JP2023000535A - Curved work bonding apparatus and curved work bonding method - Google Patents

Curved work bonding apparatus and curved work bonding method Download PDF

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JP2023000535A
JP2023000535A JP2021101423A JP2021101423A JP2023000535A JP 2023000535 A JP2023000535 A JP 2023000535A JP 2021101423 A JP2021101423 A JP 2021101423A JP 2021101423 A JP2021101423 A JP 2021101423A JP 2023000535 A JP2023000535 A JP 2023000535A
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convex mold
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JP7091526B1 (en
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義和 大谷
Yoshikazu Otani
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Shin Etsu Engineering Co Ltd
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Abstract

To provide an apparatus and method for uniformly bonding a first work and a second work having three-dimensional curved surfaces over entire surfaces.SOLUTION: There is provided a curved work bonding apparatus that comprises: a first concave-convex mold 1 having a first curved surface 1a on which a first non-bonding surface W11 of a first work W1 is detachably held; a second concave-convex mold 2 having a second curved surface 2a on which a second non-bonding surface W21 of a second work W2 is detachably held; a drive unit that relatively moves one or both of the first concave-convex mold and the second concave-convex mold toward each other in a thickness direction of the first work and the second work; and a control unit that controls operation of the driving unit. The second curved surface is a transfer surface obtained by duplication of the first curved surface. The control unit that causes the driving unit to approach and move so as to overlap the first work and the second work in the thickness direction between the first curved surface of the first concave-convex mold and the second curved surface of the second concave-convex mold, pressurizes the first work and the second work in the thickness direction, and controls so as to bond the first bonding surface W12 of the first work and the second bonding surface W22 of the second work.SELECTED DRAWING: Figure 1

Description

本発明は、三次元の曲面形状に形成された薄板状の第一ワークと第二ワークを貼り合わせる曲面ワーク貼合装置、及び、曲面ワーク貼合装置を用いた曲面ワーク貼合方法に関する。 The present invention relates to a curved work bonding apparatus for bonding a thin plate-like first work and a second work formed in a three-dimensional curved shape, and a curved work bonding method using the curved work bonding apparatus.

従来、この種の曲面ワーク貼合装置として、ベースの表面に突き当てブロックが突出して設けられた下型と、キャビティを有する吸着プラットフォームが設けられた上型との間に、キャビティ内に吸着して位置決めされる曲面物体,軟性部材,軟性部材の表面に設けられる接着層を配置し、上型及び下型の結合により、軟性部材と曲面物体を貼合させる曲面貼合装置がある(例えば、特許文献1参照)。
キャビティには、曲面物体の曲面部と接合する屈曲弧面が形成され、突き当てブロックの該当箇所には、屈曲面が形成される。
突き当てブロックの屈曲面に沿って軟施位部材に曲面が成形された後、上型及び下型を結合することにより、軟性部材の表面が接着層を介して曲面物体に貼合され、貼合後に下型及び上型を分離することで、一体に結合した曲面物体と軟性部材が得られる。
Conventionally, in this type of curved surface work bonding apparatus, a lower die provided with an abutment block protruding from the surface of a base and an upper die provided with a suction platform having a cavity are arranged so as to be adsorbed in the cavity. There is a curved surface laminating apparatus that places a curved object, a flexible member, and an adhesive layer provided on the surface of the flexible member positioned by a slab, and bonds the flexible member and the curved object by joining the upper mold and the lower mold (for example, See Patent Document 1).
A curved arc surface that joins with the curved surface portion of the curved object is formed in the cavity, and a curved surface is formed in the corresponding portion of the abutment block.
After the curved surface is formed on the soft position member along the curved surface of the abutting block, the surface of the flexible member is bonded to the curved object via the adhesive layer by joining the upper mold and the lower mold. By separating the lower mold and the upper mold after joining, the curved object and the flexible member that are integrally connected can be obtained.

特開2019-077172号公報JP 2019-077172 A

ところで、貼り合わせる薄板が複雑な三次元曲面形状になると、均一で高精度に貼り合わせることが困難になる。
特許文献1では、曲面物体の曲面部と対応するキャビティの屈曲弧面と、突き当てブロックの屈曲面が別々に作成されるため、複雑な三次元曲面形状になると、それぞれの加工精度の僅かな違いなどによって、曲面物体に軟性部材が貼合面全体で均一に貼り合わされず、貼合面に気泡が入り易くて貼り合わせ精度が劣るという問題があった。
By the way, when the thin plates to be bonded have a complicated three-dimensional curved surface shape, it becomes difficult to bond them uniformly and with high accuracy.
In Patent Document 1, since the curved arc surface of the cavity corresponding to the curved surface portion of the curved object and the curved surface of the abutment block are formed separately, if the shape of the three-dimensional curved surface is complicated, the processing accuracy of each of them is very small. Due to such differences, the flexible member is not uniformly bonded to the curved surface over the entire bonding surface, and air bubbles are likely to enter the bonding surface, resulting in poor bonding accuracy.

このような課題を解決するために本発明に係る曲面ワーク貼合装置は、三次元曲面の薄板状に形成された第一ワークと第二ワークを貼り合わせる曲面ワーク貼合装置であって、前記第一ワークの第一非貼合面が着脱自在に保持される第一曲型面を有する第一凹凸型と、前記第二ワークの第二非貼合面が着脱自在に保持される第二曲型面を有する第二凹凸型と、前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記第一ワーク及び前記第二ワークの厚み方向へ相対的に接近移動させる駆動部と、前記駆動部を作動制御する制御部と、を備え、前記第二曲型面は、前記第一曲型面の複製による転写面であり、前記制御部は、前記駆動部の接近移動により、前記第一凹凸型の前記第一曲型面と前記第二凹凸型の前記第二曲型面との間に、前記第一ワークと前記第二ワークが前記厚み方向に重ね合わされ、前記第一ワークと前記第二ワークを前記厚み方向に加圧して、前記第一ワークの第一貼合面と前記第二ワークの第二貼合面が接合されるように制御することを特徴とする。
また、このような課題を解決するために本発明に係る曲面ワーク貼合方法は、三次元曲面の薄板状に形成された第一ワークと第二ワークを貼り合わせる曲面ワーク貼合方法であって、第一曲型面を有する第一凹凸型から第二曲型面を有する第二凹凸型が作成される型取り工程と、前記第一凹凸型の前記第一曲型面に前記第一ワークの第一非貼合面を着脱自在に保持するとともに、前記第二凹凸型の前記第二曲型面に前記第二ワークの第二非貼合面を、前記第一ワーク及び前記第二ワークが厚み方向へ離隔して挟むように保持するセット工程と、前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記厚み方向へ相対的に接近移動して、前記第一ワークと前記第二ワークが前記厚み方向へ接するように重ね合わされ、且つ加圧して前記第一ワークの第一貼合面と前記第二ワークの第二貼合面を接合する加圧工程と、を含み、前記型取り工程では、前記第一曲型面の複製による転写面として前記第二曲型面が形成されることを特徴とする。
In order to solve such problems, the curved surface work bonding apparatus according to the present invention is a curved surface work bonding apparatus for bonding a first work and a second work formed in a thin plate shape with three-dimensional curved surfaces, A first concave-convex mold having a first curved surface on which the first non-bonding surface of the first work is detachably held, and a second concave-convex mold on which the second non-bonding surface of the second work is detachably held. A driving unit that relatively moves a second concave-convex mold having a curved surface and one or both of the first concave-convex mold and the second concave-convex mold toward each other in the thickness direction of the first work and the second work. and a control unit that controls the operation of the drive unit, wherein the second curved surface is a transfer surface obtained by duplicating the first curved surface, and the control unit performs the approaching movement of the drive unit. , the first workpiece and the second workpiece are overlapped in the thickness direction between the first curved surface of the first concave-convex mold and the second curved surface of the second concave-convex mold; The one work and the second work are pressurized in the thickness direction, and controlled so that the first bonding surface of the first work and the second bonding surface of the second work are bonded. .
Further, in order to solve such problems, a curved surface work bonding method according to the present invention is a curved surface work bonding method for bonding a first work and a second work formed in a three-dimensional curved thin plate shape. a step of forming a second concave-convex mold having a second curved surface from a first concave-convex mold having a first curved surface; While detachably holding the first non-bonding surface of the second concave-convex mold, the second non-bonding surface of the second work is attached to the second curved surface of the second uneven mold, the first work and the second work a setting step of holding the workpiece so as to be separated and sandwiched in the thickness direction; and a pressing step in which the second work is superimposed so as to be in contact with the thickness direction and pressurized to join the first bonding surface of the first work and the second bonding surface of the second work. In the molding step, the second curved surface is formed as a transfer surface by duplicating the first curved surface.

本発明の実施形態(第一実施形態)に係る曲面ワーク貼合装置及び曲面ワーク貼合方法の全体構成を示す説明図であり、(a)が型取り工程の縦断正面図、(b)がセット工程の縦断正面図同横断平面図、(c)が加圧工程の縦断正面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the whole structure of the curved-surface work bonding apparatus based on embodiment (1st embodiment) of this invention, and the curved-surface work bonding method, (a) is a longitudinal front view of a mold-making process, (b) is FIG. 2(c) is a longitudinal front view and a transverse plan view of the setting process, and FIG. 搬入工程を示す説明図であり、(a)が受け取り前の縦断正面図、(b)が受け取り時の縦断正面図、(c)が受け渡し時の縦断正面図である。It is explanatory drawing which shows a carrying-in process, (a) is a longitudinal front view before reception, (b) is a longitudinal front view at the time of reception, (c) is a longitudinal front view at the time of delivery. 本発明の他の実施形態(第二実施形態)に係る曲面ワーク貼合装置及び曲面ワーク貼合方法の全体構成を示す説明図であり、(a)がセット工程の縦断正面図、(b)が加圧工程の縦断正面図、(c)が加圧工程終了後の縦断正面図である。FIG. 4 is an explanatory view showing the overall configuration of a curved workpiece bonding apparatus and a curved workpiece bonding method according to another embodiment (second embodiment) of the present invention, where (a) is a longitudinal front view of a setting process, and (b) is. is a longitudinal front view of the pressurizing process, and (c) is a longitudinal front view after the pressurizing process is completed.

