JP4657387B1 - Display panel manufacturing method and manufacturing system thereof - Google Patents

Display panel manufacturing method and manufacturing system thereof Download PDF

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JP4657387B1
JP4657387B1 JP2010541632A JP2010541632A JP4657387B1 JP 4657387 B1 JP4657387 B1 JP 4657387B1 JP 2010541632 A JP2010541632 A JP 2010541632A JP 2010541632 A JP2010541632 A JP 2010541632A JP 4657387 B1 JP4657387 B1 JP 4657387B1
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substrate
optical panel
liquid adhesive
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JPWO2012029110A1 (en
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道也 横田
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信越エンジニアリング株式会社
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    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/318Applications of adhesives in processes or use of adhesives in the form of films or foils for the production of liquid crystal displays
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133308Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133325Assembling processes
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133308Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133331Cover glasses
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133354Arrangements for aligning or assembling substrates
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/28Adhesive materials or arrangements

Abstract

電気光学パネルと基板を完全な無気泡状態で且つ均一なギャップで接着する。
先ず、真空雰囲気中で電気光学パネル(1)と基板(2)の対向面(1a,2a)同士を液状接着剤(3)を挟んでZ方向へ重ね合わせる。次いで、電気光学パネル(1)と基板(2)の間で液状接着剤(3)を自然伸展させることにより、液状接着剤(3)中における局部的な真空などが消失して、液状接着剤(3)の層厚が電気光学パネル(1)及び基板(2)の対向面(1a,2a)全体でZ方向へ略均一になる。その後、大気中で電気光学パネル(1)及び基板(2)のいずれか一方を他方に対しXYθ方向へ相互に滑り移動させて位置合わせする。この位置合わせの工程は、電気光学パネル(1)又は基板(2)のいずれか一方を液状接着剤(3)の界面に沿ってスムーズに滑動させるだけでよく、加圧しないので液状接着剤(3)は変形流動せず空気を巻き込むことはない。
【選択図】図2
The electro-optical panel and the substrate are bonded in a completely air-free state with a uniform gap.
First, the opposing surfaces (1a, 2a) of the electro-optical panel (1) and the substrate (2) are overlapped in the Z direction with a liquid adhesive (3) interposed therebetween in a vacuum atmosphere. Next, by naturally extending the liquid adhesive (3) between the electro-optical panel (1) and the substrate (2), a local vacuum or the like in the liquid adhesive (3) disappears, and the liquid adhesive The layer thickness of (3) is substantially uniform in the Z direction across the opposing surfaces (1a, 2a) of the electro-optic panel (1) and the substrate (2). Thereafter, either one of the electro-optical panel (1) and the substrate (2) is slid relative to the other in the XYθ direction and aligned in the atmosphere. In this alignment step, either the electro-optical panel (1) or the substrate (2) may be smoothly slid along the interface of the liquid adhesive (3), and the liquid adhesive ( 3) does not deform and flow and does not involve air.
[Selection] Figure 2

Description

本発明は、例えばタッチパネルや3D(3次元)ディスプレイや電子書籍など、FPD(フラットパネルディスプレイ)などからなる電気光学パネルに対して、新たに付加的機能を有する基板を貼り付けた付加機能基板貼り付け型表示パネルの製造方法、及び、その方法を実施するために使用する製造システムに関する。
詳しくは、電気光学パネルと、透光性を有し前記電気光学パネルから射出された光を視認側に射出する基板とを液状接着剤で貼り合わせる表示パネルの製造方法、及び、その製造システムに関する。
In the present invention, for example, an additional function substrate pasting a substrate having an additional function is pasted on an electro-optical panel made of an FPD (flat panel display) such as a touch panel, a 3D (three-dimensional) display, and an electronic book. The present invention relates to a method for manufacturing a mounting type display panel and a manufacturing system used for carrying out the method.
More specifically, the present invention relates to a method for manufacturing a display panel in which an electro-optical panel and a substrate that has translucency and emits light emitted from the electro-optical panel to the viewing side are bonded with a liquid adhesive, and a manufacturing system thereof. .
従来、この種の表示パネルの製造方法として、真空雰囲気中で電気光学パネル(液晶パネル)と紫外線硬化性接着剤が部分的に描画(塗布)された基板(カバーガラス)とを位置合わせした状態で押し合わせ、その後、前記電気光学パネルを仮UV硬化装置のテーブルに真空吸着させるとともに前記基板を加圧板に真空吸着させ、次いで、加圧部材で加圧板全体をテーブル側に押圧するとともに、バネで加圧板の周縁部をテーブル側に押圧することにより、電気光学パネルと基板とが互いに接近する方向に押圧され、かつ電気光学パネル及び基板の周縁部が中央部側よりも強い力で押圧され、また押圧とともに、テーブルと加圧板との相対位置を調整して電気光学パネル及び基板のアライメント処理が行われ、その後、仮接着工程を行い、最後に本硬化処理(本接着工程)を行って電気光学パネルと基板が本接着される電気光学装置の製造方法がある(例えば、特許文献1参照)。   Conventionally, as a method of manufacturing this type of display panel, an electro-optical panel (liquid crystal panel) and a substrate (cover glass) on which a UV curable adhesive is partially drawn (coated) are aligned in a vacuum atmosphere. After that, the electro-optical panel is vacuum-sucked to the table of the temporary UV curing device and the substrate is vacuum-sucked to the pressure plate. Then, the whole pressure plate is pressed to the table side by the pressure member, and the spring is pressed. By pressing the peripheral edge of the pressure plate to the table side, the electro-optical panel and the substrate are pressed in a direction approaching each other, and the peripheral edge of the electro-optical panel and the substrate is pressed with a stronger force than the center side. In addition, along with the pressing, the relative position between the table and the pressure plate is adjusted to perform alignment processing of the electro-optic panel and the substrate, and then a temporary bonding process is performed. Electro-optical panel and the substrate by performing a main curing process (the bonding step) may method of manufacturing an electro-optical device that is present bonded to (e.g., see Patent Document 1).
2009−230039号公報2009-230039
このような従来の表示パネルの製造方法では、仮UV硬化装置のテーブルと加圧板に電気光学パネルと基板をそれぞれ真空吸着した状態で互いに接近する方向に押圧するとともに位置合わせを行うが、これら真空吸着による電気光学パネル及び基板の保持は大気中でなければ確実に行えない。
そうしてみると、大気中で電気光学パネルと基板が互いに接近する方向に押圧されることになり、それに伴って、接着剤が厚さ方向へ押し潰され、変形流動しながら液晶パネル及び基板の対向面に沿って流動し押し広げられる。
しかし乍ら、大気中における接着剤の変形流動は、その変形流動の過程で空気を巻き込み易くなることが避けられず、完全な無気泡で接着できないことから不良品が発生し易く歩留まりが悪いという問題があった。
すなわち、接着剤の変形流動中、例えば接着剤と基板の間に空隙が全く生じない状態で流動すれば空気が混入することはないが、押圧中に電気光学パネルの表面に対して基板が僅かでも傾斜すると空隙が生じ、空気の巻き込みが発生するいう問題があった。大気中で加圧板を使用する場合には、加圧板を支持する軸機構の精度、加圧板の歪み等が存在し、これらが基板に伝わるため、空気の巻き込みの問題は避け得ないものであった。
また、基板が例えばタッチパネルのカバーガラスのように模様や記号などが接着面に印刷される場合には、印刷部と非印刷部との間に僅かな凹凸が生ずるため、空気の巻き込みがさらに助長されるという問題もあった。
バネで電気光学パネル及び基板の周縁部を中央部側よりも強い力で押圧しても、大気中における接着剤の変形流動に伴う空気の巻き込みを減らすことはできず、電気光学パネルと基板の間を完全な無気泡状態にすることはできなかった。
特に、基板サイズが大型化すると、加圧方式では信頼性を得ることは難しかった。
また、電気光学パネルと基板を一組ずつ重ね合わせて位置合わせするため、生産性に劣るという問題があった。
In such a conventional display panel manufacturing method, the electro-optical panel and the substrate are pressed in a direction approaching each other in a state where the electro-optical panel and the substrate are vacuum-adsorbed to the table and the pressure plate of the provisional UV curing device, respectively. The holding of the electro-optical panel and the substrate by adsorption cannot be performed reliably unless it is in the atmosphere.
