JP2023167499A - Carrier and testing tray - Google Patents

Abstract

To provide a carrier capable of accommodating a large sized DUT while increasing a contact area.SOLUTION: An insert 710 comprises: a body 720 having an opening 725 to which a DUT is inserted; and a pair of latch members 740 arranged within the opening 725, rotatably supported by the body 720 and capable of approaching the DUT. The body 720 has a cover part 724 projecting toward the inside of the opening 725. The cover part 724 covers the pair of latch members 740 when the pair of latch members 740 are located at an open position.SELECTED DRAWING: Figure 8

Description

The present invention relates to a carrier that holds an electronic component under test (DUT: Device Under Test) such as a semiconductor integrated circuit element, and a test tray equipped with the carrier.

The IC device under test is housed in an insert mounted on a test tray, transported to a test head, and is pressed against the test head while housed in the insert (for example, see Patent Document 1).

This insert includes a guide core, an insert main body, and a lever plate (Cited document 1 (FIGS. 7, 11, and 12)). The guide core has a bottom plate portion including an opening, and supports the IC device under test by the bottom plate portion. This guide core is attached to the insert body.

The insert body has a latch mechanism including a pair of latches, and the pair of latches are rotatably supported in the opening of the insert body via a shaft. The pair of latches have a latch portion that covers the top surface of the IC device under test, and this latch portion prevents the IC device under test from jumping out of the insert.

When the IC device under test is carried into the guide core by the XY transport device, the lever plate is pressed toward the insert body by the suction head of the XY transport device. As a result, the lever plate presses the lever plate acting part of the latch downward, rotates the latch part upward, and opens the pair of latches (Cited Document 1 (Figure 12(b))) . In this state, the IC device under test is carried into the guide core. On the other hand, when the pressing force on the lever plate acting part is removed, the latch part rotates downward, and the pair of latches are in the closed state (Reference Document 1 (FIG. 12(a))).

International Publication No. 2003/075024

In the latch in the above technology, in the open state, the latch part is arranged along the inner surface of the opening of the insert body (Citation 1 (Fig. 12(b))), so it is suitable for large-sized DUTs. It is now possible.

However, since the latch in the open state protrudes from the opening near the inner surface of the opening of the insert body (Reference Document 1 (FIG. 12(b))), it is necessary to increase the area of the opening.

When testing an IC device under test, the IC device under test housed in the insert is pressed against the test head by a pusher, and the insert body is configured to come into contact with a match plate provided with the pusher. There are cases. At this time, with the above insert, the contact area between the insert body and the match plate becomes smaller, so the pressure that the insert body receives from the match plate increases, which may damage the insert or shorten the life of the insert. There is a problem.

The problem to be solved by the present invention is to provide a carrier that can accommodate large-sized DUTs and increase the contact area, and a test tray equipped with the carrier.

[1] Aspect 1 of the present invention is a carrier that is attached to a frame of a test tray transported within an electronic component handling device and holds a DUT, the carrier body having a through hole into which the DUT is inserted; a latch member disposed inside the through hole, rotatably supported by the carrier body, and accessible to the DUT; a rotary part that is rotatable; an arm part that is connected to the rotary part at a position apart from the rotation axis; The carrier body has a latch portion that rotates between a closed position where the carrier body approaches and an open position where the carrier body is retracted from the main surface of the DUT, and the carrier body protrudes toward the inside of the through hole. It has a cover part, and the cover part is a carrier that covers the latch member when the latch part is located in the open position.

[2] Aspect 2 of the present invention is the carrier of aspect 1, in which the latch has a pair of rotating parts facing each other, and the arm part is interposed between the pair of rotating parts. , the pair of rotating parts may be connected to each other, and the cover part may be a carrier that covers the arm part when the latch part is located in the open position.

[3] Aspect 3 of the present invention is that in the carrier according to aspect 1 or aspect 2, when the latch portion is projected in the extending direction of the arm portion, the angle formed by the latch portion and the rotating portion is The carrier may have an angle of 90° or more.

[4] Aspect 4 of the present invention is the carrier according to any one of aspects 1 to 3, wherein the carrier includes a pair of the latch members provided inside the through hole so as to face each other,
The carrier main body may be a carrier having a pair of the cover parts arranged at positions corresponding to the pair of latch members.

[5] Aspect 5 of the present invention may be a carrier according to aspect 4, in which the cover portion covers the pair of arm portions when the latch portion is located at the open position. .

[6] Aspect 6 of the present invention is the carrier according to any one of aspects 1 to 5, wherein the cover portion is a carrier that covers the latch portion when the latch portion is located in the open position. There may be.

