JP2023057854A - Film deposition apparatus - Google Patents

Abstract

To provide a technology for improving convenience when measuring a film thickness of a substrate on which a film is deposited.SOLUTION: A film deposition apparatus includes: a film deposition chamber in which a film deposition unit for depositing a film to a substrate is installed; transportation means for transporting a substrate between a film deposition position of the substrate and a receiving position of the substrate while holding the substrate on a lower side; and measurement means for measuring a thickness of a film formed on the substrate held to the transportation means.SELECTED DRAWING: Figure 26

Description

The present invention relates to a film forming apparatus for measuring the film thickness of an organic material deposited on a glass substrate.

2. Description of the Related Art As manufacturing equipment for organic EL displays and the like, there is known a film formation line equipped with a device that transports a substrate to a film formation chamber and forms a film on the substrate. As an example, Patent Literature 1 discloses a cluster-type film forming apparatus in which substrates are transferred from a common transfer chamber to a plurality of film forming chambers by an articulated robot.

Further, Document 2 discloses that a film thickness inspection chamber for measuring a film thickness formed on a substrate on which film formation processing has been performed in the film formation chamber is arranged on the film formation line.

JP 2019-192898 A JP 2005-322612 A

However, as the size of the substrate increases, a larger film thickness inspection chamber is required, which poses a problem of increasing the size of the entire film forming line.

In view of the above problems, an object of the present invention is to provide a technique for improving the convenience in measuring the film thickness of a substrate on which a film has been formed.

In order to solve the above problems, a film forming apparatus according to the present invention includes:
a film forming chamber provided with a film forming unit for forming a film on a substrate;
a transport means for transporting the substrate between a substrate deposition position and a substrate receiving position while holding the substrate downward;
measuring means for measuring the thickness of the film formed on the substrate held by the conveying means;
Prepare.

Accordingly, it is possible to provide a technique for improving convenience in measuring the film thickness of a substrate on which a film has been formed.

1 is a layout diagram of a film forming system according to an embodiment of the present invention; FIG. (A) and (B) are a plan view and a side view of the transport unit. FIG. 3 is a perspective view of a hand of the transport unit of FIGS. 2(A) and 2(B); (A) and (B) are explanatory diagrams of the bending of a substrate and the function of a support member. FIG. 4 is an explanatory diagram of the transfer unit in the delivery chamber; FIG. 6 is a cross-sectional view of the transport unit of FIG. 5; (A) and (B) are explanatory diagrams of a transfer operation of a substrate. (A) and (B) are explanatory diagrams of a transfer operation of a substrate. (A) and (B) are explanatory diagrams of a transfer operation of a substrate. (A) and (B) are explanatory diagrams of a transfer operation of a substrate. (A) to (F) are explanatory diagrams of movement of the vapor deposition source. (A) and (B) are explanatory diagrams of the operation of conveying the mask to the mask table. (A) and (B) are explanatory diagrams of the operation of conveying the mask to the mask table. (A) and (B) are explanatory diagrams of a substrate transport operation and an alignment operation. (A) and (B) are explanatory diagrams of a film forming operation on a substrate. (A) to (C) are explanatory diagrams showing an operation example of the entire film forming apparatus. (A) to (C) are explanatory diagrams showing an operation example of the entire film forming apparatus. (A) to (C) are explanatory diagrams showing an operation example of the entire film forming apparatus. (A) to (C) are explanatory diagrams showing an operation example of the entire film forming apparatus. (A) to (D) are explanatory diagrams showing an operation example of the entire film forming apparatus. (A) to (C) are explanatory diagrams of another vapor deposition source and its moving unit. (A) and (B) are explanatory views of an alignment unit. (A) to (C) are explanatory diagrams of another configuration example of a film forming apparatus. FIG. 4 is an explanatory diagram of another configuration example of the holding unit; 1A is an overall view of an organic EL display device, and FIG. 1B is a view showing a cross-sectional structure of one pixel; FIG. Explanatory drawing which shows the example of arrangement|positioning of a film-thickness-measurement apparatus. Sectional drawing of the film-thickness-measurement apparatus in each example of arrangement|positioning. (A) to (C) are explanatory diagrams showing the measurement principle of the film thickness measuring device. (A) to (C) are explanatory diagrams showing configuration examples of a film thickness measuring apparatus. Explanatory drawing which shows the example of a change of the reflectance of the board|substrate before and behind film-forming. Explanatory drawing which shows the structural example of the top plate of a film-forming apparatus. FIG. 4 is an explanatory diagram showing a substrate and a substrate carrier; Explanatory drawing which shows the structure of a fiber joint.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. In addition, the following embodiments do not limit the invention according to the scope of claims. Although multiple features are described in the embodiments, not all of these multiple features are essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant description is omitted.

<First embodiment>
<Overview of the system>
FIG. 1 is a layout diagram of a film forming system 100. As shown in FIG. In each drawing, arrow Z indicates the vertical direction (direction of gravity), and arrow X and arrow Y indicate horizontal directions perpendicular to each other. Arrow θ indicates the direction of rotation about the Z-axis.

The film forming system 100 has a configuration in which an intermediate transport device 101, a film forming device 1, and an intermediate transport device 102 are arranged in the X direction, and substrates W are transported and processed in this order. The intermediate transport device 101 is located upstream in the substrate W transport direction, and the intermediate transport device 102 is located downstream in the substrate W transport direction. In the illustrated example, the film forming system 100 includes one film forming apparatus 1, but the film forming apparatus 1 may be provided upstream of the intermediate transport apparatus 101 or downstream of the intermediate transport apparatus 102. can. The control device 103 includes a processor such as a CPU, a storage device such as a semiconductor memory and a hard disk, and an input/output interface, and controls the film forming system 100 .

The intermediate transfer devices 101 and 102 are equipped with transfer robots 110 . The transport robot 110 is a double-arm robot in which two sets of arms 110b and hands 110c are supported on a base portion 110a. The two sets of arms 110b and hands 110c turn on the base portion 110a in the .theta. direction, and are telescopic. Adjacent to the intermediate conveying devices 101 and 102, a stocker 104 in which masks M are stored is provided. The transport robot 110 transports not only the substrate W but also the mask M. As shown in FIG. The hand 110c has a fork shape, and the substrate M and the mask M are placed on the hand 110c and conveyed.

The film forming apparatus 1 is an apparatus that performs a film forming process on a substrate W loaded from an intermediate transport apparatus 101 and carries the wafer W out to an intermediate transport apparatus 102 . The film forming apparatus 1 includes a transfer chamber 2 for transferring substrates W, and a plurality of film forming chambers 3 arranged adjacent to the transfer chamber 2 . In this embodiment, two film forming chambers 3 are provided, one on each side of the transfer chamber 2 in the Y direction. The transfer chamber 2 and the film forming chamber 3 are surrounded by walls 20 and 30, respectively, and can be kept airtight.

A deposition material is deposited on the substrate W in the deposition chamber. A thin film of a vapor deposition material can be formed on the substrate W using a mask M in a predetermined pattern. The material of the substrate W can be appropriately selected from materials such as glass, resin, metal, etc. Typically, a material in which a resin layer such as polyimide is formed on glass is used. In this embodiment, the substrate W is rectangular. Vapor deposition substances include substances such as organic materials and inorganic materials (metals, metal oxides, etc.). The film forming apparatus 1 can be applied to, for example, display devices (such as flat panel displays), thin film solar cells, electronic devices such as organic photoelectric conversion elements (organic thin film imaging elements), and manufacturing apparatuses for manufacturing optical members. In particular, it is applicable to manufacturing equipment for manufacturing organic EL panels.

<Delivery room>
The transfer chamber 2 transfers the substrates W and the masks M between the intermediate transfer devices 101 and 102 and the film forming apparatus 1 and distributes the substrates W and the masks M to the film forming chambers 3 . Therefore, the transfer chamber 2 can also be called a sorting chamber.

<Multidirectional transport unit>
A transfer unit 4 for transferring the substrate W and the mask M is provided in the transfer chamber 2 . The transport unit 4 receives the substrate W or the mask M from the intermediate transport device 101 and transfers it to the holding units 6A-6D. Further, it unloads the substrate W or mask M received from the holding units 6A to 6D to the intermediate transfer device 102. FIG. 2A and 2B are a plan view and a side view of the transport unit 4. FIG.

