JP2023077326A - Vacuum processing apparatus - Google Patents

Abstract

To provide a vacuum processing apparatus in which a transfer tray can be inserted into a transfer section or the transfer tray can be pulled out of the transfer section even when guiding movement in a non-contact pulled state with upper and lower parts of the transfer tray.SOLUTION: Each of a first chamber Pc and a second chamber Lc, which are connected with each other, comprises transfer means Tm for transferring a transfer tray Tr in an X-axis direction, and a freely tiltable tilt section 2 is provided in the first chamber, such that a posture of the transfer tray can be changed between a horizontal posture and a vertical posture. The transfer means comprises: a first guide section 4 for guiding movement in the X-axis direction in a state where an upper part of the transfer tray is pulled upward in a Z-axis direction with no contact; a second guide section 6 for guiding movement in the X-axis direction in a state where a lower part of the transfer tray is pulled upward in the Z-axis direction with no contact; and a transfer section 5 for transferring the transfer tray while supporting the transfer tray in contact therewith. Drive sections 72a and 72b are provided for moving a portion of the second guide section existing in the first chamber at least in a Y-axis direction.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present invention relates to a vacuum processing apparatus that performs a predetermined vacuum process on a processing surface of a substrate to be processed while transporting a transport tray on one side of which a substrate to be processed is arranged, and more particularly to a posture of the transport tray. The present invention relates to a device comprising a changeable first chamber and a second chamber connected thereto.

A vacuum processing apparatus of the above kind is known, for example, from US Pat. Hereinafter, the moving direction of the transport tray is defined as the X-axis direction, the gravitational acceleration direction orthogonal to the X-axis direction is defined as the Z-axis direction, the X-axis direction and the direction orthogonal to the Z-axis direction are defined as the Y-axis direction, and the substrate to be processed (hereinafter referred to as , "substrates") are oriented upward in the Z-axis direction as the horizontal orientation, and the orientation in which the processing surface faces one side in the Y-axis direction is the upright orientation. In the technique described in Patent Document 1, for example, a pre-processed substrate in an atmospheric atmosphere is transported in a horizontal posture and placed on a transport tray, and the standing posture (the posture in which the transport tray is tilted at a predetermined angle with respect to the Z-axis) is used. a first chamber and a second chamber for transferring the transfer tray in the upright position to each vacuum (processing) chamber in a vacuum atmosphere after the transfer tray has been changed to a different position. The first chamber is, for example, a so-called position chamber in which the substrate is attached to and detached from the carrier tray. and a movable portion capable of moving the tilting portion left and right in the Y-axis direction.

When the substrate is placed on the horizontal carrier tray in the first chamber, the tilting unit rotates while lifting the carrier tray to bring the carrier tray into an upright posture. After moving in one direction in the Y-axis direction to the position, the transfer tray is transferred to the transfer section so as to be inserted. When the transport tray Tr containing the processed substrates Sw is received from the transport unit, the tilting unit holds the transport tray from the other surface side and lifts the transport tray in the upright posture so as to pull it upward in the Z-axis direction. While lifting the carrier tray, the carrier tray is rotated to change to a horizontal posture and moved to a predetermined position in the other Y-axis direction, so that the processed substrate can be recovered from the carrier tray.

The second chamber connected in the X-axis direction via a gate valve is a so-called load-lock chamber, and a vacuum pump and an air vent are installed so that the inside thereof can be switched between an atmospheric atmosphere and a vacuum atmosphere. A valve or the like is provided to enable, for example, transfer of the transfer tray to each vacuum chamber in a vacuum atmosphere. The first chamber and the second chamber are provided with transport means for transporting the transport tray in the upright posture along the X-axis direction. The conveying means includes a guide portion (hereinafter referred to as a “first guide portion”) that guides movement in the X-axis direction while the upper portion of the conveying tray is pulled upward in the Z-axis direction in a non-contact manner, and supports the conveying tray in contact. and a conveying unit that conveys the sheet by pressing (see, for example, Patent Literature 2). As the first guide part, one magnet (hereinafter referred to as "first magnet") provided on the Z-axis direction upper surface of the transport tray is spaced upward in the Z-axis direction from the first magnet, and the first magnet A generally used magnet is provided with the other magnet (hereinafter referred to as "second magnet") arranged along the X-axis direction in the upper part of the first chamber and the second chamber so as to attract the magnet.