[7] Aspect 7 of the present invention is the carrier according to any one of aspects 1 to 6, wherein the carrier main body has a main body to which the cover portion is connected, and the main body is connected to the cover portion. The cover part includes a second main surface that connects to the first main surface, and the first and second main surfaces are on the same plane. It may be a career in which

[8] Aspect 8 of the present invention is the carrier according to any one of aspects 1 to 7, wherein the carrier is detachably attached to the carrier body and inserted into the through hole while holding the DUT. The carrier may further include a device holding section.

[9] Aspect 9 of the present invention is the carrier according to any one of aspects 1 to 8, further comprising a pressing mechanism that rotates the latch member around the rotation axis by pressing the latch member. There may be.

[10] A tenth aspect of the present invention is a test tray including the carrier according to any one of aspects 1 to 9 and the frame that holds the carrier.

According to the present invention, since the cover part covers the latch member when the latch part is located in the open position, it is possible to increase the contact area while making it possible to accommodate a large-sized DUT.

FIG. 1 is a schematic cross-sectional view showing an example of an electronic component testing device using a carrier according to an embodiment of the present invention. FIG. 2 is a perspective view showing the electronic component testing apparatus of FIG. 1. FIG. 3 is a conceptual diagram for explaining tray transfer in the electronic component testing apparatus of FIGS. 1 and 2. FIG. FIG. 4 is an exploded perspective view showing an example of an IC stocker used in the above electronic component testing apparatus. FIG. 5 is a perspective view showing an example of a customer tray used in the electronic component testing apparatus described above. FIG. 6 is a perspective view showing an example of a test tray in an embodiment of the present invention. FIG. 7 is an exploded perspective view showing an example of an insert (carrier) in an embodiment of the present invention. FIG. 8 is an enlarged perspective view showing a state in which the latch member is attached to the body of the insert in the embodiment of the present invention. FIG. 9 is an exploded perspective view showing an example of the core of the insert in the embodiment of the present invention. FIG. 10 is a bottom view showing an example of the core of the insert in the embodiment of the present invention. FIG. 11(A) is a sectional view taken along the line XIA-XIA in FIG. B) is a sectional view showing the latch section in the closed position. FIG. 12(A) is an enlarged plan view showing a state in which the latch part is located in the open position in the embodiment of the present invention, and FIG. 12(B) is an enlarged plan view showing the latch part in the closed position. FIG. 3 is an enlarged plan view showing the state. FIG. 13 is a cross-sectional view illustrating a method of testing a DUT held in an insert in an embodiment of the invention. FIG. 14 is a sectional view taken along the line XIV-XIV in FIG. 7.

Embodiments of the present invention will be described below based on the drawings. FIG. 1 is a schematic cross-sectional view showing an electronic component testing apparatus 1000 using a carrier 710 in this embodiment, FIG. 2 is a perspective view showing the electronic component testing apparatus 1000 of FIG. 1, and FIG. 2 is a conceptual diagram for explaining the transfer of the tray TST in the electronic component testing apparatus 1000 of No. 2. FIG.

The electronic component testing apparatus 1000 shown in FIG. 1 applies high or low temperature thermal stress to the DUT 90, and tests (inspects) whether the DUT 90 operates properly in this state using a test head 5 and a tester 6. do. Then, this electronic component testing apparatus 1000 classifies the DUT 90 based on the test results. A specific example of the DUT 90 is, for example, a memory device.

In the electronic component testing apparatus 1000, a large number of DUTs 90 to be tested are mounted on a customer tray KST (see FIG. 5). Further, within the handler 1 of the electronic component testing apparatus 1000, the test tray TST (see FIG. 6) is circulated. The DUT 90 is transferred from the customer tray KST to the test tray TST and tested. The handler 1 in this embodiment corresponds to an example of an "electronic component handling device" in an aspect of the present invention.

As shown in FIG. 1, a space 8 is provided at the bottom of the handler 1, and a test head 5 is placed in this space 8. A socket 50 is provided on the test head 5, and this socket 50 is connected to the tester 6 through a cable 7.

In this electronic component testing apparatus 1000, the DUT 90 placed on the test tray TST and the socket 50 on the test head 5 are in contact with each other and electrically connected. DUT 90 is tested (inspected) based on the signal output from 6. Note that when replacing the type of DUT 90, the socket 50 and the core 730, which will be described later, are replaced with ones that match the shape, number of pins, etc. of the DUT 90.

As shown in FIGS. 2 and 3, the handler 1 includes a storage section 200, a loader section 300, a test section 100, and an unloader section 400. The storage unit 200 stores untested and tested DUTs 90. The loader section 300 transfers the DUT 90 transferred from the storage section 200 to the test section 100. The test section 100 is configured such that the socket 50 of the test head 5 faces inside. The unloader section 400 classifies the tested DUTs 90 that have been tested by the test section 100.