以下、本発明の実施形態を図面に基づいて詳細に説明する。
本発明の実施形態に係る曲面ワーク貼合装置Aは、図1~図3に示すように、例えば液晶ディスプレイ(LCD),有機ELディスプレイ(OLED),プラズマディスプレイ(PDP)等のフラットパネルディスプレイ(FPD),或いはフレキシブルディスプレイ,センサーデバイス,例えばタッチパネル式FPDや3D(3次元)ディスプレイや電子書籍などのような液晶モジュール(LCM),フレキシブルプリント配線板(FPC)などに用いられる薄板状の基板からなる第一ワークW1に対して、タッチパネルやカバーガラスやカバーフィルムやFPDなどのもう一枚の薄板状又はフィルム状の第二ワークW2を貼り合わせる貼合デバイスDの貼り合わせ機である。
第一ワークW1は、液晶パネル,タッチパネルなどを構成するガラス基板,アクリル板,ステンレス板などの回路基板を含む三次元曲面形状に形成された薄板状の基板である。第一ワークW1の裏側には、後述する第一凹凸型1と対向する第一非貼合面W11が形成され、第一ワークW1の表側には、第一貼合面W12が形成される。
第二ワークW2は、薄膜センサ(Film Sensor),タッチパネルなどの回路基板を含む三次元曲面形状に形成された薄板状の基板、又はカバーなどとして用いられる三次元の曲面形状に形成された薄板状の基板である。第二ワークW2となる薄板状の基板には、フィルム状の基板が含まれ、少なくとも厚み方向へ弾性変形可能な薄板やフィルムも含まれる。第二ワークW2の裏側には、後述する第二凹凸型2と対向する第二非貼合面W21が形成され、第二ワークW2の表側には、第二貼合面W22が形成される。
第一ワークW1の第一貼合面W12又は第二ワークW2の第二貼合面W22のいずれか一方若しくは第一貼合面W12及び第二貼合面W22の両方には、接着層W3を設けることが好ましい。接着層W3は、紫外線や熱線(赤外線)などの照射又は加熱などで変性(変質)して適度な接着力を有する変性材料からなり、最終的には第一ワークW1と第二ワークW2が強固な接着状態となるものを用いることが好ましい。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
As shown in FIGS. 1 to 3, the curved surface work bonding apparatus A according to the embodiment of the present invention is a flat panel display such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP). FPD), or flexible displays, sensor devices, such as touch panel type FPD, 3D (three-dimensional) displays, liquid crystal modules (LCM) such as e-books, flexible printed circuit boards (FPC), etc. It is a bonding machine of a bonding device D that bonds another thin plate-like or film-like second work W2 such as a touch panel, a cover glass, a cover film, or an FPD to a first work W1.
The first work W1 is a thin plate-like substrate formed in a three-dimensional curved shape including a circuit substrate such as a glass substrate, an acrylic plate, a stainless steel plate, etc., which constitutes a liquid crystal panel, a touch panel, or the like. A first non-bonding surface W11 is formed on the back side of the first work W1 and faces the first concave-convex mold 1, which will be described later, and a first bonding surface W12 is formed on the front side of the first work W1.
The second work W2 is a thin board having a three-dimensional curved surface including a circuit board such as a film sensor and a touch panel, or a thin board having a three-dimensional curved surface such as a cover. is the substrate of The thin plate-like substrate that becomes the second work W2 includes a film-like substrate, and also includes thin plates and films that are elastically deformable at least in the thickness direction. A second non-bonding surface W21 is formed on the back side of the second work W2 to face the second concave-convex mold 2 described later, and a second bonding surface W22 is formed on the front side of the second work W2.
Either the first bonding surface W12 of the first work W1 or the second bonding surface W22 of the second work W2, or both the first bonding surface W12 and the second bonding surface W22, is provided with an adhesive layer W3. It is preferable to provide The adhesive layer W3 is made of a denatured material that is denatured (altered) by irradiation with ultraviolet rays, heat rays (infrared rays), heating, etc., and has an appropriate adhesive strength, and finally the first work W1 and the second work W2 are firmly bonded. It is preferable to use a material that provides a good adhesion state.

詳しく説明すると、本発明の実施形態に係る曲面ワーク貼合装置Aは、第一ワークW1に対応する第一凹凸型1と、第二ワークW2に対応する第二凹凸型2と、第一凹凸型1又は第二凹凸型2のいずれか一方若しくは両方を厚み方向へ相対的に接近移動又は離隔移動させる駆動部3と、駆動部3などを作動制御する制御部4と、を主要な構成要素として備えている。
さらに、第一凹凸型1を着脱自在に保持するように設けられる第一保持部材31と、第二凹凸型2を着脱自在に保持するように設けられる第二保持部材32と、を備え、駆動部3で第一保持部材31や第二保持部材32を相対的に接近移動させることが好ましい。
本発明の第一実施形態に係る曲面ワーク貼合装置A1を図1(a)~(c)及び図2(a)~(c)に示し、本発明の第二実施形態に係る曲面ワーク貼合装置A2を図3(a)~(c)に示している。
少なくとも第一凹凸型1,第二凹凸型2,駆動部3や第一保持部材31,第二保持部材32は、貼り合わせ空間Sに配備される。第一ワークW1,第二ワークW2は、搬送治具51や搬送ロボットなどからなる搬送手段5によって、外部空間(図示しない)から貼り合わせ空間Sにそれぞれ搬入され、貼り合わせ完了後の貼合デバイスDを搬送手段5で貼り合わせ空間Sから外部空間に搬出する。
なお、第一ワークW1及び第二ワークW2は、通常、上下方向へ対向するように配置され、下側(下位)の第一ワークW1と上側(上位)の第二ワークW2が貼り合わされる方向を以下「Z方向」という。Z方向と交差する第一ワークW1及び第二ワークW2に沿った方向を以下「XY方向」という。
More specifically, the curved workpiece bonding apparatus A according to the embodiment of the present invention includes a first concave-convex mold 1 corresponding to a first work W1, a second concave-convex mold 2 corresponding to a second work W2, a first concave-convex mold The main constituent elements are a drive unit 3 that relatively moves either or both of the mold 1 and the second concave-convex mold 2 toward or away from each other in the thickness direction, and a control unit 4 that controls the operation of the drive unit 3 and the like. It is equipped as
Further, a first holding member 31 provided to detachably hold the first concave-convex mold 1 and a second holding member 32 provided to detachably hold the second concave-convex mold 2 are provided. It is preferable to move the first holding member 31 and the second holding member 32 relatively closer to each other at the portion 3 .
1(a) to (c) and FIGS. 2(a) to (c) show the curved work bonding apparatus A1 according to the first embodiment of the present invention. The coupling device A2 is shown in FIGS. 3(a)-(c).
At least the first concave-convex mold 1, the second concave-convex mold 2, the drive unit 3, the first holding member 31, and the second holding member 32 are arranged in the bonding space S. The first work W1 and the second work W2 are each carried from an external space (not shown) into the bonding space S by a transport means 5 including a transport jig 51, a transport robot, etc., and transferred to the bonding device after completion of bonding. D is transported from the bonding space S to the external space by the transport means 5 .
In addition, the first work W1 and the second work W2 are usually arranged so as to face each other in the vertical direction, and the direction in which the lower (lower) first work W1 and the upper (upper) second work W2 are bonded together. is hereinafter referred to as "Z direction". A direction along the first work W1 and the second work W2 that intersects with the Z direction is hereinafter referred to as "XY direction".

第一凹凸型1と第二凹凸型2は、第一凹凸型1又は第二凹凸型2のいずれか一方が鋳造物であり、他方が鋳造物の複製品である。以下、第一凹凸型1がアルミニウムやその他の金属又は硬質合成樹脂若しくはその他の硬質材料からなる鋳造物である場合について説明する。特に、第一凹凸型1が鋳造物であって且つ第一凹凸型1と対応する第一ワークW1のZ方向の凹凸高さが比較的に低い場合には、第一凹凸型1の外表面に電鋳法などによるメッキ層(図示しない)を形成することも可能である。
第一凹凸型1は、第一ワークW1のサイズよりもXY方向に大きく形成され、第一凹凸型1において第一ワークW1の第一非貼合面W11とZ方向に対向する表側には、第一曲型面1aが形成される。
第一曲型面1aは、第一ワークW1の第一非貼合面W11を基準面としてZ方向に嵌め合う三次元曲面形状に凹凸形成され、第一曲型面1aに沿って第一非貼合面W11が隙間なく接合するように構成されている。
第一曲型面1aには、搬送手段5で貼り合わせ空間Sに搬入された第一ワークW1の第一非貼合面W11を着脱自在に仮保持する第一ワーク保持部1bが設けられる。第一ワーク保持部1bで第一曲型面1aの所定位置に対して、第一ワークW1の第一非貼合面W11がXY方向へ位置ズレ不能に仮保持される。第一ワーク保持部1bの具体例としては、真空吸着などの差圧チャックなどを用いている。
さらに、第一曲型面1aに対する第一ワークW1の位置決め方法としては、CCDカメラなどの位置検出器で第一曲型面1aに対する第一ワークW1の搬入位置が検出され、この検出値に基づいて第一ワークW1の搬入位置を微調整する方法や、第一曲型面1a又は第一ワークW1に取り付けたマーク情報に基づいて位置決めして設置する方法や、第一曲型面1aに設置した位置決めピンに合わせて第一ワークW1を設置する方法などがある。
第一凹凸型1の具体例として図1及び図3に示される場合には、第一凹凸型1をZ方向の下位に配置される下定盤として使用し、第一曲型面1aの所定位置には、第一ワーク保持部1bとして真空吸着することにより、第一ワークW1となるガラス基板がセットされる。
One of the first concave-convex mold 1 and the second concave-convex mold 2 is a casting, and the other is a replica of the casting. A case where the first concave-convex mold 1 is a casting made of aluminum, other metals, hard synthetic resins, or other hard materials will be described below. In particular, when the first uneven mold 1 is a cast product and the height of the unevenness in the Z direction of the first workpiece W1 corresponding to the first uneven mold 1 is relatively low, the outer surface of the first uneven mold 1 It is also possible to form a plated layer (not shown) by electroforming or the like.
The first concave-convex mold 1 is formed to be larger in the XY direction than the size of the first work W1. A first curved surface 1a is formed.
The first curved surface 1a is unevenly formed into a three-dimensional curved surface shape that fits in the Z direction with the first non-bonding surface W11 of the first workpiece W1 as a reference surface. It is configured such that the bonding surface W11 is bonded without a gap.
The first curved mold surface 1a is provided with a first work holding portion 1b that detachably temporarily holds the first non-bonding surface W11 of the first work W1 carried into the bonding space S by the conveying means 5. As shown in FIG. The first non-bonding surface W11 of the first work W1 is temporarily held at a predetermined position of the first curved surface 1a by the first work holding portion 1b so as not to be displaced in the XY directions. As a specific example of the first workpiece holding portion 1b, a differential pressure chuck such as a vacuum chuck is used.
Furthermore, as a method of positioning the first work W1 with respect to the first curved surface 1a, a position detector such as a CCD camera detects the carry-in position of the first work W1 with respect to the first curved surface 1a. A method of finely adjusting the carry-in position of the first work W1 by using the There is a method of setting the first work W1 in accordance with the positioning pins.
1 and 3 as a specific example of the first concave-convex mold 1, the first concave-convex mold 1 is used as a lower surface plate arranged in the lower Z direction, and the predetermined position of the first curved mold surface 1a , a glass substrate that becomes the first work W1 is set by being vacuum-sucked as the first work holding portion 1b.