The conveying unit generally includes a conveying roller provided with a concave groove curved with a predetermined curvature and engaged with a cylindrical rail member provided on the lower surface of the conveying tray in the Z-axis direction so as to extend in the X-axis direction. It is used. Then, the transport tray is transported back and forth in the X-axis direction between the first chamber and the second chamber while being guided in the X-axis direction by the first guide portion by the rotation of each transport roller. Usually, in order to increase the so-called throughput, two lanes (a forward transport path and a return transport path) each provided with a first guide section and a transport section are provided in the first chamber and the second chamber in the Y-axis direction. Spaced apart to allow simultaneous transport of the transport trays between the first and second chambers.

In the transport section of the transport means, a part of the weight of the transport tray (including the weight of the substrate when the substrate is placed) is usually placed on the first guide portion for the purpose of suppressing abrasion powder (dust generation). to reduce the surface pressure and load applied to the transport rollers that contact and support the remaining weight of the transport tray. At the same time, it is configured to limit the degree of freedom in the Y-axis direction together with the transport rollers of the transport unit. That is, when the transport tray is transported by the transport means, the first guide part rotates (yaw) about the Z-axis direction up and down, rotates (rolls) about the X-axis direction front and back, and rotates the transport tray with respect to the transport tray. Regarding the movement in the axial direction, the movement in the upper part of the carrier tray is restricted to a certain range (the degree of freedom of movement is limited). Rotation (yaw) around an axis, rotation (roll) around the front and back in the X-axis direction, and movement in the Y-axis direction are restricted to a certain range. Regarding the degree of freedom of movement in the Z-axis direction and rotation (pitting) around the Y-axis direction, the movement is restricted by the transport rollers, and the guide portion applies surface pressure to the transport rollers. In addition, it is configured to exhibit only the effect of reducing the load.

With the configuration of the transport section described above, it is possible to add a certain limit to the degree of freedom of rotation of the transport tray about the X-axis or Z-axis direction and left-right movement in the Y-axis direction (that is, the lower part of the transport tray can be transported). However, the freedom of movement in the lower part of the transport tray is limited by using a mechanical engaging element such as a groove between the rail member and the transport roller. For this reason, the engaging member may slide left and right in the Y-axis direction as the conveying tray moves within the concave groove of the conveying roller. Along with this, there is a problem that abrasion powder is generated in the concave groove. In particular, this becomes more pronounced when the transport tray is always transported while being tilted at a predetermined angle with respect to the Z-axis direction.

In order to solve such a problem, the portion of the transport section that contacts and supports the transport tray is configured with rolling elements such as spheres to limit only the degree of freedom in the Z-axis direction. It is proposed to provide another guide portion (hereinafter referred to as a “second guide portion”) that guides the movement in the X-axis direction while being pulled upward in the Z-axis direction without contact at the lower portion in the axial direction. Similar to the first guide portion, the second guide portion includes one magnet (hereinafter referred to as "third magnet") provided at the lower portion of the conveying tray in the Z-axis direction, and a magnet located above the third magnet in the Z-axis direction. and the other magnet (hereinafter referred to as the "fourth magnet") provided in the first chamber and the second chamber so as to be attracted to the third magnet. In such a case, for example, the third magnet may be provided on the Z-axis direction upper surface of the supporting plate portion extending outward in the Y-axis direction from the lower end of the other surface of the transport tray. the magnets respectively provide support walls having horizontal wall portions spaced apart from and opposed to the support plate portion of the transport tray along the transport path into the first and second chambers and the return transport path in the Z-axis direction; It may be provided on the lower surface of the horizontal wall portion in the Z-axis direction.

According to the above, when the transport tray is transported while being guided by the first guide portion above the transport tray, the transport tray rotates (rolls) about the front and back in the X-axis direction and the left and right in the Y-axis direction. Even if there is a degree of freedom of movement, only rolling friction is generated in the portion of the conveying portion, so it is possible to suppress the generation of abrasion powder due to sliding friction as in the above conventional example as much as possible. In addition, part of the weight of the remaining portion of the transport tray contact-supported by the transport portion is also pulled by the second guide portion, so that the load of the transport tray applied to the portion of the transport portion contact-supporting the transport tray. In addition, the rotation (roll) of the transport tray around the X-axis direction and the degree of freedom of the Y-axis direction left and right movement in the lower part of the transport tray are restricted, so that the abrasion dust caused by friction is reduced. The occurrence can be further suppressed. In the present invention, the "lower part in the Z-axis direction" of the transport tray does not only refer to the lower end in the Z-axis direction, but also the part located below the center of gravity of the transport tray contacted and supported by the transport unit in the Z-axis direction. say. However, when the second guide portion is provided as described above, the operation of inserting the conveying tray into the conveying portion and the operation of pulling out the conveying tray from the conveying portion are hindered due to the interference between the third magnet and the fourth magnet which are close to each other. problem.