The transport unit 4 of this embodiment is a horizontal articulated robot capable of moving the substrate W and the like in multiple directions on the XY plane. An arm portion 41 and a hand 44 supported by the arm portion 41 are provided. The base portion 40 has a drive shaft 40a, and rotates the arm portion 41 around the Z1 axis by rotating the drive shaft 40a in the θ direction, and moves the arm portion 41 up and down by moving the drive shaft 40a up and down. The arm portion 41 has arm members 42 and 43 . One end of the arm portion 42 is connected to the drive shaft 40 a and the other end is connected to one end of the arm member 43 . The arm member 43 is connected to the arm member 42 so as to be rotatable around the Z2 axis. The hand 44 is connected to the other end of the arm member 43 so as to be rotatable around the Z3 axis.

Reference is made to FIG. 3 in addition to FIGS. 2(A) and 2(B). FIG. 3 is a perspective view of the hand 44. FIG. The hand 44 includes a plate-like hand main body 45 and a plurality of support members 46 to 48 erected on the hand main body 45 and supporting the substrate W. As shown in FIG. The strut members 46 to 48 are roughly divided into a strut member 46 located in the central portion of the hand body 45 and strut members 47 and 48 located in the peripheral portion. The substrate W is placed on a plurality of support members 46-48. In a state in which the substrate W is supported by the hand 44, the support member 46 is positioned at the central portion of the substrate W, and the support members 47 and 48 are positioned at the periphery of the substrate W. As shown in FIG.

The strut member 46 includes a pin 46a and an elastic member 46b provided at its tip. The support member 47 includes a pin 47 a , a mounting portion 47 b provided at the tip of the pin 47 a , and an elastic member 47 c provided on the upper surface of the support portion 47 b and positioned at the tip of the support member 47 . The support member 48 includes a plurality of pins 48 a , mounting portions 48 b provided at the distal end portions of the plurality of pins 48 a , and a plurality of elastic members provided on the upper surface of the mounting portion 48 b and positioned at the distal end portions of the support member 48 . and a member 48c.

By supporting the substrate W with such support members 46 to 48, the substrate W can be supported in a small area, and the surface of the substrate W can be prevented from being rubbed or the like. The elastic members 46b, 47c, and 48c are portions that contact the substrate W, and are made of resin, for example. The contact of the elastic members 46b, 47c, and 48c with the substrate W prevents the surface of the substrate W from rubbing or the like more reliably.

As shown in FIG. 2B, the relationship between the height H1 of the support member 46 from the hand body 45 and the height H2 of the support members 47 and 48 is H1>H2. As a result, the central portion of the substrate W can be prevented from sagging. 4(A) and 4(B) are explanatory diagrams illustrating the state in which the holding unit 6A receives the substrate W from the hand 44. FIG.

As will be described later, in the case of this embodiment, the holding units 6A to 6D hold the substrate W by electrostatic force. When the holding units 6A to 6D receive the substrate W, if the flatness of the substrate W is low, the attracting force is reduced. In addition, the accuracy of film formation is lowered during film formation. As a comparative example, FIG. 4A assumes a case where the hand 44 does not have the support member 46 and the substrate W is supported by the support member 47 (and the support member 48). A large substrate W bends and hangs down at its central portion due to its own weight. If the holding unit 6A sucks the substrate W in this state, a gap may be formed between the central portion of the substrate W and the lower surface (holding surface) of the holding unit 6A, resulting in a reduction in the suction force.

On the other hand, in the present embodiment shown in FIG. 4B, the relationship between the height H1 of the support member 46 and the height H2 of the support members 47 and 48 satisfies H1>H2. The substrate W is supported by the support members 46, and the central portion of the substrate W rises slightly. Even if the substrate W is large, the central portion of the substrate W is prevented from bending and hanging down due to its own weight, and rather, the central portion of the substrate W comes into contact with the holding unit 6A earlier than the peripheral portion. As a result, the suction spreads from the central portion of the substrate W to the peripheral portion, and the entire substrate W is held by the holding unit 6A without gaps.

<Sliding transport unit>
As shown in FIG. 1, the film forming apparatus 1 includes two sets of transport units 5A and 5B that are arranged from the transfer chamber 2 to the two film forming chambers 3. As shown in FIG. The transport unit 5A includes holding units 6A and 6C and a moving unit 7A that independently translates them in the Y direction. The transport unit 5B has the same structure as the transport unit 5A, and includes holding units 6B and 6D, and a moving unit 7B that independently translates these in the Y direction.

FIG. 5 shows a portion of the transport units 5A and 5B arranged in the transfer chamber 2, and FIG. 6 shows a cross-sectional view of the transport unit 5A (moving unit 7A and holding unit 6A). The transport units 5A and 5B are units for independently reciprocating the holding units 6A to 6D in the horizontal posture in the Y direction at positions higher than the transport unit 4, and are arranged side by side in the X direction. Although FIG. 6 shows the structure of the transport unit 5A (the moving unit 7A and the holding unit 6A) as a representative, the holding units 6A to 6D have the same structure, and the moving units 7A and 7B also have the same structure. .

The moving units 7A and 7B of the present embodiment are mechanisms for moving the holding units 6A to 6D by magnetic force, and in particular, are mechanisms for floating and moving by magnetic force. Each of the moving units 7A and 7B includes a pair of guide members 70 that define the moving trajectories of the holding units 6A-6D in the Y direction. Each guide member 70 is a rail member having a C-shaped cross section and extending in the Y direction. The pair of guide members 70 are separated from each other in the X direction.

Each guide member 70 has a large number of pairs of magnetic elements 71 spaced apart in the Z direction. A large number of pairs of magnetic elements 71 are arranged at equal pitches in the Y direction. At least one of the pair of magnetic elements 71 is an electromagnet and the other is an electromagnet or a permanent magnet.

The holding units 6A to 6D are carriers for transporting the substrate W and the mask M. As shown in FIG. Each of the holding units 6A to 6D has a rectangular body member 60 in plan view. Each end of the body member 60 in the X direction is inserted into the corresponding guide member 70 . Permanent magnets 61 provided with yokes (not shown) are fixed to the upper and lower surfaces of each end of the body member 60 in the X direction. A plurality of upper and lower permanent magnets 61 are provided in the body member 60 in the Y direction. The permanent magnet 61 faces the magnetic element 71 of the guide member 70 . A repulsive force between the permanent magnet 61 and the magnetic element 71 can generate a levitation force in the holding units 6A to 6D. Of the magnetic elements (electromagnets) 71 provided in large numbers in the Y direction, by sequentially switching the magnetic elements 71 that generate magnetic force, the attractive force between the permanent magnets 61 and the magnetic elements 71 causes the holding units 6A to 6D to move in the Y direction. It can generate locomotion.

In this embodiment, the moving units 7A and 7B are magnetic levitation transport mechanisms, but other transport mechanisms capable of moving the holding units 6A to 6D, such as roller transport mechanisms, belt transport mechanisms, rack-pinion mechanisms, etc., may be used. may

A scale 72 extending in the Y direction is arranged on the guide member 70 , and a sensor 64 for reading the scale 72 is provided on the body member 60 . Based on the detection result of the sensor 64, the position of each of the holding units 6A to 6D in the Y direction can be identified.

The holding units 6A to 6D each include a holding portion 62 for holding the substrate W. As shown in FIG. In the case of this embodiment, the holding part 62 is an electrostatic chuck that attracts the substrate W by electrostatic force, and the holding part 62 includes a plurality of electrodes 62a arranged on the lower surfaces of the holding units 6A to 6D. Each of the holding units 6A-6D also includes a holding portion 63 for holding the mask M. As shown in FIG. The holding part 63 is, for example, a magnetic chuck that attracts the mask M by magnetic force, and is positioned outside the holding part 62 in the X direction. The holding part 63 may be a clamping mechanism that mechanically clamps the mask M. As shown in FIG.