FIG. 4 is an exploded perspective view showing an IC stocker used in the electronic component testing apparatus 1000 described above, and FIG. 5 is a perspective view showing a customer tray used in the electronic component testing apparatus 1000 described above.

As shown in FIG. 4, the storage unit 200 includes a pre-test stocker 201 and a tested stocker 202. The pre-test stocker 201 stores a customer tray KST containing DUTs 90 before testing. The tested stocker 202 stores customer trays KST containing DUTs 90 classified according to test results. The pre-test stocker 201 and the tested stocker 202 include a frame-shaped tray support frame 203 and an elevator 204 that enters from the bottom of the tray support frame 203 and moves up and down toward the top. A plurality of customer trays KST are stacked on the tray support frame 203. The stacked customer trays KST are moved up and down by the elevator 204.

As shown in FIG. 5, the customer tray KST includes a plurality of concave housing portions that house the DUTs 90. The plurality of storage units are arranged in multiple rows and multiple columns (for example, 14 rows and 13 columns). Note that the pre-test stocker 201 and the tested stocker 202 have the same structure.

As shown in FIGS. 2 and 3, the pre-test stocker 201 is provided with two stockers STK-B and two empty tray stockers STK-E. Two stockers STK-B are adjacent to each other, and two empty tray stockers STK-E are adjacent to each other next to these two stockers STK-B. In the empty tray stocker STK-E, empty customer trays KST to be transferred to the unloader section 400 are stacked.

A tested stocker 202 is provided next to the pre-test stocker 201 . This tested stocker 202 is provided with eight stockers STK-1, STK-2, . . . , STK-8. The tested stocker 202 is configured to be able to sort and store tested DUTs 90 into up to eight categories according to test results. For example, the tested DUT 90 can be sorted into good and defective products in the tested stocker 202, as well as into good products with a high operating speed, non-defective products with a medium operating speed, and non-defective products with a slow operating speed. Or, it can be sorted into defective products that require retesting and defective products that do not require retesting.

The storage unit 200 further includes a tray transfer arm 205, as shown in FIG. The tray transfer arm 205 is provided between the storage section 200 and the apparatus base 101. This tray transfer arm 205 transfers the customer tray KST from the lower side of the apparatus base 101 to the loader section 300. A pair of windows 370 are formed at positions corresponding to the loader section 300 in the device base 101.

The loader section 300 includes a device transport device 310. This device transport device 310 includes two rails 311, a movable arm 312, and a movable head 320. The two rails 311 are installed on the device base 101. Movable arm 312 reciprocates between test tray TST and customer tray KST along two rails 311. Note that the moving direction of the movable arm 312 is referred to as the Y direction. Movable head 320 is supported by movable arm 312 and moves in the X direction. A plurality of suction pads (not shown) are attached to the movable head 320 so as to face downward.

The device transport device 310 moves the movable head 320, which has attracted a plurality of DUTs 90 with a plurality of suction pads, from the customer tray KST to a preciser 360. Thereby, the DUT 90 is transferred from the customer tray KST to the precisionr 360. Then, the device transport device 310 corrects the mutual positional relationship of the DUTs 90 using the movable arm 312 and the movable head 320 in the precisionr 360. Thereafter, the device transport device 310 transports the DUT 90 to the test tray TST stopped at the loader section 300. Thereby, the DUT 90 is transferred from the customer tray KST to the test tray TST.

The test section 100 includes a soak chamber 110, a test chamber 120, and an unsoak chamber 130, as shown in FIGS. 2 and 3. The soak chamber 110 applies targeted high or low temperature thermal stress to the DUT 90 mounted on the test tray TST. The test chamber 120 presses the DUT 90, which has been subjected to thermal stress in the soak chamber 110, against the test head 5. Unsoak chamber 130 removes thermal stress from DUT 90 tested in test chamber 120.

When applying high temperature to the DUT 90 in the soak chamber 110, the DUT 90 is cooled down to room temperature by blowing air in the unsoak chamber 130. On the other hand, when applying a low temperature to the DUT 90 in the soak chamber 110, the DUT 90 is heated in the unsoak chamber 130 by hot air, a heater, or the like to a temperature that does not cause dew condensation.

As shown in FIG. 2, the soak chamber 110 and the unsoak chamber 130 protrude above the test chamber 120. Further, as shown in FIG. 3, the soak chamber 110 is provided with a vertical conveyance device, and while the preceding test tray TST is present in the test chamber 120, the following test trays TST are vertically conveyed. Wait while supported by the device. The DUTs 90 mounted on the plurality of trailing test trays TST are subjected to high or low temperature thermal stress during standby.