Table 2012-140801 JP 2005-289556 A

In view of the above points, in order to suppress the generation of abrasion powder due to sliding friction as much as possible, the present invention provides a state in which the conveying tray is pulled upward in the Z-axis direction without contact with the upper and lower parts in the Z-axis direction. It is an object of the present invention to provide a vacuum processing apparatus that enables insertion of a transfer tray into a transfer section and extraction of the transfer tray from a transfer section even when a configuration for guiding movement in the X-axis direction is adopted. is.

In order to solve the above problems, a vacuum processing apparatus according to the present invention performs a predetermined vacuum process on a processing surface of a substrate to be processed while transporting a transport tray on which the substrate to be processed is arranged. Two directions perpendicular to each other are the X-axis direction and the Y-axis direction, the direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction, and the processing surface of the substrate to be processed faces upward in the Z-axis direction. is a horizontal posture, and a posture in which the processing surface faces one side in the Y-axis direction is a standing posture, and a first chamber and a second chamber are connected to each other in the X-axis direction. A transport means is provided for transporting the transport tray along the X-axis direction, and a tilting portion is provided in the first chamber so that the transport tray can be tilted while holding the transport tray, and the transport tray is moved between the horizontal position and the vertical position. The posture can be changed, and the transport means is provided inside the first chamber and the second chamber, and guides the movement in the X-axis direction while pulling the upper part of the transport tray upward in the Z-axis direction without contact. a second guide portion that guides the movement in the X-axis direction while the lower portion of the carrier tray is pulled upward in the Z-axis direction without contact; and a driving section for moving the portion of the second guide section existing in the first chamber at least in the Y-axis direction.

In the present invention, first and second conveying paths are provided in which a first guide portion, a conveying portion, and a second guide portion are respectively provided in the first chamber and the second chamber with a space therebetween in the Y-axis direction. When provided, the second guide portion includes one magnet provided on the upper surface in the Z-axis direction of a support plate portion formed under the transport tray on the other surface side, and the one magnet and the Z-axis direction upper side. and the other magnet provided on the Z-axis direction lower surface of the support wall arranged along each transfer path in the first chamber and the second chamber so as to attract each other from the It is possible to employ a configuration in which the movable portions of the support wall including magnets are used and the respective movable portions are integrally moved in the Y-axis direction by the driving portion.

According to the above, when the conveying tray is inserted into the conveying section or the conveying tray is pulled out from the conveying section, the portion of the second guide section containing the other magnet (the support wall containing the other magnet) is controlled by the driving section. If the movable portion is retracted to one side in the Y-axis direction, there will be no problem that one magnet and the other magnet serving as the second guide portion interfere with each other to hinder insertion and withdrawal of the conveying tray. In this case, another drive unit is further provided to move the above-mentioned portion in the Z-axis direction. By moving and retracting, for example, there is no problem that the adjacent magnets come into contact with each other due to vibration when the transport tray is held by the tilting portion. Moreover, since only the above-mentioned portions are independently moved, there is no problem of lowering the throughput.

When the movable part of the second guide part is retracted in the Y-axis direction, if there is a risk that it may interfere with the transport part, the transport part moves between the first and second chambers in the first and second chambers. and having rolling elements that point-contact the lower surface of the transfer tray, and move the rolling elements in the first chamber together in at least one of the Y-axis direction and the Z-axis direction. Preferably, another drive is provided.

1 is a longitudinal sectional view of an in-line vacuum processing apparatus according to this embodiment; FIG. FIG. 2 is a cross-sectional view of the in-line vacuum processing apparatus shown in FIG. 1; FIG. 4 is a partially enlarged view showing a conveying state of the conveying tray; 4A to 4F are diagrams for explaining an operation of receiving a transport tray from a transport unit and transferring the transport tray to the transport unit; FIG.