As a result, the electro-optical panel and the substrate are pressed toward each other in the atmosphere, and accordingly, the adhesive is crushed in the thickness direction, and the liquid crystal panel and the substrate are deformed and flowed. It flows along the opposite surface of and spreads.
However, the deformation flow of the adhesive in the atmosphere is unavoidable that it becomes easy to entrain air in the process of deformation flow, and it cannot be bonded completely without bubbles, so that defective products are likely to occur and the yield is low. There was a problem.
That is, during deformation flow of the adhesive, for example, if there is no air gap between the adhesive and the substrate, air will not be mixed in, but the substrate will slightly touch the surface of the electro-optical panel during pressing. However, there is a problem that air gaps occur when tilted and air entrainment occurs. When using a pressure plate in the atmosphere, there are accuracy of the shaft mechanism that supports the pressure plate, distortion of the pressure plate, etc., and these are transmitted to the substrate, so the problem of air entrainment is inevitable. It was.
In addition, when patterns or symbols are printed on the adhesive surface, such as a cover glass of a touch panel, a slight unevenness is formed between the printed part and the non-printed part, which further encourages air entrainment. There was also a problem of being.
Even if the peripheral edge of the electro-optical panel and the substrate is pressed with a stronger force than the center side with a spring, the entrainment of air due to the deformation flow of the adhesive in the atmosphere cannot be reduced. It was not possible to make the space completely air-free.
In particular, when the substrate size is increased, it is difficult to obtain reliability by the pressurization method.
Moreover, since the electro-optical panel and the substrate are superposed and aligned one by one, there is a problem that productivity is inferior.
本発明は、このような問題に対処することを課題とするものであり、電気光学パネルと基板を完全な無気泡状態で且つ均一なギャップで接着すること、などを目的とするものである。   An object of the present invention is to address such a problem, and an object of the present invention is to bond an electro-optical panel and a substrate in a completely bubble-free state with a uniform gap.
このような目的を達成するために本発明による表示パネルの製造方法は、電気光学パネルと、透光性を有し前記電気光学パネルから射出された光を視認側に射出する基板とを液状接着剤で貼り合わせる表示パネルの製造方法であって、真空雰囲気中で前記電気光学パネル及び前記基板の対向面をそれらの間に前記液状接着剤が挟まれるようにZ方向へ重ね合わせる合着工程と、前記合着工程で重ね合わされた前記電気光学パネル及び前記基板の前記対向面に沿って前記液状接着剤を所定時間に亘り自然伸展させて、該液状接着剤の層厚を前記電気光学パネル及び前記基板の対向面全体でZ方向へ略均一にするレベリング工程と、前記レベリング工程後に前記電気光学パネル又は前記基板のいずれか一方を他方に対し大気中でXYθ方向へ相互に滑り移動させて位置合わせする無気泡整列工程と、前記無気泡整列工程で位置合わせされた前記電気光学パネル及び前記基板の前記対向面間に配置される前記液状接着剤を硬化させる硬化工程とを含むことを特徴とする。   In order to achieve such an object, a manufacturing method of a display panel according to the present invention includes a liquid adhesive bonding between an electro-optical panel and a substrate that has translucency and emits light emitted from the electro-optical panel to the viewing side. A method for manufacturing a display panel to be bonded with an agent, wherein the electro-optical panel and the opposing surface of the substrate are stacked in a Z direction so that the liquid adhesive is sandwiched between them in a vacuum atmosphere The liquid adhesive is naturally stretched over a predetermined time along the opposing surfaces of the electro-optical panel and the substrate that are overlapped in the attaching step, and the layer thickness of the liquid adhesive is set to the electro-optical panel and A leveling step of making the entire opposing surface of the substrate substantially uniform in the Z direction, and after the leveling step, either the electro-optical panel or the substrate is mutually in the XYθ direction in the atmosphere with respect to the other. A bubble-free alignment step for sliding and aligning, and a curing step for curing the liquid adhesive disposed between the electro-optic panel and the opposing surface of the substrate aligned in the bubble-free alignment step It is characterized by including.
また本発明による表示パネルの製造システムは、電気光学パネルと、透光性を有し前記電気光学パネルから射出された光を視認側に射出する基板とを液状接着剤で貼り合わせる表示パネルの製造システムであって、真空チャンバーを有し、該真空チャンバー内で前記電気光学パネルと前記基板を保持して、それらの間に前記液状接着剤が挟まれるようにZ方向へ重ね合わせる合着ユニットと、前記合着ユニットで重ね合わされた前記電気光学パネル及び前記基板を着脱自在に保持して、前記真空チャンバー内から大気中に搬送する搬送ユニットと、大気中に設けられ、前記搬送ユニットで搬送された前記電気光学パネル又は前記基板のいずれか一方を他方に対しXYθ方向へ相互移動して位置合わせする無気泡整列ユニットと、前記無気泡整列ユニットで位置合わせされた前記電気光学パネルと前記基板の対向面間に配置される前記液状接着剤を硬化させる硬化ユニットとを備え、前記搬送ユニットは、前記真空チャンバー内から重ね合わされた前記電気光学パネル及び前記基板を大気中の前記無気泡整列ユニットへ搬送してセットするまでの所定時間中に、前記電気光学パネルと前記基板の対向面に沿って前記液状接着剤が自然伸展して、該液状接着剤の層厚が前記対向面全体でZ方向へ略均一になるようにしたことを特徴とする。   The display panel manufacturing system according to the present invention also manufactures a display panel in which an electro-optical panel and a substrate having translucency and emitting light emitted from the electro-optical panel to the viewing side are bonded with a liquid adhesive. A fusion unit having a vacuum chamber, holding the electro-optical panel and the substrate in the vacuum chamber, and superposing them in the Z direction so that the liquid adhesive is sandwiched therebetween; A transfer unit that detachably holds the electro-optical panel and the substrate overlaid by the attachment unit and conveys them from the vacuum chamber to the atmosphere, and is provided in the atmosphere and is conveyed by the conveyance unit. A bubble-free alignment unit that moves and aligns either the electro-optical panel or the substrate with respect to the other in the XYθ direction, and the bubble-free alignment unit. The electro-optical panel aligned with the unit and a curing unit configured to cure the liquid adhesive disposed between the opposing surfaces of the substrate, and the transport unit is superposed from within the vacuum chamber. During a predetermined time until the panel and the substrate are transported to the bubble-free alignment unit in the atmosphere and set, the liquid adhesive naturally extends along the opposing surfaces of the electro-optical panel and the substrate, The layer thickness of the liquid adhesive is substantially uniform in the Z direction over the entire opposing surface.
前述した特徴を有する本発明による表示パネルの製造方法は、先ず、合着工程において、真空雰囲気中で電気光学パネルと基板の対向面同士が液状接着剤を挟んでZ方向へ重ね合わされることにより、液状接着剤を対向面に沿って強制的に伸展させる。次いで、レベリング工程において、電気光学パネルと基板の間で液状接着剤を自然伸展させることにより、液状接着剤中における局部的な真空などが消失して、液状接着剤は略静止安定した状態になり、液状接着剤の層厚が電気光学パネル及び基板の対向面全体でZ方向へ略均一になって、これ以上のギャップ調整は必要ない状態となる。その後の無気泡整列工程において、大気中で電気光学パネル及び基板のいずれか一方を他方に対しXYθ方向へ相互移動して位置合わせする場合、略均一な層厚の液状接着剤上に乗った電気光学パネル又は基板のいずれか一方を液状接着剤の界面に沿ってスムーズに滑動させるだけでよく、加圧しないので液状接着剤は変形流動せず空気を巻き込むことはない。
したがって、電気光学パネルと基板を完全な無気泡状態で且つ均一なギャップで接着することができる。
その結果、真空吸着された電気光学パネルと基板を大気中で互いに接近する方向に押圧するとともに位置合わせを行う従来の製造方法に比べ、電気光学パネルのサイズが大きくなっても、無気泡の性能を向上させることができ、歩留まりが大幅に良くなる。
In the manufacturing method of the display panel according to the present invention having the above-described characteristics, first, in the bonding step, the facing surfaces of the electro-optical panel and the substrate are overlapped in the Z direction with a liquid adhesive interposed therebetween in a vacuum atmosphere. The liquid adhesive is forcibly extended along the opposing surface. Next, in the leveling process, by naturally extending the liquid adhesive between the electro-optical panel and the substrate, the local vacuum in the liquid adhesive disappears, and the liquid adhesive becomes substantially stationary and stable. The layer thickness of the liquid adhesive becomes substantially uniform in the Z direction over the entire opposing surfaces of the electro-optical panel and the substrate, and no further gap adjustment is required. In the subsequent bubble-free alignment process, when one of the electro-optic panel and the substrate is moved relative to each other in the XYθ direction in the atmosphere and aligned, the electric on the liquid adhesive having a substantially uniform layer thickness It is only necessary to smoothly slide either the optical panel or the substrate along the interface of the liquid adhesive, and since the liquid adhesive is not pressurized, the liquid adhesive is not deformed and does not entrain air.