第二凹凸型2は、第一凹凸型1又は第一凹凸型1と同形状に別途作製された型部材(鋳造物)を複製元とした複製品であり、第二ワークW2のサイズよりもXY方向に大きく形成され、第二凹凸型2において第二ワークW2の第二非貼合面W21とZ方向に対向する表側には、第二曲型面2aが形成される。
第二曲型面2aは、第一曲型面1aの複製による転写面である。詳しく説明すると、流動性に優れた液状の複製材2Rを用いて第一凹凸型1から注型することにより、第一曲型面1aが第二凹凸型2の表面に複製(転写)されて第二曲型面2aとなる。複製材2Rとしては、シリコーンゴムやシリコーン樹脂などの適度な弾性を有する軟質合成樹脂などを用いることが好ましい。この場合には、注型時において熱などによる母型(第二凹凸型2)の変形が少ないとともに、第一凹凸型1に向けた加圧により第二凹凸型2が少なくともZ方向に弾性変形して、第一ワークW1の第一曲型面1aと全面的に密着可能になる。
第二曲型面2aには、搬送手段5で貼り合わせ空間Sに搬入された第二ワークW2の第二非貼合面W21を着脱自在に仮保持する第二ワーク保持部2bが設けられる。第二ワーク保持部2bで第二曲型面2aの所定位置に対して、第二ワークW2の第二非貼合面W21がXY方向へ位置ズレ不能に仮保持される。
特に、複製材2Rがシリコーンゴムやシリコーン樹脂などの適度な粘着性を有する軟質合成樹脂などである場合には、第二ワーク保持部2bとして複製材2Rが有する粘着力のみで、第二ワークW2の第二非貼合面W21を位置ズレ不能に密着保持することが可能になる。
また、第二曲型面2aに対する第二ワークW2の位置決め方法としては、第一曲型面1aに対する第一ワークW1の位置決め方法と同様である。
第二凹凸型2の具体例として図1及び図3に示される場合には、複製品の第二凹凸型2をZ方向の上位に配置される上定盤として使用し、第二曲型面2aの所定位置には、第二ワークW2としてフィルム基板が複製材2Rの粘着力で落下不能にセットされる。
The second concave-convex mold 2 is a duplicate of the first concave-convex mold 1 or a mold member (casting) separately manufactured in the same shape as the first concave-convex mold 1, and is larger than the size of the second workpiece W2. A second curved surface 2a is formed on the front side of the second concave-convex mold 2 facing the second non-bonding surface W21 of the second workpiece W2 in the Z direction.
The second curved surface 2a is a transfer surface by copying the first curved surface 1a. More specifically, the first curved mold surface 1a is duplicated (transferred) to the surface of the second concave-convex mold 2 by casting from the first concave-convex mold 1 using a liquid replication material 2R having excellent fluidity. It becomes the second curved surface 2a. As the replication material 2R, it is preferable to use a soft synthetic resin having appropriate elasticity such as silicone rubber or silicone resin. In this case, deformation of the master mold (second concave-convex mold 2) due to heat or the like during casting is small, and the second concave-convex mold 2 is elastically deformed at least in the Z direction due to pressure directed toward the first concave-convex mold 1. As a result, the entire surface of the first curved surface 1a of the first workpiece W1 can be closely contacted.
The second curved mold surface 2a is provided with a second work holding portion 2b that detachably temporarily holds the second non-bonding surface W21 of the second work W2 carried into the bonding space S by the conveying means 5. As shown in FIG. The second non-bonding surface W21 of the second work W2 is temporarily held with respect to a predetermined position of the second curved surface 2a by the second work holding portion 2b so as not to be displaced in the XY directions.
In particular, when the replication material 2R is a soft synthetic resin having appropriate adhesiveness such as silicone rubber or silicone resin, the second workpiece W2 can be held by only the adhesive force of the replication material 2R as the second workpiece holder 2b. It becomes possible to closely hold the second non-bonding surface W21 of the second non-bonding surface W21 so as not to be displaced.
Further, the method of positioning the second work W2 with respect to the second curved surface 2a is the same as the method of positioning the first work W1 with respect to the first curved surface 1a.
1 and 3 as a specific example of the second concave-convex mold 2, the second concave-convex mold 2 of the replica is used as an upper surface plate arranged above in the Z direction, and the second curved mold surface At a predetermined position 2a, a film substrate as a second work W2 is set so as not to fall off due to the adhesive force of the replication material 2R.

第一保持部材31は、金属などの剛体で歪み(撓み)変形しない厚さの平板状に形成され、第一保持部材31の表側は、第一凹凸型1の第一非型面1cとZ方向へ対向して着脱自在に保持する第一保持面31aを有している。第一保持面31aには、第一凹凸型1の第一非型面1cを着脱自在に保持する第一保持チャック31bが設けられる。
第一保持面31aの具体例として図1及び図3に示される場合には、全体的に略平滑な平面状に形成され、第一保持チャック31bとしては、真空吸着などの差圧チャックやメカニカルチャックなどを用いている。
第二保持部材32は、金属などの剛体で歪み(撓み)変形しない厚さの平板状に形成され、第二保持部材32の表側は、第二凹凸型2の第二非型面2cとZ方向へ対向して接触する第二保持面32aを有している。第二保持面32aには、第二凹凸型2の第二非型面2cを着脱自在に保持する第二保持チャック32bが設けられる。
第二保持面32aの一例(第一実施形態)として図1(a)~(c)に示される場合には、全体的に略平滑な面に形成され、第二保持チャック32bとしては、真空吸着などの差圧チャックなどを用いている。
また、第二保持面32aの他の例(第二実施形態)として図3(a)~(c)に示される場合には、第二保持部材32の表側一部が第二凹凸型2の第二非型面2cに向けてZ方向へ部分的に突出する凸部32cを有する曲面状に形成され、第二保持チャック32bとしては、真空吸着などの差圧チャックなどを用いている。
The first holding member 31 is a rigid body such as a metal and is formed in a flat plate shape with a thickness that does not cause distortion (bending) deformation. It has a first holding surface 31a that is detachably held facing the direction. A first holding chuck 31b that detachably holds the first non-mold surface 1c of the first concave-convex mold 1 is provided on the first holding surface 31a.
When the first holding surface 31a is shown in FIGS. 1 and 3 as a specific example, the first holding surface 31a is generally formed in a substantially flat planar shape. I use a chuck.
The second holding member 32 is a rigid body such as metal and is formed in a flat plate shape with a thickness that does not cause distortion (bending) deformation. It has a second holding surface 32a that faces and contacts in the direction. A second holding chuck 32b that detachably holds the second non-mold surface 2c of the second concave-convex mold 2 is provided on the second holding surface 32a.
1(a) to 1(c) as an example (first embodiment) of the second holding surface 32a, the second holding chuck 32b is formed to have a generally smooth surface. Differential pressure chucks such as adsorption are used.
3A to 3C as another example (second embodiment) of the second holding surface 32a, a part of the front side of the second holding member 32 is the second concave-convex mold 2. It is formed in a curved surface shape having a convex portion 32c partially protruding in the Z direction toward the second non-mold surface 2c, and a differential pressure chuck such as a vacuum chuck is used as the second holding chuck 32b.

駆動部3は、第一保持部材31又は第二保持部材32のいずれか一方か若しくは両方をZ方向へ相対的に往復動させるアクチュエーターなどで構成され、後述する制御部4により貼り合わせ空間Sに対して第一ワークW1や第二ワークW2を搬入又は搬出する搬送手段5と連動するように作動制御される。
制御部4による駆動部3の制御例としては、図1(b)や図3(a)に示されるように、貼り合わせ空間Sに搬入された第一ワークW1と第二ワークW2を第一凹凸型1と第二凹凸型2にそれぞれ受け渡す前の初期状態で、駆動部3が第一保持部材31又は第二保持部材32のいずれか一方を他方からZ方向へ相対的に離隔移動させるか、若しくは第一保持部材31及び第二保持部材32の両方を互いにZ方向へ相対的に離隔移動させている。その後は、図1(c)や図3(b)(c)に示されるように、駆動部3が第一保持部材31又は第二保持部材32のいずれか一方を他方に向けてZ方向へ接近移動させるか、若しくは第一保持部材31及び第二保持部材32の両方を互いにZ方向へ接近移動させている。これにより、第一ワークW1と第二ワークW2がシール材W3を挟んでZ方向へ重ね合わされ、必要がある場合には更に加圧して貼り合わせる。貼り合わせが完了した後は、第一保持部材31や第二保持部材32がZ方向へ相対的に離隔移動して初期状態に戻る。
駆動部3の具体例として図示例の場合には、第二保持部材32のみを駆動部3と連係させて、第二保持部材32を第一保持部材31に向けてZ方向へ相対的に往復動させている。
The drive unit 3 is configured by an actuator or the like that relatively reciprocates either one or both of the first holding member 31 and the second holding member 32 in the Z direction. On the other hand, the operation is controlled so as to interlock with the conveying means 5 for carrying in or carrying out the first work W1 or the second work W2.
As an example of control of the drive unit 3 by the control unit 4, as shown in FIGS. In the initial state before being transferred to the concave-convex mold 1 and the second concave-convex mold 2, the driving unit 3 relatively separates either the first holding member 31 or the second holding member 32 from the other in the Z direction. Alternatively, both the first holding member 31 and the second holding member 32 are relatively moved away from each other in the Z direction. After that, as shown in FIGS. 1(c) and 3(b)(c), the drive unit 3 moves either the first holding member 31 or the second holding member 32 toward the other in the Z direction. Alternatively, both the first holding member 31 and the second holding member 32 are moved closer to each other in the Z direction. As a result, the first work W1 and the second work W2 are superimposed in the Z direction with the sealing material W3 interposed therebetween, and if necessary, further pressure is applied to bond them together. After the bonding is completed, the first holding member 31 and the second holding member 32 are relatively moved apart in the Z direction to return to the initial state.
In the illustrated example as a specific example of the drive unit 3, only the second holding member 32 is linked to the drive unit 3, and the second holding member 32 is relatively reciprocated in the Z direction toward the first holding member 31. I am moving

