JP2022525620A - 光学分散の多次元モデル - Google Patents
光学分散の多次元モデル Download PDFInfo
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Abstract
Description
本特許出願は、2019年3月17日に出願した「多次元分散モデル」という名称の米国仮特許出願第62/819,658号の米国特許法第119条による優先権を主張するものであり、その主題は、本願に引用して援用する。
n=n(ω、E1、E2、E3など) (2)
n=n(ω、Eg、E01、Cb1、E02、Cb2など) (3)
ただし、Egはバンドギャップであり、E01はi番目のモデル化された遷移の光学的な遷移のピークエネルギーであり、Cb1はi番目のモデル化された遷移の光学的な遷移の幅である。
BPi=fi(EP1,EP2) (4)
Claims (20)
- 半導体ウェハ上の測定スポットでスペクトル範囲にわたって前記半導体ウェハにある量の照明を与えるように構成された照明器と、
前記照明器によって与えられる前記照明に応じて前記測定スポットからある量の光を集め、前記測定スポットにおける前記半導体ウェハのスペクトル応答を示すある量のデータを生成するように構成された分光計と、
1つまたは複数のコンピューティングシステムと、を備え、前記1つまたは複数のコンピューティングシステムは、
前記スペクトル範囲にわたって前記半導体ウェハの前記スペクトル応答を受信し、
ベース光学分散モデルの外側の1つまたは複数のパラメータの観点から前記半導体ウェハの1つまたは複数の層の光学応答を特徴付ける前記ベース光学分散モデルの1つまたは複数のパラメータをパラメータ化し、
前記スペクトル応答の少なくとも一部に基づいて前記ベース光学分散モデルの前記1つまたは複数のパラメータの値を推定し、
前記ベース光学分散モデルの前記1つまたは複数のパラメータの前記値をメモリに記憶するように構成されている
ことを特徴とするシステム。 - 請求項1に記載のシステムであって、前記コンピューティングシステムは、
前記スペクトル応答の少なくとも一部に基づいて1つまたは複数の外部パラメータの値を推定する
ようにさらに構成されることを特徴とするシステム。 - 請求項1に記載のシステムであって、前記コンピューティングシステムは、
前記ベース光学分散モデルの前記1つまたは複数のパラメータの値の少なくとも一部に基づいて前記半導体ウェハの層を特徴付ける1つまたは複数のパラメータの値を推定するようにさらに構成され、前記半導体ウェハの前記層は、前記ベース光学分散モデルによって特徴付けられる前記半導体ウェハの前記1つまたは複数の層とは異なることを特徴とするシステム。 - 請求項1に記載のシステムであって、前記ベース光学分散モデルの前記1つまたは複数のパラメータは、1つまたは複数のべき法則関数によって前記ベース光学分散モデルの外側の前記1つまたは複数のパラメータの観点から特徴付けられることを特徴とするシステム。
- 請求項1に記載のシステムであって、前記ベース光学分散モデルの前記1つまたは複数のパラメータは、前記半導体ウェハの前記1つまたは複数の層のうちの少なくとも1つを説明する電気的パラメータであることを特徴とするシステム。
- 請求項1に記載のシステムであって、1つまたは複数の外部パラメータは、前記半導体ウェハの構造の材料または寸法を特徴付ける製造制御パラメータまたは構造パラメータを含むことを特徴とするシステム。
- 請求項6に記載のシステムであって、前記製造制御パラメータは、プロセス温度、プロセス圧力、およびプロセス材料フローのいずれかを含み、前記半導体層の前記構造的特徴は、膜厚、合金材料の材料濃度、プロセスにより誘起される変形、不純物濃度、およびデバイス寸法のいずれかを含むことを特徴とするシステム。
- 請求項1に記載のシステムであって、1つまたは複数の外部パラメータのうちの少なくとも1つは、一定の値のパラメータであり、前記ベース光学分散モデルの前記1つまたは複数のパラメータの前記値の前記推定は、前記一定の値のパラメータの少なくとも一部に基づいていることを特徴とするシステム。
- 請求項8に記載のシステムであって、前記一定の値は、前記測定スポットにおける前記半導体ウェハの前記スペクトル応答によって決定されないことを特徴とするシステム。
- 請求項4に記載のシステムであって、前記1つまたは複数のコンピューティングシステムは、
製造制御パラメータまたは構造パラメータの値の少なくとも一部に基づいて前記半導体ウェハの製造のプロセスを制御するようにさらに構成されていることを特徴とするシステム。 - 請求項1に記載のシステムであって、前記半導体ウェハの第1の層は、半導体基板の上方に配置される合金材料層であることを特徴とするシステム。
- 請求項1に記載のシステムであって、前記照明器および分光計は、楕円偏光計および反射率計のいずれかとして構成されることを特徴とするシステム。
- スペクトル範囲にわたって半導体ウェハ上の測定スポットにおけるスペクトル応答を受信するステップと、
ベース光学分散モデルの外側の1つまたは複数のパラメータの観点から前記半導体ウェハの1つまたは複数の層の光学応答を特徴付ける前記ベース光学分散モデルの1つまたは複数のパラメータをパラメータ化するステップと、
前記スペクトル応答の少なくとも一部に基づいて前記ベース光学分散モデルの前記1つまたは複数のパラメータの値を推定するステップと、
前記ベース光学分散モデルの前記1つまたは複数のパラメータの前記値をメモリに記憶するステップと
を含むことを特徴とする方法。 - 請求項13に記載の方法であって、前記スペクトル応答の少なくとも一部に基づいて1つまたは複数の外部パラメータの値を推定するステップ
をさらに含むことを特徴とする方法。 - 請求項13に記載の方法であって、前記ベース光学分散モデルの前記1つまたは複数のパラメータの値の少なくとも一部に基づいて前記半導体ウェハの層を特徴付ける1つまたは複数のパラメータの値を推定するステップをさらに含み、前記半導体ウェハの前記層は、前記ベース光学分散モデルによって特徴付けられる前記半導体ウェハの前記1つまたは複数の層とは異なる
