TWI801038B - 瑕疵檢測方法、系統、電子設備及介質 - Google Patents

瑕疵檢測方法、系統、電子設備及介質 Download PDF

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Publication number
TWI801038B
TWI801038B TW110147306A TW110147306A TWI801038B TW I801038 B TWI801038 B TW I801038B TW 110147306 A TW110147306 A TW 110147306A TW 110147306 A TW110147306 A TW 110147306A TW I801038 B TWI801038 B TW I801038B
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Taiwan
Prior art keywords
electronic device
storage medium
detection method
defect detection
defect
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TW110147306A
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English (en)
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TW202326598A (zh
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譚富元
程靖涵
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新加坡商鴻運科股份有限公司
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Publication of TW202326598A publication Critical patent/TW202326598A/zh

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TW110147306A 2021-12-16 2021-12-16 瑕疵檢測方法、系統、電子設備及介質 TWI801038B (zh)

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TW202326598A TW202326598A (zh) 2023-07-01

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201931217A (zh) * 2017-09-06 2019-08-01 美商克萊譚克公司 用於缺陷偵測及分類之統一神經網路
CN110826609A (zh) * 2019-10-29 2020-02-21 华中科技大学 一种基于强化学习的双流特征融合图像识别方法
CN111199543A (zh) * 2020-01-07 2020-05-26 南京航空航天大学 一种基于卷积神经网络的冰柜表面缺陷检测
CN113538341A (zh) * 2021-03-31 2021-10-22 联合汽车电子有限公司 自动光学检测辅助方法、装置及存储介质
US20210366103A1 (en) * 2020-05-21 2021-11-25 Kla Corporation Mode selection and defect detection training
TW202147250A (zh) * 2020-04-22 2021-12-16 美商Ｐｄｆ對策公司 異常晶圓圖像分類

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201931217A (zh) * 2017-09-06 2019-08-01 美商克萊譚克公司 用於缺陷偵測及分類之統一神經網路
CN110826609A (zh) * 2019-10-29 2020-02-21 华中科技大学 一种基于强化学习的双流特征融合图像识别方法
CN111199543A (zh) * 2020-01-07 2020-05-26 南京航空航天大学 一种基于卷积神经网络的冰柜表面缺陷检测
TW202147250A (zh) * 2020-04-22 2021-12-16 美商Ｐｄｆ對策公司 異常晶圓圖像分類
US20210366103A1 (en) * 2020-05-21 2021-11-25 Kla Corporation Mode selection and defect detection training
CN113538341A (zh) * 2021-03-31 2021-10-22 联合汽车电子有限公司 自动光学检测辅助方法、装置及存储介质

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
網路文獻 寒衣VC "VCIP2020：不同尺寸塊基於神經網絡的幀內預測" 2021/07/09 https://www.365seal.com/y/bNVKlGyRp4.html *

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