A test head 5 is arranged in the center of the test chamber 120. A test tray TST is transferred onto the test head 5. At the center of the test chamber 120, the terminals of the DUT 90 mounted on the test tray TST are brought into contact with the contacts of the socket 50 on the test head 5, and the DUT 90 is tested. The test tray TST loaded with the DUT 90 that has been tested is transferred to the unsoak chamber 130. In the unsoak chamber 130, the DUT 90 that has been tested is removed from heat to room temperature. The test tray TST on which the heat-removed DUT 90 is mounted is carried out to the unloader section 400.

An entrance for carrying the test tray TST from the apparatus base 101 into the soak chamber 110 is formed in the upper part of the soak chamber 110 . On the other hand, an exit is formed in the upper part of the unsoak chamber 130 for carrying out the test tray TST from the unsoak chamber 130 to the apparatus base 101.

As shown in FIG. 2, a tray conveyance device 102 is provided on the device base 101. As shown in FIG. This tray transport device 102 transports the test tray TST from the apparatus base 101 to the soak chamber 110 and transports the test tray TST from the unsoak chamber 130 to the apparatus base 101. This tray conveyance device 102 is composed of, for example, a rotating roller.

After the test tray TST is carried out from the unsoak chamber 130 to the device base 101 by the tray transport device 102, all the DUTs 90 mounted on the test tray TST are transferred to the test results by the device transport device 410 (described later). It is transferred to the corresponding customer tray KST. Thereafter, the test tray TST is transferred to the soak chamber 110 via the unloader section 400 and the loader section 300.

As shown in FIG. 2, the unloader section 400 is provided with two device transport devices 410. This device transport device 410 has the same structure as the device transport device 310 provided in the loader section 300. The two device transport devices 410 transfer the tested DUTs 90 from the test tray TST present on the device base 101 to the customer tray KST according to the test results.

Two pairs of windows 470 are formed in the device base 101. These two pairs of windows 470 are arranged so that the customer tray KST transferred to the unloader section 400 faces the top surface of the device base 101. An elevating table (not shown) is provided below the two pairs of windows 470 and the window 370 described above. This elevating table lowers the customer tray KST on which the tested DUT 90 is mounted and transfers it to the tray transfer arm 205.

The configuration of the test tray TST including an insert capable of holding the DUT 90 will be described below.

FIG. 6 is a perspective view showing the test tray TST, and FIG. 7 is an exploded perspective view showing the insert 710 in this embodiment. As shown in FIG. 6, the test tray TST includes a frame 700 and a plurality of inserts (carriers) 710. The frame 700 includes a rectangular outer frame 701 and a lattice-shaped inner frame 702 provided within the outer frame 701. A plurality of rectangular openings 703 defined by an outer frame 701 and an inner frame 702 are formed in the frame 700 . A plurality of through holes 704 are formed in the frame 700 at the intersections of the outer frame 701 and the inner frame 702 and at each intersection of the inner frame 702. As shown in FIG. 7, a fastener 705 is inserted into the through hole 704. The insert 710 in this embodiment corresponds to an example of a "carrier" in an aspect of the present invention.

Each insert 710 is provided corresponding to one opening 703. In other words, the plurality of inserts 710 are arranged in the frame 700 of the test tray TST to form a matrix of multiple rows and multiple columns.

FIG. 7 is an exploded perspective view showing the insert 710 in this embodiment. As shown in FIG. 7, the insert 710 includes a body 720, a plurality of cores 730 (four in this example), a plurality of latch members 740 (740a, 740b) (four pairs in this example), and a pressing mechanism 750. It is equipped with. The body 720 in this embodiment corresponds to an example of a "carrier main body" in an aspect of the present invention, and the core 730 in this embodiment corresponds to an example of a "device holding part" in an aspect of the present invention.

The body 720 is a member for holding the insert 710 in a finely movable manner with respect to the frame 700. Among the plurality of bodies 720, the body 720 corresponding to the opening 703 located at the outermost periphery of the frame 700 has a part of the outer peripheral part 720a of the body 720 overlapping with the outer frame 701, and the other part of the outer peripheral part 720a overlaps with the inner frame. It is arranged so as to overlap with 702. The other bodies 720 are arranged so that the outer peripheral portion 720a overlaps the inner frame 702. By holding a part of the outer peripheral part 720a of the body 720 between the outer frame 701 or the inner frame 702 and the fastener 705, the body 720 is held in a state where it can be slightly moved in the XY plane direction with respect to the frame 700. be done.

The body 720 is a member to which the core 730 is attached and holds the core 730. The body 720 in this embodiment is a rectangular frame-shaped resin molded body, and has a shape corresponding to the opening 703 of the frame 700. This body 720 includes a main body 721, a plurality of cover parts 724, a plurality of openings 725, a plurality of hook receiving parts 726, a plurality of bearing parts 727, and a plurality of pressing member receiving parts 728. ing. Note that the opening 725 in this embodiment corresponds to an example of a "through hole" in the aspect of the present invention.

