JP2023502183A - 単一光子アバランシェダイオード装置 - Google Patents
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- 239000000463 material Substances 0.000 claims abstract description 146
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 239000007943 implant Substances 0.000 claims abstract description 42
- 238000002161 passivation Methods 0.000 claims abstract description 14
- 239000002210 silicon-based material Substances 0.000 claims abstract description 8
- 239000002086 nanomaterial Substances 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000011810 insulating material Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000002801 charged material Substances 0.000 claims description 6
- 239000000945 filler Substances 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 6
- 230000003667 anti-reflective effect Effects 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 150000001495 arsenic compounds Chemical class 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- -1 phosphorus compound Chemical class 0.000 claims description 2
- 150000003018 phosphorus compounds Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 description 25
- 238000002955 isolation Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 229910052593 corundum Inorganic materials 0.000 description 6
- 229910044991 metal oxide Inorganic materials 0.000 description 6
- 150000004706 metal oxides Chemical class 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 229910001845 yogo sapphire Inorganic materials 0.000 description 6
- 230000000295 complement effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000651 laser trapping Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
Description
図示されるように、ピクセル要素のそれぞれは、エピタキシャル成長材料の第1の部分に構成されるp型注入材料113と、エピタキシャル成長材料の第2の部分に構成されるn型注入材料115と、p型注入材料113およびn型注入材料115から構成された結合領域(接合領域)とを有する。一例において、p型注入材料は、濃度が1×1015atoms/cm3以上1×1018atoms/cm3以下であるホウ素材料を含む。一例において、n型注入材料は、濃度が1×1017atoms/cm3以上1×1019atoms/cm3以下であるリン化合物またはヒ素化後物を含む。もちろん、他のバリエーション、変更、および代替案も存在し得る。図示のように、p型注入材料およびn型注入材料は、ピクセル要素の半導体基板の近傍または結合領域の近傍に設けられている。
一例において、前記装置は、論理回路で構成された半導体基板であるロジック基板919を有する。一例において、該基板は、特に、相補型金属酸化シリコン(CMOS)基板、ブランクまたはパターン化されていない基板、パターン化されたハイブリッド基板であってもよい。一例において、半導体基板は、論理回路用の複数のCMOSセルを有し、また、複数のメモリセル、インターフェースセル、および他の回路要素を含んでもよい。図示のように、前記基板は、結合領域917と論理回路921を有し、論理回路921は、特に、出力回路、消滅回路、再充電回路として構成されてもよい。もちろん、他のバリエーション、変更、および代替案も存在し得る。
Claims (26)
- 単一光子アバランシェダイオード装置であって、
上面を有するロジック基板と、
前記ロジック基板の前記上面に結合されたセンサ基板であって、配列構造を形成するように空間的に配置された複数のピクセル要素を有するセンサ基板と、を備え、
前記ピクセル要素のそれぞれは、
パッシベーション材料と、
p型シリコンエピタキシャル成長材料と、
前記エピタキシャル成長材料の第1の部分に設けられたp型注入材料と、
前記エピタキシャル成長材料の第2の部分に設けられたn型注入材料と、
前記p型注入材料と前記n型注入材料とから構成された結合領域と、
前記ピクセル要素に隣接するディープトレンチ領域であって、充填材料と、周囲の電荷材料と、周囲の絶縁材料とを有するトレンチ領域と、
前記p型注入材料に結合された前記センサ基板の第1の面上の第1の接触領域と、