<Receiving operation of board>
The substrates W and masks M transported from the transport unit 4 are received by the holding units 6A to 6D at predetermined positions in the transfer chamber 2 . FIG. 5 shows the holding units 6A-6D positioned at the respective receiving positions PA-PD. The receiving positions PA to PD are arranged in a matrix (2×2) on the XY plane, and are set inside the transfer chamber 2 outside the film formation chamber 3 . Since there are four different receiving positions PA to PD, these receiving positions PA to PD can also be used as buffers for holding substrates W in the event of a downstream system failure.

FIGS. 7A to 8B show an example of the receiving operation of the holding unit 6B for the substrate W from the transport unit 4 at the receiving position PB. FIG. 7A shows a state in which the transport unit 4 receives the substrate W from the intermediate transport device 101 . A substrate W is placed on the hand 44 . In other words, the substrate W is supported by the hand 44 from below. The holding unit 6B is moved to the receiving position PB by the moving unit 7B. FIG. 7B shows a state in which the hand 44 is moved below the holding unit 6B by the operation of the arm portion 41 of the transport unit 4. FIG. In the state of FIG. 7B, the hand 44 is turned 90 degrees in the .theta. direction with respect to the state of FIG. 7A. As a result, the substrate W changes its longitudinal direction from the X direction (FIG. 7A) to the Y direction (FIG. 7B).

At the stage of FIG. 7B, alignment between the holding unit 6B and the substrate W is performed. A camera 21 for alignment is provided in the transfer chamber 2 . The relative position between the holding unit 6B and the substrate W is specified from the image captured by the camera 21, and the position of the substrate W in the X direction, Y direction and θ direction is adjusted by the transport unit 4. FIG.

FIG. 8A shows a state in which the arm portion 41 of the transport unit 4 is lifted and the substrate W is brought into contact with the holding portion 62 of the holding unit 6B. The substrate W is held by the holding portion 62 by the electrostatic force of the holding portion 62 . As described above, in this embodiment, the substrate W is passed from the bottom to the top from the transport unit 4 to the holding unit 6B. FIG. 8B shows a state in which the arm portion 41 of the transport unit 4 is lowered and the holding unit 6B has completely received the substrate W. FIG.

The same applies to transfer of substrates W between the transport unit 4 and other holding units 6A, 6C and 6D. As an example, FIGS. 9A to 10B show an example of the receiving operation of the holding unit 6A for the substrate W from the transport unit 4 at the receiving position PA. 9A shows a state in which the transport unit 4 receives the substrate W from the intermediate transport device 101. FIG. The substrate W is supported by a hand 44 from below. The holding unit 6A is moved to the receiving position PA by the moving unit 7A. FIG. 9B shows a state in which the hand 44 is moved below the holding unit 6B by the operation of the arm portion 41 of the transport unit 4. FIG. In the state of FIG. 9(B), the hand 44 is turned 90 degrees in the .theta. direction with respect to the state of FIG. 9(A). As a result, the substrate W changes its longitudinal direction from the X direction (FIG. 9A) to the Y direction (FIG. 9B).

At the stage of FIG. 9B, the holding unit 6A and the substrate W are aligned. The relative position between the holding unit 6A and the substrate W is specified from the captured image of the camera 21 provided in the transfer chamber 2, and the position of the substrate W in the X direction, Y direction and θ direction is adjusted by the transport unit 4.

FIG. 10A shows a state in which the arm portion 41 of the transport unit 4 is lifted and the substrate W is brought into contact with the holding portion 62 of the holding unit 6A. The substrate W is held by the holding portion 62 by the electrostatic force of the holding portion 62 . FIG. 10B shows a state in which the arm portion 41 of the transport unit 4 is lowered and the holding unit 6A has completely received the substrate W. FIG.

Although the operation for receiving the substrate W has been described above, the operation for receiving the mask M is the same.

<Deposition chamber>
In the film forming chamber 3, a film is formed on the substrate W using a mask M. As shown in FIG. As shown in FIG. 1, two mask stands 31 are arranged in each of the two film formation chambers 3 . A total of four mask stages 31 define vapor deposition positions JA to JD for vapor deposition. The two film formation chambers 3 have the same structure. Each film forming chamber 3 is provided with a vapor deposition source 8 and a moving unit 9 for moving the vapor deposition source 8 . The structure and operation of the vapor deposition source 8 and the moving unit 9 will be described with reference to FIGS. 11(A) to 11(F).

The vapor deposition source 8 is a film forming unit that includes a crucible containing a raw material of a vapor deposition substance, a heater that heats the crucible, and the like, and heats the raw material and discharges the vapor of the vapor of the vapor deposition substance upward from the opening 8a. The moving unit 9 comprises an actuator 90 , a pair of movable rails 94 and a pair of fixed rails 95 . The actuator 90 includes a drive source 93 , an arm member 91 and an arm member 92 . One end of the arm member 91 is connected to a drive source 93 and rotated by the drive source 93 . The other end of the arm member 91 is rotatably connected to one end of the arm member 92 , and the other end of the arm member 92 is rotatably connected to the bottom of the vapor deposition source 8 .

A pair of movable rails 94 guide movement of the deposition source 8 in the Y direction. Each movable rail 94 extends in the Y direction, and a pair of movable rails 94 are separated from each other in the X direction. The pair of fixed rails 95 guides the movement of the pair of movable rails 94 in the X direction. Each fixed rail 95 is immovably fixed and extends in the Y direction. The pair of fixed rails 95 are separated from each other in the Y direction.

By driving the actuator 90, the vapor deposition source 8 slides in the Y direction under the vapor deposition position JA (under the mask table 31), slides from the vapor deposition position JA side to the vapor deposition position JB side, It slides in the Y direction under the position JB (under the mask table 31). Specifically, when the arm members 91 and 92 are rotated by driving the actuator 90 from the position shown in FIG. It passes under the deposition position JA in the Y direction. When the arm members 91 and 92 are rotated in the opposite direction by driving the actuator 90 from this state, the vapor deposition source 8 passes under the vapor deposition position JA in the Y direction as shown in FIG. position.

When the arm members 91 and 92 are further rotated by driving the actuator 90, the vapor deposition source 8 and the pair of movable rails 94 are guided by the pair of fixed rails 95 to move in the X direction toward the vapor deposition position JB. When the arm members 91 and 92 are further rotated by driving the actuator 90 from the position shown in FIG. 11(D), the vapor deposition source 8 is guided by the pair of movable rails 94 to move under the vapor deposition position JB as shown in FIG. 11(E). in the Y direction. When the arm members 91 and 92 are rotated in the opposite direction by driving the actuator 90 from this state, the vapor deposition source 8 passes under the vapor deposition position JB in the Y direction as shown in FIG. position.

Thus, in this embodiment, by moving one vapor deposition source 8, the vapor deposition source 8 can be shared by two vapor deposition positions, the vapor deposition position JA and the vapor deposition position JB.

Next, referring to FIGS. 12A to 15B for the mounting of the mask M on the mask table 31, the alignment operation between the mask M and the substrate W, and the subsequent film forming operation. to explain.

First, the operation of mounting the mask M on the mask table 31 will be described. 12A to 13B show the operation of mounting the mask M on the mask table 31 at the vapor deposition position JA. From the state of FIG. 12A, the holding unit 6A holding the mask M is moved onto the mask table 31 by the moving unit 7A. When the mask M reaches a predetermined position on the mask table 31 as shown in FIG. 13A, the magnetic force of the magnetic element 71 of the moving unit 7A is adjusted to move the holding unit 6A as shown in FIG. 13B. The floating amount is lowered, and the holding of the mask M by the holding unit 6A is released. Thereby, the mask M is mounted on the mask table 31 .

Next, an alignment operation and a film formation operation will be described. FIG. 14A shows a state in which the holding unit 6A holding the substrate W is moved to the vapor deposition position JA by the moving unit 7A. When the substrate W reaches above the mask M, the substrate W and the mask M are aligned on the XY plane. In the alignment, as shown in FIG. 14B, the camera 32 captures images of the alignment marks respectively attached to the substrate W and the mask M, and the amount of positional deviation between the substrate W and the mask M is calculated from the captured images. . Then, the position of the substrate W is adjusted so as to reduce the calculated positional deviation amount. In this embodiment, the position of the substrate W is adjusted by adjusting the magnetic force of the magnetic element 71 of the moving unit 7A. By adjusting the magnetic force of each magnetic element 71 spaced apart in the X direction and the Y direction, the position of the holding unit 6A can be displaced in the X direction, the Y direction and the θ direction. The position of the substrate W in the X direction, Y direction, and θ direction can be displaced. For example, when the magnetic force of the magnetic element 71 provided on one guide member 70 of the pair of guide members 70 is strengthened, the holding unit 6A and the substrate W are moved toward the one guide member 70 by magnetic attraction. (or to the other guide member 70 side by magnetic repulsion).

