JP2023127745A - 感光性樹脂組成物 - Google Patents

感光性樹脂組成物 Download PDF

Info

Publication number
JP2023127745A
JP2023127745A JP2022031619A JP2022031619A JP2023127745A JP 2023127745 A JP2023127745 A JP 2023127745A JP 2022031619 A JP2022031619 A JP 2022031619A JP 2022031619 A JP2022031619 A JP 2022031619A JP 2023127745 A JP2023127745 A JP 2023127745A
Authority
JP
Japan
Prior art keywords
group
photosensitive resin
resin composition
carbon atoms
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022031619A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023127745A5 (enrdf_load_stackoverflow
Inventor
秀則 石井
Hidenori Ishii
貴文 遠藤
Takafumi Endo
崇洋 坂口
Takahiro Sakaguchi
浩司 荻野
Hiroshi Ogino
有輝 星野
Yuki Hoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Chemical Corp
Original Assignee
Nissan Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Corp filed Critical Nissan Chemical Corp
Priority to JP2022031619A priority Critical patent/JP2023127745A/ja
Publication of JP2023127745A publication Critical patent/JP2023127745A/ja
Publication of JP2023127745A5 publication Critical patent/JP2023127745A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2022031619A 2022-03-02 2022-03-02 感光性樹脂組成物 Pending JP2023127745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022031619A JP2023127745A (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022031619A JP2023127745A (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Publications (2)

Publication Number Publication Date
JP2023127745A true JP2023127745A (ja) 2023-09-14
JP2023127745A5 JP2023127745A5 (enrdf_load_stackoverflow) 2025-01-27

Family

ID=87973153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022031619A Pending JP2023127745A (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JP2023127745A (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
KR102090451B1 (ko) 감광성 수지 조성물, 폴리이미드의 제조 방법 및 반도체 장치
KR101719045B1 (ko) 네거티브형 감광성 수지 조성물, 경화 릴리프 패턴의 제조 방법, 및 반도체 장치
WO2023106104A1 (ja) 感光性樹脂組成物
JP5415861B2 (ja) 感光性樹脂組成物、パターン形成方法、及び半導体装置
WO2023106108A1 (ja) 感光性樹脂組成物
WO2022202098A1 (ja) 感光性樹脂組成物
JP2016167036A (ja) 感光性樹脂組成物、硬化レリーフパターンの製造方法及び半導体装置
WO2023106101A1 (ja) 樹脂組成物
WO2020080207A1 (ja) 感光性絶縁膜組成物
JP7388486B2 (ja) ポリイミド前駆体の製造方法、感光性樹脂組成物の製造方法、パターン硬化物の製造方法、層間絶縁膜、カバーコート層又は表面保護膜の製造方法、及び電子部品の製造方法
US20250251663A1 (en) Photosensitive resin composition, production method for polyimide cured film using same, and polyimide cured film
JP7332076B1 (ja) 絶縁膜形成用感光性樹脂組成物
JP2016079340A (ja) 樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置
KR102781673B1 (ko) 폴리이미드 전구체, 수지 조성물, 감광성 수지 조성물, 패턴 경화막의 제조 방법, 경화막, 층간 절연막, 커버 코트층, 표면 보호막 및 전자 부품
JP2024163067A (ja) ネガ型感光性樹脂組成物及び硬化レリーフパターンの製造方法
WO2024090486A1 (ja) 感光性樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置
JP2023156304A (ja) 感光性絶縁膜組成物
JP2023127745A (ja) 感光性樹脂組成物
TWI827467B (zh) 絕緣膜形成用感光性樹脂組成物
JP2019152791A (ja) 感光性樹脂組成物、パターン硬化膜の製造方法、硬化膜、層間絶縁膜、カバーコート層、表面保護膜及び電子部品
JP2022050106A (ja) ネガ型感光性樹脂組成物、硬化膜および化合物
US12386257B2 (en) Photosensitive resin composition, method of manufacturing pattern cured film, cured film, interlayer insulating film, cover coat layer, surface protective film, and electronic component
TW202518172A (zh) 感光性樹脂組成物、圖案硬化物、圖案硬化物的製造方法及電子零件
WO2024219463A1 (ja) ネガ型感光性樹脂組成物、並びにこれを用いた硬化レリーフパターンの製造方法及び硬化膜

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250115

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250115