JP2023127745A - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物 Download PDFInfo
- Publication number
- JP2023127745A JP2023127745A JP2022031619A JP2022031619A JP2023127745A JP 2023127745 A JP2023127745 A JP 2023127745A JP 2022031619 A JP2022031619 A JP 2022031619A JP 2022031619 A JP2022031619 A JP 2022031619A JP 2023127745 A JP2023127745 A JP 2023127745A
- Authority
- JP
- Japan
- Prior art keywords
- group
- photosensitive resin
- resin composition
- carbon atoms
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022031619A JP2023127745A (ja) | 2022-03-02 | 2022-03-02 | 感光性樹脂組成物 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022031619A JP2023127745A (ja) | 2022-03-02 | 2022-03-02 | 感光性樹脂組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023127745A true JP2023127745A (ja) | 2023-09-14 |
JP2023127745A5 JP2023127745A5 (enrdf_load_stackoverflow) | 2025-01-27 |
Family
ID=87973153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022031619A Pending JP2023127745A (ja) | 2022-03-02 | 2022-03-02 | 感光性樹脂組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2023127745A (enrdf_load_stackoverflow) |
-
2022
- 2022-03-02 JP JP2022031619A patent/JP2023127745A/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102090451B1 (ko) | 감광성 수지 조성물, 폴리이미드의 제조 방법 및 반도체 장치 | |
KR101719045B1 (ko) | 네거티브형 감광성 수지 조성물, 경화 릴리프 패턴의 제조 방법, 및 반도체 장치 | |
WO2023106104A1 (ja) | 感光性樹脂組成物 | |
JP5415861B2 (ja) | 感光性樹脂組成物、パターン形成方法、及び半導体装置 | |
WO2023106108A1 (ja) | 感光性樹脂組成物 | |
WO2022202098A1 (ja) | 感光性樹脂組成物 | |
JP2016167036A (ja) | 感光性樹脂組成物、硬化レリーフパターンの製造方法及び半導体装置 | |
WO2023106101A1 (ja) | 樹脂組成物 | |
WO2020080207A1 (ja) | 感光性絶縁膜組成物 | |
JP7388486B2 (ja) | ポリイミド前駆体の製造方法、感光性樹脂組成物の製造方法、パターン硬化物の製造方法、層間絶縁膜、カバーコート層又は表面保護膜の製造方法、及び電子部品の製造方法 | |
US20250251663A1 (en) | Photosensitive resin composition, production method for polyimide cured film using same, and polyimide cured film | |
JP7332076B1 (ja) | 絶縁膜形成用感光性樹脂組成物 | |
JP2016079340A (ja) | 樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置 | |
KR102781673B1 (ko) | 폴리이미드 전구체, 수지 조성물, 감광성 수지 조성물, 패턴 경화막의 제조 방법, 경화막, 층간 절연막, 커버 코트층, 표면 보호막 및 전자 부품 | |
JP2024163067A (ja) | ネガ型感光性樹脂組成物及び硬化レリーフパターンの製造方法 | |
WO2024090486A1 (ja) | 感光性樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置 | |
JP2023156304A (ja) | 感光性絶縁膜組成物 | |
JP2023127745A (ja) | 感光性樹脂組成物 | |
TWI827467B (zh) | 絕緣膜形成用感光性樹脂組成物 | |
JP2019152791A (ja) | 感光性樹脂組成物、パターン硬化膜の製造方法、硬化膜、層間絶縁膜、カバーコート層、表面保護膜及び電子部品 | |
JP2022050106A (ja) | ネガ型感光性樹脂組成物、硬化膜および化合物 | |
US12386257B2 (en) | Photosensitive resin composition, method of manufacturing pattern cured film, cured film, interlayer insulating film, cover coat layer, surface protective film, and electronic component | |
TW202518172A (zh) | 感光性樹脂組成物、圖案硬化物、圖案硬化物的製造方法及電子零件 | |
WO2024219463A1 (ja) | ネガ型感光性樹脂組成物、並びにこれを用いた硬化レリーフパターンの製造方法及び硬化膜 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20250115 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250115 |