The imaging by the camera 32 and the alignment of the substrate W and the mask M by adjusting the magnetic force of the magnetic element 71 may be repeated until the amount of positional deviation between the two falls within the allowable range. When the alignment is completed, the magnetic force of the magnetic element 71 of the moving unit 7A is adjusted to lower the flying height of the holding unit 6A, and the substrate W is placed on the mask M as shown in FIG. 15(A). The holding of the substrate W by the holding unit 6A is not released. Next, a film forming operation is performed. As shown in FIG. 15B, the vapor deposition material is discharged from the vapor deposition source 8 onto the substrate W while the vapor deposition source 8 is being moved. A deposition material film is formed on the substrate W through the mask M. As shown in FIG. During film formation, the substrate W is kept held by the holding unit 6A.

<Example of operation of film forming apparatus>
An operation example of continuously forming films on a plurality of substrates W in the film forming apparatus 1 will be described with reference to FIGS. 16A to 20D. First, the mask M is transported to the mask table 31 of each vapor deposition position JA to JD. FIG. 16A shows a state in which the first mask M is conveyed from the intermediate conveying device 101. FIG. The transport unit 4 receives the mask M on the hand 44, and transfers the mask M to the holding unit 6A at the receiving position PA as shown in FIG. 16(B). The holding unit 6A holds the mask M from above.

As shown in FIG. 16(C), the second mask M is conveyed from the intermediate conveying device 101 . In parallel, the holding unit 6A is translated to the deposition position JA by the moving unit 7A. The transport unit 4 receives the second mask M on the hand 44, and transfers the mask M to the holding unit 6C at the receiving position PC as shown in FIG. 17(A). The holding unit 6C holds the mask M from above. In parallel, the first mask M is placed on the mask table 31 at the deposition position JA, and the holding unit 6A returns to the receiving position PA.

As shown in FIG. 17(B), the third mask M is conveyed from the intermediate conveying device 101 . In parallel, the holding unit 6C is translated to the deposition position JC by the moving unit 7A. The transport unit 4 receives the third mask M on the hand 44 and delivers the mask M to the holding unit 6B at the receiving position PB. By repeating the above procedure, the masks M are arranged at the vapor deposition positions JA to JD as shown in FIG. 17(C).

Next, a series of operations for forming a film on the substrate W will be described. FIG. 18A shows a state in which the first substrate W has been transported from the intermediate transport device 101. FIG. The transport unit 4 receives the substrate W on the hand 44, and transfers the substrate W to the holding unit 6A at the receiving position PA as shown in FIG. 18(B). The holding unit 6A holds the substrate W from above.

As shown in FIG. 18(C), the second substrate W is transferred from the intermediate transfer device 101 . In parallel, the holding unit 6A receiving the substrate W is translated to the deposition position JA by the moving unit 7A. Alignment of the substrate W and the mask M is performed at the vapor deposition position JA. The transport unit 4 receives the second substrate W on the hand 44, and transfers the substrate W to the holding unit 6C at the receiving position PC as shown in FIG. 19(A). The holding unit 6C holds the substrate W from above. In parallel, the deposition operation is performed on the first substrate W by the deposition source 8 at the deposition position JA.

As shown in FIG. 19(B), the third wafer W is transferred from the intermediate transfer device 101 . In parallel, the holding unit 6C that has received the second substrate W is translated to the deposition position JC by the moving unit 7A. Alignment between the substrate W and the mask M is performed at the vapor deposition position JC. The transport unit 4 receives the third substrate W on the hand 44, and transfers the substrate W to the holding unit 6B at the receiving position PB as shown in FIG. 19(C). The holding unit 6B holds the substrate W from above. In parallel, the vapor deposition source 8 that has finished film formation at the vapor deposition position JA is moved to the vapor deposition position JB side. Further, the deposition operation is performed on the second substrate W by the deposition source 8 at the deposition position JC.

As shown in FIG. 20(A), the fourth wafer W is transferred from the intermediate transfer device 101 . In parallel, the holding unit 6B that has received the third substrate W is translated to the vapor deposition position JB by the moving unit 7B. Alignment between the substrate W and the mask M is performed at the vapor deposition position JB. Further, the holding unit 6A holding the first substrate W on which film formation has been completed is moved to the receiving position PA by the moving unit 7A.

The transport unit 4 receives the fourth substrate W on the hand 44, and transfers the substrate W to the holding unit 6D at the receiving position PD as shown in FIG. 20(B). The holding unit 6D holds the substrate W from above. In parallel, the vapor deposition source 8 that has finished film formation at the vapor deposition position JC is moved to the vapor deposition position JD side, and the holding unit 6C that holds the second substrate W that has finished film formation is received by the moving unit 7A. Moved to position PC. Further, a film formation operation is performed on the third substrate W by the vapor deposition source 8 at the vapor deposition position JB.

When the holding unit 6A holding the first substrate W on which film formation has been completed returns to the moving unit 7A, as shown in FIG. is received from the holding unit 6A. In parallel, the holding unit 6D that has received the fourth substrate W is translated to the deposition position JD by the moving unit 7B. As shown in FIG. 20(D), the transport unit 4 transports the first substrate W on which film formation has been completed to the intermediate transport device 102 . By repeating the above procedure, film formation is sequentially performed on a large number of substrates W. FIG.

According to the film forming apparatus 1 described above, transportation of the substrate W and the mask M from the intermediate transportation device 101 to each of the vapor deposition positions JA to JD is performed by the transportation unit 4 and the transportation unit 5A or 5B. It is possible to transport the substrate W over a longer distance while shortening the transport distance of each transport unit, as compared with transport by a single transport mechanism. When transporting a large substrate W, it is possible to realize a long transport distance and prevent each transport unit from increasing in size due to high rigidity. Therefore, it is possible to provide the film forming apparatus 1 that can cope with an increase in the size of the substrate W.

Also, different mechanisms are adopted for the transport unit 4 and the transport units 5A and 5B. In other words, by constructing the transfer unit 4 with an articulated robot, the degree of freedom in the position of the transfer destination of the substrate W and the degree of freedom in the attitude (orientation) of the substrate W can be improved. In addition, the transfer units 5A and 5B are configured with a parallel movement mechanism for the substrate W so that a long transfer distance can be handled.

Since the transfer of the substrate W from the transport unit 4 to the transport units 5A and 5B is performed by the holding part 62, which is an electrostatic chuck, the substrate W is attached to the holding part 62 from the transport unit 4, and the substrate W is transferred. W can be delivered. In contrast to the method of replacing the substrate W, the placement of the substrate W becomes unnecessary, and the delivery time can be shortened. This can improve productivity.

When the substrate W and the mask M were transported from the transfer chamber 2 to the film forming chamber 3, their postures were changed by 90 degrees by the transport unit 4 so that the longitudinal direction of the substrate W and the mask M was oriented in the Y direction. This contributes to miniaturization of the width of the film forming apparatus 1 in the X direction. Of course, a configuration in which the attitudes of the substrate W and the mask M are not changed can also be adopted. In this case, it contributes to miniaturization of the width of the film forming apparatus 1 in the Y direction.

<Second embodiment>
In the first embodiment, the vapor deposition source 8 is configured to be movable in both the X direction and the Y direction, but may be configured to be movable only in the X direction. FIGS. 21(A) to 21(C) show an example thereof, illustrating configurations at vapor deposition positions JA and JB. A similar configuration can also be adopted at the vapor deposition positions JC and JD.

