JP2023523426A5 - - Google Patents
Info
- Publication number
- JP2023523426A5 JP2023523426A5 JP2022564488A JP2022564488A JP2023523426A5 JP 2023523426 A5 JP2023523426 A5 JP 2023523426A5 JP 2022564488 A JP2022564488 A JP 2022564488A JP 2022564488 A JP2022564488 A JP 2022564488A JP 2023523426 A5 JP2023523426 A5 JP 2023523426A5
- Authority
- JP
- Japan
- Prior art keywords
- images
- pairwise
- prediction model
- features
- classifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063013737P | 2020-04-22 | 2020-04-22 | |
| US63/013,737 | 2020-04-22 | ||
| PCT/US2021/028563 WO2021216822A1 (en) | 2020-04-22 | 2021-04-22 | Abnormal wafer image classification |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023523426A JP2023523426A (ja) | 2023-06-05 |
| JP2023523426A5 true JP2023523426A5 (https=) | 2024-05-02 |
Family
ID=78222360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022564488A Ceased JP2023523426A (ja) | 2020-04-22 | 2021-04-22 | 異常ウェハ画像分類 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11972552B2 (https=) |
| JP (1) | JP2023523426A (https=) |
| KR (1) | KR20230006822A (https=) |
| CN (1) | CN115485740A (https=) |
| TW (1) | TW202147250A (https=) |
| WO (1) | WO2021216822A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115280468B (zh) * | 2021-03-01 | 2025-10-14 | 株式会社日立高新技术 | 实验要点推荐装置、实验要点推荐方法及半导体装置制造系统 |
| US12080042B2 (en) | 2021-07-16 | 2024-09-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for retrieving images from database |
| TWI801038B (zh) * | 2021-12-16 | 2023-05-01 | 新加坡商鴻運科股份有限公司 | 瑕疵檢測方法、系統、電子設備及介質 |
| WO2023143707A1 (en) * | 2022-01-26 | 2023-08-03 | Universität Konstanz | Training a neural network to perform a machine learning task |
| US12449379B2 (en) * | 2023-05-25 | 2025-10-21 | Applied Materials, Inc. | Machine learning model training |
| US12462369B2 (en) | 2023-08-16 | 2025-11-04 | Applied Materials, Inc. | Method for image-based sensor trace analysis |
| TWI886645B (zh) * | 2023-11-21 | 2025-06-11 | 環球晶圓股份有限公司 | 產生標記結果檔的方法及電子裝置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6456899B1 (en) | 1999-12-07 | 2002-09-24 | Ut-Battelle, Llc | Context-based automated defect classification system using multiple morphological masks |
| KR101800057B1 (ko) * | 2010-10-19 | 2017-11-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 트레이닝 영상에 등급을 배정하는 방법 및 장치 |
| JP5608575B2 (ja) * | 2011-01-19 | 2014-10-15 | 株式会社日立ハイテクノロジーズ | 画像分類方法および画像分類装置 |
| US9715723B2 (en) * | 2012-04-19 | 2017-07-25 | Applied Materials Israel Ltd | Optimization of unknown defect rejection for automatic defect classification |
| US10650508B2 (en) | 2014-12-03 | 2020-05-12 | Kla-Tencor Corporation | Automatic defect classification without sampling and feature selection |
| JP7144244B2 (ja) * | 2018-08-31 | 2022-09-29 | 株式会社日立ハイテク | パターン検査システム |
-
2021
- 2021-04-22 US US17/237,516 patent/US11972552B2/en active Active
- 2021-04-22 JP JP2022564488A patent/JP2023523426A/ja not_active Ceased
- 2021-04-22 CN CN202180029759.0A patent/CN115485740A/zh active Pending
- 2021-04-22 KR KR1020227038349A patent/KR20230006822A/ko active Pending
- 2021-04-22 WO PCT/US2021/028563 patent/WO2021216822A1/en not_active Ceased
- 2021-04-22 TW TW110114543A patent/TW202147250A/zh unknown
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