The main body 721 in this embodiment has an outer peripheral portion 722 and an inner frame 723. The outer peripheral portion 722 has a rectangular frame shape. A cross-shaped inner frame 723 is provided inside this outer peripheral portion 722 .

FIG. 8 is an enlarged perspective view showing a state in which the latch member 740 is attached to the body 720 of the insert 710 in this embodiment. As shown in FIG. 8, the cover portion 724 is provided inside the main body 721, and is a flat portion that protrudes from the main body 721 toward the inside of the opening 725 (FIGS. 11A and 11B). 11(B)). The cover portion 724 in this embodiment stands approximately perpendicularly to the main body 721 at the opening 725, and is formed integrally with the main body 721.

The same number of cover parts 724 as the number of latch members 740 are provided. In this embodiment, a pair of cover parts 724 facing each other are arranged at positions corresponding to a pair of latch members 740 facing each other. The pair of cover portions 724 partially cover the latch members 740a, 740b when the latch portions 745 of the latch members 740a, 740b are in the open position (described later). Specifically, the cover part 724 of this embodiment covers the arm part 744 and the latch part 745 of the latch member 740.

Further, in this embodiment, the cover portion 724 is located at the upper end of the opening 725. Therefore, the first main surface (upper surface) 721a of the main body 721 is directly connected to the second main surface (upper surface) 724a of the cover part 724, and the first and second main surfaces 721a, 724a exist on the same plane. Thereby, it is possible to increase the contact area between the match plate 61 of the pressing device 60 (see FIG. 12), which will be described later, and the upper surface (first and second main surfaces 721a, 724a) of the insert 710.

The opening 725 is a rectangular through hole provided inside the pair of cover parts 724, the outer peripheral part 722 of the main body 721, and the inner frame 723 of the main body 721. As shown in FIG. 7, the body 720 has the same number of openings 725 as the number of cores 730. The plurality of openings 725 form a matrix of multiple rows and multiple columns (two rows and two columns in this example) in the body 720. Note that in this embodiment, four openings 725 are formed in the body 720, but the number of openings 725 is not particularly limited to this.

The opening 725 is formed to penetrate the body 720 in the Z direction in the figure. The DUT 90 can be inserted into the opening 725. The opening 725 communicates with the opening 734 of the core 730 when the core 730 is attached to the body 720.

The plurality of hook receiving parts 726 are parts for engaging with the hooks 732 of the core 730. A plurality of hook receiving portions 726 are formed inside each opening 725, and each core 730 is suspended from the body 720 by the hook 732 engaging with the hook receiving portion 726. Retained.

The plurality of bearing parts 727 are parts that rotatably hold a rotating shaft 742 (described later) of the latch member 740. In this embodiment, the bearing part 727 formed in the outer peripheral part 722 of the body 720 is a round hole, and the bearing part 727 formed in the inner frame 723 is a slit. Note that the shape of the bearing portion 727 is not limited to this, and may be any shape as long as the rotating shaft 742 is rotatable.

The plurality of pressing member receiving portions 728 are portions through which the pressing pins 752 of the pressing mechanism 750 are inserted. Although details will be described later, the pressing member receiving portion 728 is a slit that allows the pressing pin 752 to move in the Z direction within the pressing member receiving portion 728. Note that the shape of the pressing member receiving portion 728 is not limited to this, and may be any shape as long as the pressing pin 752 is movable in the Z direction.

FIG. 9 is an exploded perspective view showing an example of the core 730 of the insert 710 in this embodiment, and FIG. 10 is a bottom view showing an example of the core 730 of the insert 710 in this embodiment. As shown in FIG. 9, the core 730 is a rectangular frame-shaped resin molded body, and includes a core body 731, a plurality of (four in this example) hooks 732, and a film 733. An opening 734 is formed in the core body 731 . The core 730 is removable from the body 720 and can be replaced depending on the type of DUT 90. The shape of the core body 731 and the size of the opening 734 can be appropriately designed depending on the shape of the DUT 90.

The opening 734 penetrates the core body 731 in the Z direction in the figure. The opening 734 communicates with the opening 725 of the body 720 when the core 730 is attached to the body 720 via the hook 732 . This allows the DUT 90 inserted into the insert 710 from above the body 720 through the opening 725 to be inserted into the core body 731 through the opening 734 and held by the core 730.

A film 733 is disposed at the bottom of the core body 731. The film 733 is a rectangular resin thin film. As shown in FIG. 10, it is attached to the frame-shaped bottom of the core body 731 by a plurality of (twelve in this example) caulking members 735. The film 733 is attached to cover one opening 734 of the core body 731, and by placing the DUT 90 on the film 733, the core body 731 can hold the DUT 90. .