Therefore, the electro-optical panel and the substrate can be bonded in a completely bubble-free state with a uniform gap.
As a result, even if the electro-optical panel size is larger, the bubble-free performance compared to the conventional manufacturing method in which the vacuum-adsorbed electro-optical panel and the substrate are pressed in the direction approaching each other in the atmosphere and aligned. The yield can be greatly improved.
また、前述した特徴を有する本発明による表示パネルの製造システムは、先ず、合着ユニットによって、真空チャンバー内で電気光学パネルと基板の対向面同士が液状接着剤を挟んでZ方向へ重ね合わされることにより、液状接着剤を対向面に沿って強制的に伸展させる。次いで、搬送ユニットによって、真空チャンバー内から重ね合わせが完了した電気光学パネル及び基板を、大気中の無気泡整列ユニットに搬送してセットするまでの所定時間中に、電気光学パネルと基板の間で液状接着剤を自然伸展させることにより、液状接着剤中における局部的な真空などが消失して、液状接着剤は略静止安定した状態になり、液状接着剤の層厚が電気光学パネル及び基板の対向面全体でZ方向へ略均一になって、これ以上のギャップ調整は必要ない状態となる。その後、無気泡整列ユニットによって、大気中で電気光学パネル及び基板のいずれか一方を他方に対しXYθ方向へ相互移動して位置合わせする場合、略均一な層厚の液状接着剤上に乗った電気光学パネル又は基板のいずれか一方を液状接着剤の界面に沿ってスムーズに滑動させるだけでよく、加圧しないので液状接着剤は変形流動せず空気を巻き込むことはない。
したがって、電気光学パネルと基板を完全な無気泡状態で且つ均一なギャップで接着することができる。
その結果、真空吸着された電気光学パネルと基板を大気中で互いに接近する方向に押圧するとともに位置合わせを行う従来の製造システムに比べ、電気光学パネルのサイズが大きくなっても、無気泡の性能を向上させることができ、歩留まりが大幅に良くなる。
In the display panel manufacturing system according to the present invention having the above-described features, first, the facing surfaces of the electro-optical panel and the substrate are overlapped in the Z direction with a liquid adhesive in the vacuum chamber by the bonding unit. As a result, the liquid adhesive is forcibly extended along the opposing surface. Next, the electro-optical panel and the substrate that have been superposed from within the vacuum chamber by the transport unit are transported between the electro-optical panel and the substrate during a predetermined time until they are transported to the bubble-free alignment unit in the atmosphere and set. By naturally extending the liquid adhesive, a local vacuum or the like in the liquid adhesive disappears, the liquid adhesive becomes substantially stationary and stable, and the liquid adhesive has a layer thickness of the electro-optical panel and the substrate. The entire opposing surface is substantially uniform in the Z direction, and no further gap adjustment is required. After that, when one of the electro-optic panel and the substrate is moved relative to the other in the XYθ direction and aligned with each other by the bubble-free alignment unit, the electric on the liquid adhesive having a substantially uniform layer thickness. It is only necessary to smoothly slide either the optical panel or the substrate along the interface of the liquid adhesive, and since the liquid adhesive is not pressurized, the liquid adhesive is not deformed and does not entrain air.
Therefore, the electro-optical panel and the substrate can be bonded in a completely bubble-free state with a uniform gap.
As a result, even if the electro-optic panel size is larger than the conventional manufacturing system that presses the vacuum-adsorbed electro-optic panel and the substrate in the direction close to each other in the atmosphere and aligns them, it is free of bubbles. The yield can be greatly improved.
本発明の実施形態に係る表示パネルの製造システムを示すブロック図である。It is a block diagram which shows the manufacturing system of the display panel which concerns on embodiment of this invention. 合着ユニットの縦断正面図であり、(a)が重ね合わせ前の状態を示し、(b)が重ね合わせ後の状態を示している。It is a vertical front view of a joining unit, (a) shows the state before superposition, and (b) shows the state after superposition. 無気泡整列ユニットの縦断正面図であり、(a)が平面図、(b)が一部切欠正面図である。It is a vertical front view of a bubble-free alignment unit, (a) is a plan view, (b) is a partially cutaway front view. 本発明の実施形態に係る表示パネルの製造方法を示すフローチャートである。3 is a flowchart illustrating a method for manufacturing a display panel according to an embodiment of the present invention.
以下、本発明の実施形態を図面に基づいて詳細に説明する。
本発明の実施形態に係る表示パネルAの製造システムは、図1〜図3に示すように、電気光学パネル1と基板2を液状接着剤3が挟まれるようにZ方向へ重ね合わせる合着ユニット10、重ね合わされた電気光学パネル1及び基板2を大気中に搬送する搬送ユニット20、電気光学パネル1と基板2をXYθ方向へ位置合わせする無気泡整列ユニット30、位置合わせされた電気光学パネル1及び基板2の間に配置される液状接着剤3を硬化させる硬化ユニット40、これら合着ユニット10,搬送ユニット20,無気泡整列ユニット30及び硬化ユニット40などをそれぞれ作動制御する制御部50を、主要な構成要素として備えている。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
The display panel A manufacturing system according to the embodiment of the present invention includes a bonding unit that superposes the electro-optical panel 1 and the substrate 2 in the Z direction so that the liquid adhesive 3 is sandwiched between them as shown in FIGS. 10. A transport unit 20 that transports the superposed electro-optical panel 1 and the substrate 2 into the atmosphere, a bubble-free alignment unit 30 that aligns the electro-optical panel 1 and the substrate 2 in the XYθ direction, and the aligned electro-optical panel 1 And a control unit 50 for controlling the operation of the curing unit 40 for curing the liquid adhesive 3 disposed between the substrates 2, the bonding unit 10, the transport unit 20, the bubble-free alignment unit 30 and the curing unit 40, respectively. It is provided as a main component.
電気光学パネル1は、電気光学物質層とこれに電圧を印加する手段とを備えたものであり、電気信号に基づいた電圧印加により電気光学物質層の状態を変化させ、所望の光を取り出すことが可能になっている。
電気光学パネル1の具体例としては、タッチパネルや3D(3次元)ディスプレイや電子書籍などに用いられる、例えば液晶ディスプレイ(LCD)、有機ELディスプレイ(OLED)、プラズマディスプレイ(PDP)、フレキシブルディスプレイなどのフラットパネルディスプレイ(FPD)などが挙げられる。
さらに、電気光学パネル1は、矩形などに形成され、その周縁部には、後述する基板2との位置合わせに用いるアライメントマーク(図示しない)を設けることが好ましい。
また、電気光学パネル1としては、その製作段階で複数の電気光学パネル1が並設される分離前の一枚ものを使用することも可能である。
The electro-optical panel 1 includes an electro-optical material layer and means for applying a voltage to the electro-optical material layer, and changes the state of the electro-optical material layer by applying a voltage based on an electric signal to extract desired light. Is possible.
Specific examples of the electro-optical panel 1 are used for a touch panel, a 3D (three-dimensional) display, an electronic book, and the like, such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), and a flexible display. A flat panel display (FPD) is exemplified.
Furthermore, it is preferable that the electro-optical panel 1 is formed in a rectangular shape or the like, and an alignment mark (not shown) used for alignment with the substrate 2 described later is provided on the peripheral edge thereof.
In addition, as the electro-optical panel 1, it is also possible to use a single one before separation in which a plurality of electro-optical panels 1 are arranged in parallel at the manufacturing stage.
