JP2023156230A5 - - Google Patents

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Publication number
JP2023156230A5
JP2023156230A5 JP2023021801A JP2023021801A JP2023156230A5 JP 2023156230 A5 JP2023156230 A5 JP 2023156230A5 JP 2023021801 A JP2023021801 A JP 2023021801A JP 2023021801 A JP2023021801 A JP 2023021801A JP 2023156230 A5 JP2023156230 A5 JP 2023156230A5
Authority
JP
Japan
Prior art keywords
electrode
insulating film
interlayer insulating
type
slab
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023021801A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023156230A (ja
JP7848714B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to US18/192,791 priority Critical patent/US12436414B2/en
Publication of JP2023156230A publication Critical patent/JP2023156230A/ja
Publication of JP2023156230A5 publication Critical patent/JP2023156230A5/ja
Application granted granted Critical
Publication of JP7848714B2 publication Critical patent/JP7848714B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2023021801A 2022-04-12 2023-02-15 光位相変調器 Active JP7848714B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US18/192,791 US12436414B2 (en) 2022-04-12 2023-03-30 Optical phase modulator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022065866 2022-04-12
JP2022065866 2022-04-12

Publications (3)

Publication Number Publication Date
JP2023156230A JP2023156230A (ja) 2023-10-24
JP2023156230A5 true JP2023156230A5 (https=) 2026-03-10
JP7848714B2 JP7848714B2 (ja) 2026-04-21

Family

ID=88421351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023021801A Active JP7848714B2 (ja) 2022-04-12 2023-02-15 光位相変調器

Country Status (1)

Country Link
JP (1) JP7848714B2 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5530764B2 (ja) * 2009-09-02 2014-06-25 株式会社フジクラ 光学素子
US10101630B2 (en) * 2016-04-28 2018-10-16 Analog Photonic Llc Optical waveguide device
JP2019113660A (ja) * 2017-12-22 2019-07-11 ルネサスエレクトロニクス株式会社 半導体装置
CN111712755B (zh) * 2018-01-26 2024-03-01 希尔纳公司 具有优化的掺杂分布和不同过渡区域厚度的硅基调制器
CN211454149U (zh) * 2019-12-30 2020-09-08 杭州芯耘光电科技有限公司 一种掺杂结构及光调制器

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