009084625A (ja) 2007-09-28 2009-04-23 Tokyo Electron Ltd 原料ガスの供給システム及び成膜装置
KR101084275B1 (ko) 2009-09-22 2011-11-16 삼성모바일디스플레이주식회사 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법
TWI518198B (zh) 2014-04-09 2016-01-21 中央研究院 製備薄膜之系統
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
US11421320B2 (en) * 2017-12-07 2022-08-23 Entegris, Inc. Chemical delivery system and method of operating the chemical delivery system
US10975470B2 (en) * 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11183400B2 (en) * 2018-08-08 2021-11-23 Lam Research Corporation Progressive heating of components of substrate processing systems using TCR element-based heaters
KR20200101141A (ko) * 2019-02-19 2020-08-27 고려대학교 산학협력단 전구체 소스 공급을 위한 금속블록 결합형 히터 어셈블리를 포함하는 증착 장치
JP7691439B2 (ja) 2020-04-30 2025-06-11 ラム リサーチ コーポレーション 化学物質送達システム用のヒーター設計ソリューション

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