貼り合わせ空間Sは、第一ワークW1及び第二ワークW2の周囲に形成され、それ以外に少なくとも第一凹凸型1,第二凹凸型2,駆動部3や第一保持部材31,第二保持部材32が配備される。
貼り合わせ空間Sにおいて第一保持部材31と第二保持部材32は、表側の第一保持面31aと第二保持面32aがZ方向へ対向するように配設される。この対向状態で、第一保持部材31の第一保持面31aに対しては、第一保持チャック31bで第一凹凸型1の第一非型面1cが着脱自在に保持される。第二保持部材32の第二保持面32aに対しては、第二保持チャック32bで第二凹凸型2の第二非型面2cが着脱自在に保持される。 これにより、第一保持部材31に保持された第一凹凸型1の第一曲型面1aに対して、
搬送手段5で貼り合わせ空間Sに搬入した第一ワークW1の第一非貼合面W11を第一ワーク保持部1bで仮保持することが可能になる。第二保持部材32に保持された第二凹凸型2の第二曲型面2aに対しては、搬送手段5で貼り合わせ空間Sに搬入した第二ワークW2の第二非貼合面W21を第二ワーク保持部2bで仮保持することが可能になる。
また必要に応じて、貼り合わせ空間Sは、大気雰囲気から所定真空度の減圧雰囲気まで変圧調整可能に構成することや、常温雰囲気から所定の高温雰囲気まで加熱調整可能に構成することが好ましい。
貼り合わせ空間Sを真空チャンバーなどからなる真空装置(図示しない)の内部に形成することで、第一ワークW1と第二ワークW2が真空雰囲気で貼り合わせることが可能になる。貼り合わせ空間Sを加熱装置(図示しない)の内部に形成することで、第一ワークW1と第二ワークW2が高温雰囲気で貼り合わせることが可能になる。
さらに、真空雰囲気で第一ワークW1と第二ワークW2を重ね合わせた後に加熱して接着層W3により熱接着する場合には、第一凹凸型1と第二凹凸型2の間に第一ワークW1及び第二ワークW2を挟み込んで一体化された重合体を、第一保持部材31と第二保持部材32から取り外して搬出し、真空装置とは別個に構成された加熱炉(図示しない)の内部に搬入して、錘などで荷重を掛けながら加熱することで可能になる。
The bonding space S is formed around the first workpiece W1 and the second workpiece W2, and at least the first concave-convex mold 1, the second concave-convex mold 2, the drive unit 3, the first holding member 31, and the second holding member 31. A member 32 is deployed.
In the bonding space S, the first holding member 31 and the second holding member 32 are arranged so that the first holding surface 31a and the second holding surface 32a on the front side face each other in the Z direction. In this facing state, the first holding chuck 31 b detachably holds the first non-molding surface 1 c of the first concave-convex mold 1 to the first holding surface 31 a of the first holding member 31 . The second non-molding surface 2c of the second concave-convex mold 2 is detachably held on the second holding surface 32a of the second holding member 32 by the second holding chuck 32b. As a result, with respect to the first curved surface 1a of the first concave-convex mold 1 held by the first holding member 31,
It becomes possible to temporarily hold the first non-bonding surface W11 of the first work W1 carried into the bonding space S by the conveying means 5 by the first work holding portion 1b. The second non-bonding surface W21 of the second workpiece W2 carried into the bonding space S by the conveying means 5 is placed on the second curved surface 2a of the second concave-convex mold 2 held by the second holding member 32. It becomes possible to temporarily hold the work by the second work holding portion 2b.
If necessary, it is preferable that the bonding space S is configured so that the pressure can be adjusted from an atmospheric atmosphere to a reduced pressure atmosphere of a predetermined degree of vacuum, or that heating can be adjusted from a room temperature atmosphere to a predetermined high temperature atmosphere.
By forming the bonding space S inside a vacuum device (not shown) such as a vacuum chamber, the first work W1 and the second work W2 can be bonded together in a vacuum atmosphere. By forming the bonding space S inside a heating device (not shown), the first work W1 and the second work W2 can be bonded together in a high-temperature atmosphere.
Furthermore, when the first work W1 and the second work W2 are overlapped in a vacuum atmosphere and then heated to be thermally bonded by the adhesive layer W3, the first work W1 and the second work W2 are placed between the first uneven mold 1 and the second uneven mold 2. The polymer integrated by sandwiching W1 and the second work W2 is removed from the first holding member 31 and the second holding member 32, carried out, and placed in a heating furnace (not shown) configured separately from the vacuum device. It is possible by carrying it inside and heating it while applying a load with a weight or the like.

制御部4は、駆動部3,第一ワークW1や第二ワークW2の搬送手段5とそれぞれ電気的に接続するコントローラーである。
このコントローラーは、それ以外にも真空装置や加熱装置などの駆動源(図示しない)などとも電気的に接続している。
制御部4となるコントローラーは、その制御回路(図示しない)に予め設定されたプログラムに従って、予め設定されたタイミングで順次それぞれ作動制御している。
そして、制御部4の制御回路に設定されたプログラムを、貼合デバイスDの貼合方法として説明する。
本発明の実施形態に係る曲面ワーク貼合装置Aを用いた曲面ワーク貼合方法は、第一凹凸型1から第二凹凸型2を作成する型取り工程と、第一凹凸型1の第一曲型面1aと第二凹凸型2の第二曲型面2aとの間に第一ワークW1と第二ワークW2を仮保持するセット工程と、第一凹凸型1又は第二凹凸型2のいずれか一方若しくは両方をZ方向へ相対的に接近移動して、第一ワークW1と第二ワークW2をZ方向に加圧する加圧工程と、を主要な工程として含んでいる。
さらに、第一ワークW1と第二ワークW2を貼り合わせ空間Sに入れる搬入工程と、貼り合わされた貼合デバイスDを貼り合わせ空間Sから取り出す搬出工程と、を含むことが好ましい。
The control unit 4 is a controller that is electrically connected to the driving unit 3 and the conveying means 5 for the first work W1 and the second work W2.
This controller is also electrically connected to drive sources (not shown) such as a vacuum device and a heating device.
The controller, which serves as the control unit 4, sequentially controls operations at preset timings according to a preset program in its control circuit (not shown).
A program set in the control circuit of the controller 4 will be described as a lamination method of the lamination device D. FIG.
A curved workpiece bonding method using a curved workpiece bonding apparatus A according to an embodiment of the present invention comprises a mold taking step of creating a second uneven mold 2 from a first uneven mold 1, A setting step of temporarily holding the first workpiece W1 and the second workpiece W2 between the curved mold surface 1a and the second curved mold surface 2a of the second concave-convex mold 2; A main process includes a pressurizing process in which either one or both of them are relatively moved in the Z direction to press the first work W1 and the second work W2 in the Z direction.
Further, it is preferable to include a carry-in step of putting the first work W1 and the second work W2 into the bonding space S and a carry-out step of taking out the bonded device D from the bonding space S.

型取り工程では、図1(a)に示されるように、複製材2Rを用いた注型によって、第一凹凸型1を複製元とした複製品となる第二凹凸型2が作成される。これにより、第二凹凸型2の第二曲型面2aが第一凹凸型1の第一曲型面1aからの転写面となる。
型取り工程の具体例として図示例の場合には、先ず型枠6の内側に複製元となる第一凹凸型1を入れて型枠6の底部6aに固定する。その次に液状の複製材2Rを第一凹凸型1が埋まるまで注入し、脱泡を行ってから固化させる。最後に固化が完了した母型を型枠6から取り出すことにより、複製品の第二凹凸型2が完成する。
セット工程では、図1(b)や図3(a)に示されるように、貼り合わせ空間Sに配備した第一保持部材31の第一保持面31aには、第一凹凸型1の第一非型面1cが保持され、第二保持部材32の第二保持面32aには、第二凹凸型2の第二非型面2cが保持される。この保持状態で搬入工程が開始される。
In the mold making step, as shown in FIG. 1A, a second concave-convex mold 2, which is a replica of the first concave-convex mold 1 as a copy source, is created by casting using a replication material 2R. As a result, the second curved surface 2 a of the second concave-convex mold 2 becomes a transfer surface from the first curved surface 1 a of the first concave-convex mold 1 .
In the illustrated example as a specific example of the molding process, first, the first concave-convex mold 1 to be the duplication source is placed inside the mold 6 and fixed to the bottom 6 a of the mold 6 . Next, the liquid replication material 2R is injected until the first concave-convex mold 1 is filled, defoamed, and then solidified. Finally, by removing the solidified matrix from the formwork 6, the second concave-convex mold 2 for the replica is completed.
In the setting step, as shown in FIGS. 1(b) and 3(a), the first holding surface 31a of the first holding member 31 arranged in the bonding space S is provided with the first holding surface 31a of the first concave-convex mold 1. The non-molding surface 1 c is held, and the second holding surface 32 a of the second holding member 32 holds the second non-molding surface 2 c of the second uneven mold 2 . The carrying-in process is started in this holding state.

搬入工程では、搬送手段5により第一ワークW1と第二ワークW2が外部空間から貼り合わせ空間Sに搬入され、第一ワーク保持部1bや第二ワーク保持部2bの作動により、第一凹凸型1の第一曲型面1aに第一ワークW1を受け渡し、第二凹凸型2の第二曲型面2aに第二ワークW2を受け渡して、第一ワークW1の第一貼合面W12と第二ワークW2の第二貼合面W22がZ方向へ離隔してそれぞれ仮保持される。
特に、第二ワークW2が曲面形状のフィルム又は薄板である場合には、先ず図2(a)に示されるように、第二凹凸型2の第二曲型面2aと同じ凹凸形状の保持面7aを有するトレー形状の保持台7に対し、保持面7aと嵌合するように第二ワークW2が装着されている。保持面7aの具体例としては、真空吸着などの差圧チャックなどを用いている。
保持面7aに対する第二ワークW2の装着位置は、それ以降も含めて位置決めピンやCCDカメラなどの位置検出器で位置決めされ、一時的に真空吸着などで仮固定することが好ましい。搬送手段5としては、圧縮気体の噴射機能及び吸引機能を有する搬送治具51が用いられ、第二ワークW2と僅かにZ方向へ離れた位置から搬送治具51より圧縮気体を、第二ワークW2の第二貼合面W22に向け噴射して、第二ワークW2のシワを伸ばして保持面7aの凹凸形状に沿わすことが好ましい。
その次に図2(b)に示されるように、搬送治具51からの吸引で第二ワークW2の第二貼合面W22を全面的に真空吸着して受け取る。
その後の搬入時には図2(c)に示されるように、搬送治具51が移動して第二ワークW2の第二非貼合面W21を第二凹凸型2の第二曲型面2aに受け渡す。図示例では、第二凹凸型2が第二曲型面2a及び第二ワーク保持部2bを上向きにしており、図1(b)や図3(a)に示したセット状態と上限反転しており、その後に第二ワークW2が受け渡された第二凹凸型2を上下反転して、第二保持部材32の第二保持面32aに第二保持チャック32bで保持される。
また、その他の例として図示しないが、搬送治具51を移動及び上下反転させて、セット状態の第二曲型面2a及び第二ワーク保持部2bが下向きの第二凹凸型2に対して、第二ワークW2の第二非貼合面W21を受け渡すことも可能である。
なお、図示例では、搬送治具51から圧縮気体を噴射したが、これに代えて保持台7の保持面7aから圧縮気体を噴射することや、搬送治具51及び保持面7aの両方から圧縮気体を噴射することなどの変更が可能である。
これにより、第二ワークW2が薄いフィルム状であってもシワが無く形状が安定した状態で第二凹凸型2に受け渡すことが可能になるため、その後の貼り合わせ動作が安定し、貼り合わせ完了後の貼合デバイスDに気泡が入ることや、内部応力が残ることなく、品質の高い貼り合わせを実現できる。
In the carry-in step, the first work W1 and the second work W2 are carried from the external space into the bonding space S by the transport means 5, and the first work holding part 1b and the second work holding part 2b are operated to move the first concave-convex mold. The first workpiece W1 is transferred to the first curved surface 1a of the second concave-convex mold 2, the second workpiece W2 is transferred to the second curved surface 2a of the second uneven mold 2, and the first bonding surface W12 of the first workpiece W1 and the second bonding surface W12 are transferred. The second bonding surfaces W22 of the two works W2 are separated in the Z direction and temporarily held.
In particular, when the second workpiece W2 is a curved film or thin plate, first, as shown in FIG. A second workpiece W2 is mounted on a tray-shaped holding base 7 having a holding surface 7a so as to fit with the holding surface 7a. As a specific example of the holding surface 7a, a differential pressure chuck such as a vacuum chuck is used.
The mounting position of the second work W2 with respect to the holding surface 7a is preferably positioned by a positioning pin or a position detector such as a CCD camera, and temporarily fixed by vacuum suction or the like. As the conveying means 5, a conveying jig 51 having a compressed gas injection function and a suction function is used. It is preferable to jet toward the second bonding surface W22 of W2, smooth out the wrinkles of the second work W2, and follow the uneven shape of the holding surface 7a.
Then, as shown in FIG. 2(b), the entire second bonding surface W22 of the second work W2 is vacuum-sucked and received by suction from the conveying jig 51. Next, as shown in FIG.
2(c), the conveying jig 51 is moved to receive the second non-bonding surface W21 of the second workpiece W2 on the second curved surface 2a of the second concave-convex mold 2. hand over. In the illustrated example, the second concave-convex mold 2 has the second curved surface 2a and the second workpiece holding portion 2b facing upward, and the set state shown in FIGS. After that, the second concave-convex mold 2 to which the second workpiece W2 is transferred is turned upside down and held on the second holding surface 32a of the second holding member 32 by the second holding chuck 32b.
In addition, although not shown as another example, the conveying jig 51 is moved and turned upside down so that the second curved mold surface 2a and the second work holding portion 2b in the set state with respect to the second concave-convex mold 2 facing downward, It is also possible to transfer the second non-bonding surface W21 of the second work W2.
In the illustrated example, the compressed gas is injected from the conveying jig 51, but instead of this, the compressed gas may be injected from the holding surface 7a of the holding base 7, or the compressed gas may be injected from both the conveying jig 51 and the holding surface 7a. Modifications such as injecting gas are possible.
As a result, even if the second work W2 is in the form of a thin film, it can be transferred to the second concave-convex mold 2 with no wrinkles and a stable shape. A high-quality bonding can be achieved without causing air bubbles to enter the bonding device D after completion or leaving internal stress.