基板2は、ガラスや石英、プラスチックなどの透光性を有する材料からなるものであり、電気光学パネル1から射出された光を透過しZ方向側(視認側)に射出するとともに、表示パネルAの用途に応じた機能を有している。
基板2の具体例としては、タッチパネルや3D(3次元)ディスプレイや電子書籍などに用いられる、カバーガラスやバリアガラスなどが挙げられ、例えばタッチパネルとして用いられる場合には、模様や記号などのパターンが接着面である表面に印刷される。
基板2の大きさや平面形状は、電気光学パネル1と同程度の矩形などに形成され、その周縁部には、電気光学パネル1との位置合わせに用いるアライメントマーク(図示しない)を設けることが好ましい。
また、基板2としては、その製作段階で複数の基板2が並設される分離前の一枚ものを使用することも可能である。
The substrate 2 is made of a light-transmitting material such as glass, quartz, plastic, and the like. The substrate 2 transmits light emitted from the electro-optical panel 1 and emits it to the Z direction side (viewing side). It has functions according to the application.
Specific examples of the substrate 2 include a cover glass and a barrier glass used for a touch panel, a 3D (three-dimensional) display, an electronic book, and the like. For example, when used as a touch panel, a pattern such as a pattern or a symbol is used. Printed on the adhesive surface.
The size and planar shape of the substrate 2 are formed in a rectangular shape similar to that of the electro-optical panel 1, and an alignment mark (not shown) used for alignment with the electro-optical panel 1 is preferably provided on the peripheral edge thereof. .
Further, as the substrate 2, it is possible to use a single substrate before separation in which a plurality of substrates 2 are arranged in parallel at the manufacturing stage.
液状接着剤3は、光エネルギーを吸収して重合が進行することにより硬化して接着性を発現する光硬化性を有する接着剤や熱硬化型接着剤や二液混合硬化型接着剤などからなり、重合度(硬化度)が低い状態では流動性を有し、重合度(硬化度)が高くなるにつれて流動性が低下し変形し難くなるように構成される。
さらに、液状接着剤3は、電気光学パネル1及び基板2の対向面(表面)1a,2aに対して部分的に塗布され、後述する合着ユニット10で電気光学パネル1及び基板2の対向面1a,2aを重ね合わせることにより、これら対向面1a,2aに沿って液状接着剤3が伸展して、最終的には対向面1a,2aの略全体に充満するようにしている。
液状接着剤3の具体例としては、紫外線硬化型接着剤などが用いられる。
また、液状接着剤3の塗布方法としては、例えばディスペンサなどの液体定量吐出機からなる塗布手段(図示しない)を用い、対向面1a,2aに点状や線状に描画し、後述する合着ユニット10により電気光学パネル1と基板2の対向面1a,2a同士が重ね合わされることで、点状や線状の液状接着剤3がそれぞれ伸展してその界面同士が接触し相互に繋がるように分散配置することが好ましい。
The liquid adhesive 3 is composed of a photocurable adhesive, a thermosetting adhesive, a two-component mixed curable adhesive, or the like that is cured by absorbing light energy and polymerizing to develop adhesiveness. In the state where the degree of polymerization (curing degree) is low, it has fluidity, and as the degree of polymerization (curing degree) increases, the fluidity decreases and it is difficult to deform.
Further, the liquid adhesive 3 is partially applied to the opposing surfaces (surfaces) 1 a and 2 a of the electro-optical panel 1 and the substrate 2, and the opposing surfaces of the electro-optical panel 1 and the substrate 2 by the bonding unit 10 described later. By laminating 1a and 2a, the liquid adhesive 3 extends along these opposing surfaces 1a and 2a, and finally fills substantially the entire opposing surfaces 1a and 2a.
As a specific example of the liquid adhesive 3, an ultraviolet curable adhesive or the like is used.
Further, as a method of applying the liquid adhesive 3, for example, using a coating means (not shown) made of a liquid dispensing device such as a dispenser, drawing on the opposing surfaces 1a and 2a in a dot shape or a line shape, and the bonding described later The opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2 are overlapped by the unit 10 so that the dotted or linear liquid adhesive 3 extends, and the interfaces thereof are in contact with each other and connected to each other. It is preferable to disperse them.
そして、合着ユニット10は、その全体又は一部が開閉駆動部11aの作動により開閉自在に形成される真空チャンバー11と、真空チャンバー11内にZ方向(図2(a)(b)に示される例では上下方向)へ対向するように設けられて電気光学パネル1と基板2をそれぞれ着脱自在に保持する一対の保持板12,13と、これら保持板12,13のいずれか一方又は両方をZ方向へ互いに接近移動させて電気光学パネル1と基板2を重ね合わせる昇降駆動部14とを有している。   The fusing unit 10 has a vacuum chamber 11 whose whole or part is formed to be opened and closed by the operation of the opening / closing drive unit 11a, and a Z direction (shown in FIGS. 2A and 2B) in the vacuum chamber 11. In this example, a pair of holding plates 12 and 13 which are provided so as to face each other in the vertical direction and detachably hold the electro-optical panel 1 and the substrate 2 and either one or both of these holding plates 12 and 13 are provided. An elevating drive unit 14 is provided to move the electro-optical panel 1 and the substrate 2 so as to move closer to each other in the Z direction.
一対の保持板12,13は、例えば金属やセラミックスなどの剛体で歪み(撓み)変形しない厚さの平板状に形成され、その互いに対向する保持面12a,13aに、電気光学パネル1又は基板2を着脱自在に保持する保持手段(図示しない)として、例えば粘着チャック又は静電チャックや吸引チャックとの組み合わせなどが設けられるとともに、真空チャンバー11に対して保持面12a,13aのいずれか一方又は両方がZ方向へ平行状態で互いに接近又は離隔するように往復動自在に支持される。   The pair of holding plates 12 and 13 are formed in a flat plate shape having a thickness that does not deform (bend) with a rigid body such as metal or ceramics, and the electro-optical panel 1 or the substrate 2 is formed on the holding surfaces 12a and 13a facing each other. As a holding means (not shown) for detachably holding, for example, an adhesive chuck or a combination with an electrostatic chuck or a suction chuck is provided, and either one or both of the holding surfaces 12a and 13a with respect to the vacuum chamber 11 is provided. Are supported so as to reciprocate so as to approach or separate from each other in a parallel state in the Z direction.
図2(a)(b)に示される例では、下方に配置される保持板12の保持面12aに電気光学パネル1が保持され、上方に配置される保持板13の保持面13aに基板2が保持され、下方の保持板12に対して上方の保持板13のみを昇降駆動部14で昇降移動させるように構成している。
また、その他の例として図示しないが、下方の保持板12に基板2を保持するとともに上方の保持板13に電気光学パネル1を保持したり、上方の保持板13に対して下方の保持板12のみを昇降駆動部14で昇降移動したり、下方の保持板12及び上方の保持板13の両方を昇降駆動部14で昇降移動させることも可能である。
In the example shown in FIGS. 2A and 2B, the electro-optical panel 1 is held on the holding surface 12a of the holding plate 12 arranged below, and the substrate 2 is placed on the holding surface 13a of the holding plate 13 arranged above. Is configured such that only the upper holding plate 13 is moved up and down by the elevating drive unit 14 with respect to the lower holding plate 12.
Although not shown as another example, the substrate 2 is held on the lower holding plate 12 and the electro-optical panel 1 is held on the upper holding plate 13, or the lower holding plate 12 with respect to the upper holding plate 13. It is also possible to move only up and down by the elevating drive unit 14, or to move both the lower holding plate 12 and the upper holding plate 13 up and down by the elevating drive unit 14.
また、真空チャンバー11の内部において保持板12,13の周囲には、気圧調整可能な閉空間Sを形成し、該閉空間Sが真空又はそれに近い状態に減圧された雰囲気の環境下で、保持面12a,13aを互いに接近移動して電気光学パネル1と基板2を重ね合わせることが好ましい。   In addition, a closed space S capable of adjusting the atmospheric pressure is formed around the holding plates 12 and 13 inside the vacuum chamber 11, and the closed space S is held in an environment where the vacuum is reduced to a vacuum or a state close thereto. It is preferable that the surfaces 12a and 13a are moved close to each other to overlap the electro-optical panel 1 and the substrate 2.
