JP2012098337A5 - - Google Patents

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Publication number
JP2012098337A5
JP2012098337A5 JP2010243548A JP2010243548A JP2012098337A5 JP 2012098337 A5 JP2012098337 A5 JP 2012098337A5 JP 2010243548 A JP2010243548 A JP 2010243548A JP 2010243548 A JP2010243548 A JP 2010243548A JP 2012098337 A5 JP2012098337 A5 JP 2012098337A5
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JP
Japan
Prior art keywords
coating
droplet
application
stage
droplets
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JP2010243548A
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English (en)
Japanese (ja)
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JP2012098337A (ja
JP5657998B2 (ja
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Priority to JP2010243548A priority Critical patent/JP5657998B2/ja
Priority claimed from JP2010243548A external-priority patent/JP5657998B2/ja
Publication of JP2012098337A publication Critical patent/JP2012098337A/ja
Publication of JP2012098337A5 publication Critical patent/JP2012098337A5/ja
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Publication of JP5657998B2 publication Critical patent/JP5657998B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010243548A 2010-10-29 2010-10-29 液滴塗布装置及び液滴塗布方法 Expired - Fee Related JP5657998B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010243548A JP5657998B2 (ja) 2010-10-29 2010-10-29 液滴塗布装置及び液滴塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010243548A JP5657998B2 (ja) 2010-10-29 2010-10-29 液滴塗布装置及び液滴塗布方法

Publications (3)

Publication Number Publication Date
JP2012098337A JP2012098337A (ja) 2012-05-24
JP2012098337A5 true JP2012098337A5 (cg-RX-API-DMAC7.html) 2013-12-26
JP5657998B2 JP5657998B2 (ja) 2015-01-21

Family

ID=46390354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010243548A Expired - Fee Related JP5657998B2 (ja) 2010-10-29 2010-10-29 液滴塗布装置及び液滴塗布方法

Country Status (1)

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JP (1) JP5657998B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI609763B (zh) 2012-10-04 2018-01-01 大日本印刷股份有限公司 壓印方法及壓印裝置
JP6742177B2 (ja) * 2016-07-15 2020-08-19 キヤノン株式会社 インプリント装置、および物品製造方法
US10468247B2 (en) * 2016-12-12 2019-11-05 Canon Kabushiki Kaisha Fluid droplet methodology and apparatus for imprint lithography

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004004915A (ja) * 2003-06-30 2004-01-08 Seiko Epson Corp フィルター製造装置、フィルター製造方法、このフィルターを備えた表示装置の製造方法、インクジェットパターニング装置及びインクジェットパターニング方法
JP2008299041A (ja) * 2007-05-31 2008-12-11 Seiko Epson Corp 吐出量測定方法、吐出量調整方法、液状体の吐出方法、カラーフィルタの製造方法、液晶表示装置の製造方法、及び電気光学装置の製造方法
WO2010005011A1 (ja) * 2008-07-08 2010-01-14 株式会社アルバック インクジェット式印刷装置、吐出量検査方法
JP2010194465A (ja) * 2009-02-25 2010-09-09 Shibaura Mechatronics Corp 液滴塗布方法及び装置

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