Hereinafter, with reference to the drawings, the substrate to be processed is a large glass substrate (hereinafter referred to as "substrate Sw") used for manufacturing flat panel displays, and the transport tray Tr on which the substrate Sw is placed is placed in a vacuum chamber. The present invention is an example of an in-line type in which various vacuum processes such as film formation, heat treatment, and etching are performed on one surface (process surface) of the substrate Sw while being transported along transport paths Tp1 and Tp2 described later. An embodiment of the vacuum processing apparatus will be described. In the following, the moving direction of the transport tray Tr along the transport paths Tp1 and Tp2 is the X-axis direction, the gravitational acceleration direction perpendicular to the X-axis direction is the Z-axis direction, and the direction perpendicular to the X-axis direction and the Z-axis direction is Y Axial direction. Further, the posture of the transport tray (and the substrate Sw) in which the processing surface of the substrate Sw placed on the transport tray Tr faces upward in the Z-axis direction is the horizontal posture, and the transport tray Tr (in which the processing surface of the substrate Sw faces one side in the Y-axis direction). and the substrate Sw) is assumed to be an upright posture (including a posture in which the transport tray Tr is inclined at a predetermined angle with respect to the Z axis).

1 to 3, the vacuum processing apparatus VM arranges a substrate Sw before processing in a horizontal posture on one surface of a transport tray Tr by a transport robot (not shown), or places the substrate Sw in a horizontal posture on one side of the transport tray Tr. A position chamber (first chamber) Pc for taking out the processed substrate Sw from. The transport tray Tr is composed of a plate-like body 11 having an outline slightly larger than that of the substrate Sw. A pressing part (not shown) such as a clamp for locally pressing the edge of the substrate Sw against 11 is provided so that the substrate Sw in the upright posture can be held on the transport tray Tr during vacuum processing. . Depending on the vacuum processing on the substrate Sw, a mask plate may be attached together with the substrate Sw. As such a transport tray Tr, a known one can be used, so further explanation is omitted.

The position chamber Pc, which is maintained in the atmosphere, is provided with a tilting portion 2 that is capable of tilting while holding the transport tray Tr from the other side. can be changed. The tilting portion 2 is provided with a holding plate 21. A holding mechanism such as a vacuum chuck is provided at a predetermined position of the holding plate 21, although not shown and described, so that the holding plate 21 can be held even when the transport tray Tr is in the upright posture. The substrate Sw is prevented from being detached from. The holding plate 21 is provided on two frames 22 which are vertically spaced apart in the X-axis direction and vertically synchronously expandable in the Z-axis direction by a mechanism such as a single-axis robot (not shown). When the rotating shaft 23 is connected and driven to rotate in one direction by the motor Mt, the holding plate 21 rotates around the rotating shaft 23 to tilt the transport tray Tr. The lower end of each frame 22 is connected to a moving mechanism 24 of a single-axis robot provided in the position chamber Pc so as to extend in the Y-axis direction, and can reciprocate left and right in the Y-axis direction.

When the substrate Sw is placed on the transport tray Tr in the horizontal posture in the position chamber Pc, the tilting unit 2 rotates while lifting the transport tray Tr to bring the transport tray Tr into the upright posture, and the moving mechanism 24 moves the transport unit (described later). After moving in one direction in the Y-axis direction to a position above in the Z-axis direction, the transport tray Tr is transferred to the transport section so as to be inserted. On the other hand, when receiving a transport tray Tr containing a processed substrate Sw from a transport unit, which will be described later, the tilting unit 2 holds the transport tray Tr from the other surface side, and then is pulled out upward in the Z-axis direction. After the transport tray Tr is lifted, the transport tray Tr is rotated while being lowered, changed to a horizontal posture, moved to a predetermined position in the other Y-axis direction, and the processed substrates Sw are removed from the transport tray Tr. recovery is possible.

A load lock chamber (second chamber) Lc is connected to the front of the position chamber Pc in the X-axis direction via a gate valve Gv1. An exhaust pipe from a vacuum pump and a vent gas line for introducing vent gas are connected to the load lock chamber Lc, although not shown and described, so that the load lock chamber Lc can be switched between a vacuum atmosphere and an atmospheric atmosphere as appropriate. can. In front of the load lock chamber Lc in the X-axis direction, the number of processing chambers Vc1 to Vcn corresponding to various types of vacuum processing to be performed on the processing surface of the substrate Sw are successively connected via gate valves Gv2 and Gvn. It is Each of the processing chambers Vc1 and Vcn is separated into two left and right chambers in the Y-axis direction by a partition wall 31 extending along the X-axis direction. Each necessary device 32 is provided. Then, while the transport tray Tr passes through the chambers 31a and 31b of the vacuum processing chambers Vc1 and Vcn in an upright posture in which the processing surface of the substrate Sw faces the left in the Y-axis direction (downward in FIG. 2), the substrate is Various vacuum treatments are applied to the treated surface of Sw. A turnback chamber Bc is connected to the processing chamber Vcn positioned on the most downstream side in the X-axis direction.