搬送ユニット20は、電気光学パネル1及び基板2を着脱自在に保持する手段として、例えば吸着パッドなどを有する搬送用ロボットなどであり、少なくとも合着ユニット10の真空チャンバー11と後述する無気泡整列ユニット30とに亘って往復動自在に設けられて、合着ユニット10で重ね合わされた電気光学パネル1及び基板2を無気泡整列ユニット30へ向け搬送して受け渡す。
搬送ユニット20の具体例としては、合着ユニット10の保持板12,13に設けられる昇降自在なリフトピン(図示しない)などと協動して作動することにより、真空チャンバー11内で重ね合わされた電気光学パネル1及び基板2を保持面12a,13aから受け取り、真空チャンバー11内から外の大気中に取り出すとともに、電気光学パネル1及び基板2の重ね合わせ状態を維持しながら後述する無気泡整列ユニット30へ向け搬送し、その保持チャック31上の所定位置にセットする。
さらに必要に応じて、搬送ユニット20により、例えばディスペンサなどの液体定量吐出機からなる塗布手段が配備される外部領域から電気光学パネル1及び基板2を、合着ユニット10の真空チャンバー11内へ向け搬入し、また後述する無気泡整列ユニット30による無気泡整列工程及び後述する硬化ユニット40に液状接着剤3の硬化工程が終了した後に、無気泡整列ユニット30から電気光学パネル1及び基板2を搬出するように移動制御することが好ましい。
また必要に応じて、搬送ユニット20には、搬送中の電気光学パネル1及び基板2に対し、それぞれの対向面1a,2a中に挟まれた液状接着剤3の自然伸展を促進するために、微振動が含まれた適度な振動を与える手段を備えたり、搬送中の電気光学パネル1及び基板2を一定時間に亘り滞留保持して先入れ先出しするバッファ手段を備えることも可能である。
The transport unit 20 is, for example, a transport robot having a suction pad or the like as means for detachably holding the electro-optical panel 1 and the substrate 2, and at least the vacuum chamber 11 of the bonding unit 10 and a bubble-free alignment unit described later. The electro-optical panel 1 and the substrate 2 which are provided so as to be reciprocally movable over 30 and overlapped by the bonding unit 10 are conveyed toward the bubble-free alignment unit 30 and delivered.
As a specific example of the transport unit 20, the electric power stacked in the vacuum chamber 11 by operating in cooperation with lift pins (not shown) that can be raised and lowered provided on the holding plates 12 and 13 of the joining unit 10. The optical panel 1 and the substrate 2 are received from the holding surfaces 12a and 13a, taken out from the vacuum chamber 11 into the outside atmosphere, and the bubble-free alignment unit 30 to be described later is maintained while maintaining the superposed state of the electro-optical panel 1 and the substrate 2. To a predetermined position on the holding chuck 31.
Further, if necessary, the transfer unit 20 directs the electro-optical panel 1 and the substrate 2 into the vacuum chamber 11 of the bonding unit 10 from an external region where a coating unit such as a dispenser is disposed. The electro-optical panel 1 and the substrate 2 are carried out from the bubble-free alignment unit 30 after the bubble-free alignment process by the bubble-free alignment unit 30 described later and the curing process of the liquid adhesive 3 in the curing unit 40 described later are completed. It is preferable to control the movement so as to.
Further, if necessary, the transport unit 20 may promote the natural extension of the liquid adhesive 3 sandwiched between the opposing surfaces 1a and 2a with respect to the electro-optical panel 1 and the substrate 2 being transported. It is also possible to provide means for applying moderate vibrations including fine vibrations, or buffer means for retaining and holding the electro-optical panel 1 and the substrate 2 being transported for a predetermined time.
無気泡整列ユニット30は、大気中に配設され、搬送ユニット20で搬送された電気光学パネル1と基板2をそれぞれ着脱自在に保持する一対の保持チャック31,32と、これら保持チャック31,32のいずれか一方を他方に対してXYθ方向(図3(a)に示される例では上下左右及び斜め方向)へ移動させて電気光学パネル1と基板2を位置合わせする水平駆動部33と、電気光学パネル1及び基板2の周縁部に配置されるアライメントマークなどを検出するための位置検出部34を有している。   The bubble-free alignment unit 30 is disposed in the atmosphere, and a pair of holding chucks 31 and 32 that detachably hold the electro-optical panel 1 and the substrate 2 conveyed by the conveyance unit 20, and the holding chucks 31 and 32. A horizontal driving unit 33 that aligns the electro-optical panel 1 and the substrate 2 by moving either one of them in the XYθ direction (in the example shown in FIG. A position detection unit 34 for detecting alignment marks and the like arranged on the peripheral portions of the optical panel 1 and the substrate 2 is provided.
一対の保持チャック31,32は、例えば金属やセラミックスなどの剛体で歪み(撓み)変形しない厚さの平板状に形成され、その互いに対向する保持面31a,32aに、電気光学パネル1又は基板2を着脱自在に保持する保持手段(図示しない)として、例えば吸引チャックや静電チャックや粘着チャックや摩擦チャック又はそれらの組み合わせなどが設けられるとともに、保持面31a,32aの真空チャンバー11に対して保持面12a,13aのいずれか一方が他方に対して平行状態を維持しながらXYθ方向へ移動自在に支持される。
図3(a)(b)に示される例では、基板2が保持される上方の保持チャック32の周縁部に、位置検出部34としてカメラを設けている。さらに、基板2が保持される上方の保持チャック32に対して、電気光学パネル1が保持される下方の保持チャック31をXYθ方向へ移動自在に支持している。
また、その他の例として図示しないが、電気光学パネル1が保持される下方の保持チャック31に対して、基板2が保持される上方の保持チャック32をXYθ方向へ移動自在に支持することも可能である。
The pair of holding chucks 31 and 32 are formed in a flat plate shape having a thickness that is not distorted (bent) by a rigid body such as metal or ceramics, and the electro-optical panel 1 or the substrate 2 is formed on the holding surfaces 31a and 32a facing each other. For example, a suction chuck, electrostatic chuck, adhesive chuck, friction chuck, or a combination thereof is provided as a holding means (not shown) for detachably holding the holder, and the holding surfaces 31a and 32a are held against the vacuum chamber 11. Either one of the surfaces 12a and 13a is supported so as to be movable in the XYθ direction while maintaining a parallel state with respect to the other.
In the example shown in FIGS. 3A and 3B, a camera is provided as a position detection unit 34 on the peripheral edge of the upper holding chuck 32 on which the substrate 2 is held. Further, a lower holding chuck 31 for holding the electro-optical panel 1 is movably supported in the XYθ direction with respect to an upper holding chuck 32 for holding the substrate 2.
Although not shown as another example, it is possible to support the upper holding chuck 32 holding the substrate 2 movably in the XYθ direction with respect to the lower holding chuck 31 holding the electro-optical panel 1. It is.
硬化ユニット40は、液状接着剤3の重合度(硬化度)を高めるために光エネルギーを照射するものであり、無気泡整列ユニット30による電気光学パネル1及び基板2の位置合わせ直後に、これらを移動させずに液状接着剤3の重合度(硬化度)を高める。
硬化ユニット40の具体例として、液状接着剤3が紫外線硬化型接着剤などが用いられる場合には、紫外線を照射するUV照射部となり電気光学パネル1及び基板2の対向面1a,2aの間に沿って伸展した液状接着剤3の一部又は全部に向け、紫外線を照射させる。
図3(a)(b)に示される例では、基板2が保持される上方の保持チャック32の周縁部に、硬化ユニット40としてUV照射ヘッドを配設し、電気光学パネル1及び基板2の対向面1a,2aの間に沿って伸展した液状接着剤3の周縁部おいて数箇所を部分的に硬化させることにより、必要最低限の仮硬化を行い、無気泡整列ユニット30から電気光学パネル1及び基板2が搬出された後に本硬化させるようにしている。
また、その他の例として図示しないが、紫外線硬化型接着剤に代えて熱硬化型接着剤や二液混合硬化型接着剤などを用いたり、液状接着剤3の全部を本硬化させることも可能である。
The curing unit 40 irradiates light energy in order to increase the degree of polymerization (curing degree) of the liquid adhesive 3, and immediately after the alignment of the electro-optical panel 1 and the substrate 2 by the bubble-free alignment unit 30, The degree of polymerization (curing degree) of the liquid adhesive 3 is increased without being moved.
As a specific example of the curing unit 40, when the liquid adhesive 3 is an ultraviolet curable adhesive or the like, it becomes a UV irradiation unit that irradiates ultraviolet rays, and is disposed between the opposing surfaces 1 a and 2 a of the electro-optical panel 1 and the substrate 2. Ultraviolet rays are irradiated toward a part or all of the liquid adhesive 3 extended along.