加圧工程では、図1(c)や図3(b)(c)に示されるように、駆動部3による第一保持部材31や第二保持部材32の作動で、第一凹凸型1又は第二凹凸型2のいずれか一方若しくは両方がZ方向へ相対的に接近移動して、第一ワークW1の第一貼合面W12と第二ワークW2の第二貼合面W22が接着層W3を介してZ方向へ接するように重ね合わせる。これに続く相対的な接近移動で第一ワークW1と第二ワークW2をZ方向に加圧する。これにより、第一ワークW1の第一貼合面W12と第二ワークW2の第二貼合面W22が接着層W3を介して面全体で均一に接合される。
さらに、加圧工程における第一ワークW1と第二ワークW2の重ね合わせは、必要に応じて、真空雰囲気や高温雰囲気で行うことも可能である。
最終の搬出工程では、駆動部3による第一保持部材31や第二保持部材32の作動で、第一凹凸型1又は第二凹凸型2のいずれか一方若しくは両方がZ方向へ相対的に離隔移動して、第一ワーク保持部1bや第二ワーク保持部2bの作動解除により、第一凹凸型1の第一曲型面1aと第二凹凸型2の第二曲型面2aから、貼り合わせた貼合デバイスDが貼り合わせ空間Sから外部空間に搬出される。
In the pressurizing step, as shown in FIGS. 1(c), 3(b) and 3(c), the drive unit 3 operates the first holding member 31 and the second holding member 32 to press the first concave-convex mold 1 or Either one or both of the second concave-convex molds 2 are moved relatively closer in the Z direction, and the first bonding surface W12 of the first work W1 and the second bonding surface W22 of the second work W2 are brought into contact with the adhesive layer W3. are overlapped so as to be in contact with each other in the Z direction. The first work W1 and the second work W2 are pressurized in the Z direction by the subsequent relative approaching movement. As a result, the first bonding surface W12 of the first work W1 and the second bonding surface W22 of the second work W2 are uniformly bonded over the entire surface via the adhesive layer W3.
Furthermore, the stacking of the first work W1 and the second work W2 in the pressurizing process can be performed in a vacuum atmosphere or a high temperature atmosphere, if necessary.
In the final unloading step, the first holding member 31 and the second holding member 32 are operated by the drive unit 3, so that either one or both of the first concave-convex mold 1 and the second concave-convex mold 2 are relatively separated in the Z direction. By moving and releasing the operation of the first workpiece holding part 1b and the second workpiece holding part 2b, the first curved surface 1a of the first concave-convex mold 1 and the second curved surface 2a of the second concave-convex mold 2 are stuck. The combined bonded device D is carried out from the bonding space S to the external space.

次に、本発明の第二実施形態に係る曲面ワーク貼合装置A2について説明する。
図3(a)~(c)に示される第二実施形態の曲面ワーク貼合装置A2は、第二保持部材32′の第二保持面32a′がZ方向に突出する凸部32cを有する構成が、前述した第一実施形態とは異なり、それ以外の構成は第一実施形態と同じものである。
凸部32cは、図3(a)に一点鎖線で示される第一実施形態の第二保持部材32の第二保持面32aに比べて、部分的に突出しており、その中心からXY方向のいずれか一方又は両方などに向かって徐々に突出量が減少する山型状に形成することが好ましい。
図示例では、凸部32cがY方向のみに向かって徐々に突出量が減少する山型状に形成している。また、その他に図示しないが、凸部32cの形状や個数を図示例以外の形状や個数に変更することが可能である。
このため、図3(a)に示されるセット状態では、第二保持部材32′の第二保持面32a′及び凸部32cに対し、第二凹凸型2′の第二非型面2c′を当接させて第二保持チャック32bで第二凹凸型2′が保持される。図3(a)に一点鎖線で示される第一実施形態の第二凹凸型2に比べ、凸部32cで押された箇所がZ方向へ山型状に膨出変形して膨出部2dとなる。
これにより、第二ワークW2が少なくともZ方向に弾性変形可能な薄板状又はフィルム状である場合には、第二曲型面2a′の部分的な膨出部2dに倣って、第二ワークW2の一部が膨出変形し、第二貼合面W22に山型状の膨出変形部位W23が部分的に形成される。
このため、図3(b)に示される加圧工程の前半では、駆動部3で第二保持部材32′を介して第二凹凸型2′が第一凹凸型1に向け相対的に接近移動にすることにより、先ずは第二ワークW2の第二貼合面W22において山型状の膨出変形部位W23が、第一ワークW1の第一貼合面W12と部分的に接合する。
これに続く図3(c)に示される加圧工程の後半では、駆動部3による第一凹凸型1に向けた第二凹凸型2′の相対的な接近移動に伴う加圧で、第二貼合面W22の膨出変形部位W23及び第二曲型面2aの部分的な膨出部2dが徐々に潰れ変形して、膨出変形部位W23を中心とした周囲部位が順次圧接する。
これにより、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がって、最終的には第一貼合面W12の全体に第二貼合面W22の全体が圧接する。
Next, a curved surface workpiece bonding apparatus A2 according to a second embodiment of the present invention will be described.
3(a) to 3(c), the curved surface workpiece bonding apparatus A2 of the second embodiment has a configuration in which the second holding surface 32a' of the second holding member 32' has a convex portion 32c projecting in the Z direction. However, unlike the above-described first embodiment, the configuration other than that is the same as that of the first embodiment.
The protrusion 32c partially protrudes from the second holding surface 32a of the second holding member 32 of the first embodiment shown by the dashed line in FIG. It is preferable to form a mountain shape in which the amount of protrusion gradually decreases toward one or both of them.
In the illustrated example, the convex portion 32c is formed in a mountain shape in which the amount of protrusion gradually decreases only in the Y direction. In addition, although not shown, the shape and number of the protrusions 32c can be changed to a shape and number other than the illustrated example.
Therefore, in the set state shown in FIG. 3(a), the second non-molding surface 2c' of the second concave-convex mold 2' is placed against the second holding surface 32a' and the convex portion 32c of the second holding member 32'. The second concave-convex mold 2' is held by the second holding chuck 32b in contact. Compared to the second concave-convex mold 2 of the first embodiment shown by the dashed line in FIG. Become.
As a result, when the second work W2 is in the form of a thin plate or a film that can be elastically deformed at least in the Z direction, the second work W2 follows the partial bulging portion 2d of the second curved surface 2a'. is deformed to bulge, and a mountain-shaped bulging deformation portion W23 is partially formed on the second bonding surface W22.
Therefore, in the first half of the pressurizing step shown in FIG. 3(b), the second concave-convex mold 2' is relatively moved toward the first concave-convex mold 1 via the second holding member 32' by the drive unit 3. By doing so, first, the mountain-shaped swelling deformation portion W23 on the second bonding surface W22 of the second work W2 is partially bonded to the first bonding surface W12 of the first work W1.
In the latter half of the subsequent pressurizing step shown in FIG. The swelling deformation portion W23 of the bonding surface W22 and the partial swelling portion 2d of the second curved surface 2a are gradually crushed and deformed, and the surrounding portions around the swelling deformation portion W23 are sequentially pressed.
Thereby, the contact area of the second bonding surface W22 with respect to the first bonding surface W12 gradually widens, and finally the entire second bonding surface W22 is pressed against the entire first bonding surface W12.

このような本発明の実施形態に係る曲面ワーク貼合装置A(A1,A2)及び曲面ワーク貼合方法によると、駆動部3の接近移動により第一凹凸型1と第二凹凸型2,2′が相対的に接近移動して、第一曲型面1aと第一曲型面1aの転写面である第二曲型面2a,2a′との間に、第一ワークW1と第二ワークW2が厚み方向(Z方向)に(接着層W3を挟んで)重ね合わされる。
これに続く駆動部3による第一凹凸型1と第二凹凸型2,2′の相対的な接近移動に伴い、第一ワークW1と第二ワークW2を厚み方向(Z方向)に加圧して、第一ワークW1の第一貼合面W12と第二ワークW2の第二貼合面W22が接合される。
したがって、三次元曲面形状の第一ワークW1と第二ワークW2を面全体で均一に貼り合わせることができる。
その結果、曲面物体の曲面部と対応するキャビティの屈曲弧面と、突き当てブロックの屈曲面が別々に作成される従来のものに比べ、第二曲型面2aが第一曲型面1aの転写面であるため、加工精度の僅かな違いが発生せず、第一ワークW1及び第二ワークW2が複雑な三次元曲面形状になっても、第一貼合面W12と第二貼合面W22を容易で且つ確実に均一な貼合デバイスDを作成できる。
これにより、貼り合わせ精度の向上が図れる。
According to the curved workpiece bonding apparatus A (A1, A2) and the curved workpiece bonding method according to the embodiment of the present invention, the first uneven mold 1 and the second uneven mold 2,2 ' move relatively closer to each other, and between the first curved surface 1a and the second curved surfaces 2a, 2a' which are transfer surfaces of the first curved surface 1a, the first workpiece W1 and the second workpiece W2 is overlaid (with an adhesive layer W3 interposed therebetween) in the thickness direction (Z direction).
As the driving unit 3 subsequently moves the first concave-convex mold 1 and the second concave-convex mold 2, 2' toward each other, the first work W1 and the second work W2 are pressed in the thickness direction (Z direction). , the first bonding surface W12 of the first work W1 and the second bonding surface W22 of the second work W2 are bonded.
Therefore, the first workpiece W1 and the second workpiece W2 having three-dimensional curved surfaces can be evenly bonded together over the entire surface.
As a result, the second curved surface 2a is different from the first curved surface 1a, compared to the conventional method in which the curved surface of the cavity corresponding to the curved surface of the curved object and the curved surface of the abutment block are separately formed. Since it is a transfer surface, even if the first work W1 and the second work W2 have a complicated three-dimensional curved surface shape, the first bonding surface W12 and the second bonding surface do not cause a slight difference in processing accuracy. W22 can easily and reliably produce a uniform bonded device D.
As a result, the bonding precision can be improved.