The turnback chamber Bc is provided with a moving stage 4 which is movable in the left and right directions in the Y-axis direction and has a transfer roller 41 on its upper surface. It can be returned to the chamber 31b on the right side of the chamber Pcn in the Y-axis direction. A transport means Tm is provided so that the transport tray Tr can be transported in an upright posture along two transport paths extending in the X-axis direction between the position chamber Pc and the turnback chamber Bc. In the following description, the transfer tray Tr is connected to the turnback chamber Bc through the position chamber Pc connected to the X-axis direction, the load-lock chamber Lc, and the chambers 31a on the left side of the processing chambers Vc1 and Vcn in the Y-axis direction. Forward transport (from left to right in FIGS. 1 and 2) follows transport path Tp1, turns back chamber Tc to chamber 31b on the right side in the Y-axis direction, load lock chamber Lc, and then to position chamber Pc. The conveying tray Tr is conveyed rearward in the X-axis direction (from the right side to the left side in FIG. 1) is referred to as a return conveying path Tp2.

The transport means Tm has a first guide portion 4 that guides the movement forward or backward in the X-axis direction in a state in which the transport tray Tr in the upright posture is pulled upward in the Z-axis direction in a non-contact manner. A transport unit 5 that transports the transport tray Tr forward or backward in the X-axis direction by contacting and supporting the remaining weight of the transport tray Tr from which part of the weight has been pulled, A second guide portion 6 is provided for guiding movement forward or backward in the X-axis direction while being pulled upward in the Z-axis direction by contact. The first guide portion 4 includes a first magnet 41 elongated in the X-axis direction attached to the upper surface of the plate-like body 11 of the transport tray Tr along the upper side in the Z-axis direction, and a forward transport path Tp1 and a return transport path Tp2. A position chamber Pc, a load lock chamber Lc, and second magnets 42 arranged in the upper part in the Z-axis direction in each of the processing chambers Vc1 and Vcn. The first magnet 41 and the second magnet 42 are magnetized so that the polarities of their facing surfaces are different, thereby allowing the transport tray Tr to move forward and backward in the X-axis direction while being pulled upward in the Z-axis direction without contact. Guide each movement. In addition, the first magnet 41 and the second magnet 42 can also be provided in a plurality of cases with a space in the Y-axis direction. Alternating is preferred.

The transport unit 5 is provided as a rolling element spaced apart in the X-axis direction in the lower part of the position chamber Pc, the load lock chamber Lc, and the processing chambers Vc1 and Vcn along the outgoing transport path Tp1 and the return transport path Tp2. A conveying roller 51 is provided. Each transport roller 51 has shafts 51a that are pivotally supported at predetermined positions in the position chamber Pc, the load lock chamber Lc, and the processing chambers Vc1 and Vcn. and a wheel portion 51b that contacts the lower surface in the Z-axis direction. In this case, at least two wheel portions 51b are attached to a single shaft 51a spaced apart in the Y-axis direction, and the tips of the wheel portions 51b are also elliptical, tapering radially outward. The wheel portion 51b is in point contact with the lower surface of the transport tray Tr in the Z-axis direction. In this embodiment, each of the transport rollers 51 constitutes the part of the transport section 5 that contacts and supports the transport tray Tr in a state where only the degree of freedom in the Z-axis direction is restricted. Although not shown and described in particular, the shaft 51a of each transport roller 51 is connected to a known power transmission mechanism such as a pulley, a gear, a drive belt, or a motor, and each transport is performed for each forward transport path Tp1 and return transport path Tp2. The rollers 51 are synchronously driven to rotate in the same direction.