In the example shown in FIGS. 3A and 3B, a UV irradiation head is disposed as a curing unit 40 on the periphery of the upper holding chuck 32 where the substrate 2 is held, and the electro-optical panel 1 and the substrate 2 are arranged. By partially curing several portions at the peripheral edge of the liquid adhesive 3 that extends between the opposing surfaces 1a and 2a, the necessary minimum temporary curing is performed, and the electro-optical panel is formed from the bubble-free alignment unit 30. The main curing is performed after the 1 and the substrate 2 are unloaded.
Although not shown in the drawings as other examples, a thermosetting adhesive or a two-component mixed curing adhesive can be used instead of the ultraviolet curable adhesive, or the entire liquid adhesive 3 can be fully cured. is there.
制御部50は、合着ユニット10における真空チャンバー11の開閉駆動部11aや昇降駆動部14,搬送ユニット20,無気泡整列ユニット30における水平駆動部33や位置検出部34及び硬化ユニット40などと電気的に接続するコントローラーであり、予め設定されたプログラムに従って順次作動させるように制御されている。
特に、制御部50は、搬送ユニット20の作動速度を調整するなどして、合着ユニット10により真空チャンバー11内で電気光学パネル1と基板2の重ね合わせが完了した時点から、無気泡整列ユニット30による電気光学パネル1と基板2の位置合わせが開始される時点までの時間を任意に設定可能にしている。
詳しくは、電気光学パネル1と基板2の重ね合わせが完了した時点から始まる液状接着剤3の自然伸展に対応して、無気泡整列ユニット30による位置合わせが開始される時間を任意に設定可能にしている。
つまり、電気光学パネル1及び基板2の対向面1a,2aに対して部分的に塗布された液状接着剤3を、電気光学パネル1と基板2の対向面1a,2aに沿って自然伸展させ、対向面1a,2aの略全体に充満させるとともに、液状接着剤3中における局部的な真空などが消失して液状接着剤3は略静止安定した状態になり、液状接着剤3の層厚を対向面1a,2a全体でZ方向へ略均一にしてから、無気泡整列ユニット30による電気光学パネル1と基板2の位置合わせが開始されるようにしている。
The control unit 50 is electrically connected to the opening / closing drive unit 11a of the vacuum chamber 11 in the bonding unit 10, the lift drive unit 14, the transport unit 20, the horizontal drive unit 33, the position detection unit 34, the curing unit 40 in the bubble-free alignment unit 30, and the like. The controller is connected to each other and is controlled so as to operate sequentially according to a preset program.
In particular, the control unit 50 adjusts the operating speed of the transport unit 20 to adjust the operation speed of the transport unit 20 and the bubble-free alignment unit from the time when the electro-optical panel 1 and the substrate 2 are superposed in the vacuum chamber 11 by the bonding unit 10. The time until the start of the alignment of the electro-optical panel 1 and the substrate 2 by 30 can be arbitrarily set.
Specifically, it is possible to arbitrarily set the time for starting the alignment by the bubble-free alignment unit 30 corresponding to the natural extension of the liquid adhesive 3 starting from the time when the superposition of the electro-optical panel 1 and the substrate 2 is completed. ing.
That is, the liquid adhesive 3 partially applied to the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2 is naturally extended along the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2, While filling almost the entire facing surfaces 1a and 2a, the local vacuum in the liquid adhesive 3 disappears and the liquid adhesive 3 becomes substantially stationary and stable, and the layer thickness of the liquid adhesive 3 is opposed. After the surfaces 1a and 2a are made substantially uniform in the Z direction, alignment of the electro-optical panel 1 and the substrate 2 by the bubble-free alignment unit 30 is started.
また、本発明の実施形態に係る表示パネルAを生産するための製造方法は、図4に示すフローチャートのように、電気光学パネル1及び基板2を重ね合わせるための合着工程と、液状接着剤3を自然伸展させるためのレベリング工程と、電気光学パネル1と基板2を位置合わせするための無気泡整列工程と、液状接着剤3を硬化させるための硬化工程とを含んでいる。   In addition, the manufacturing method for producing the display panel A according to the embodiment of the present invention includes a bonding step for overlaying the electro-optical panel 1 and the substrate 2 and a liquid adhesive as shown in the flowchart of FIG. 3 includes a leveling process for naturally extending 3, a bubble-free alignment process for aligning the electro-optical panel 1 and the substrate 2, and a curing process for curing the liquid adhesive 3.
合着工程は、合着ユニット10により真空チャンバー11内の真空雰囲気中で、電気光学パネル1及び基板2の対向面1a,2aをそれらの間に液状接着剤3が挟まれるようにZ方向へ重ね合わせて仮貼り合わせする。   The bonding process is performed in the Z direction so that the liquid adhesive 3 is sandwiched between the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2 in a vacuum atmosphere in the vacuum chamber 11 by the bonding unit 10. Overlay and temporarily bond.
レベリング工程は、搬送ユニット20などにより、真空チャンバー11内から重ね合わせが完了した電気光学パネル1及び基板2を取り出し、無気泡整列ユニット30にセットするまでの所定時間に、合着工程で重ね合わされた電気光学パネル1と基板2の対向面1a,2aに沿って液状接着剤3を所定時間に亘り自然伸展させて、対向面1a,2aの略全体に充満させるとともに、液状接着剤3の層厚を電気光学パネル1及び基板2の対向面1a,2a全体でZ方向へ略均一にするようしている。   In the leveling process, the electro-optical panel 1 and the substrate 2 that have been superposed are taken out of the vacuum chamber 11 by the transport unit 20 or the like, and are superposed in the joining process at a predetermined time until they are set in the bubble-free alignment unit 30. The liquid adhesive 3 is naturally stretched along the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2 over a predetermined time to fill substantially the entire opposing surfaces 1a and 2a, and the layer of the liquid adhesive 3 The thickness is made substantially uniform in the Z direction across the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2.
無気泡整列工程は、レベリング工程後に無気泡整列ユニット30により、電気光学パネル1又は基板2のいずれか一方を他方に対し大気中でXYθ方向へ相互に滑り移動させて位置合わせする。   In the bubble-free alignment step, after the leveling step, the bubble-free alignment unit 30 aligns either the electro-optical panel 1 or the substrate 2 by sliding relative to the other in the XYθ direction relative to the other.
液状接着剤3の硬化工程は、無気泡整列工程で位置合わせされた電気光学パネル1及び基板2の対向面1a,2a間に配置される液状接着剤3を、硬化ユニット40によりその一部又は全部を硬化させる。   In the curing process of the liquid adhesive 3, the liquid adhesive 3 disposed between the opposing surfaces 1 a and 2 a of the electro-optical panel 1 and the substrate 2 aligned in the bubble-free alignment process is partially or Cure everything.
このような本発明の実施形態に係る表示パネルAの製造システム及び製造方法によると、先ず、合着工程では、合着ユニット10によって、真空チャンバー11内で電気光学パネル1と基板2の対向面1a,2a同士が液状接着剤3を挟んでZ方向へ重ね合わされる。
それにより、液状接着剤3が対向面1a,2aに沿って強制的に伸展され、対向面1a,2aの大部分に液状接着剤3が充満する。
According to the manufacturing system and the manufacturing method of the display panel A according to the embodiment of the present invention, first, in the bonding process, the facing surfaces of the electro-optical panel 1 and the substrate 2 in the vacuum chamber 11 by the bonding unit 10. 1a and 2a are overlapped in the Z direction with the liquid adhesive 3 interposed therebetween.
Thereby, the liquid adhesive 3 is forcibly extended along the opposing surfaces 1a and 2a, and the liquid adhesive 3 fills most of the opposing surfaces 1a and 2a.
その後のレベリング工程では、搬送ユニット20によって、真空チャンバー11内から重ね合わせが完了した電気光学パネル1及び基板2を、大気中の無気泡整列ユニット30に搬送してセットするまでの所定時間中に、電気光学パネル1と基板2の間で液状接着剤3が自然伸展される。
それにより、液状接着剤3中における局部的な真空などが消失して、液状接着剤3は略静止安定した状態になり、液状接着剤3の層厚が電気光学パネル1及び基板2の対向面1a,2a全体で、Z方向へ塗布した液状接着剤3の体積に見合った略均一になる。それによって、電気光学パネル1と基板2の対向面1a,2aが平行になり、これ以上のギャップ調整は必要ない状態となる。
In the subsequent leveling step, the electro-optical panel 1 and the substrate 2 that have been superposed from the inside of the vacuum chamber 11 by the transport unit 20 are transported to the bubble-free alignment unit 30 in the atmosphere and set for a predetermined time. The liquid adhesive 3 is naturally extended between the electro-optical panel 1 and the substrate 2.