A plurality of small holes 733a are formed in the film 733 so as to correspond to the terminals 91 (see FIG. 13) provided on the bottom surface of the DUT 90. The terminals 91 of the DUT 90 placed on the film 733 protrude below the core 730 through these small holes 733a, and can come into contact with the socket 50 on the test head 5 when testing the DUT 90.

A large hole 733b is formed in the center of the film 733. By passing light emitted from an optical sensor (not shown) attached to a predetermined position of the test chamber 120 through the large hole 733b, it is possible to detect whether or not the DUT 90 is held in the core 730.

Note that in this embodiment, a mode in which the DUT 90 is held by the film 733 has been described, but the present invention is not limited to this. For example, instead of the film 733 , a plurality of holding pieces may be provided at the bottom of the core body 731 that protrudes toward the center of the opening 734 . The DUT 90 may be held by the core 730 by being supported from below by these holding pieces.

As shown in FIGS. 7 and 8, the plurality of latch members 740 are arranged inside the opening 725 of the body 720 and are rotatably supported by the body 720. In this embodiment, a pair of latch members 740a, 740b are provided for one opening 725, and four pairs of latch members 740a, 740b are provided for one body 720. The latch member 740 is accessible to the DUT 90 held by the core 730, and prevents the DUT 90 from jumping out from the core 730 when the latch member 740 is close to the DUT 90. Note that in this embodiment, two latch members 740 are provided for one opening 725, but one latch member 740 may be provided for one opening 725.

Since the latch member 740a and the latch member 740b basically have the same configuration, the configuration of the latch member 740a will be described as a representative. As shown in FIG. 7, the latch member 740a includes a pair of rotating parts 741, an arm part 744, and a latch part 745.

The rotating portion 741 is provided on the inner wall of the opening 725 so as to be rotatable about a rotating shaft 742 . The rotating part 741 in this embodiment has a flat plate shape and is arranged substantially parallel to the inner wall of the opening 725. This rotating part 741 has a rotating shaft 742 and a pressed hole 743.

The rotating shaft 742 is a columnar member that stands substantially perpendicular to the main surface of the rotating portion 741 . This rotating shaft 742 is rotatably held by a bearing portion 727 of the body 720.

The pressed hole 743 is a through hole that passes through the rotating portion 741 . A pressing pin 752 (see FIGS. 7 and 13) of a pressing mechanism 750 (described later) is inserted into the pressed hole 743, and the inner wall of the pressed hole 743 is pressed by the pressing pin 752. When the inner wall of the pressed hole 743 is pressed downward, the rotating part 741 rotates downward about the rotating shaft 742, and when the inner wall of the pressed hole 743 is pressed upward, the rotating part 741 rotates downward about the rotating shaft 742. It rotates upward around a rotation axis 742.

The arm portion 744 is a columnar member that stands up on the main surface of the rotating portion 741 and is arranged substantially parallel to the inner wall of the opening 725. This arm portion 744 is connected to the rotating portion 741 at a position separated from the rotating shaft 742. Therefore, the arm portion 744 can rotate (revolution) around the rotating shaft 742 in conjunction with the rotation (rotation) of the rotating portion 741. The arm part 744 in this embodiment is interposed between the pair of rotating parts 741 and connects the pair of rotating parts 741. Furthermore, the arm portion 744 is formed integrally with the rotating portion 741, although this is not particularly limited.

A latch portion 745 is connected to approximately the center of the arm portion 744 . The latch portion 745 is a columnar member extending downward, and is a portion that prevents the DUT 90 from jumping out from the core 730.

FIG. 11(A) is a cross-sectional view taken along the line XIA-XIA in FIG. 8, and is also a cross-sectional view showing a state in which the latch portion 745 in this embodiment is located at the open position. On the other hand, FIG. 11(B) is a cross-sectional view showing a state in which the latch portion 745 is located in the closed position. FIG. 12(A) is a plan view showing a state in which the latch portion 745 in this embodiment is located at the open position. On the other hand, FIG. 12(B) is a plan view showing a state in which the latch portion 745 is located in the closed position.

The latch section 745 rotates in conjunction with the rotation of the rotating section 741 via the arm section 744. The latch portion 745 in this embodiment has two positions: an open position where it retreats from the main surface of the DUT 90 as shown in FIG. 11(A), and a closed position where it approaches the main surface of the DUT 90 as shown in FIG. 11(B). Rotate between.

As shown in FIG. 11A, the open position in this embodiment is the position where the latch portion 745 is farthest from the DUT 90 held by the core 730. When the pair of latch parts 745 are located in this open position, the pair of latch parts 745 are farthest from each other. For example, when the DUT 90 is placed in the core 730 by the movable head 320 (see FIG. 2) described above, the DUT 90 is inserted into the opening 734 via the opening 725. At this time, the latch portion 745 is retracted to the open position so that the DUT 90 does not come into contact with the latch member 740. Similarly, when taking out the DUT 90 from the insert 710, the latch portion 745 is placed in the open position.