The second guide part 6 includes a third magnet (one magnet) 61 provided at the bottom of the transport tray Tr in the Z-axis direction, and a position chamber Pc, a load lock chamber Lc, and a position chamber Pc along the forward transport path Tp1 and the return transport path Tp2. and a fourth magnet 62 positioned at the bottom of each processing chamber Vc1, Vcn. The plate-like body 11 of the transport tray Tr is supported by extending outward from its lower end on the other surface side (the left side in FIG. 3) opposite to the one surface on which the substrate Sw is arranged. A plate portion 13 is formed, and a third magnet 61 is provided on the upper surface of the support plate portion 13 in the Z-axis direction. On the other hand, along the forward transport path Tp1 and the return transport path Tp2, the Z-axis direction lower part of the position chamber Pc, the load lock chamber Lc, and each of the processing chambers Vc1 and Vcn is provided on the support plate portion 13 of the transport tray Tr in the Z-axis direction. Support walls 63 having horizontal wall portions 63a opposed to each other with a space therebetween are provided so as to extend along the X-axis direction, and a fourth magnet 62 is provided on the lower surface of the horizontal wall portion 63a. The third magnet 61 and the fourth magnet 62 are magnetized so that their opposing surfaces have different polarities, thereby pulling the Z-axis direction lower portion of the transport tray Tr upward in the Z-axis direction without contact. They guide axial forward and backward movement, respectively. Note that the third magnets 61 and the fourth magnets 62 can be arranged in a plurality of rows at intervals in the Y-axis direction, in the same manner as described above. In this case, the third magnets 61 and the fourth magnets 62 It is preferred to alternate the polarity of the opposing ones.

With the above configuration, when the transport tray Tr is transported back and forth in the X-axis direction, the point-contact transport rollers 51, which are rolling bodies, are used as the parts of the transport unit 5 and the bottom surface of the transport tray Tr. Since there is no sliding friction between the track surface on the transport tray Tr side and the rolling elements, it is possible to suppress the generation of abrasion powder caused by the sliding friction as in the conventional example. Moreover, in addition to part of the weight of the transport tray Tr being towed by the first guide part 4 , part of the remaining weight of the transport tray Tr that is contacted and supported by the transport rollers 51 is caused by the second guide part 6 . By also pulling the transport tray Tr, the load of the transport tray Tr applied to each transport roller 51 can be further reduced. By restricting the rotation (roll) of the transport tray Tr and the degree of freedom of movement in the Y-axis direction left and right, it is possible to further suppress the generation of abrasion powder due to friction. However, when the transport tray Tr is transferred to or received from the transport unit 5 in the position chamber Pc, the interference between the third magnet 61 and the fourth magnet 62, which are close to each other, causes the transport tray Tr to be inserted into the transport roller 51. It is necessary to configure such that the pullout operation of the transport tray Tr from the transport roller 51 is not hindered.

In this embodiment, the portions of both support walls 63 that are present in the position chamber Pc are configured as movable portions 63L and 63R that can move left and right in the Y-axis direction and up and down in the Z-axis direction, respectively. Each movable portion 63L, 63R is erected on a common first movable base 71 provided in the position chamber Pc. The first movable base 71 is connected to (first) drive units 72a and 72b capable of moving the base 71 horizontally in the Y-axis direction and vertically in the Z-axis direction with a predetermined stroke length. As the drive units 72a and 72b, well-known units such as air cylinders and direct-acting motors can be used. In addition, support rods 52a and 52b having bearings (not shown) are connected to the shafts 51a of the transport rollers 51 in the position chamber Pc. Each is attached to a common second movable base 73 provided inside. The second movable base 73 is connected to (second) drive units 74a and 74b capable of independently moving the base 73 horizontally in the Y-axis direction and vertically in the Z-axis direction with a predetermined stroke length. As the second drive portions 74a and 74b, known devices such as air cylinders and direct-acting motors can be used as described above. When the next transport tray Tr is transferred to the forward transport path Tp1, when the first movable base 71 is moved to the left in the Y-axis direction, the movable portion 63R on the return transport path Tp2 side and the forward transport path Tp1 are separated from each other. In order to avoid interference with the transport rollers 51 on the side, a (third) driving unit 75 is further provided to further move only the movable portion 63L on the forward transport path Tp1 side left and right in the Y-axis direction. You can configure it freely. An operation of receiving the transport tray Tr from the return transport path Tp2 and delivering the transport tray Tr to the forward transport path Tp1 in the position chamber Pc will be described below with reference to FIG.

