JP2023048650A5 - - Google Patents
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- JP2023048650A5 JP2023048650A5 JP2021158082A JP2021158082A JP2023048650A5 JP 2023048650 A5 JP2023048650 A5 JP 2023048650A5 JP 2021158082 A JP2021158082 A JP 2021158082A JP 2021158082 A JP2021158082 A JP 2021158082A JP 2023048650 A5 JP2023048650 A5 JP 2023048650A5
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- JP
- Japan
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021158082A JP7737852B2 (ja) | 2021-09-28 | 2021-09-28 | 検査装置及び検査方法 |
| KR1020247012521A KR20240068698A (ko) | 2021-09-28 | 2022-09-14 | 검사 장치 및 검사 방법 |
| PCT/JP2022/034418 WO2023053968A1 (ja) | 2021-09-28 | 2022-09-14 | 検査装置及び検査方法 |
| CN202280063312.XA CN117981064A (zh) | 2021-09-28 | 2022-09-14 | 检查装置和检查方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021158082A JP7737852B2 (ja) | 2021-09-28 | 2021-09-28 | 検査装置及び検査方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023048650A JP2023048650A (ja) | 2023-04-07 |
| JP2023048650A5 true JP2023048650A5 (enExample) | 2024-08-07 |
| JP7737852B2 JP7737852B2 (ja) | 2025-09-11 |
Family
ID=85779983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021158082A Active JP7737852B2 (ja) | 2021-09-28 | 2021-09-28 | 検査装置及び検査方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7737852B2 (enExample) |
| KR (1) | KR20240068698A (enExample) |
| CN (1) | CN117981064A (enExample) |
| WO (1) | WO2023053968A1 (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05198662A (ja) * | 1991-08-01 | 1993-08-06 | Tokyo Electron Yamanashi Kk | プローブ装置及び同装置におけるアライメント方法 |
| JP5432551B2 (ja) | 2009-03-13 | 2014-03-05 | 株式会社テクノホロン | プローブ方法及びプローブ装置 |
| JP2012204695A (ja) | 2011-03-25 | 2012-10-22 | Tokyo Electron Ltd | プローブカード検出装置、ウエハの位置合わせ装置及びウエハの位置合わせ方法 |
| JP7018784B2 (ja) | 2018-02-23 | 2022-02-14 | 東京エレクトロン株式会社 | コンタクト精度保証方法および検査装置 |
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2021
- 2021-09-28 JP JP2021158082A patent/JP7737852B2/ja active Active
-
2022
- 2022-09-14 WO PCT/JP2022/034418 patent/WO2023053968A1/ja not_active Ceased
- 2022-09-14 KR KR1020247012521A patent/KR20240068698A/ko active Pending
- 2022-09-14 CN CN202280063312.XA patent/CN117981064A/zh active Pending