A vapor deposition source 8' replacing the vapor deposition source 8 has an elongated shape in the Y direction, and an opening 8a' for discharging the vapor deposition material has a length corresponding to the length of the vapor deposition positions JA and JB in the Y direction. ing. A moving unit 9 ′ that replaces the moving unit 9 has a pair of fixed rails 96 . Each fixed rail 96 extends in the X direction, and a pair of fixed rails 96 are separated from each other in the Y direction. The moving unit 9 ′ has an actuator (not shown) corresponding to the actuator 90 .

As shown in FIG. 21A, the vapor deposition source 8′ has a standby position between the vapor deposition position JA and the vapor deposition position JB. As shown in (B), the deposition position JA is traversed in the X direction. When film formation is performed on the substrate W at the vapor deposition position JB, the vapor deposition position JB is traversed in the X direction as shown in FIG. 21(C). According to this embodiment, the mechanism of the moving unit 9' can be a relatively simple mechanism.

<Third embodiment>
In the first embodiment, the adjustment of the magnetic force of the magnetic element 71 is used to align the substrate W and the mask M at the vapor deposition positions JA to JD, but a dedicated alignment device may be provided. 22(A) and 22(B) show an example thereof. The alignment device 10 is arranged at each of the vapor deposition positions JA to JD, and the illustrated example illustrates the alignment device 10 arranged at the vapor deposition position JA.

The alignment device 10 is a device that receives the substrate W from the holding unit 6A, aligns the mask M and the substrate W, and superimposes the substrate W on the mask M. As shown in FIG. The alignment device 10 has an arm member 11 having claws for holding the substrate W. As shown in FIG. The substrate W held by the holding unit 6A is released from the holding and placed on the arm member 11 . The arm member 11 can be displaced in the X direction, the Y direction and the θ direction by the drive unit 12, thereby adjusting the position of the substrate W placed on the arm member 11 in the X direction, the Y direction and the θ direction. . The drive unit 12 can be raised and lowered by the elevation unit 13 .

The alignment apparatus 10 also includes a plate unit 14 and an elevating unit 15 that elevates the plate unit 14 . The plate unit 14 is a plate for bringing the substrate W and the mask M into close contact with each other.

At the time of alignment, as shown in FIG. 22(A), images of alignment marks provided on the substrate W and the mask M are captured by the camera 32, and the amount of positional deviation between the substrate W and the mask M is calculated from the captured images. do. Then, the position of the substrate W is adjusted so as to reduce the calculated positional deviation amount. The position of the substrate W is adjusted by displacing the arm member 11 on which the substrate W is placed by the drive unit 12 while the substrate W and the mask M are separated vertically.

The imaging by the camera 32 and the alignment of the substrate W and the mask M by adjusting the magnetic force of the magnetic element 71 may be repeated until the amount of positional deviation between the two falls within the allowable range. When the alignment is completed, as shown in FIG. 22B, after the holding unit 6A is retracted from the vapor deposition position JA, the lifting unit 13 lowers the substrate W together with the drive unit 12 and the arm member 12 onto the mask M. are superimposed on each other, and the plate unit 14 is lowered onto the substrate W by the lifting unit 15 to bring the substrate W and the mask M into close contact with each other. A film is formed on the substrate W in this state.

When the film formation is completed, the plate unit 14 is lifted by the lifting unit 15 . After the holding unit 6A is moved again to the vapor deposition position JA, the substrate W is lifted together with the driving unit 12 and the arm member 12 by the lifting unit 13 to transfer the substrate W to the holding unit 6A.

<Fourth embodiment>
It is also possible to transport the substrate W and the mask M to the film forming chamber 3 only by the transport unit 4 without going through the transport units 5A and 5B. 23(A) to 23(D) show an example thereof. In the illustrated example, a corresponding holding unit 6A, 6C is arranged at each vapor deposition position JA, JC. The holding units 6A, 6C are arranged fixedly and their position is immovable. Each vapor deposition position JA, JC has a form in which vapor deposition sources 8, 8, mask stands 31, 31, and holding units 6A, 6C are arranged in this order from the bottom. The vapor deposition source 8 may be fixedly arranged, but in this embodiment, it is in a form that moves as in the other embodiments. The mask M is placed on the mask table 31 in advance.

As shown in FIG. 23(A), when the substrate W is transferred from the intermediate transfer device 101, the transfer unit 4 receives the substrate W on the hand 44, and the substrate W is transferred as shown in FIGS. 24(B) and 24(C). , the substrate W is delivered to the holding unit 6A at the vapor deposition position JA. The deposition position JA also serves as the receiving position PA. The holding unit 6A holds the substrate W from above. Since the transfer of the substrate W is performed by the holding part 62 which is an electrostatic chuck, the transfer of the substrate W can be performed by attaching the substrate W from the transfer unit 4 to the holding part 62 . In contrast to the method of replacing the substrate W, the placement of the substrate W becomes unnecessary, and the delivery time can be shortened. This can improve productivity. Alignment between the mask M and the substrate W can be performed by adjusting the position and posture of the substrate W using the transfer unit 4 .

After that, as shown in FIG. 23(D), the deposition source 8 is moved in the Y direction to form a film on the substrate W held by the holding unit 6A. The film formation operation at the vapor deposition position JC is the same, and the transfer of the substrate W and the film formation can be performed in parallel at the vapor deposition position JA and the vapor deposition position JC. After finishing the film formation, the transport unit 4 receives the substrate W from the holding unit 6A or 6C and carries it out to the intermediate transport device 102 .

<Fifth embodiment>
In the first embodiment, the holding part 62 that holds the substrate W is configured with an electrostatic chuck, but other adsorption methods may be used. FIG. 24 shows an example of this and shows the lower surface of the holding portion 62 . A plurality of suction pads 65 are provided on the lower surface of the holding portion 62 . The suction pad 65 is, for example, an adhesive member that holds the substrate W by adhesive force. Alternatively, the suction pad 65 is a vacuum pad.

<Sixth embodiment>
Next, an example of a method for manufacturing an electronic device will be described. The configuration and manufacturing method of an organic EL display device will be exemplified below as an example of an electronic device.

First, the organic EL display device to be manufactured will be described. FIG. 25A is an overall view of the organic EL display device 50, and FIG. 25B is a view showing the cross-sectional structure of one pixel.

As shown in FIG. 25A, in a display region 51 of an organic EL display device 50, a plurality of pixels 52 each having a plurality of light emitting elements are arranged in a matrix. Although details will be described later, each of the light emitting elements has a structure including an organic layer sandwiched between a pair of electrodes.

The term "pixel" as used herein refers to a minimum unit capable of displaying a desired color in the display area 51. FIG. In the case of a color organic EL display device, a pixel 52 is configured by combining a plurality of sub-pixels of a first light-emitting element 52R, a second light-emitting element 52G, and a third light-emitting element 52B that emit light different from each other. The pixel 52 is often composed of a combination of three types of sub-pixels, a red (R) light-emitting element, a green (G) light-emitting element, and a blue (B) light-emitting element, but is not limited to this. The pixel 52 may include at least one type of sub-pixel, preferably two or more types of sub-pixels, and more preferably three or more types of sub-pixels. Sub-pixels constituting the pixel 52 may be a combination of four types of sub-pixels, for example, a red (R) light-emitting element, a green (G) light-emitting element, a blue (B) light-emitting element, and a yellow (Y) light-emitting element.

FIG. 25(B) is a schematic partial cross-sectional view taken along line AB of FIG. 25(A). The pixel 52 includes, on a substrate 53, a first electrode (anode) 54, a hole transport layer 55, one of a red layer 56R, a green layer 56G, and a blue layer 56B, an electron transport layer 57, and a second electrode ( cathode) 58 and a plurality of sub-pixels composed of organic EL elements. Among these layers, the hole transport layer 55, the red layer 56R, the green layer 56G, the blue layer 56B, and the electron transport layer 57 correspond to organic layers. The red layer 56R, the green layer 56G, and the blue layer 56B are formed in patterns corresponding to light-emitting elements (also referred to as organic EL elements) that emit red, green, and blue, respectively.

Also, the first electrode 54 is formed separately for each light emitting element. The hole transport layer 55, the electron transport layer 57, and the second electrode 58 may be formed in common over the plurality of light emitting elements 52R, 52G, and 52B, or may be formed for each light emitting element. That is, as shown in FIG. 25B, the hole transport layer 55 is formed as a common layer over a plurality of sub-pixel regions, and the red layer 56R, green layer 56G, and blue layer 56B are separated for each sub-pixel region. The electron transport layer 57 and the second electrode 58 may be formed thereon as a common layer over a plurality of sub-pixel regions.