When the transport tray Tr is transported to the receiving position of the return transport path Tp2 in the position chamber Pc (see FIG. 4A), the transport tray Tr is held from the other side by the tilting portion 2 (hereinafter referred to as The position of the transport tray Tr in the Z-axis direction is referred to as a "holding position"), the first driving portion 72a moves the first movable base 71 and, in turn, the support walls 63L and 63R upward in the Z-axis direction, One of the second drive portions 74a lowers the second movable base 73 and, in turn, the conveying rollers 51 in the Z-axis direction (see FIG. 4B). Next, the first movable base 71 is synchronously moved by the other first driving section 72b, and the second movable base 73 is synchronously moved to the left in the Y-axis direction by the other second driving section 74b (Fig. 4(c)). When the first movable base 71 is moved to the left in the Y-axis direction, if the movable portion 63R on the return transport path Tp2 does not interfere with the transport rollers 51 on the forward transport path Tp1, Movement of the second movable base 73 can be made unnecessary. Then, the transport tray Tr with the processed substrates Sw is lifted from the holding position so as to be pulled upward in the Z-axis direction and removed from the return transport path Tp2. After that, although not particularly illustrated and described, the holding plate 21 is rotated to return to the horizontal posture, and the substrate Sw after processing and the substrate Sw before processing are exchanged with respect to the transport tray Tr in the horizontal posture in the position chamber pc. be.

Next, the first and second movable bases 71 and 73 are moved to the right in the Y-axis direction to their original positions by the other first and second driving portions 72b and 74b, and the third driving portion 75 The movable portion 63L is moved to the left in the Y-axis direction, and in this state, the transport tray Tr in the upright posture is moved to the holding position by the transport unit 5 of the forward transport path Tp1 by the tilting unit 2 (FIG. 4D). reference). Then, the second movable base 73 is lifted to the original position in the Z-axis direction by one of the second drive portions 74a, and the transport rollers 51 contact and support the transport tray Tr (see FIG. 4E). Finally, the third driving section 75 moves the movable portion 63L to the original position to the right in the Y-axis direction, and the first driving section 72a moves the first movable base 71 to the original position in the Z-axis direction. After being lowered, the tilting portion 2 is removed (see FIG. 4(f)). As a result, the transport tray Tr can be simultaneously transported between the position chamber Pc and the load lock chamber Lc.

According to the above embodiment, when the transport tray Tr is inserted into the transport unit 5 or pulled out from the transport unit 5, the third magnet 61 and the fourth magnet 62 as the second guide unit 6 There is no problem that the operation of inserting or pulling out the transport tray Tr is hindered due to interference between the two. Moreover, since the movable portions 63L and 63R are moved upward in the Z-axis direction in advance, the third and fourth magnets 61 and 62 approach each other due to vibration when the transport tray Tr is held by the tilting portion 2. There is no problem that the contacts come into contact with each other. Moreover, since only the movable parts 63L and 63R and the transport roller 51 in the position chamber Pc are moved, there is no problem of lowering the throughput.

Although the embodiments of the present invention have been described above, various modifications are possible without departing from the scope of the technical idea of the present invention. In the above embodiment, the transport tray Tr is held from the other side by the tilting portion 2. However, even when the transport tray Tr is in the upright position, the substrate Sw is transported so as not to separate from the holding plate 21. Any shape can be used as long as it can hold the tray Tr. Further, in the above-described embodiment, the conveying unit 5 is provided with the conveying rollers 51 that are supported in point contact with the lower surface of the conveying tray Tr in the Z-axis direction, but only the freedom in the Z-axis direction is limited. As long as it can contact and support the transport tray Tr in a state where it is held in place, it is not limited to this.

Further, in the above embodiment, the first guide portion 4 and the second guide portion 6 are provided with a pair of magnets 41, 42, 61, 62 arranged so as to attract each other. 4, most of the weight of the transport tray Tr (including the weight of the substrate Sw) can be towed, and at least the degree of freedom in the X-axis direction, vertical movement in the Z-axis direction, and rotation (pitting) about the horizontal axis in the Y-axis direction. As long as the degree of freedom can be limited to some extent, it is not limited to this. Although not shown and described, for example, a rail member is provided in the upper part of the position chamber Pc, the load lock chamber Lc, and the processing chambers Vc1 and Vcn. The transport tray Tr may be pulled and guided by a plurality of wires hung at intervals in the X-axis direction. On the other hand, the second guide part 6 is also limited to this if the degree of freedom of the rotation (roll) of the transport tray Tr about the X-axis direction and the Y-axis direction left/right movement can be restricted to some extent. Instead, a configuration similar to that of the first guide section may be adopted.