ことを特徴とする方法。 - 請求項13に記載の方法であって、前記ベース光学分散モデルの前記1つまたは複数のパラメータは、1つまたは複数のべき法則関数によって前記ベース光学分散モデルの外側の前記1つまたは複数のパラメータの観点から特徴付けられることを特徴とする方法。
- 請求項13に記載の方法であって、1つまたは複数の外部パラメータは、前記半導体ウェハの構造の材料または寸法を特徴付ける製造制御パラメータまたは構造パラメータを含むことを特徴とする方法。
- 請求項13に記載の方法であって、1つまたは複数の外部パラメータのうちの少なくとも1つは、一定の値のパラメータであり、前記ベース光学分散モデルの前記1つまたは複数のパラメータの前記値の前記推定は、前記一定の値のパラメータの少なくとも一部に基づいていることを特徴とする方法。
- 半導体ウェハ上の測定スポットでスペクトル範囲にわたって前記半導体ウェハにある量の照明を与えるように構成された照明器と、
前記照明器によって与えられる前記照明に応じて前記測定スポットからある量の光を集め、前記測定スポットにおける前記半導体ウェハのスペクトル応答を示すある量のデータを生成するように構成された分光計と、
非一時的なコンピュータ可読媒体と、を備え、前記非一時的なコンピュータ可読媒体は、
コンピューティングシステムに、前記スペクトル範囲にわたって前記半導体ウェハの前記スペクトル応答を受け取らせるコード、
前記コンピューティングシステムに、ベース光学分散モデルの外側の1つまたは複数のパラメータの観点から前記半導体ウェハの1つまたは複数の層の光学応答を特徴付ける前記ベース光学分散モデルの1つまたは複数のパラメータをパラメータ化させるコード、
前記コンピューティングシステムに、前記スペクトル応答の少なくとも一部に基づいて前記ベース光学分散モデルの前記1つまたは複数のパラメータの値を推定させるコード、および
前記コンピューティングシステムに、前記ベース光学分散モデルの前記1つまたは複数のパラメータの前記値をメモリに記憶させるコード
を含むことを特徴とするシステム。 - 請求項19に記載のシステムであって、前記非一時的なコンピュータ可読媒体は、
前記コンピューティングシステムに、前記スペクトル応答の少なくとも一部に基づいて1つまたは複数の外部パラメータの値を推定させるコードをさらに備えることを特徴とするシステム。
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US11156548B2 (en) * | 2017-12-08 | 2021-10-26 | Kla-Tencor Corporation | Measurement methodology of advanced nanostructures |
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Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5608526A (en) | 1995-01-19 | 1997-03-04 | Tencor Instruments | Focused beam spectroscopic ellipsometry method and system |
US6734967B1 (en) | 1995-01-19 | 2004-05-11 | Kla-Tencor Technologies Corporation | Focused beam spectroscopic ellipsometry method and system |
US5859424A (en) | 1997-04-08 | 1999-01-12 | Kla-Tencor Corporation | Apodizing filter system useful for reducing spot size in optical measurements and other applications |
US6483580B1 (en) | 1998-03-06 | 2002-11-19 | Kla-Tencor Technologies Corporation | Spectroscopic scatterometer system |
US6429943B1 (en) | 2000-03-29 | 2002-08-06 | Therma-Wave, Inc. | Critical dimension analysis with simultaneous multiple angle of incidence measurements |
US6710865B2 (en) | 2000-09-14 | 2004-03-23 | N&K Technology, Inc. | Method of inferring optical parameters outside of a measurement spectral range |
US6917419B2 (en) | 2000-09-20 | 2005-07-12 | Kla-Tencor Technologies Corp. | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen |
US6895075B2 (en) | 2003-02-12 | 2005-05-17 | Jordan Valley Applied Radiation Ltd. | X-ray reflectometry with small-angle scattering measurement |
JP4938219B2 (ja) | 2001-12-19 | 2012-05-23 | ケーエルエー−テンカー コーポレイション | 光学分光システムを使用するパラメトリック・プロフィーリング |
US6816570B2 (en) | 2002-03-07 | 2004-11-09 | Kla-Tencor Corporation | Multi-technique thin film analysis tool |