ところで、第一ワークW1や第二ワークW2は、それらの加工精度の僅かな違いにより、僅かな寸法誤差が生じる。寸法誤差の具体例としては、製品毎に僅かな厚みムラ,凹凸部位の僅かな位置ズレなどが生じることがある。
そこで、第二凹凸型2,2′は、弾性を有する複製材2Rにより第一凹凸型1を複製元として形成されることが好ましい。
この場合には、複製材2Rからなる第二凹凸型2が少なくとも厚み方向(Z方向)に弾性変形可能であるため、第一ワークW1や第二ワークW2の製品毎に僅かな厚みムラが生じても、僅かな厚みムラを第二凹凸型2の弾性変形で吸収可能となる。
さらに、第一ワークW1や第二ワークW2の製品毎において凹凸部位の相対位置に僅かな位置ズレが生じても、凹凸部位の相対位置の僅かな位置ズレを第二凹凸型2の弾性変形で吸収可能となる。
したがって、三次元曲面形状の第一ワークW1と第二ワークW2をそれらの僅かな寸法誤差に影響されることなく面全体で均一に貼り合わせることができる。
その結果、貼り合わせ精度の更なる向上が図れる。
これに加えて、複製材2Rからなる第二凹凸型2は、機械加工によるものに比べ、高精度な複製品を簡単に大量生産できて、コストの低減化も図れる。
また、粘着性が有る複製材2Rからなる第二凹凸型2を、第一凹凸型1よりも厚み方向(Z方向)の上位に配置した場合には、複製材2Rが有する粘着力で第二ワークW2の第二非貼合面W21を落下不能に保持できて、貼り合わせ動作の雰囲気が大気圧中に限らず真空中であっても第二ワークW2(第二貼合面W22)を第一ワークW1(第一貼合面W12)と簡単で且つ確実に貼り合わせることができる。
By the way, the first work W1 and the second work W2 have a slight dimensional error due to a slight difference in their machining accuracies. As specific examples of dimensional errors, slight thickness unevenness and slight positional deviation of uneven portions may occur for each product.
Therefore, the second concave-convex molds 2 and 2' are preferably formed by using the first concave-convex mold 1 as a duplication source using the replication material 2R having elasticity.
In this case, since the second concave-convex mold 2 made of the replication material 2R is elastically deformable at least in the thickness direction (Z direction), slight thickness unevenness occurs for each product of the first work W1 and the second work W2. Even so, slight unevenness in thickness can be absorbed by elastic deformation of the second concave-convex mold 2 .
Furthermore, even if a slight positional deviation occurs in the relative positions of the uneven portions in each product of the first workpiece W1 and the second workpiece W2, the slight positional deviation in the relative positions of the uneven portions can be corrected by the elastic deformation of the second uneven mold 2. absorbable.
Therefore, the first workpiece W1 and the second workpiece W2 having three-dimensional curved surfaces can be uniformly pasted together over the entire surface without being affected by slight dimensional errors.
As a result, the bonding precision can be further improved.
In addition to this, the second concave-convex mold 2 made of the duplicate material 2R can easily mass-produce high-precision duplicates and reduce costs, as compared to machining.
Further, when the second concave-convex mold 2 made of the replication material 2R having adhesiveness is arranged higher in the thickness direction (Z direction) than the first concave-convex mold 1, the adhesion of the replication material 2R causes the second concave-convex mold 2 to move upward. The second non-bonding surface W21 of the workpiece W2 can be held so as not to fall, and the second workpiece W2 (second bonding surface W22) can be held in a vacuum state, not limited to atmospheric pressure. It can be easily and reliably bonded to one work W1 (first bonding surface W12).

さらに、第二ワークW2は、フィルム状の基板からなることことが好ましい。
この場合には、第二ワークW2の剛性が低くなり、第一ワークW1の凹凸部位に倣って第二ワークW2が変形可能になる。
したがって、三次元曲面形状の第一ワークW1(第一貼合面W12)に第二ワークW2(第二貼合面W22)を面全体で均一に密着させることができる。
その結果、貼り合わせ精度の更なる向上が図れる。
特に、第二凹凸型2が、第一凹凸型1の第一曲型面1aを複製元とした弾性変形可能な複製材2Rからなる場合には、第一ワークW1や第二ワークW2の僅かな寸法誤差に影響されることなく、第一貼合面W12に第二貼合面W22を面全体で均一に密着させることができる。
Furthermore, the second work W2 is preferably made of a film-like substrate.
In this case, the rigidity of the second work W2 is lowered, and the second work W2 can be deformed following the irregularities of the first work W1.
Therefore, the second workpiece W2 (second bonding surface W22) can be uniformly adhered to the three-dimensional curved first workpiece W1 (first bonding surface W12) over the entire surface.
As a result, the bonding precision can be further improved.
In particular, when the second concave-convex mold 2 is made of an elastically deformable replication material 2R having the first curved surface 1a of the first concave-convex mold 1 as the replication source, the first workpiece W1 and the second workpiece W2 are slightly deformed. The second bonding surface W22 can be uniformly adhered to the first bonding surface W12 over the entire surface without being affected by any dimensional error.

また、図3(a)~(c)に示される第二実施形態の曲面ワーク貼合装置A2によると、第二保持部材32′の第二保持面32a′及び凸部32cに沿って、第二凹凸型2′の第二非型面2c′を保持することにより、第二凹凸型2′の第二曲型面2a′において凸部32cで押された箇所が厚み方向(Z方向)に膨出変形する。
このため、第二曲型面2a′の部分的な膨出部2dに倣って、第二ワークW2の第二貼合面W22に膨出変形部位W23が部分的に形成される。
この膨出変形状態で第一凹凸型1が第二凹凸型2に向け相対的に接近移動にすることにより、第二ワークW2の第二貼合面W22において膨出変形部位W23が、第一ワークW1の第一貼合面W12と部分的に接合する。
これに続く第一凹凸型1に対する第二凹凸型2′の相対的な接近移動に伴う加圧で、第二貼合面W22の膨出変形部位W23及び第二曲型面2aの部分的な膨出部2dが徐々に潰れ変形して、膨出変形部位W23を中心とした周囲部位が順次圧接する。
これにより、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がって、最終的には第一貼合面W12の全体に第二貼合面W22の全体が圧接する。
したがって、三次元曲面形状の第一ワークW1の第一貼合面W12に対する第二ワークW2の第二貼合面W22の接合状態を常時安定させることができる。
その結果、安定的な接合で貼り合わせ精度の更なる向上が図れる。
また、貼り合わせ動作の雰囲気が大気圧中や真空中において、第一貼合面W12と第二貼合面W22の間にガスが存在する場合であっても、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がることにより、第一貼合面W12と第二貼合面W22の間から外側にガスが押し出される。このため、貼り合わされた第一貼合面W12と第二貼合面W22の内部にガスが残存せず、無気泡で高品質な貼合デバイスDを作成できる。
その結果、大気中や真空中に関係なくガスが存在する環境であっても、安定的な接合で貼り合わせ精度の更なる向上が図れる。
Further, according to the curved surface work bonding apparatus A2 of the second embodiment shown in FIGS. By holding the second non-molding surface 2c' of the two concave-convex mold 2', the portion pressed by the convex portion 32c on the second curved surface 2a' of the second concave-convex mold 2' is stretched in the thickness direction (Z direction). It swells and deforms.
Therefore, a bulging deformed portion W23 is partially formed on the second bonding surface W22 of the second workpiece W2 following the partial bulging portion 2d of the second curved surface 2a'.
In this bulging deformation state, the first concave-convex mold 1 is relatively moved toward the second concave-convex mold 2, so that the bulging deformation part W23 on the second bonding surface W22 of the second work W2 becomes the first It is partially bonded to the first bonding surface W12 of the work W1.
Subsequent pressurization accompanying the relative movement of the second uneven mold 2' to the first uneven mold 1 causes the swelling deformation portion W23 of the second bonding surface W22 and the second curved surface 2a to partially expand. The bulging portion 2d is gradually crushed and deformed, and the peripheral portions around the bulging deformation portion W23 are sequentially pressed.
Thereby, the contact area of the second bonding surface W22 with respect to the first bonding surface W12 gradually widens, and finally the entire second bonding surface W22 is pressed against the entire first bonding surface W12.
Therefore, the bonding state of the second bonding surface W22 of the second workpiece W2 to the first bonding surface W12 of the first workpiece W1 having a three-dimensional curved shape can be stabilized at all times.
As a result, the bonding precision can be further improved with stable bonding.
In addition, even if the atmosphere of the bonding operation is atmospheric pressure or vacuum and gas exists between the first bonding surface W12 and the second bonding surface W22, the first bonding surface W12 may As the contact area of the two bonding surfaces W22 gradually widens, the gas is pushed out from between the first bonding surface W12 and the second bonding surface W22. For this reason, no gas remains inside the bonded first bonding surface W12 and the second bonding surface W22, and a bubble-free, high-quality bonding device D can be produced.
As a result, even in an environment where gas exists regardless of whether it is in the air or in a vacuum, it is possible to achieve stable bonding and further improve the bonding accuracy.

