JP2023523426A - 異常ウェハ画像分類 - Google Patents

異常ウェハ画像分類 Download PDF

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Publication number
JP2023523426A
JP2023523426A JP2022564488A JP2022564488A JP2023523426A JP 2023523426 A JP2023523426 A JP 2023523426A JP 2022564488 A JP2022564488 A JP 2022564488A JP 2022564488 A JP2022564488 A JP 2022564488A JP 2023523426 A JP2023523426 A JP 2023523426A
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Japan
Prior art keywords
images
image
features
classifier
pairwise
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JP2022564488A
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Japanese (ja)
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JPWO2021216822A5 (https=
JP2023523426A5 (https=
Inventor
智土 本田
バーチ，リチャード
ツー，シン
デービット，ジェフリー，ドゥルー
Original Assignee
ピーディーエフ ソリューションズ，インコーポレイテッド
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Publication of JP2023523426A publication Critical patent/JP2023523426A/ja
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2415—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on parametric or probabilistic models, e.g. based on likelihood ratio or false acceptance rate versus a false rejection rate
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/243—Classification techniques relating to the number of classes
    • G06F18/2431—Multiple classes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/045—Combinations of networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/44—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components
    • G06V10/443—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components by matching or filtering
    • G06V10/449—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters
    • G06V10/451—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters with interaction between the filter responses, e.g. cortical complex cells
    • G06V10/454—Integrating the filters into a hierarchical structure, e.g. convolutional neural networks [CNN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20076—Probabilistic image processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Medical Informatics (AREA)
  • Multimedia (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Computational Linguistics (AREA)
  • Databases & Information Systems (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Biophysics (AREA)
  • Quality & Reliability (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Probability & Statistics with Applications (AREA)
  • Image Analysis (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2022564488A 2020-04-22 2021-04-22 異常ウェハ画像分類 Ceased JP2023523426A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063013737P 2020-04-22 2020-04-22
US63/013,737 2020-04-22
PCT/US2021/028563 WO2021216822A1 (en) 2020-04-22 2021-04-22 Abnormal wafer image classification

Publications (3)

Publication Number Publication Date
JP2023523426A true JP2023523426A (ja) 2023-06-05
JPWO2021216822A5 JPWO2021216822A5 (https=) 2024-05-02
JP2023523426A5 JP2023523426A5 (https=) 2024-05-02

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JP2022564488A Ceased JP2023523426A (ja) 2020-04-22 2021-04-22 異常ウェハ画像分類

Country Status (6)

Country Link
US (1) US11972552B2 (https=)
JP (1) JP2023523426A (https=)
KR (1) KR20230006822A (https=)
CN (1) CN115485740A (https=)
TW (1) TW202147250A (https=)
WO (1) WO2021216822A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12450520B2 (en) * 2021-03-01 2025-10-21 Hitachi High-Tech Corporation Experiment point recommendation device, experiment point recommendation method, and semiconductor device manufacturing device
US12080042B2 (en) * 2021-07-16 2024-09-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method for retrieving images from database
TWI801038B (zh) * 2021-12-16 2023-05-01 新加坡商鴻運科股份有限公司 瑕疵檢測方法、系統、電子設備及介質
CN118633090A (zh) * 2022-01-26 2024-09-10 康斯坦茨大学 训练神经网络以执行机器学习任务
US12449379B2 (en) * 2023-05-25 2025-10-21 Applied Materials, Inc. Machine learning model training
US12462369B2 (en) * 2023-08-16 2025-11-04 Applied Materials, Inc. Method for image-based sensor trace analysis
TWI886645B (zh) * 2023-11-21 2025-06-11 環球晶圓股份有限公司 產生標記結果檔的方法及電子裝置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013224942A (ja) * 2012-04-19 2013-10-31 Applied Materials Israel Ltd 自動欠陥分類のための未知欠陥除去の最適化
US8965116B2 (en) * 2010-10-19 2015-02-24 3M Innovative Properties Company Computer-aided assignment of ratings to digital samples of a manufactured web product
JP2020035282A (ja) * 2018-08-31 2020-03-05 株式会社日立ハイテクノロジーズ パターン検査システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6456899B1 (en) 1999-12-07 2002-09-24 Ut-Battelle, Llc Context-based automated defect classification system using multiple morphological masks
JP5608575B2 (ja) * 2011-01-19 2014-10-15 株式会社日立ハイテクノロジーズ 画像分類方法および画像分類装置
US10650508B2 (en) * 2014-12-03 2020-05-12 Kla-Tencor Corporation Automatic defect classification without sampling and feature selection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8965116B2 (en) * 2010-10-19 2015-02-24 3M Innovative Properties Company Computer-aided assignment of ratings to digital samples of a manufactured web product
JP2013224942A (ja) * 2012-04-19 2013-10-31 Applied Materials Israel Ltd 自動欠陥分類のための未知欠陥除去の最適化
JP2020035282A (ja) * 2018-08-31 2020-03-05 株式会社日立ハイテクノロジーズ パターン検査システム

Also Published As

Publication number Publication date
US20210334608A1 (en) 2021-10-28
TW202147250A (zh) 2021-12-16
WO2021216822A1 (en) 2021-10-28
CN115485740A (zh) 2022-12-16
KR20230006822A (ko) 2023-01-11
US11972552B2 (en) 2024-04-30

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