An insulating layer 59 is provided between the first electrodes 54 to prevent short-circuiting between the adjacent first electrodes 54 . Furthermore, since the organic EL layer is deteriorated by moisture and oxygen, a protective layer 60 is provided to protect the organic EL element from moisture and oxygen.

Although the hole-transporting layer 55 and the electron-transporting layer 57 are shown as one layer in FIG. 25B, they may be formed of a plurality of layers having a hole-blocking layer and an electron-blocking layer depending on the structure of the organic EL display element. may be In addition, a positive electrode having an energy band structure capable of smoothly injecting holes from the first electrode 54 to the hole transport layer 55 is provided between the first electrode 54 and the hole transport layer 55 . A hole injection layer may be formed. Similarly, an electron injection layer may be formed between the second electrode 58 and the electron transport layer 57 as well.

Each of the red layer 56R, the green layer 56G, and the blue layer 56B may be formed of a single light-emitting layer, or may be formed by laminating a plurality of layers. For example, the red layer 56R may be composed of two layers, the upper layer being a red light emitting layer, and the lower layer being a hole transport layer or an electron blocking layer. Alternatively, the lower layer may be formed of a red light-emitting layer and the upper layer may be formed of an electron-transporting layer or a hole-blocking layer. By providing a layer below or above the light-emitting layer in this way, the light-emitting position in the light-emitting layer is adjusted, and the optical path length is adjusted, thereby improving the color purity of the light-emitting element.

Although an example of the red layer 56R is shown here, a similar structure may be adopted for the green layer 56G and the blue layer 56B. Also, the number of layers may be two or more. Furthermore, layers of different materials may be laminated such as the light emitting layer and the electron blocking layer, or layers of the same material may be laminated such as laminating two or more light emitting layers.

Next, an example of a method for manufacturing an organic EL display device will be specifically described. Here, it is assumed that the red layer 56R consists of two layers, a lower layer 56R1 and an upper layer 56R2, and the green layer 56G and blue layer 56B consist of a single light-emitting layer.

First, a substrate 53 on which a circuit (not shown) for driving the organic EL display device and a first electrode 54 are formed is prepared. The material of the substrate 53 is not particularly limited, and can be made of glass, plastic, metal, or the like. In this embodiment, a substrate in which a polyimide film is laminated on a glass substrate is used as the substrate 53 .

A resin layer such as acrylic or polyimide is coated by bar coating or spin coating on the substrate 53 on which the first electrode 54 is formed, and an opening is formed in the portion where the first electrode 54 is formed by lithography of the resin layer. An insulating layer 59 is formed by patterning as shown in FIG. This opening corresponds to a light emitting region where the light emitting element actually emits light.

The substrate 53 on which the insulating layer 59 is patterned is carried into the first deposition chamber, and the hole transport layer 55 is deposited as a common layer on the first electrodes 54 in the display area. The hole transport layer 55 is formed using a mask having openings for each of the display regions 51 that will eventually become the panel portion of each organic EL display device.

Next, the substrate 53 with the holes up to the hole transport layer 55 formed thereon is carried into the second film forming chamber. The substrate 53 is aligned with the mask, the substrate is placed on the mask, and the portion of the substrate 53 on the hole transport layer 55 where the element emitting red light is arranged (the region for forming the red sub-pixel). , a red layer 56R is deposited. Here, the mask used in the second deposition chamber is a mask having openings formed only in a plurality of regions serving as red sub-pixels among a plurality of regions on the substrate 53 serving as sub-pixels of the organic EL display device. A fine mask. As a result, the red layer 56R including the red light-emitting layer is formed only on the red sub-pixel area among the plurality of sub-pixel areas on the substrate 53 . In other words, the red layer 56R is not formed on the blue sub-pixel region or the green sub-pixel region among the plurality of sub-pixel regions on the substrate 53, and is not formed on the red sub-pixel region. A film is selectively formed in the region where

Similar to the deposition of the red layer 56R, the green layer 56G is deposited in the third deposition chamber, and the blue layer 56B is deposited in the fourth deposition chamber. After the formation of the red layer 56R, the green layer 56G, and the blue layer 56B is completed, the electron transport layer 57 is formed over the entire display area 51 in the fifth film formation chamber. The electron transport layer 57 is formed as a layer common to the three color layers 56R, 56G and 56B.

The substrate on which the electron transport layer 57 is formed is moved to the sixth film forming chamber, and the second electrode 58 is formed. In this embodiment, each layer is formed by vacuum deposition in the first to sixth film forming chambers. However, the present invention is not limited to this, and for example, the deposition of the second electrode 58 in the sixth deposition chamber may be performed by sputtering. After that, the substrate on which the second electrode 68 is formed is moved to a sealing device, and the protective layer 60 is formed by plasma CVD (sealing step) to complete the organic EL display device 50 . Although the protective layer 60 is formed by the CVD method here, it is not limited to this, and may be formed by the ALD method or the inkjet method.

Here, films are formed in the first to sixth film forming chambers using masks having openings corresponding to the patterns of the respective layers to be formed. During film formation, the substrate 53 is placed on the mask after relative positional adjustment (alignment) between the substrate 53 and the mask.

<Seventh embodiment>
Next, a film thickness measuring device for measuring the film thickness of a substrate on which a film has been formed will be described. In this embodiment, a film thickness measuring apparatus that uses an optical sensor to measure the film thickness based on the light reflectance of the substrate surface will be described as an example.

FIG. 26 shows measurement positions MAA to MDC where the film thickness measuring device 120 can be arranged in the film forming apparatus. The measurement positions MAA, MBA, MCA, and MDA are between the receiving positions PA to PD and the deposition positions JA to JD and are transported by the transport units 5A and 5B inside the transfer chamber 2, that is, outside the film forming chamber 3. This is the position where the film thickness of the substrate 53 is measured. The measurement positions MAB, MBB, MCB, and MDB are between the receiving positions PA to PD and the deposition positions JA to JD, and measure the film thickness of the substrate transported by the transport units 5A and 5B within the deposition chamber 3. position. The measurement positions MAC, MBC, MCC, and MDC are positions for measuring the film thickness of the substrates positioned at the deposition positions JA to JJD in the deposition chamber 3 . Note that the film thickness measurement device 120 may be arranged at least one of the measurement positions MAA to MDC between the reception positions PA to PD and the deposition positions JA to JD. Thickness measuring device 120 need not be present.

FIG. 27 is a cross-sectional view of the film forming apparatus on the YZ plane. As shown in FIG. 27, the measurement positions MAA to MDC where the film thickness measuring device 120 can be arranged are all arranged below the substrate 53 in the vertical direction (Z direction). As a result, the film thickness of the substrate 53 can be measured by the film thickness measuring device 120 while being transported by the transport units 5A and 5B.

In this way, since the film thickness of the substrate W is measured while the substrate W is being sucked by the ESC, the thin film measurement can be performed while improving the measurement accuracy without requiring additional large equipment such as a thin film measuring chamber. be able to. Moreover, since the film thickness is measured during transportation, the film thickness can be measured at high speed after film formation.

FIGS. 28A to 28C are explanatory diagrams for explaining the measurement principle using an example in which the film thickness measurement device 120 is arranged at the measurement position MAA.

FIG. 28(A) is a view when measuring the intensity of reflected light by emitting laser light from the film thickness measuring device 120 before the substrate is carried into the film forming chamber 3 . Here, let P _BG be the received light intensity of the received laser light. By measuring the received light intensity, it is possible to identify the magnitude of noise (background noise) caused by the temperature characteristics of the light receiving sensor and the leakage of light between fibers in the measuring device, which will be described later.