なお、前示の実施形態(第一実施形態及び第二実施形態)では、Z方向の下位に第一ワークW1と第一凹凸型1を配置し、上位に第二ワークW2と第二凹凸型2を配置したが、これに限定されず、上位に第一ワークW1と第一凹凸型1を配置し、下位に第二ワークW2と第二凹凸型2を配置してもよい。
これに加えて、第一凹凸型1が鋳造物であって第二凹凸型2が複製品である場合を説明したが、これに限定されず、第二凹凸型2が鋳造物であり、第一凹凸型1が第二凹凸型2又は第二凹凸型2と同形状に別途作製した型部材(鋳造物)の複製品であってもよい。特に、第二凹凸型2が鋳造物であって且つ第二凹凸型2と対応する第二ワークW2のZ方向の凹凸高さが比較的に低い場合には、第二ワークW2の外表面に電鋳法などによるメッキ層(図示しない)を形成することも可能である。
さらに、第一ワーク保持部1b,第一保持チャック31b,第二保持チャック32bとして真空吸着などの差圧チャックを用い、第二ワーク保持部2bとして複製材2Rの粘着力のみで密着保持したが、これに限定されず、差圧チャックや複製材2Rの粘着力に代えて粘着部材などの粘着チャック,静電吸着などの静電チャック,磁石による固定保持,メカニカルチャックなどを用いてもよい。特に、真空雰囲気で貼り合わせを行う場合には、磁石による固定保持やメカニカルチャックによる固定保持方法などが有効である。
また、保持台7の保持面7aとして真空吸着などの差圧チャックを用いたが、これに限定されず、差圧チャックに代えて粘着部材などの粘着チャック,静電吸着などの静電チャックなどを用いてもよい。
In the above-described embodiments (first embodiment and second embodiment), the first work W1 and the first concave-convex mold 1 are arranged in the lower position in the Z direction, and the second work W2 and the second concave-convex mold are arranged in the upper position. 2 is arranged, but it is not limited to this, and the first workpiece W1 and the first concave-convex mold 1 may be arranged on the upper side, and the second workpiece W2 and the second concave-convex mold 2 may be arranged on the lower side.
In addition to this, the case where the first concave-convex mold 1 is a casting and the second concave-convex mold 2 is a replica has been described, but the present invention is not limited to this, and the second concave-convex mold 2 is a casting and the second concave-convex mold 2 is a replica. The first concave-convex mold 1 may be the second concave-convex mold 2 or a replica of a mold member (casting) separately produced in the same shape as the second concave-convex mold 2 . In particular, when the second uneven mold 2 is a casting and the height of the unevenness in the Z direction of the second workpiece W2 corresponding to the second uneven mold 2 is relatively low, the outer surface of the second workpiece W2 has It is also possible to form a plated layer (not shown) by an electroforming method or the like.
Further, a differential pressure chuck such as a vacuum chuck is used as the first work holding portion 1b, the first holding chuck 31b, and the second holding chuck 32b, and the second work holding portion 2b is held in close contact only by the adhesive force of the replication material 2R. However, instead of the differential pressure chuck and the adhesive force of the replication material 2R, an adhesive chuck such as an adhesive member, an electrostatic chuck such as electrostatic adsorption, a fixed holding by a magnet, a mechanical chuck, or the like may be used. In particular, when bonding is performed in a vacuum atmosphere, fixing and holding methods using a magnet, a fixing and holding method using a mechanical chuck, etc. are effective.
Further, although a differential pressure chuck such as a vacuum chuck is used as the holding surface 7a of the holding table 7, the present invention is not limited to this. may be used.

A,A1,A2 曲面ワーク貼合装置 1 第一凹凸型
1a 第一曲型面 2(2′) 第二凹凸型
2a(2a′) 第二曲型面 2c(2c′) 第二非型面
2R 複製材 3 駆動部
32′ 第二保持部材 32a′ 第二保持面
32c 凸部 4 制御部
W1 第一ワーク W11 第一非貼合面
W12 第一貼合面 W2 第二ワーク
W21 第二非貼合面 W22 第二貼合面
A, A1, A2 Curved surface workpiece bonding device 1 First uneven mold 1a First curved surface 2 (2') Second uneven mold 2a (2a') Second curved surface 2c (2c') Second non-mold surface 2R replication material 3 drive unit 32' second holding member 32a' second holding surface 32c convex portion 4 control unit W1 first work W11 first non-bonding surface W12 first bonding surface W2 second work W21 second non-bonding surface Mating surface W22 Second bonding surface

このような課題を解決するために本発明に係る曲面ワーク貼合装置は、三次元曲面の薄板状に形成された回路基板を含む第一ワークと、薄板状の第二ワークを貼り合わせる曲面ワーク貼合装置であって、前記第一ワークの第一非貼合面が着脱自在に保持される第一曲型面を有する第一凹凸型と、前記第二ワークの第二非貼合面が着脱自在に保持される第二曲型面を有する第二凹凸型と、前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記第一ワーク及び前記第二ワークの厚み方向へ相対的に接近移動させる駆動部と、前記駆動部を作動制御する制御部と、を備え、前記第二曲型面は、前記第一曲型面の複製による転写面であり、前記制御部は、前記駆動部の接近移動により、前記第一凹凸型の前記第一曲型面と前記第二凹凸型の前記第二曲型面との間に、前記第一ワークと前記第二ワークが前記厚み方向に挟み込まれて重ね合わされ、前記第一ワークと前記第二ワークを前記厚み方向に加圧して、前記第一ワークの第一貼合面と前記第二ワークの第二貼合面が面全体で接合されるように制御することを特徴とする。
また、このような課題を解決するために本発明に係る曲面ワーク貼合方法は、三次元曲面の薄板状に形成された回路基板を含む第一ワークと、薄板状の第二ワークを貼り合わせる曲面ワーク貼合方法であって、第一曲型面を有する第一凹凸型から第二曲型面を有する第二凹凸型が作成される型取り工程と、前記第一凹凸型の前記第一曲型面に前記第一ワークの第一非貼合面を着脱自在に保持するとともに、前記第二凹凸型の前記第二曲型面に前記第二ワークの第二非貼合面を、前記第一ワーク及び前記第二ワークが厚み方向へ離隔して挟むように保持するセット工程と、前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記厚み方向へ相対的に接近移動して、前記第一ワークと前記第二ワークが前記厚み方向に加圧する加圧工程と、を含み、前記型取り工程では、前記第一曲型面の複製による転写面として前記第二曲型面が形成され、前記加圧工程では、前記第一凹凸型の前記第一曲型面と前記第二凹凸型の前記第二曲型面との間に、前記第一ワークと前記第二ワークを前記厚み方向に挟み込んで重ね合わせ、前記第一ワークと前記第二ワークを前記厚み方向に加圧して、前記第一ワークの第一貼合面と前記第二ワークの第二貼合面が面全体で接合されることを特徴とする。
In order to solve such problems, a curved work bonding apparatus according to the present invention is a curved work that bonds a first work including a circuit board formed in a thin plate shape with a three-dimensional curved surface, and a second work in a thin plate shape . A bonding apparatus, wherein a first concave-convex mold having a first curved surface on which a first non-bonding surface of the first work is detachably held, and a second non-bonding surface of the second work are A second concave-convex mold having a second curved surface which is detachably held, and one or both of the first concave-convex mold and the second concave-convex mold are moved in the thickness direction of the first work and the second work. A drive unit for relatively moving closer to each other, and a control unit for controlling the operation of the drive unit, wherein the second curved surface is a transfer surface obtained by duplicating the first curved surface, and the control unit comprises , the first work and the second work are moved between the first curved surface of the first concave-convex mold and the second curved surface of the second concave-convex mold by the approaching movement of the driving part. The first workpiece and the second workpiece are sandwiched and overlapped in the thickness direction, and the first bonding surface of the first workpiece and the second bonding surface of the second workpiece are pressed together in the thickness direction. It is characterized in that it is controlled to be joined as a whole .
Further, in order to solve such problems, a method for bonding a curved surface work according to the present invention is to bond a first work including a circuit board formed in a three-dimensional curved thin plate shape and a thin plate-like second work. A method for bonding curved workpieces, comprising: a molding step in which a second concave-convex mold having a second curved surface is created from a first concave-convex mold having a first curved surface; The first non-bonded surface of the first work is detachably held on the curved surface, and the second non-bonded surface of the second work is attached to the second curved surface of the second concave-convex mold. A setting step in which the first workpiece and the second workpiece are held so as to be separated in the thickness direction, and one or both of the first concave-convex mold and the second concave-convex mold are relatively approached in the thickness direction. a pressurizing step in which the first work and the second work are moved and pressurized in the thickness direction, and in the mold taking step, the second curved surface is used as a transfer surface by copying the first curved surface. A curved surface is formed, and in the pressing step, between the first curved surface of the first concave-convex mold and the second curved surface of the second concave-convex mold, the first workpiece and the second concave-convex mold are formed. Two works are sandwiched and overlapped in the thickness direction, the first work and the second work are pressed in the thickness direction, and the first bonding surface of the first work and the second bonding of the second work The faces are characterized in that they are joined across the face .

次に、本発明の第二実施形態に係る曲面ワーク貼合装置A2について説明する。
図3(a)~(c)に示される第二実施形態の曲面ワーク貼合装置A2は、第二保持部材32′の第二保持面32a′がZ方向に突出する凸部32cを有する構成が、前述した第一実施形態とは異なり、それ以外の構成は第一実施形態と同じものである。
凸部32cは、図3(a)に一点鎖線で示される第一実施形態の第二保持部材32の第二保持面32aに比べて、部分的に突出しており、その中心からXY方向のいずれか一方又は両方などに向かって徐々に突出量が減少する山型状に形成することが好ましい。
図示例では、凸部32cがY方向のみに向かって徐々に突出量が減少する山型状に形成している。また、その他に図示しないが、凸部32cの形状や個数を図示例以外の形状や個数に変更することが可能である。
このため、図3(a)に示されるセット状態では、第二保持部材32′の第二保持面32a′及び凸部32cに対し、第二凹凸型2′の第二非型面2c′を当接させて第二保持チャック32bで第二凹凸型2′が保持される。図3(a)に一点鎖線で示される第一実施形態の第二凹凸型2に比べ、凸部32cで押された箇所がZ方向へ山型状に膨出変形して膨出部2dとなる。
これにより、第二ワークW2が少なくともZ方向に弾性変形可能な薄板状又はフィルム状である場合には、第二曲型面2a′の部分的な膨出部2dに倣って、第二ワークW2の一部が膨出変形し、第二貼合面W22に山型状の膨出変形部位W23が部分的に形成される。
このため、図3(b)に示される加圧工程の前半では、駆動部3で第二保持部材32′を介して第二凹凸型2′が第一凹凸型1に向け相対的に接近移動にすることにより、先ずは第二ワークW2の第二貼合面W22において山型状の膨出変形部位W23が、第一ワークW1の第一貼合面W12と部分的に接合する。
これに続く図3(c)に示される加圧工程の後半では、駆動部3による第一凹凸型1に向けた第二凹凸型2′の相対的な接近移動に伴う加圧で、第二貼合面W22の膨出変形部位W23及び第二曲型面2aの部分的な膨出部2dが徐々に潰れ変形して、膨出変形部位W23を中心とした周囲部位が順次圧接する。
これにより、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がって、最終的には第一貼合面W12の全体に第二貼合面W22の全体が圧接する。
Next, a curved surface workpiece bonding apparatus A2 according to a second embodiment of the present invention will be described.
3(a) to 3(c), the curved surface workpiece bonding apparatus A2 of the second embodiment has a configuration in which the second holding surface 32a' of the second holding member 32' has a convex portion 32c projecting in the Z direction. However, unlike the above-described first embodiment, the configuration other than that is the same as that of the first embodiment.
The protrusion 32c partially protrudes from the second holding surface 32a of the second holding member 32 of the first embodiment shown by the dashed line in FIG. It is preferable to form a mountain shape in which the amount of protrusion gradually decreases toward one or both of them.
In the illustrated example, the convex portion 32c is formed in a mountain shape in which the amount of protrusion gradually decreases only in the Y direction. In addition, although not shown, the shape and number of the protrusions 32c can be changed to a shape and number other than the illustrated example.
Therefore, in the set state shown in FIG. 3(a), the second non-molding surface 2c' of the second concave-convex mold 2' is placed against the second holding surface 32a' and the convex portion 32c of the second holding member 32'. The second concave-convex mold 2' is held by the second holding chuck 32b in contact. Compared to the second concave-convex mold 2 of the first embodiment shown by the dashed line in FIG. Become.
As a result, when the second work W2 is in the form of a thin plate or a film that can be elastically deformed at least in the Z direction, the second work W2 follows the partial bulging portion 2d of the second curved surface 2a'. is deformed to bulge, and a mountain-shaped bulging deformation portion W23 is partially formed on the second bonding surface W22.
Therefore, in the first half of the pressurizing step shown in FIG. 3(b), the second concave-convex mold 2' is relatively moved toward the first concave-convex mold 1 via the second holding member 32' by the drive unit 3. By doing so, first, the mountain-shaped swelling deformation portion W23 on the second bonding surface W22 of the second work W2 is partially bonded to the first bonding surface W12 of the first work W1.
In the latter half of the subsequent pressurizing step shown in FIG. The bulging deformation portion W23 of the bonding surface W22 and the partial bulging portion 2d of the second curved surface 2a ' are gradually crushed and deformed, and the peripheral portions around the bulging deformation portion W23 are sequentially pressed.
Thereby, the contact area of the second bonding surface W22 with respect to the first bonding surface W12 gradually widens, and finally the entire second bonding surface W22 is pressed against the entire first bonding surface W12.

