JP2023006636A5 - - Google Patents

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JP2023006636A5
JP2023006636A5 JP2021109342A JP2021109342A JP2023006636A5 JP 2023006636 A5 JP2023006636 A5 JP 2023006636A5 JP 2021109342 A JP2021109342 A JP 2021109342A JP 2021109342 A JP2021109342 A JP 2021109342A JP 2023006636 A5 JP2023006636 A5 JP 2023006636A5
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Japan
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substrate stage
substrate
liquid ejection
target
droplet
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JP2021109342A
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Japanese (ja)
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JP2023006636A (ja
JP7693415B2 (ja
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JP2021109342A 2021-06-30 2021-06-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Active JP7693415B2 (ja)

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JP2021109342A JP7693415B2 (ja) 2021-06-30 2021-06-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

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Application Number Priority Date Filing Date Title
JP2021109342A JP7693415B2 (ja) 2021-06-30 2021-06-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Publications (3)

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JP2023006636A JP2023006636A (ja) 2023-01-18
JP2023006636A5 true JP2023006636A5 (cg-RX-API-DMAC7.html) 2024-06-28
JP7693415B2 JP7693415B2 (ja) 2025-06-17

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JP2021109342A Active JP7693415B2 (ja) 2021-06-30 2021-06-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

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JP (1) JP7693415B2 (cg-RX-API-DMAC7.html)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5409813B2 (ja) 2009-12-26 2014-02-05 キヤノン株式会社 インプリント装置及び物品の製造方法
JP6566843B2 (ja) 2015-11-12 2019-08-28 キヤノン株式会社 パターン形成方法、インプリントシステムおよび物品製造方法
JP7015134B2 (ja) 2017-10-12 2022-02-02 キヤノン株式会社 インプリント装置、インプリント方法、情報処理装置、生成方法、プログラム及び物品の製造方法
JP7379031B2 (ja) 2019-09-11 2023-11-14 キヤノン株式会社 インプリント装置およびインプリント装置の制御方法

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