In this embodiment, as described above, the cover section 724 covers the arm section 744 of the latch member 740 and the latch section 745 when the latch section 745 is in the open state. Specifically, as shown in FIG. 12(A), the cover member 724 overlaps the arm portion 744 of the latch member 740 in plan view, and the cover member 724 overlaps the latch portion 745 of the latch member 740. ing. In other words, the arm portion 744 and the latch portion 745 of the latch member 740 are located below the cover portion 724. Note that in this embodiment, the entire arm portion 744 and the entire latch portion 745 are covered by the cover portion 724, but the present invention is not limited thereto. For example, the cover portion 724 may cover only a portion of the arm portion 744 or may cover a portion of the latch portion 725.

On the other hand, as shown in FIG. 11(B), the closed position in this embodiment is the position where the latch portion 745 is closest to the DUT 90 held by the core 730. When the pair of latch parts 745 are located in this closed position, the pair of latch parts 745 are closest to each other. For example, the latch portion 745 is located in the closed position except when the DUT 90 is inserted into or removed from the insert 710. The latch portion 745 is also in the closed position when the DUT 90 held by the insert 710 is tested in the test chamber 120 (see FIG. 2).

In this closed state, in contrast to the open state, the cover portion 724 does not cover the arm portion 744 and the latch portion 745 of the latch member 740. Specifically, as shown in FIG. 12(B), the cover member 724 does not overlap the arm portion 744 and the latch portion 745 of the latch member 740 in plan view. In other words, the arm portion 744 and the latch portion 745 of the latch member 740 are not located below the cover member 724.

FIG. 13 is a cross-sectional view showing a method of testing a DUT held in an insert in this embodiment. As shown in FIG. 13, when testing the DUT 90, a pressing device 60 that presses the DUT 90 is placed at a position corresponding to the opening 703 of the frame 700 of the test tray TST (see FIG. 6).

The pressing device 60 includes a match plate 61 and a pusher 62. The match plate 61 is a plate-shaped member, and in this embodiment is configured to come into contact with the upper surface of the insert 710 when the pusher 62 presses the DUT 90.

The pusher 62 is held by the match plate 61 and presses the DUT 90 held by the insert 710 toward the socket 50. As a result, the terminals 91 of the DUT 90 come into contact with the contacts 51 of the socket 50, and the DUT 90 and the test head 5 are electrically connected. In this way, during the test, the pusher 62 presses the DUT 90, so the distance between the pair of latch parts 745 in the closed position is larger than the width of the pusher 62.

As shown in FIG. 11(A), FIG. 11(B), and FIG. 13, when the latch portion 745 in this embodiment is projected in the extending direction of the arm portion 744 (X direction in the figure), the latch portion The angle θ between the rotary member 745 and the rotating portion 741 is 90° or more (θ≧90°). In this way, by setting the angle θ to 90° or more, the insert 710 can accommodate a large-sized DUT while maintaining a clearance between the latch portion 745 and the pusher 62.

Further, as shown in FIG. 13, the match plate 61 contacts the top surface of the insert 710, but the body 720 has a cover portion 724, and this cover portion 724 increases the contact area with the match plate 61. Therefore, the pressure that the body 720 receives from the match plate 61 can be reduced. Thereby, damage to the insert 710 and shortening of the life of the insert 710 can be suppressed.

As shown in FIG. 7, the pressing mechanism 750 presses the latch member 740 via the pressed hole 743. This pressing mechanism 750 includes a movable member 751, a pressing pin 752, and a spring 753. The pressing pin 752 in this embodiment corresponds to an example of a "pressing member" in an aspect of the present invention.

FIG. 14 is a sectional view taken along the line XIV-XIV in FIG. 7, and is a sectional view for explaining the operation of the pressing mechanism 750. As shown in FIGS. 7 and 14, the movable member 751 is a substantially U-shaped member interposed between the inner frame 723 of the body 720 and the latch member 740. This movable member 751 accommodates a spring 753 inside.

This movable member 751 has a pair of pin insertion holes 751a. As shown in FIG. 14, each pin insertion hole 751a is interposed between a pressing member receiving portion 728 formed in the inner frame 723 and a pressed hole 743 formed in the latch member 740.

The pressing pin 752 is inserted into the pressing member receiving portion 728, the pair of pin insertion holes 751a, and the pair of pressed holes 743. The pressing pin 752 presses the inner wall of the pressed hole 743 to rotate the rotating portion 741 of the latch member 740, thereby opening and closing the latch member 740. Further, this pressing pin 752 supports the movable member 751 in the pin insertion hole 751a, and is supported by the inner frame 723 in the pressing member receiving portion 728.