また、図3(a)~(c)に示される第二実施形態の曲面ワーク貼合装置A2によると、第二保持部材32′の第二保持面32a′及び凸部32cに沿って、第二凹凸型2′の第二非型面2c′を保持することにより、第二凹凸型2′の第二曲型面2a′において凸部32cで押された箇所が厚み方向(Z方向)に膨出変形する。
このため、第二曲型面2a′の部分的な膨出部2dに倣って、第二ワークW2の第二貼合面W22に膨出変形部位W23が部分的に形成される。
この膨出変形状態で第一凹凸型1が第二凹凸型2に向け相対的に接近移動にすることにより、第二ワークW2の第二貼合面W22において膨出変形部位W23が、第一ワークW1の第一貼合面W12と部分的に接合する。
これに続く第一凹凸型1に対する第二凹凸型2′の相対的な接近移動に伴う加圧で、第二貼合面W22の膨出変形部位W23及び第二曲型面2aの部分的な膨出部2dが徐々に潰れ変形して、膨出変形部位W23を中心とした周囲部位が順次圧接する。
これにより、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がって、最終的には第一貼合面W12の全体に第二貼合面W22の全体が圧接する。
したがって、三次元曲面形状の第一ワークW1の第一貼合面W12に対する第二ワークW2の第二貼合面W22の接合状態を常時安定させることができる。
その結果、安定的な接合で貼り合わせ精度の更なる向上が図れる。
また、貼り合わせ動作の雰囲気が大気圧中や真空中において、第一貼合面W12と第二貼合面W22の間にガスが存在する場合であっても、第一貼合面W12に対する第二貼合面W22の接触領域が徐々に広がることにより、第一貼合面W12と第二貼合面W22の間から外側にガスが押し出される。このため、貼り合わされた第一貼合面W12と第二貼合面W22の内部にガスが残存せず、無気泡で高品質な貼合デバイスDを作成できる。
その結果、大気中や真空中に関係なくガスが存在する環境であっても、安定的な接合で貼り合わせ精度の更なる向上が図れる。
Further, according to the curved surface work bonding apparatus A2 of the second embodiment shown in FIGS. By holding the second non-molding surface 2c' of the two concave-convex mold 2', the portion pressed by the convex portion 32c on the second curved surface 2a' of the second concave-convex mold 2' is stretched in the thickness direction (Z direction). It swells and deforms.
Therefore, a bulging deformed portion W23 is partially formed on the second bonding surface W22 of the second workpiece W2 following the partial bulging portion 2d of the second curved surface 2a'.
In this bulging deformation state, the first concave-convex mold 1 is relatively moved toward the second concave-convex mold 2, so that the bulging deformation part W23 on the second bonding surface W22 of the second work W2 becomes the first It is partially bonded to the first bonding surface W12 of the work W1.
Subsequent pressurization accompanying the relative movement of the second concave-convex mold 2' to the first concave-convex mold 1 causes the swelling deformation portion W23 of the second bonding surface W22 and the second curved mold surface 2a ' to partially expand. The bulging portion 2d is gradually crushed and deformed, and the peripheral portions centering on the bulging deformation portion W23 are sequentially pressed.
Thereby, the contact area of the second bonding surface W22 with respect to the first bonding surface W12 gradually widens, and finally the entire second bonding surface W22 is pressed against the entire first bonding surface W12.
Therefore, the bonding state of the second bonding surface W22 of the second workpiece W2 to the first bonding surface W12 of the first workpiece W1 having a three-dimensional curved shape can be stabilized at all times.
As a result, the bonding precision can be further improved with stable bonding.
In addition, even if the atmosphere of the bonding operation is atmospheric pressure or vacuum and gas exists between the first bonding surface W12 and the second bonding surface W22, the first bonding surface W12 may As the contact area of the two bonding surfaces W22 gradually widens, the gas is pushed out from between the first bonding surface W12 and the second bonding surface W22. For this reason, no gas remains inside the bonded first bonding surface W12 and the second bonding surface W22, and a bubble-free, high-quality bonding device D can be produced.
As a result, even in an environment where gas exists regardless of whether it is in the air or in a vacuum, it is possible to achieve stable bonding and further improve the bonding accuracy.

Claims (5)

三次元曲面の薄板状に形成された第一ワークと第二ワークを貼り合わせる曲面ワーク貼合装置であって、
前記第一ワークの第一非貼合面が着脱自在に保持される第一曲型面を有する第一凹凸型と、
前記第二ワークの第二非貼合面が着脱自在に保持される第二曲型面を有する第二凹凸型と、
前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記第一ワーク及び前記第二ワークの厚み方向へ相対的に接近移動させる駆動部と、
前記駆動部を作動制御する制御部と、を備え、
前記第二曲型面は、前記第一曲型面の複製による転写面であり、
前記制御部は、前記駆動部の接近移動により、前記第一凹凸型の前記第一曲型面と前記第二凹凸型の前記第二曲型面との間に、前記第一ワークと前記第二ワークが前記厚み方向に重ね合わされ、前記第一ワークと前記第二ワークを前記厚み方向に加圧して、前記第一ワークの第一貼合面と前記第二ワークの第二貼合面が接合されるように制御することを特徴とする曲面ワーク貼合装置。
A curved surface work bonding device for bonding a first work and a second work formed in a thin plate shape with a three-dimensional curved surface,
a first concave-convex mold having a first curved surface on which the first non-bonding surface of the first work is detachably held;
a second concave-convex mold having a second curved surface on which the second non-bonding surface of the second work is detachably held;
a driving unit that moves one or both of the first concave-convex mold and the second concave-convex mold relatively closer to each other in the thickness direction of the first workpiece and the second workpiece;
a control unit that controls the operation of the drive unit,
The second curved surface is a transfer surface obtained by duplicating the first curved surface,
The control unit moves the driving unit toward the first workpiece and the second curved surface between the first curved surface of the first concave-convex mold and the second curved surface of the second concave-convex mold. Two works are superimposed in the thickness direction, and the first work and the second work are pressed in the thickness direction so that the first bonding surface of the first work and the second bonding surface of the second work An apparatus for bonding curved surfaces, characterized in that control is performed so that the workpieces are bonded.
前記第二凹凸型は、弾性を有する複製材により前記第一凹凸型を複製元として形成されることを特徴とする請求項1記載の曲面ワーク貼合装置。 2. The apparatus for adhering curved workpieces according to claim 1, wherein said second concave-convex mold is formed with said first concave-convex mold as a copy source by using a replication material having elasticity. 前記第二ワークは、フィルム状の基板からなることを特徴とする請求項1又は2記載の曲面ワーク貼合装置。 3. The curved work bonding apparatus according to claim 1, wherein said second work is made of a film-like substrate. 前記第二凹凸型の第二非型面が保持される第二保持面を有する第二保持部材を備え、前記第二保持面が前記厚み方向へ突出して前記第二非型面と当接する凸部を有し、前記駆動部により前記第二保持部材を介して前記第二凹凸型が前記第一凹凸型に向け前記厚み方向(Z方向)へ相対的に接近移動されることを特徴とする請求項2又は3記載の曲面ワーク貼合装置。 A second holding member having a second holding surface for holding the second non-molding surface of the second concave-convex mold, wherein the second holding surface protrudes in the thickness direction and contacts the second non-molding surface. and the drive unit causes the second concave-convex mold to move relatively closer to the first concave-convex mold in the thickness direction (Z direction) via the second holding member. 4. The curved surface work bonding apparatus according to claim 2 or 3. 三次元曲面の薄板状に形成された第一ワークと第二ワークを貼り合わせる曲面ワーク貼合方法であって、
第一曲型面を有する第一凹凸型から第二曲型面を有する第二凹凸型が作成される型取り工程と、
前記第一凹凸型の前記第一曲型面に前記第一ワークの第一非貼合面を着脱自在に保持するとともに、前記第二凹凸型の前記第二曲型面に前記第二ワークの第二非貼合面を、前記第一ワーク及び前記第二ワークが厚み方向へ離隔して挟むように保持するセット工程と、、
前記第一凹凸型又は前記第二凹凸型のいずれか一方若しくは両方を前記厚み方向へ相対的に接近移動して、前記第一ワークと前記第二ワークが前記厚み方向へ接するように重ね合わされ、且つ加圧して前記第一ワークの第一貼合面と前記第二ワークの第二貼合面を接合する加圧工程と、を含み、
前記型取り工程では、前記第一曲型面の複製による転写面として前記第二曲型面が形成されることを特徴とする曲面ワーク貼合方法。
A curved surface work bonding method for bonding a first work and a second work formed in a three-dimensional curved thin plate shape,
a molding step in which a second concave-convex mold having a second curved surface is created from a first concave-convex mold having a first curved surface;
The first non-bonding surface of the first work is detachably held on the first curved surface of the first concave-convex mold, and the second workpiece is held on the second curved surface of the second concave-convex mold. A setting step of holding the second non-bonding surface so that the first work and the second work are separated and sandwiched in the thickness direction;
Either one or both of the first concave-convex mold and the second concave-convex mold are moved relatively closer to each other in the thickness direction, and the first work and the second work are overlapped so as to be in contact with each other in the thickness direction, and a pressurizing step of applying pressure to join the first bonding surface of the first work and the second bonding surface of the second work,
A curved surface work bonding method, wherein, in the molding step, the second curved surface is formed as a transfer surface by duplicating the first curved surface.
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