Next, FIG. 28(B) is a view when the reference substrate W _REF is carried into the film forming chamber 3, laser light is emitted by the film thickness measuring device 120, and the intensity of the reflected light is measured as a reference. is. In FIG. 28B, a substrate W _REF having a known reflectance R _ref such as plain glass is used. Here, let P _Tref be the irradiation intensity of the transmitted laser beam, and let P _Rref be the received light intensity of the received laser beam, then the following formula (1) holds.
R _ref =(P _Rref −P _BG )/(P _Tref −P _BG ) (1)
As described above, the reflectance R, the received light intensity P _BG in FIG. 28(A), and the received light intensity P _Rref in FIG. 28(B) can be obtained. _Tref can be identified. This makes it possible to identify the correspondence relationship between the reflectance and the received light intensity.

Subsequently, in FIG. 28C, when the substrate W is unloaded from the film formation chamber 3 after film formation in the film formation chamber 3, the film thickness measurement device 120 emits a laser beam, and the intensity of the reflected light is It is a diagram when measuring. In FIG. 28C _, with reference to the irradiation intensity P _Tref of the laser beam specified in FIG. can be specified.
R=(P _R −P _BG )/(P _Tref −P _BG ) (2)
This allows the change in reflectance to be identified.

Note that the background noise measurement and the reference measurement as shown in FIGS. It may be performed later, or after a predetermined time has elapsed.

FIG. 30 shows an example of reflectance measurement results for each film thickness. As shown in FIG. 30, in the case of a film thickness of 1600 Å, the reflectance around wavelengths 280 and 330 to 420 nm is greater than the reflectance of the substrate in the case of a film thickness of 40 angstroms (Å). Therefore, the film thickness can be estimated by measuring the reflectance in this wavelength band. A known technique can be used to estimate the film thickness based on the reflectance. For example, the reflectance may be measured in advance for a plurality of film thicknesses, and which measurement result is closest to the measured reflectance may be estimated.

In addition, the film thickness may be estimated based on the reflectance measured in a plurality of frequency bands for the estimation of the film thickness based on the measurement results of the reflectance. For example, if the film thickness estimates based on reflectance measurements at wavelengths of 280 nm and 330 nm are 1000 Å and 1200 Å, respectively, the film thickness estimates may be averaged and the film thickness may be 1100 Å. .

<<Configuration example of film thickness measuring device>>
(Configuration example 1)
FIG. 29A shows one configuration example of the film thickness measuring device 120 . A film thickness measuring apparatus 120 according to Configuration Example 1 includes a light source 2901 , a vacuum flange 2902 , a light projecting/receiving section 2903 , a spectroscope 2904 and a PC 2905 . The light source 2901, the vacuum flange 2902, the light emitting/receiving part 2903, and the spectroscope 2904 are connected by optical fibers.

The light source 2901 is a light-emitting device capable of switching between light output and non-output by operating a shutter 29011 . In one example, the light source 2901 includes a deuterium (D2) halogen light source 29012 that emits continuous light of halogen and deuterium from one exit. In another example, light source 2901 comprises a Laser-Driven Light Source light source.

A vacuum flange 2902 is positioned at the junction between the vacuum environment and the atmospheric environment. For example, the light source 2901, the spectroscope 2904, and the PC 2905 are arranged in a housing that is maintained in an atmospheric environment, and a light projecting/receiving unit 2903 is arranged in a film formation chamber that can be placed in a vacuum outside the housing. An optical fiber connecting the light source 2901 and the spectroscope 2904 connects the inside and outside of the housing via the vacuum flange 2902 . In another example, the light emitting/receiving unit 2903 is arranged inside the film formation chamber 3 and the transfer chamber 2, and the light source 2901, the spectroscope 2904, and the PC 2905 may be arranged outside the film formation chamber 3 and the transfer chamber 2. good. In this case, the vacuum flange 2902 may be provided on the wall surface of the film forming chamber 3 or the transfer chamber 2 .

As shown in FIG. 27, the light projecting/receiving unit 2903 includes a light projecting unit for emitting the light emitted from the light source 2901 vertically upward, and a light receiving unit for receiving the reflected light and sending it to the spectroscope 2904. Prepare. The spectroscope 2904 has a light input port, splits the input light, and measures the light intensity for each wavelength band. Then, information about the intensity of the measured light is transmitted to the PC 2905 .

The PC 2905 calculates the measured film thickness using the above equations (1) and (2) based on the light intensity measured by the spectroscope 2904 . In one example, the PC 2905 uses the measured value of the film thickness to adjust the time required for the film forming process of the film forming apparatus 1, adjust the discharge amount of the vapor deposition material from the vapor deposition source 8 of the film forming apparatus 1, can be used for adjusting the parameters of the film forming process.

(Configuration example 2)
FIG. 29B shows configuration example 2 of the film thickness measuring device 120 . The film thickness measuring apparatus 120 according to Configuration Example 2 includes a light source 2921, vacuum flanges 2922a and 2922b (hereinafter sometimes referred to as vacuum flanges 2922 without distinction), light emitting/receiving portions 2923a and 2923b (hereinafter, light emitting/receiving 2923), a spectrometer 2924, a PC 2925, a fiber switch 2926, and a joint 2927. The light source 2921, the vacuum flange 2922, the light emitting/receiving part 2923, the spectroscope 2924, the fiber switch 2926, and the joint 2927 are connected by optical fibers.

A light source 2921, a vacuum flange 2922, a light projecting/receiving unit 2923, a spectroscope 2924, and a PC 2925 are the same as the light source 2901, vacuum flange 2902, light projecting/receiving unit 2903, spectroscope 2904, and PC 2905 described in the first embodiment, and descriptions thereof are omitted.

The joint 2927 connects the light source 2921 and a branch fiber for branching the light output from the light source 2921 to a plurality of input ports of the fiber switcher 2926 .

The fiber switcher 2926 is a switcher that switches output/non-output of the light input from the branch fiber, and outputs the light from one of the output ports. In this embodiment, the fiber switch 2926 is described as having 3 inputs and 3 outputs, but the number is not limited as long as a plurality of pairs of input ports and output ports are provided. In this embodiment, the light output from the first output port (port 1) is sent to the light projecting/receiving portion 2923a, and the light output from the second output port (port 2) is to the light projecting/receiving portion 2923b. , the light output from the third output port (port 3) is directly input to the spectroscope. Accordingly, by arranging the light emitting/receiving sections 2923a and 2923b at different measurement positions MAA to MDD, it is possible to measure the film thickness of a plurality of transfer lines. Also, by arranging the light emitting/receiving sections 2923a and 2923b at different locations in one measuring position, it is possible to improve the measurement accuracy of the film thickness of one transport line. In addition, the intensity change of the light output from the light source 2921 can be detected by port 3 .

(Configuration example 3)
FIG. 29C shows configuration example 3 of the film thickness measuring device 120 . The film thickness measuring apparatus 120 according to Configuration Example 3 includes light sources 2941 a and b (hereinafter sometimes referred to as light sources 2941 without distinction), vacuum flanges 2942 a and b (hereinafter sometimes referred to as vacuum flanges 2942 without distinction). ), light emitting/receiving sections 2943a and 2943b (hereinafter sometimes referred to as light emitting/receiving sections 2943 without distinction), a spectroscope 2944, and a PC 2945. The light source 2941, the vacuum flange 2942, the light emitting/receiving part 2943, and the spectroscope 2944 are connected by optical fibers.

A light source 2941, a vacuum flange 2942, a light projecting/receiving unit 2943, a spectroscope 2944, and a PC 2945 are the same as the light source 2901, vacuum flange 2902, light projecting/receiving unit 2903, spectroscope 2904, and PC 2905 described in the first embodiment, so description thereof is omitted.

According to Configuration Example 3, there is no need to prepare a spectroscope and a PC for each measurement position.

<< taper member >>
As shown in FIG. 27, at the arrangement positions MAA to MDC where the film thickness measuring device 120 is arranged, the measurement light emitted from the film thickness measuring device 120 is reflected on the ceiling portions of the transfer chamber 2 and the film forming chamber 3. , the measurement accuracy may decrease as a result of input to the light emitting/receiving part. Therefore, the taper member 3101 is arranged in the direction of light irradiation of the film thickness measuring device 120, which is the ceiling portion of the transfer chamber 2 in the example of FIG. For example, the tapered member 3101 has a triangular prism, pyramid, or conical shape. Thereby, the measuring light can be reflected in a direction different from that of the film thickness measuring device 120 . Also, in one example, the tapered member 3101 is a black member having a high light absorption rate. In one example, the surface portion irradiated with the measurement light from the film thickness measuring device 120 is subjected to surface treatment such as sandblasting, which can promote light diffusion.