前記n型注入材料に結合された前記センサ基板の第2の面上の第2の接触領域とを備え、
前記電荷材料は、該電荷材料の近傍部に複数の正孔を生じさせるように負の電荷で構成されている、装置。 - 前記ピクセル要素のそれぞれは、前記パッシベーション材料を覆う反射防止材料を備えている、請求項1に記載の装置。
- 前記ピクセル要素のそれぞれは、1ミクロンから約100ミクロンまでの範囲のサイズを有する、請求項1に記載の装置。
- 前記パッシベーション材料は、酸化物材料、high-k誘電材料、窒化物材料、又はポリイミド材料を含む、請求項1に記載の装置。
- 前記p型注入材料は、濃度が1×1015atoms/cm3以上1×1018atoms/cm3以下であるホウ素材料を含む、請求項1に記載の装置。
- 前記n型注入材料は、濃度が1×1017atoms/cm3以上1×1019atoms/cm3以下であるリン化合物またはヒ素化後物を含む、請求項1に記載の装置。
- Nを1以上、Mを1以上とした場合、前記配列構造はN行×M列である、請求項1に記載の装置。
- 前記充填材料は、金属材料、半導体材料、又は絶縁材料を含む、請求項1に記載の装置。
- 前記p型注入材料と前記n型注入材料とは、前記ピクセル要素の前記ロジック基板の近傍部に設けられている、請求項1に記載の装置。
- 前記ロジック基板は、複数のCMOSセルを備える、請求項1に記載の装置。
- 前記ピクセル要素のそれぞれは、複数のナノ構造であって、該ナノ構造に接触する光子を捕捉しやすくするように開口領域を覆うように構成され、シリコン材料からなる複数のナノ構造を備える、請求項1に記載の装置。
- 前記ピクセル要素のそれぞれは、複数のナノ構造であって、該ナノ構造に接触する光子を捕捉しやすくするように前記上面との境界面の近傍部に設けられた複数のナノ構造を備える、請求項1に記載の装置。
- 前記ピクセル要素のそれぞれは、底部領域から前記結合領域へ光子を反射させやすくするように前記開口領域とは反対側に設けられた反射材料を備える、請求項1に記載の装置。
- 単一光子アバランシェダイオード装置であって、
上面を有するロジック基板と、
前記ロジック基板の前記上面に結合されたセンサ基板であって、配列構造を形成するように空間的に配置された複数のピクセル要素を有するセンサ基板と、を備え、
前記ピクセル要素のそれぞれは、
p型シリコンエピタキシャル成長材料と、
前記エピタキシャル成長材料の第1の部分に設けられたn型注入材料と、
前記n型注入材料を覆い、前記エピタキシャル成長材料の第2の部分に設けられたp型注入材料と、
前記p型注入材料と前記n型注入材料とから構成された結合領域と、
前記ピクセル要素に隣接するディープトレンチ領域であって、トレンチ開口部と、周囲の絶縁材料と、周囲の電荷材料と、充填材料とを有するトレンチ領域と、
前記n型注入材料に結合された前記センサ基板の背面上の第1の接触領域と、
前記p型注入材料に結合された前記センサ基板の前面上の第2の接触領域とを備え、
前記電荷材料は、該電荷材料の近傍部に複数の正孔を生じさせるように負の固定電荷で構成されている、装置。 - 前記ピクセル要素のそれぞれは、前記パッシベーション層を覆う反射防止材料を備える、請求項14に記載の装置。
- 前記ピクセル要素のそれぞれは、1ミクロンから約100ミクロンまでの範囲のサイズを有する、請求項14に記載の装置。
- 前記パッシベーション層は、酸化物材料、high-k誘電材料、窒化物材料、又はポリイミド材料を含む、請求項14に記載の装置。
- 前記p型注入材料は、濃度が1×1015atoms/cm3以上1×1018atoms/cm3以下であるホウ素材料を含む、請求項14に記載の装置。
- 前記n型注入材料は、濃度が1×1017atoms/cm3以上1×1019atoms/cm3以下であるリン化合物またはヒ素化後物を含む、請求項14に記載の装置。
- Nを1以上、Mを1以上とした場合、前記配列構造はN行×M列である、請求項14に記載の装置。
- 前記充填材料は、金属材料、半導体材料、又は絶縁材料を含む、請求項14に記載の装置。
- 前記p型注入材料と前記n型注入材料とは、前記ピクセル要素の開口領域の近傍部に設けられている、請求項14に記載の装置。
- 前記半導体基板は、複数のCMOSセルを備える、請求項14に記載の装置。
- 前記ピクセル要素のそれぞれは、複数のナノ構造であって、該ナノ構造に接触する光子を捕捉しやすくするように開口領域を覆うように構成され、シリコン材料からなる複数のナノ構造を備える、請求項14に記載の装置。
- 前記ピクセル要素のそれぞれは、複数のナノ構造であって、該ナノ構造に接触する光子を捕捉しやすくするように前記上面との境界面の近傍部に設けられた複数のナノ構造を備える、請求項14に記載の装置。
- 前記ピクセル要素のそれぞれは、背面領域から前記結合領域へ光子を反射させやすくするように前記開口領域とは反対側に設けられた反射材料を備える、請求項14に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/775,101 US11508867B2 (en) | 2020-01-28 | 2020-01-28 | Single photon avalanche diode device |
US16/775,101 | 2020-01-28 | ||
PCT/US2021/014647 WO2021154603A1 (en) | 2020-01-28 | 2021-01-22 | Single photon avalanche diode device |
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CN117525093A (zh) * | 2023-11-13 | 2024-02-06 | 成都燧石蓉创光电技术有限公司 | 一种具有mos沟槽隔离区的探测装置及其形成方法 |
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WO2021154603A1 (en) | 2021-08-05 |
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