As a result, the local vacuum or the like in the liquid adhesive 3 disappears, and the liquid adhesive 3 becomes substantially stationary and stable, and the layer thickness of the liquid adhesive 3 is the opposite surface of the electro-optical panel 1 and the substrate 2. 1a and 2a as a whole become substantially uniform corresponding to the volume of the liquid adhesive 3 applied in the Z direction. As a result, the opposing surfaces 1a and 2a of the electro-optical panel 1 and the substrate 2 become parallel, and no further gap adjustment is required.
その後の無気泡整列工程では、無気泡整列ユニット3によって、大気中で電気光学パネル1及び基板2のいずれか一方が他方に対しXYθ方向へ相互移動して位置合わせされる。
それにより、略均一な層厚の液状接着剤3上に乗った電気光学パネル1又は基板2のいずれか一方を、液状接着剤3の界面に沿ってスムーズに滑動させるだけでよく、加圧しないので液状接着剤3は変形流動せず空気を巻き込むことはない。
特に、基板2が例えばタッチパネルのカバーガラスのように模様や記号などのパターンが接着面に印刷されて、印刷部と非印刷部との間に僅かな凹凸が生じたとしても、僅かな凹凸に液状接着剤3が無気泡状態で食い込んで固体と液体の界面が馴染んでいるから、液状接着剤3自体の流体動作としてスムーズに移動する。
したがって、電気光学パネル1と基板2を完全な無気泡状態で且つ均一なギャップで接着することができる。
次に、本発明の一実施例を図面に基づいて説明する。
In the subsequent bubble-free alignment step, either one of the electro-optic panel 1 and the substrate 2 moves relative to each other in the XYθ direction and is aligned by the bubble-free alignment unit 3 in the atmosphere.
Accordingly, it is only necessary to smoothly slide either the electro-optical panel 1 or the substrate 2 placed on the liquid adhesive 3 having a substantially uniform layer thickness along the interface of the liquid adhesive 3 and not pressurize it. Therefore, the liquid adhesive 3 does not deform and flow and does not involve air.
In particular, even if the substrate 2 has a pattern such as a cover glass of a touch panel and a pattern such as a pattern is printed on the adhesive surface and a slight unevenness is generated between the printed portion and the non-printed portion, the unevenness is slightly increased. Since the liquid adhesive 3 bites in without bubbles and the interface between the solid and the liquid is familiar, the liquid adhesive 3 moves smoothly as a fluid operation.
Therefore, the electro-optical panel 1 and the substrate 2 can be bonded in a completely bubble-free state with a uniform gap.
Next, an embodiment of the present invention will be described with reference to the drawings.
この実施例は、図2及び図3に示すように、合着ユニット10と無気泡整列ユニット30を個別に配設して、複数組の電気光学パネル1及び基板2を真空チャンバー11内で同時に重ね合わせ、これらを搬送ユニット20で搬送して、重ね合わされた複数組の電気光学パネル1と基板2を順次位置合わせしたものである。
すなわち、合着ユニット10が、真空チャンバー11内で保持板12,13により電気光学パネル1と基板2を複数組それぞれが互いに対向するように保持し、それぞれ接近移動させて同時に重ね合わせ、搬送ユニット20が、合着ユニット10で重ね合わされた複数組の電気光学パネル1及び基板2を真空チャンバー11内から無気泡整列ユニット30へ搬送し、無気泡整列ユニット30が、搬送ユニット20で搬送された複数組の電気光学パネル1と基板2をそれぞれ着脱自在に保持して順次位置合わせしている。
In this embodiment, as shown in FIG. 2 and FIG. 3, the coalescing unit 10 and the bubble-free alignment unit 30 are individually arranged, and a plurality of sets of the electro-optical panel 1 and the substrate 2 are simultaneously placed in the vacuum chamber 11. These are superimposed, these are conveyed by the conveyance unit 20, and a plurality of superimposed electro-optical panels 1 and the substrate 2 are sequentially aligned.
That is, the bonding unit 10 holds the electro-optical panel 1 and the substrate 2 in the vacuum chamber 11 by the holding plates 12 and 13 so that each of the plurality of sets opposes each other, moves them closer to each other, and superimposes them simultaneously. 20 transports a plurality of sets of the electro-optical panel 1 and the substrate 2 overlapped by the bonding unit 10 from the vacuum chamber 11 to the bubble-free alignment unit 30, and the bubble-free alignment unit 30 is transferred by the transfer unit 20. A plurality of sets of electro-optic panels 1 and substrates 2 are detachably held and sequentially aligned.
図2(a)(b)に示される例では、合着ユニット10の真空チャンバー11が、全体的にZ方向へ分割可能に構成され、その内部に区画形成される閉空間Sが所定の真空度に達してから複数組の電気光学パネル1及び基板2を重ね合わせ、その後に閉空間Sが大気開放される大気開放型の真空チャンバーである。
また、その他の例として図示しないが、真空チャンバー11が分離不能でその側壁の一部に出入口を開設し、この出入口を覆うように扉が開閉動自在に支持され、この扉を開閉駆動部11aの作動により開閉動させ、該扉の開動時に電気光学パネル1及び基板2を搬送ユニット20によって出し入れさせることも可能である。
In the example shown in FIGS. 2 (a) and 2 (b), the vacuum chamber 11 of the coalescing unit 10 is configured so as to be divided in the Z direction as a whole, and the closed space S partitioned and formed therein has a predetermined vacuum. This is a vacuum chamber that is open to the atmosphere in which a plurality of sets of the electro-optical panel 1 and the substrate 2 are superposed after reaching the limit, and the closed space S is then opened to the atmosphere.
Although not shown as another example, the vacuum chamber 11 is inseparable and an entrance / exit is opened in a part of the side wall, and a door is supported to be openable / closable so as to cover the entrance / exit. The electro-optical panel 1 and the substrate 2 can be moved in and out by the transport unit 20 when the door is opened.
さらに、図示例では、複数の電気光学パネル1として、その製作段階で複数の電気光学パネル1が並設される分離前の一枚ものを下方の保持板12に保持し、これら複数の電気光学パネル1とそれぞれ対向して、分離された複数枚の基板2を上方の保持板13に保持している。
また、その他の例として図示しないが、図示例と逆に複数の基板2としてその製作段階で複数の基板2が並設される分離前の一枚ものを保持し、これら複数の基板2とそれぞれ対向して、分離された複数枚の電気光学パネル1を保持することも可能である。
Further, in the illustrated example, as the plurality of electro-optical panels 1, one piece before separation in which the plurality of electro-optical panels 1 are juxtaposed in the manufacturing stage is held on the lower holding plate 12, and the plurality of electro-optical panels A plurality of separated substrates 2 are held on the upper holding plate 13 so as to face the panel 1 respectively.
Although not shown as other examples, a plurality of substrates 2 are held in parallel at the production stage as a plurality of substrates 2 opposite to the illustrated example, and one substrate before separation is held. It is also possible to hold a plurality of separated electro-optical panels 1 facing each other.
図3(a)(b)に示される例では、電気光学パネル1が保持される下方の保持チャック31に対して、基板2が保持される上方の保持チャック32を、各電気光学パネル1と各基板2がそれぞれ対向するようにXYθ方向(図3(a)に示される例では上下左右方向及び斜め方向)へ水平駆動部33でそれぞれ移動自在に支持している。
また、その他の例として図示しないが、図示例と逆に上方の保持チャック32に対して下方の保持チャック31がXYθ方向へ水平駆動部33でそれぞれ移動自在に支持することも可能である。
In the example shown in FIGS. 3A and 3B, the upper holding chuck 32 that holds the substrate 2 is connected to each electro-optical panel 1 with respect to the lower holding chuck 31 that holds the electro-optical panel 1. Each substrate 2 is supported by a horizontal drive unit 33 so as to be movable in the XYθ directions (in the example shown in FIG. 3A, up and down, left and right directions and diagonal directions) so as to face each other.
Although not shown as another example, the lower holding chuck 31 can be supported by the horizontal drive unit 33 so as to be movable in the XYθ direction with respect to the upper holding chuck 32, contrary to the illustrated example.