Furthermore, in the above-described embodiment, the conveying roller 51 in which at least two wheel portions 51b are provided on a single shaft 51a has been described as an example of the rolling elements provided in the conveying portion 5, but the present invention is not limited to this. , there is no problem even if it is configured as one wheel portion. Further, if the freedom of the transport tray Tr in the Z-axis direction is restricted and the driving force in the X-axis direction is transmitted to the transport tray Tr by frictional force due to rolling contact, there is no problem. In other words, the normal force for enabling driving by rolling contact instead of sliding contact is secured as the remaining weight of the transport tray Tr after a part of its weight is pulled by the first guide portion 4, and the safety factor required for this is ensured. It is an ideal embodiment if the configuration is given. Furthermore, in the above embodiment, the tip of the wheel portion 51b is in point contact with the lower surface of the transport tray Tr in the Z-axis direction, and the point contact portion is a mechanism through which the rotational driving force is transmitted via the shaft 51a. However, if, for example, a constant velocity joint is used in the fitting portion between the wheel portion and the shaft body, the driving force can be reliably transmitted to the transport tray Tr by rolling contact.

In the above embodiment, the first chamber is the position chamber Pc, and the second chamber is the load lock chamber. However, the present invention is not limited to this. For example, a horizontally oriented substrate is transported to a load lock chamber, and when the inside of the load lock chamber is evacuated to a predetermined pressure, it is transported to a position chamber connected to the load lock chamber, and the horizontally oriented substrate is placed on a transport tray. After arranging it, it is changed to an upright posture, and in this state it is transported to, for example, a processing chamber. The invention can be applied.

VM: vacuum processing apparatus, Sw: substrate (substrate to be processed), Tr: transfer tray, 13: support plate portion, Pc: position chamber (first chamber), Lc: load lock chamber (second chamber), Vc1, Vcn Processing chamber (second chamber) Tm Conveying means 2 Tilting section 4 First guide section 5 Conveying section 51 Conveying roller (rolling element) 6 Second guide section Tp1 Going Transport path (first transport path), Tp2... Return transport path (second transport path), 61... Third magnet (one magnet), 62... Fourth magnet (other magnet), 63... Support wall, 63L, 63R... Movable portion of the support wall, 72a, 72b... Drive section, 74a, 74b... Second drive section (another drive section).

Claims (3)

A vacuum processing apparatus that performs a predetermined vacuum process on a processing surface of a substrate to be processed while transporting a transport tray having a substrate to be processed arranged on one surface,
Two directions perpendicular to each other in the horizontal plane are the X-axis direction and the Y-axis direction, the direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction, and the processing surface of the substrate to be processed faces upward in the Z-axis direction. The horizontal posture is the posture, and the standing posture is the posture in which the processing surface faces one side in the Y-axis direction,
A first chamber and a second chamber are provided which are connected to each other in the X-axis direction, and a transport means is provided for transporting a transport tray in an upright posture in the first chamber and the second chamber along the X-axis direction, In a chamber in which a tilting part capable of tilting while holding a carrier tray is provided so that the posture of the carrier tray can be changed between a horizontal posture and a vertical posture,
The conveying means is provided inside the first chamber and the second chamber, and includes a first guide portion that guides the movement in the X-axis direction while pulling the upper part of the conveying tray upward in the Z-axis direction without contact. a second guide portion that guides movement in the X-axis direction while pulling the lower portion of the carrier tray upward in the Z-axis direction without contact; A vacuum processing apparatus, comprising: a transfer section; and a drive section for moving a portion of the second guide section existing in the first chamber at least in the Y-axis direction. 2. The vacuum processing apparatus according to claim 1, wherein said first chamber and said second chamber are provided with a first guide portion, a transfer portion, and a second guide portion spaced apart in the Y-axis direction, respectively. In the one provided with the transport path and the second transport path,
The second guide portion is configured to attract one magnet provided on the upper surface in the Z-axis direction of a support plate portion formed under the conveying tray on the other side so as to attract the one magnet from above in the Z-axis direction. , and the other magnet provided on the Z-axis direction lower surface of the support wall arranged along the first transfer path and the second transfer path in the first chamber and the second chamber, and the second guide part is provided with A vacuum processing apparatus, wherein the movable portion of the support wall includes the other magnet, and the movable portions are integrally moved in the Y-axis direction by the driving portion. The transport unit has rolling elements that are arranged along the first and second transport paths in the first and second chambers and are in point contact with the lower surface of the transport tray. 3. The vacuum processing apparatus according to claim 2, further comprising another drive unit for moving the rolling elements in at least one of the Y-axis direction and the Z-axis direction together.

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