JP2023084564A - 蒸着源及び蒸着装置 - Google Patents
蒸着源及び蒸着装置 Download PDFInfo
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- JP2023084564A JP2023084564A JP2021198817A JP2021198817A JP2023084564A JP 2023084564 A JP2023084564 A JP 2023084564A JP 2021198817 A JP2021198817 A JP 2021198817A JP 2021198817 A JP2021198817 A JP 2021198817A JP 2023084564 A JP2023084564 A JP 2023084564A
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- vapor deposition
- crucible
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 123
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- 230000006698 induction Effects 0.000 claims abstract description 14
- 238000004804 winding Methods 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 abstract description 53
- 230000008021 deposition Effects 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005401 electroluminescence Methods 0.000 description 4
- 230000005291 magnetic effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
図1の蒸着源10は、坩堝11と、坩堝11の周囲を覆うように配置されたコイル12と、コイル12に接続された電力供給装置19とを備える。蒸着源10は、誘導加熱方式の蒸着源である。
図2の蒸着装置20は、蒸着源10、基板保持部21及び真空チャンバ22を備える。蒸着源10のうちの少なくとも坩堝11及びコイル12、並びに基板保持部21は、真空チャンバ22内に配置される。電力供給装置19は、真空チャンバ22の外に配置されていてよい。
本発明は上述した実施の形態に限定されるものではなく、本発明の要旨を変更しない範囲でその構成を変更することもできる。例えば、坩堝の形状は特に限定されず、円筒形以外の形状であってもよい。また、坩堝は、開口部側部分にくびれ部が無い形状であってもよい。
開口部側部分にくびれ部を有する、容量2cm3の略円筒形状のチタン製の坩堝を準備した。この坩堝の開口部側部分の周囲を覆う電線の間隔が、上記坩堝の他の部分の周囲を覆う電線の間隔の1/2となるようなコイルを作製した。上記坩堝とコイルとを用いて、実施例1の蒸着源を組み立てた。
容量が5cm3であること以外は実施例1で用いた坩堝と同様の坩堝を準備した。この坩堝を用いたこと以外は実施例1と同様にして、実施例2の蒸着源を組み立てた。
電線の間隔が均等であるコイルを用いたこと以外は実施例1と同様にして、比較例1の蒸着源を組み立てた。
電線の間隔が均等であるコイルを用いたこと以外は実施例2と同様にして、比較例2の蒸着源を組み立てた。
実施例1、2及び比較例1、2のそれぞれの蒸着源について、坩堝内に蒸着材を収容し、誘導加熱を行うことで蒸着材を気化させた。蒸着材にはAlq3(トリス(8-キノリノラト)アルミニウム)を用い、誘導加熱は周波数350kHzの交流電流をコイルに流すことにより行った。比較例1、2の各蒸着源においては、開口部の周辺に蒸着材が徐々に析出し、最終的に閉塞が生じたが、実施例1、2の各蒸着源においては、開口部の周辺への蒸着材の析出は生じなかった。
11 坩堝
12 コイル
13 開口部
14 くびれ部
15 開口部側部分
16 他の部分
17 坩堝の開口部側部分の周囲を覆う電線
18 坩堝の他の部分の周囲を覆う電線
19 電力供給装置
20 蒸着装置
21 基板保持部
22 真空チャンバ
A 中心軸
B 中心軸Aに垂直な仮想面
X 蒸着材
Y 基板
Claims (3)
- 開口部を有する坩堝と、
電線が螺旋状に巻かれてなる、上記坩堝の周囲を覆うように配置されたコイルと
を備える誘導加熱方式の蒸着源であって、
上記コイルにおいて、上記坩堝の開口部側部分の周囲を覆う上記電線の間隔が、上記坩堝の他の部分の周囲を覆う上記電線の間隔よりも狭い、蒸着源。 - 上記坩堝の開口部側部分がくびれ部を有する請求項1に記載の蒸着源。
- 請求項1又は請求項2に記載の蒸着源を備える蒸着装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021198817A JP2023084564A (ja) | 2021-12-07 | 2021-12-07 | 蒸着源及び蒸着装置 |
CN202211278909.4A CN116240500A (zh) | 2021-12-07 | 2022-10-19 | 蒸镀源和蒸镀装置 |
KR1020220162198A KR20230085858A (ko) | 2021-12-07 | 2022-11-29 | 증착원 및 증착 장치 |
TW111145928A TWI837977B (zh) | 2021-12-07 | 2022-11-30 | 蒸鍍源和蒸鍍裝置 |
Applications Claiming Priority (1)
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JP2021198817A JP2023084564A (ja) | 2021-12-07 | 2021-12-07 | 蒸着源及び蒸着装置 |
Publications (1)
Publication Number | Publication Date |
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JP2023084564A true JP2023084564A (ja) | 2023-06-19 |
Family
ID=86626531
Family Applications (1)
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JP2021198817A Pending JP2023084564A (ja) | 2021-12-07 | 2021-12-07 | 蒸着源及び蒸着装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2023084564A (ja) |
KR (1) | KR20230085858A (ja) |
CN (1) | CN116240500A (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012041604A (ja) * | 2010-08-19 | 2012-03-01 | Mitsubishi Shindoh Co Ltd | 真空蒸着装置 |
JP2014029027A (ja) * | 2008-08-12 | 2014-02-13 | Momentive Performance Materials Inc | エバポレータ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011052301A (ja) | 2009-09-04 | 2011-03-17 | Hitachi Zosen Corp | 真空蒸着用蒸着材料の蒸発、昇華方法および真空蒸着用るつぼ装置 |
JP2020176298A (ja) | 2019-04-17 | 2020-10-29 | 公益財団法人福岡県産業・科学技術振興財団 | 蒸着装置 |
-
2021
- 2021-12-07 JP JP2021198817A patent/JP2023084564A/ja active Pending
-
2022
- 2022-10-19 CN CN202211278909.4A patent/CN116240500A/zh active Pending
- 2022-11-29 KR KR1020220162198A patent/KR20230085858A/ko unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014029027A (ja) * | 2008-08-12 | 2014-02-13 | Momentive Performance Materials Inc | エバポレータ |
JP2012041604A (ja) * | 2010-08-19 | 2012-03-01 | Mitsubishi Shindoh Co Ltd | 真空蒸着装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20230085858A (ko) | 2023-06-14 |
CN116240500A (zh) | 2023-06-09 |
TW202323559A (zh) | 2023-06-16 |
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