US7478019B2 (en) | 2005-01-26 | 2009-01-13 | Kla-Tencor Corporation | Multiple tool and structure analysis |
US7567351B2 (en) | 2006-02-02 | 2009-07-28 | Kla-Tencor Corporation | High resolution monitoring of CD variations |
US7755764B2 (en) | 2007-01-26 | 2010-07-13 | Kla-Tencor Corporation | Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry |
JP2008192731A (ja) | 2007-02-02 | 2008-08-21 | Fujifilm Corp | 半導体発光素子および該素子を備えた光断層画像化装置 |
US7907264B1 (en) | 2007-09-07 | 2011-03-15 | Kla-Tencor Corporation | Measurement of thin film porosity |
US7912679B2 (en) * | 2007-09-20 | 2011-03-22 | Tokyo Electron Limited | Determining profile parameters of a structure formed on a semiconductor wafer using a dispersion function relating process parameter to dispersion |
US7929667B1 (en) | 2008-10-02 | 2011-04-19 | Kla-Tencor Corporation | High brightness X-ray metrology |
US9442063B2 (en) * | 2011-06-27 | 2016-09-13 | Kla-Tencor Corporation | Measurement of composition for thin films |
CN104114999B (zh) * | 2011-09-27 | 2017-06-09 | 科磊股份有限公司 | 高吞吐量薄膜特性化及缺陷检测 |
US9228943B2 (en) | 2011-10-27 | 2016-01-05 | Kla-Tencor Corporation | Dynamically adjustable semiconductor metrology system |
US8879073B2 (en) | 2012-02-24 | 2014-11-04 | Kla-Tencor Corporation | Optical metrology using targets with field enhancement elements |
US8749179B2 (en) | 2012-08-14 | 2014-06-10 | Kla-Tencor Corporation | Optical characterization systems employing compact synchrotron radiation sources |
US9581430B2 (en) | 2012-10-19 | 2017-02-28 | Kla-Tencor Corporation | Phase characterization of targets |
US8860937B1 (en) | 2012-10-24 | 2014-10-14 | Kla-Tencor Corp. | Metrology systems and methods for high aspect ratio and large lateral dimension structures |
US10769320B2 (en) | 2012-12-18 | 2020-09-08 | Kla-Tencor Corporation | Integrated use of model-based metrology and a process model |
US9405290B1 (en) | 2013-01-17 | 2016-08-02 | Kla-Tencor Corporation | Model for optical dispersion of high-K dielectrics including defects |
US9291554B2 (en) | 2013-02-05 | 2016-03-22 | Kla-Tencor Corporation | Method of electromagnetic modeling of finite structures and finite illumination for metrology and inspection |
US10101670B2 (en) | 2013-03-27 | 2018-10-16 | Kla-Tencor Corporation | Statistical model-based metrology |
US9875946B2 (en) | 2013-04-19 | 2018-01-23 | Kla-Tencor Corporation | On-device metrology |
US11175589B2 (en) | 2013-06-03 | 2021-11-16 | Kla Corporation | Automatic wavelength or angle pruning for optical metrology |
US9915522B1 (en) | 2013-06-03 | 2018-03-13 | Kla-Tencor Corporation | Optimized spatial modeling for optical CD metrology |
US9383661B2 (en) | 2013-08-10 | 2016-07-05 | Kla-Tencor Corporation | Methods and apparatus for determining focus |