By arranging the tapered member 3101 in this way, it is possible to prevent the measurement light emitted from the film thickness measuring device 120 from being reflected at a location different from the substrate W, thereby preventing the measurement accuracy of the film thickness from deteriorating.

<<Configuration example of substrate and holding unit>>
As shown in FIG. 32, film formation areas 3201a to 3201c for measurement (hereinafter sometimes referred to as film formation areas 3201 without distinction) are provided on the substrate for each location where measurement is performed by the film thickness measurement device 120. is placed. In FIG. 32, three deposition areas 3201a to 3201c are shown for performing measurements at three locations on the substrate W, but the deposition areas for performing film thickness measurement are It may be determined according to the number of locations, or one film formation area may be arranged for measuring the film thickness at a plurality of locations. For example, one slot-shaped film formation area including the film formation areas 3201a to 3201c may be arranged.

In one example, the deposition area 3201 is arranged in a region different from the region where electronic devices are actually manufactured on the substrate W. FIG. For example, the deposition area is arranged near the edge of the substrate W so that a common position can be measured on a plurality of types of substrates on which different electronic devices are manufactured.

Further, when the film thickness is measured while the substrate W is being transported by the holding unit 6, such as the measurement positions MAA and MAB, the measurement light from the film thickness measuring device is reflected by the holding unit 6, resulting in the film thickness being measured. measurement accuracy may decrease. Therefore, an opening is also arranged in the holding unit 6 at a position corresponding to the film formation area 3201 , for example, at a position vertically above the film formation area 3201 . This prevents the measurement light emitted from the film thickness measuring device 120 from being reflected by the holding unit 6 that holds the substrate, the reflected light entering the light receiving part of the film thickness measuring device 120, and becoming noise in the measurement. can be done.

An opening is also arranged in the mask M so that film formation is performed in the film formation area 3201 for measurement. For this reason, the film thickness is measured while the mask M is positioned on the substrate W at the position where the film thickness is measured at the film formation position, such as the measurement position MAC in FIG.

<<Joint Structure>>
FIGS. 33(A) to 33(C) are explanatory diagrams showing joint structures used for connecting fibers transmitting light in the film thickness measuring apparatus 120, such as the joint 2927 in FIG. 29(B). .

FIG. 33(A) is a perspective view of the joint structure. Fiber connection is performed by inserting a plug 3302 into the connector 3301 . The connector 3301 is formed by fixing one strand 3311 on the light output side with a cable mounter 3312, connecting the cable mounter 3312 to the adapter 3313, and connecting the adapter 3313 and the cylindrical member 3314. .

The plug 3302 has a structure in which a plurality of input-side strands 3321 are bundled and the whole bundled strands are wrapped in resin. The resin is protected by a tubular member 3322 made of stainless steel. By allocating the bundled strands for each number of branches, the fibers used for connecting the joint 2927 and the fiber switcher 2926 can be branched.

FIG. 33(B) shows a cross-sectional view of the joint. Wire 3311 includes a clad, a core and a coating. The length _L1 of cable mounter 3312 to be inserted into adapter 3313 is predetermined according to a predetermined standard. The tip of the cable mounter 3312 and the wire 3311 are fixed so as to align with each other. A margin length _L2 on the adapter 3313 side when the cable mounter 3312 is inserted into the adapter 3313 is also predetermined according to a predetermined standard.

Here, as shown in FIG. 33B, when light is emitted from the wire 3311, the light is emitted from the tip of the wire 3311 at a predetermined emission angle. In one example, the output angle is 11 to 13 degrees with the output direction being 0 degrees. Therefore, when the tip position of the plug 3302 is positioned at the position 3341 , light is incident on the strands near the center of the plug 3302 , but light is not incident on the strands located on the outer peripheral side of the plug 3302 . On the other hand, when the tip position of the plug 3302 is positioned at the position 3343, the light is incident on the entire wire, but the stainless cylindrical member of the plug 3302 is also exposed to the light. becomes weaker. For this reason, the tip position of the plug 3302 is set to the position 3342 so that the light is incident on the entire strand, and the light is prevented from irradiating other than the strand. can be suppressed.

Therefore, in the joint 2927 shown in this embodiment, as shown in FIG. 33(C), a spacer 3361 with which the tip of the inserted plug 3302 abuts is arranged inside the cylindrical member. Although the spacer 3361 is shown as being a cylindrical member in FIG. 33C, it may be made of cylindrical glass. In this case, the thickness of the spacer 3361 may be determined in consideration of the refraction of light on the plane of incidence. As described above, in the joint structure according to this embodiment, the spacer 3361 is arranged to keep the distance between the strands on the output side and the plurality of strands on the input side constant.

Further, the incidence surface of the spacer 3361 on the wire 3311 side may be made convex so that the spacer 3361 can provide a lens effect. This allows light to enter perpendicularly to the cross section of the tip of the plug 3302 .

<Other embodiments>
The present invention supplies a program that implements one or more functions of the above-described embodiments to a system or apparatus via a network or a storage medium, and one or more processors in the computer of the system or apparatus reads and executes the program. It can also be realized by processing to It can also be implemented by a circuit (for example, ASIC) that implements one or more functions.

The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the claims are appended to make public the scope of the invention.

1 film forming apparatus, 3 film forming chamber, 4 transport unit, 5A and 5B transport unit, 6A to 6D holding unit, 7A and 7B moving unit

Claims (14)

A film forming apparatus,
a film forming chamber provided with a film forming unit for forming a film on a substrate;
a transport means for transporting the substrate between a substrate deposition position and a substrate receiving position while holding the substrate downward;
measuring means for measuring the thickness of the film formed on the substrate held by the conveying means;
A film forming apparatus comprising: 2. The film forming apparatus according to claim 1, wherein said measuring means measures the film thickness at a plurality of locations on said substrate by moving said conveying means holding said substrate. further comprising a transport robot that holds and transports the substrate on the upper side of the hand,
The conveying means is
receiving the substrate transported to the receiving position by the transport robot, transporting the substrate to the film forming position;
3. The film forming apparatus according to claim 1, wherein the substrate on which the film is formed by the film forming unit is transported from the film forming position to the receiving position. It further comprises multiple receiving positions,
4. The film forming apparatus according to claim 3, wherein the transport robot transports the substrate to the plurality of receiving positions. The deposition chamber comprises a plurality of deposition positions,
The film forming apparatus includes a plurality of transport means for transporting the substrate to each of the plurality of film forming positions,
5. The film forming apparatus according to claim 4, wherein the transport robot transports the substrate to receiving positions corresponding to the plurality of transport means. 6. The film forming apparatus according to claim 1, wherein the measuring means measures the thickness of the film formed on the substrate at the film forming position. 3. The measuring means measures the thickness of the film formed on the substrate at a position within the film forming chamber and between the film forming position and the receiving position. 6. The film forming apparatus according to any one of 1 to 5. 3. The measuring means measures the thickness of the film formed on the substrate at a position outside the film forming chamber and between the film forming position and the receiving position. 6. The film forming apparatus according to any one of 1 to 5. 9. The film forming apparatus according to claim 1, wherein the measuring means measures the thickness of the film by irradiating the substrate with laser light. 10. The film forming apparatus according to claim 5, wherein said measuring means includes a light source whose output is branched so as to irradiate the substrate with laser light for each of said plurality of conveying means. 11. The light source according to claim 10, further comprising a joint structure for inputting the light output from one output-side strand to a plurality of input-side strands in order to split the output from the light source. Film deposition apparatus described. 12. The film forming apparatus according to claim 11, wherein the joint structure includes a spacer that maintains a constant distance between the one output-side strand and the plurality of input-side strands. 13. The film forming apparatus according to any one of claims 10 to 12, wherein the branched output from the light source is input to a measuring device for measuring intensity. 12. The film forming apparatus according to any one of claims 9 to 11, further comprising a black member disposed so as to sandwich the conveying means together with the laser light projecting portion in the irradiation direction of the laser light. .

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