JP2022529131A5 - - Google Patents

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Publication number
JP2022529131A5
JP2022529131A5 JP2021559712A JP2021559712A JP2022529131A5 JP 2022529131 A5 JP2022529131 A5 JP 2022529131A5 JP 2021559712 A JP2021559712 A JP 2021559712A JP 2021559712 A JP2021559712 A JP 2021559712A JP 2022529131 A5 JP2022529131 A5 JP 2022529131A5
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JP
Japan
Prior art keywords
resonator
layer
arms
tuning fork
weight
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Application number
JP2021559712A
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English (en)
Japanese (ja)
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JP2022529131A (ja
JP7590340B2 (ja
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Priority claimed from FI20195305A external-priority patent/FI130145B/en
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Publication of JP2022529131A publication Critical patent/JP2022529131A/ja
Publication of JP2022529131A5 publication Critical patent/JP2022529131A5/ja
Application granted granted Critical
Publication of JP7590340B2 publication Critical patent/JP7590340B2/ja
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JP2021559712A 2019-04-15 2020-04-15 微小電気機械共振器 Active JP7590340B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20195305A FI130145B (en) 2019-04-15 2019-04-15 Microelectromechanical resonator
FI20195305 2019-04-15
PCT/FI2020/050249 WO2020212648A1 (en) 2019-04-15 2020-04-15 Microelectromechanical resonator

Publications (3)

Publication Number Publication Date
JP2022529131A JP2022529131A (ja) 2022-06-17
JP2022529131A5 true JP2022529131A5 (enExample) 2024-05-21
JP7590340B2 JP7590340B2 (ja) 2024-11-26

Family

ID=72837063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021559712A Active JP7590340B2 (ja) 2019-04-15 2020-04-15 微小電気機械共振器

Country Status (7)

Country Link
US (1) US12323131B2 (enExample)
EP (1) EP3956983A4 (enExample)
JP (1) JP7590340B2 (enExample)
KR (1) KR102802116B1 (enExample)
CN (2) CN121690115A (enExample)
FI (1) FI130145B (enExample)
WO (1) WO2020212648A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI131586B1 (en) * 2020-07-03 2025-07-21 Kyocera Tech Oy MEMS resonator and fabrication method
FI129591B (en) 2020-11-06 2022-05-13 Kyocera Tikitin Oy Mems resonator with high quality factor and its use
FR3120700B1 (fr) * 2021-03-10 2023-02-10 Office National Detudes Rech Aerospatiales Resonateur en vibration de flexion a haut facteur de qualite pour la realisation de references de temps, de capteurs de force ou de gyrometres
JP2024531972A (ja) * 2021-09-03 2024-09-03 キョーセラ テクノロジーズ オーユー 温度安定性の高いｍｅｍｓ共振器
FI20216348A1 (en) * 2021-12-23 2023-06-24 Kyocera Tikitin Oy MEMS resonator
CN115236357B (zh) * 2022-07-04 2024-10-18 南京理工大学 具有单锚点固支音叉谐振器的硅微谐振梁加速度计结构
IT202200022845A1 (it) 2022-11-07 2024-05-07 Milano Politecnico Dispositivo meccanico unidirezionale
FI20235493A1 (en) * 2023-05-04 2024-11-05 Kyocera Tech Oy Mems resonator comprising in-phase and out-of-phase elements
FI132024B1 (en) * 2023-09-14 2026-04-17 Kyocera Tech Oy MEMS RESONATOR WITH A COUPLING DEVICE

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