このような本発明の実施例に係る表示パネルAの製造システム及び製造方法によると、合着ユニット10に対して複数組の電気光学パネル1及び各基板2を1回セットするだけで、それら重ね合わせと位置合わせが行われる。
それにより、複数組の電気光学パネル1と基板2を効率良く貼り合わせることができるという利点がある。
その結果、電気光学パネルと基板を一組ずつ重ね合わせて位置合わせする従来の製造システム及び製造方法に比べ、表示パネルAの生産性を向上できて、コストの低減化が図れる。
According to the manufacturing system and the manufacturing method of the display panel A according to the embodiment of the present invention, a plurality of sets of the electro-optical panel 1 and each substrate 2 are set once with respect to the bonding unit 10, and the stacking is performed. Alignment and alignment are performed.
Thereby, there is an advantage that a plurality of sets of the electro-optical panel 1 and the substrate 2 can be bonded together efficiently.
As a result, the productivity of the display panel A can be improved and the cost can be reduced as compared with the conventional manufacturing system and manufacturing method in which the electro-optical panel and the substrate are superposed and aligned one by one.
なお、前示実施例では、合着ユニット10と無気泡整列ユニット30を個別に配設し、これら両者間に亘り搬送ユニット20で搬送したが、これに限定されず、合着ユニット10と無気泡整列ユニット30を一体的に配設して、その内部で搬送ユニット20により搬送しても良い。   In the previous embodiment, the coalescing unit 10 and the bubble-free alignment unit 30 are individually arranged and conveyed by the conveying unit 20 between them, but the present invention is not limited to this. The bubble alignment unit 30 may be disposed integrally and transported by the transport unit 20 therein.
1 電気光学パネル 1a,2a 対向面
2 基板 3 液状接着剤
11 真空チャンバー 20 搬送ユニット
30 無気泡整列ユニット 40 硬化ユニット
DESCRIPTION OF SYMBOLS 1 Electro-optical panel 1a, 2a Opposite surface 2 Substrate 3 Liquid adhesive 11 Vacuum chamber 20 Conveyance unit 30 Bubble-free alignment unit 40 Curing unit

Claims (4)

  1. 電気光学パネルと、透光性を有し前記電気光学パネルから射出された光を視認側に射出する基板とを液状接着剤で貼り合わせる表示パネルの製造方法であって、
    真空雰囲気中で前記電気光学パネル及び前記基板の対向面をそれらの間に前記液状接着剤が挟まれるようにZ方向へ重ね合わせる合着工程と、
    前記合着工程で重ね合わされた前記電気光学パネル及び前記基板の前記対向面に沿って前記液状接着剤を所定時間に亘り自然伸展させて、該液状接着剤の層厚を前記電気光学パネル及び前記基板の対向面全体でZ方向へ略均一にするレベリング工程と、
    前記レベリング工程後に前記電気光学パネル又は前記基板のいずれか一方を他方に対し大気中でXYθ方向へ相互に滑り移動させて位置合わせする無気泡整列工程と、
    前記無気泡整列工程で位置合わせされた前記電気光学パネル及び前記基板の前記対向面間に配置される前記液状接着剤を硬化させる硬化工程とを含むことを特徴とする表示パネルの製造方法。
    A method of manufacturing a display panel, in which an electro-optical panel and a substrate that has translucency and bonds light emitted from the electro-optical panel to the viewing side are bonded with a liquid adhesive,
    A bonding step of superposing the opposing surfaces of the electro-optical panel and the substrate in a Z direction so that the liquid adhesive is sandwiched between them in a vacuum atmosphere;
    The liquid adhesive is naturally extended over a predetermined time along the opposing surfaces of the electro-optical panel and the substrate superposed in the attaching step, and the layer thickness of the liquid adhesive is set to the electro-optical panel and the A leveling step for making the entire opposing surface of the substrate substantially uniform in the Z direction;
    A bubble-free alignment step in which either the electro-optic panel or the substrate is slid relative to each other in the XYθ direction relative to the other after the leveling step, and aligned.
    A method of manufacturing a display panel, comprising: a curing step of curing the liquid adhesive disposed between the opposing surfaces of the substrate and the electro-optical panel aligned in the bubble-free alignment step.
  2. 前記合着工程が、前記電気光学パネルと前記基板を複数組それぞれ互いに対向するように配置して同時に重ね合わせ、
    前記無気泡整列工程が、前記合着工程で重ね合わされた複数組の前記電気光学パネルと前記基板を順次位置合わせしたことを特徴とする請求項1記載の表示パネルの製造方法。
    In the bonding step, a plurality of sets of the electro-optical panel and the substrate are arranged so as to face each other and are simultaneously overlapped,
    2. The method of manufacturing a display panel according to claim 1, wherein the bubble-free alignment step sequentially aligns the plurality of sets of the electro-optical panels and the substrate that are overlapped in the bonding step.
  3. 電気光学パネルと、透光性を有し前記電気光学パネルから射出された光を視認側に射出する基板とを液状接着剤で貼り合わせる表示パネルの製造システムであって、
    真空チャンバーを有し、該真空チャンバー内で前記電気光学パネルと前記基板を保持して、それらの間に前記液状接着剤が挟まれるようにZ方向へ重ね合わせる合着ユニットと、
    前記合着ユニットで重ね合わされた前記電気光学パネル及び前記基板を着脱自在に保持して、前記真空チャンバー内から大気中に搬送する搬送ユニットと、
    大気中に設けられ、前記搬送ユニットで搬送された前記電気光学パネル又は前記基板のいずれか一方を他方に対しXYθ方向へ相互移動して位置合わせする無気泡整列ユニットと、
    前記無気泡整列ユニットで位置合わせされた前記電気光学パネルと前記基板の対向面間に配置される前記液状接着剤を硬化させる硬化ユニットとを備え、
    前記搬送ユニットは、前記真空チャンバー内から重ね合わされた前記電気光学パネル及び前記基板を大気中の前記無気泡整列ユニットへ搬送してセットするまでの所定時間中に、前記電気光学パネルと前記基板の対向面に沿って前記液状接着剤が自然伸展して、該液状接着剤の層厚が前記対向面全体でZ方向へ略均一になるようにしたことを特徴とする表示パネルの製造システム。
    A display panel manufacturing system in which an electro-optical panel and a substrate that has translucency and that emits light emitted from the electro-optical panel to the viewing side are bonded with a liquid adhesive,
    A bonding unit having a vacuum chamber, holding the electro-optic panel and the substrate in the vacuum chamber, and superimposing them in the Z direction so that the liquid adhesive is sandwiched between them;
    A transfer unit that detachably holds the electro-optical panel and the substrate overlaid by the attachment unit, and transfers the substrate from the vacuum chamber to the atmosphere;
    A bubble-free alignment unit that is provided in the atmosphere and that moves and aligns either the electro-optical panel or the substrate transported by the transport unit with respect to the other in the XYθ direction;
    A curing unit for curing the liquid adhesive disposed between the opposing surfaces of the substrate and the electro-optic panel aligned by the bubble-free alignment unit;
    The transfer unit is configured to transfer the electro-optical panel and the substrate superimposed from within the vacuum chamber to the bubble-free alignment unit in the atmosphere and set the electro-optical panel and the substrate during a predetermined time. The display panel manufacturing system according to claim 1, wherein the liquid adhesive is naturally stretched along the opposing surface so that the layer thickness of the liquid adhesive is substantially uniform in the Z direction over the entire opposing surface.
  4. 前記合着ユニットが、前記真空チャンバー内で前記電気光学パネルと前記基板を複数組それぞれが互いに対向するように保持し、これら複数組の前記電気光学パネルと前記基板をそれぞれ接近移動させて同時に重ね合わせ、
    前記搬送ユニットが、前記合着ユニットで重ね合わされた複数組の前記電気光学パネル及び前記基板を、前記真空チャンバー内から前記無気泡整列ユニットへ搬送し、
    前記無気泡整列ユニットが、前記搬送ユニットで搬送された複数組の前記電気光学パネルと前記基板をそれぞれ着脱自在に保持して順次位置合わせしたことを特徴とする請求項記載の表示パネルの製造システム。
    The bonding unit holds the electro-optical panel and the substrate in the vacuum chamber so that the plurality of sets face each other, and moves the plurality of sets of the electro-optical panel and the substrate close to each other at the same time. Together
    The transport unit transports the plurality of sets of the electro-optical panel and the substrate that are overlapped by the bonding unit from the vacuum chamber to the bubble-free alignment unit,
    The display panel manufacturing method according to claim 3 , wherein the bubble-free alignment unit sequentially holds and aligns the plurality of sets of the electro-optical panel and the substrate conveyed by the conveyance unit. system.
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