JP2023508442A - レーザ切断用の三次元光電子部品を備えたデバイス、及び、このようなデバイスのレーザ切断方法 - Google Patents
レーザ切断用の三次元光電子部品を備えたデバイス、及び、このようなデバイスのレーザ切断方法 Download PDFInfo
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- 239000011787 zinc oxide Substances 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
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- 229910004262 HgTe Inorganic materials 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
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- 229910003363 ZnMgO Inorganic materials 0.000 description 1
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
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- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
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- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
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Abstract
Description
- 基板32、及び
- ワイヤの成長を有利にして基板32を覆うシード構造体34
を有している。シード構造体34の上面は、支持体22の前述した表面26に相当する。シード構造体34は、ワイヤの成長を有利にする1つのシード層又は層の積層体を有してもよく、少なくともシード構造体34の上層は、ワイヤの成長を有利にするシード層である。図2に例として示されているシード構造体34は、2つのシード層36及びシード層38の積層体に相当し、シード層36は、基板32とシード層38との間に配置されている。
- シード構造体34を基板32上に形成する工程(図19)(2つの層36及び層38の積層体を含むシード構造体34が図19に例として示されている)、
- シード構造体34の上層38に、例えば上層38の厚さ全体に亘ってフォトニック結晶の柱状体66及びシードパッド62をエッチングする工程(図20)(そのため、層36はエッチング停止層の機能を果たし得る)、
- シード構造体34を覆う第1の材料の層92を堆積させて、特に柱状体66間及びシードパッド62の周囲の開口部を充填する工程(図21)、
- 例えば化学機械平坦化(CMP) によって層92をエッチングして、柱状体66及びシードパッド62の最上部に達し、層92の一部のみを柱状体66間及びシードパッド62の周囲に保持し、ひいては特にフォトニック結晶60の基層64を形成する工程(図22)、
- フォトニック結晶60上に絶縁層56を形成する工程(図23)、
- 絶縁層56に開口部94をエッチングして、光電子部品を形成する所望の位置でフォトニック結晶60の柱状体66の最上部を露出させる工程(図24)、並びに、
- 各開口部94にワイヤ52を成長させる工程(図25)(柱状体66がシードパッドの機能を果たす)
を有する。
Claims (18)
- レーザ(18)で処理すべく構成されているデバイス(20)であって、
レーザを通す支持体(22)と、
少なくとも1つの光電子部品(50)を有する少なくとも1つの光電子回路(30)と
を備えており、
前記少なくとも1つの光電子部品は、前記支持体に接合された基部(53)を有してアクティブ層(72)で覆われている三次元半導体素子(52)を有しており、
前記デバイスは、前記支持体に載置されて前記基部を囲み前記レーザを吸収する吸収領域(28)を備えており、前記吸収領域(28)はフォトニック結晶(60)を含んでいる、デバイス。 - 前記フォトニック結晶(60)は二次元のフォトニック結晶である、請求項1に記載のデバイス。
- 前記フォトニック結晶(60)は、第1の材料の基層(64)と、前記第1の材料とは異なる第2の材料の格子状に配置された柱状体(66)とを有しており、
前記柱状体は、前記基層の厚さの少なくとも一部に亘って前記基層に夫々延びている、請求項1又は2に記載のデバイス。 - 前記第1の材料は、前記レーザ(18)に対して1未満の吸収係数を有する、請求項3に記載のデバイス。
- 前記第1の材料は、前記レーザ(18)に対して1~10の範囲内の吸収係数を有する、請求項3に記載のデバイス。
- 前記第2の材料は、前記レーザ(18)に対して1未満の吸収係数を有する、請求項3~5のいずれか1つに記載のデバイス。
- 前記吸収領域(28)は、前記基部(53)を囲む吸収層(40)を有しており、前記吸収層は、前記レーザ(18)に対して1~10の範囲内の吸収係数を有する第3の材料で形成されている、請求項1~6のいずれか1つに記載のデバイス。
- 前記吸収層(40)と前記支持体(22)との間に配置されている電気絶縁層(42)を備えている、請求項7に記載のデバイス。
- 前記吸収層(40)と前記三次元半導体素子(52)との間に配置されている電気絶縁層(42)を備えている、請求項7又は8に記載のデバイス。
- 前記支持体(22)は、前記レーザを通す基板(32)と、前記基板(32)及び前記三次元半導体素子(52)の基部(53)間に配置されて前記三次元半導体素子(52)の成長を有利にする第4の材料で形成されたパッド(62)とを有している、請求項1~9のいずれか1つに記載のデバイス。
- 前記吸収領域(28)は前記パッド(62)を囲んでいる、請求項10に記載のデバイス。
- 前記第4の材料は、元素の周期表のIV列、V 列若しくはVI列の遷移金属の窒化物、炭化物若しくはホウ化物、又はこれらの化合物の組合せであるか、或いは、窒化アルミニウム、酸化アルミニウム、ホウ素、窒化ホウ素、チタン、窒化チタン、タンタル、窒化タンタル、ハフニウム、窒化ハフニウム、ニオブ、窒化ニオブ、ジルコニウム、ホウ化ジルコニウム、窒化ジルコニウム、炭化シリコン、炭窒化タンタル、窒化マグネシウム、又はこれらの化合物の少なくとも2つの混合物である、請求項10又は11に記載のデバイス。
- 前記第4の材料は前記第2の材料と同一である、請求項3を引用する請求項10に記載のデバイス。
- 前記支持体(22)は、対向する第1の表面(24)及び第2の表面(26)を有しており、
前記レーザ(18)は、前記支持体を前記第1の表面から前記第2の表面に横切るように構成されており、
前記吸収領域(28)は前記第2の表面を少なくとも部分的に覆っている、請求項1~13のいずれか1つに記載のデバイス。 - 前記光電子部品(50)の複数の複製物を備えており、前記光電子部品(50)の基部(53)は前記支持体(22)に接合されている、請求項1~14のいずれか1つに記載のデバイス。
- 請求項1~15のいずれか1つに記載のデバイス(20)を製造する方法であって、
前記支持体(22)上で前記三次元半導体素子(52)のエピタキシャル成長を行う、方法。 - 請求項1~15のいずれか1つに記載のデバイス(20)をレーザ(18)で処理する方法であって、
前記支持体(22)を通して前記吸収領域(28)を前記レーザ(18)に露出する、方法。 - 前記光電子回路(30)を受け部(90)に接合し、前記光電子回路は前記支持体(22)に依然として連結されており、前記吸収領域(28)の少なくとも一部を前記レーザ(18)によって破壊する、請求項17に記載の方法。
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FR1915605A FR3105878B1 (fr) | 2019-12-26 | 2019-12-26 | Dispositif à composants optoélectroniques tridimensionnels pour découpe au laser et procédé de découpe au laser d'un tel dispositif |
PCT/EP2020/087614 WO2021130218A1 (fr) | 2019-12-26 | 2020-12-22 | Dispositif a composants optoelectroniques tridimensionnels pour decoupe au laser et procede de decoupe au laser d'un tel dispositif |
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BR112015008057A2 (pt) | 2012-10-12 | 2017-07-04 | Asahi Kasei E Mat Corporation | substrato óptico, dispositivo emissor de luz semicondutor, e, método de fabricação do mesmo |
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