The spring 753 is not particularly limited as long as it is an elastic member, and is, for example, a helical spring. The upper end of this spring 753 is fixed to the inner frame 723. Further, the lower end of the spring 753 is pressed upward by the movable member 751, so that the spring 753 urges the movable member 751 downward. Therefore, since the pressing pin 752 is urged downward via the movable member 751, the latch member 740 is pressed downward via the inner wall of the pressed hole 743. In this state, the latch member 740 rotates downward and the latch portion 745 is located in the closed position.

On the other hand, in order to move the latch portion 745 to the open position, the movable member 751 may be pushed upward. For example, when placing the DUT 90 as described above in the insert 710 or removing the DUT 90 from the insert 710, by pushing the movable member 751 upward, the pressing pin 752 moves the inner wall of the pressed hole 743 upward. Press. In this manner, by opening the latch portion 745 by rotating the latch member 740 upward, the latch portion 745 can be prevented from coming into contact with the movable head 320.

In this embodiment as described above, since the latch part 745 is arranged so that the latch member 740 is covered by the cover part 724 when the latch part 745 is located in the open position, it is possible to accommodate large-sized DUTs. It is. Further, since the body 720 has the cover portion 724, the contact area between the insert 710 and the match plate 61 can be increased.

Note that the embodiments described above are described to facilitate understanding of the aspects of the present invention, and are not described to limit the aspects of the present invention. Therefore, each element disclosed in the above embodiments is intended to include all design changes and equivalents that fall within the technical scope of the present invention.

1000...Electronic component testing device 1...Handler 5...Test head 6...Tester 7...Cable 50...Socket 51...Contactor 100...Test part 120...Test chamber 60...Pushing device 61...Match plate 62...Pusher 200...Storage part 300 ...Loader section 400...Unloader section TST...Test tray 700...Frame 701...Outer frame 702...Inner frame 703...Opening 710...Insert 720...Body 721...Main body 721a...First main surface 722...Outer periphery 723...Inner frame 724... Cover part 724a... Second main surface 725... Opening 726... Hook receiving part 727... Bearing part 728... Pressing member receiving part 730... Core 731... Core body 732... Hook 733... Film 734... Opening 735... Caulking member 740 ...Latch member 741...Rotating part 742...Rotating shaft 743...Pressed hole 744...Arm part 745...Latch part 750...Press mechanism 751...Movable member 751a...Pin insertion hole 752...Press pin 753...Spring 90...DUT
91...Terminal

Claims (10)

A carrier that is attached to a frame of a test tray transported within an electronic component handling device and holds a DUT,
a carrier body having a through hole into which the DUT is inserted;
a latch member disposed inside the through hole, rotatably supported by the carrier body, and accessible to the DUT;
The latch member is
a rotating part rotatably supported on an inner wall of the through hole around a rotating shaft;
an arm part connected to the rotating part at a position apart from the rotating shaft;
a latch part that rotates in conjunction with the rotating part via the arm part to move between a closed position in which it approaches the main surface of the DUT and an open position in which it retreats from the main surface of the DUT. and
The carrier main body has a cover portion that protrudes toward the inside of the through hole,
The cover part is a carrier that covers the latch member when the latch part is located in the open position. The carrier according to claim 1,
The latch member has a pair of rotating parts facing each other,
The arm part is interposed between the pair of rotating parts and connects the pair of rotating parts,
The cover portion covers the arm portion when the latch portion is in the open position. The carrier according to claim 1,
In the carrier, when the latch portion is projected in the extending direction of the arm portion, the angle between the latch portion and the rotating portion is 90° or more. The carrier according to claim 1,
The carrier includes a pair of latch members provided inside the through hole so as to face each other,
The carrier body has a pair of cover parts arranged at positions corresponding to the pair of latch members. The carrier according to claim 4,
The cover portion covers the pair of arm portions when the latch portion is in the open position. The carrier according to claim 1,
The cover part is a carrier that covers the latch part when the latch part is located in the open position. The carrier according to claim 1,
The carrier body has a main body to which the cover part is connected,
The main body includes a first main surface connected to the cover part,
The cover portion includes a second main surface connected to the first main surface,
A carrier in which the first and second main surfaces are on the same plane. The carrier according to claim 1,
The carrier further includes a device holding part that is detachably attached to the carrier body and holds the DUT inserted into the through hole. The carrier according to claim 1,
The carrier further includes a pressing mechanism that rotates the latch member about the rotation axis by pressing the latch member. A carrier according to any one of claims 1 to 9,
a test tray comprising: the frame holding the carrier;

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