US10935893B2 (en) | 2013-08-11 | 2021-03-02 | Kla-Tencor Corporation | Differential methods and apparatus for metrology of semiconductor targets |
US9412673B2 (en) | 2013-08-23 | 2016-08-09 | Kla-Tencor Corporation | Multi-model metrology |
US9595481B1 (en) | 2013-08-23 | 2017-03-14 | Kla-Tencor Corporation | Dispersion model for band gap tracking |
US9846132B2 (en) | 2013-10-21 | 2017-12-19 | Kla-Tencor Corporation | Small-angle scattering X-ray metrology systems and methods |
US9553033B2 (en) | 2014-01-15 | 2017-01-24 | Kla-Tencor Corporation | Semiconductor device models including re-usable sub-structures |
US10352876B2 (en) | 2014-05-09 | 2019-07-16 | KLA—Tencor Corporation | Signal response metrology for scatterometry based overlay measurements |
US10139352B2 (en) | 2014-10-18 | 2018-11-27 | Kla-Tenor Corporation | Measurement of small box size targets |
US10152678B2 (en) | 2014-11-19 | 2018-12-11 | Kla-Tencor Corporation | System, method and computer program product for combining raw data from multiple metrology tools |
US20160139032A1 (en) | 2014-11-19 | 2016-05-19 | Kla-Tencor Corporation | Inspection system and method using an off-axis unobscured objective lens |
US9970863B2 (en) * | 2015-02-22 | 2018-05-15 | Kla-Tencor Corporation | Optical metrology with reduced focus error sensitivity |
US10502549B2 (en) | 2015-03-24 | 2019-12-10 | Kla-Tencor Corporation | Model-based single parameter measurement |
US9664734B2 (en) * | 2015-05-21 | 2017-05-30 | Kla-Tencor Corporation | Multi-oscillator, continuous Cody-Lorentz model of optical dispersion |
US10345721B1 (en) * | 2015-06-16 | 2019-07-09 | Kla-Tencor Corporation | Measurement library optimization in semiconductor metrology |
US10139358B2 (en) | 2016-01-11 | 2018-11-27 | International Business Machines Corporation | Method for characterization of a layered structure |
JP2018029095A (ja) | 2016-08-15 | 2018-02-22 | 株式会社Nano Wave | 発光素子の特性評価方法及び発光素子の特性評価装置 |
US10458912B2 (en) | 2016-08-31 | 2019-10-29 | Kla-Tencor Corporation | Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity |
US10151631B2 (en) * | 2016-10-04 | 2018-12-11 | Kla-Tencor Corporation | Spectroscopy with tailored spectral sampling |
US11333621B2 (en) | 2017-07-11 | 2022-05-17 | Kla-Tencor Corporation | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction |
US11378451B2 (en) * | 2017-08-07 | 2022-07-05 | Kla Corporation | Bandgap measurements of patterned film stacks using spectroscopic metrology |
US11060846B2 (en) * | 2018-12-19 | 2021-07-13 | Kla Corporation | Scatterometry based methods and systems for measurement of strain in semiconductor structures |
-
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