JP2023519918A - 電気光学デバイス - Google Patents
電気光学デバイス Download PDFInfo
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- JP2023519918A JP2023519918A JP2022558521A JP2022558521A JP2023519918A JP 2023519918 A JP2023519918 A JP 2023519918A JP 2022558521 A JP2022558521 A JP 2022558521A JP 2022558521 A JP2022558521 A JP 2022558521A JP 2023519918 A JP2023519918 A JP 2023519918A
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- 230000003287 optical effect Effects 0.000 claims abstract description 273
- 239000000758 substrate Substances 0.000 claims abstract description 34
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 8
- 230000005684 electric field Effects 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 4
- 230000035882 stress Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910002244 LaAlO3 Inorganic materials 0.000 description 1
- -1 LaYO3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/07—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 buffer layer
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
[0020] 本発明の好ましい実施形態が添付の図面を参照して詳細に説明される。
2 導波路層
3 バッファ層
4 電極層
7 第1の電極
8 第2の電極
10 マッハツェンダー光導波路
10a 第1の光導波路
10b 第2の光導波路
10c 分波部
10d 合波部
10i 入力光導波路
10o 出力光導波路
10e1 マッハツェンダー光導波路の第1の直線部
10e2 マッハツェンダー光導波路の第2の直線部
10e3 マッハツェンダー光導波路の第3の直線部
10f1 マッハツェンダー光導波路の第1の曲線部
10f2 マッハツェンダー光導波路の第2の曲線部
Claims (10)
- 基板と、
前記基板上の所定領域に設けられており、ニオブ酸リチウムまたはニオブ酸タンタルから形成される光導波路膜と、
前記光導波路膜に隣接して形成されるバッファ層と、
前記光導波路膜に電界を印加する電極と、を備え、
前記所定領域外に未透光の光導波路膜を備えることを特徴とする電気光学デバイス。 - 前記光導波路膜は直線部を有し、その直線部の近傍に、前記未透光の光導波路膜を備えることを特徴とする請求項1に記載の電気光学デバイス。
- 前記未透光の光導波路膜を複数有することを特徴とする請求項1又は2に記載の電気光学デバイス。
- 前記未透光の光導波路膜は前記直線部に沿って設けられることを特徴とする請求項2に記載の電気光学デバイス。
- 前記未透光の光導波路膜と前記光導波路膜との膜厚は略同一であることを特徴とする請求項1~4のいずれか一項に記載の電気光学デバイス。
- 光の伝送方向に垂直する断面において、前記光導波路膜は、前記未透光の光導波路膜の間に介在することを特徴とする請求項1~4のいずれか一項に記載の電気光学デバイス。
- 光の伝送方向に垂直する断面において、前記基板上に設けられた前記未透光の光導波路膜は、バッファ層に囲まれていることを特徴とする請求項1~4のいずれか一項に記載の電気光学デバイス。
- 前記光導波路膜は互いに隣り合う第1及び第2の光導波路膜を有し、
前記未透光の光導波路膜は、少なくとも第1の光導波路膜と第2の光導波路膜との間に介在することを特徴とする請求項1~4のいずれか一項に記載の電気光学デバイス。 - 前記第1及び第2の光導波路膜はマッハツェンダー光導波路であることを特徴とする請求項8に記載の電気光学デバイス。
- 前記未透光の光導波路膜は、少なくとも前記光導波路膜と前記基板の端部との間に形成されていることを特徴とする請求項1~4のいずれか一項に記載の電気光学デバイス。
Applications Claiming Priority (3)
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CN202010241133.3 | 2020-03-31 | ||
CN202010241133.3A CN113467105A (zh) | 2020-03-31 | 2020-03-31 | 光电器件 |
PCT/JP2021/013931 WO2021201130A1 (en) | 2020-03-31 | 2021-03-31 | Electro-optical device |
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JP2023519918A true JP2023519918A (ja) | 2023-05-15 |
JP7476343B2 JP7476343B2 (ja) | 2024-04-30 |
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US (1) | US20230112785A1 (ja) |
JP (1) | JP7476343B2 (ja) |
CN (2) | CN113467105A (ja) |
WO (1) | WO2021201130A1 (ja) |
Families Citing this family (1)
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CN115145063A (zh) * | 2021-03-30 | 2022-10-04 | Tdk株式会社 | 光学器件 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0738907A1 (en) * | 1995-04-20 | 1996-10-23 | Koninklijke KPN N.V. | Integrated optical polarisation splitter |
JPH1048445A (ja) * | 1996-08-05 | 1998-02-20 | Nippon Telegr & Teleph Corp <Ntt> | 光導波回路 |
US20020159690A1 (en) * | 1999-06-04 | 2002-10-31 | Alcatel | Optical multiplexer/demultiplexer with three waveguides |
US20040028334A1 (en) * | 2002-05-06 | 2004-02-12 | Marco Marazzi | Active optical devices and methods of controlling them |
JP2014006348A (ja) * | 2012-06-22 | 2014-01-16 | Tdk Corp | 光変調器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001242332A (ja) | 2000-03-01 | 2001-09-07 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路及びこれを用いた光導波路モジュール |
IL294733A (en) | 2020-01-14 | 2022-09-01 | Quantum Si Inc | Uniformity of waveguide excitation |
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2020
- 2020-03-31 CN CN202010241133.3A patent/CN113467105A/zh active Pending
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2021
- 2021-03-31 US US17/914,140 patent/US20230112785A1/en active Pending
- 2021-03-31 CN CN202180026047.3A patent/CN115413329A/zh active Pending
- 2021-03-31 JP JP2022558521A patent/JP7476343B2/ja active Active
- 2021-03-31 WO PCT/JP2021/013931 patent/WO2021201130A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0738907A1 (en) * | 1995-04-20 | 1996-10-23 | Koninklijke KPN N.V. | Integrated optical polarisation splitter |
JPH1048445A (ja) * | 1996-08-05 | 1998-02-20 | Nippon Telegr & Teleph Corp <Ntt> | 光導波回路 |
US20020159690A1 (en) * | 1999-06-04 | 2002-10-31 | Alcatel | Optical multiplexer/demultiplexer with three waveguides |
US20040028334A1 (en) * | 2002-05-06 | 2004-02-12 | Marco Marazzi | Active optical devices and methods of controlling them |
JP2014006348A (ja) * | 2012-06-22 | 2014-01-16 | Tdk Corp | 光変調器 |
Also Published As
Publication number | Publication date |
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WO2021201130A1 (en) | 2021-10-07 |
JP7476343B2 (ja) | 2024-04-30 |
CN115413329A (zh) | 2022-11-29 |
US20230112785A1 (en) | 2023-04-13 |
CN113467105A (zh) | 2021-10-01 |
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