JP2022524953A - 複数の溝を生成する装置及び方法 - Google Patents
複数の溝を生成する装置及び方法 Download PDFInfo
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Abstract
Description
1.表面内に複数の溝を生成するレーザ加工装置において、このレーザ加工装置は、
レーザ放射を受け取り、引き続き出力放射を生成するように取り付けられている光学回折装置と、
出力放射と表面との間に相対運動を生成するアクチュエータ装置と
を備え、この出力放射は、複数の強度極大を有し、各々の強度極大は、複数の溝のうちの一つの溝を生成する、レーザ加工装置。
相対運動は、直線的運動であり、
回折装置及び/又は放射経路は、複数の溝のうちのそれぞれ二つの溝がそれ自体の間に一つのリブを形成するように取り付けられている、上述の実施形態のいずれかに記載のレーザ加工装置。
レーザ放射を、出力放射を生成する光学回折装置に向けるステップと、
出力放射を表面に向けるステップと、
出力放射と表面との間に相対運動を生成するステップと
を含み、この出力放射は、複数の強度極大を有し、各々の強度極大は、複数の溝のうちの一つの溝を生成する、表面内に複数の溝を生成する方法。
以下に、本明細書に開示された主題の例示的な実施形態を、図面を参照して説明する。異なる図において、類似の又は同一の素子又は構成要素は、部分的に同じ符号が付けられているか、又は最初の桁だけが異なる符号が付けられていることに留意されたい。別の図における対応する特徴又は構成要素と同じであるか又は少なくとも機能的に同じである特徴又は構成要素は、以下の本文中に最初に出現する場合にだけ詳細に説明され、この説明は、これらの特徴及び構成要素(又は相応する符号)が後に出現する際には繰り返されない。上述の定義は、一実施形態によると、以下の実施形態についても当てはまり、その逆も同様である。さらに、上述で説明された特徴及び実施形態は、以下に説明された特徴及び実施形態と組み合わせることが可能である。
表面内に複数の溝を生成するためのレーザ加工装置は、レーザ放射を受け取り、引き続き出力放射を生成するように取り付けられている光学回折装置を備え、この出力放射は、複数の強度極大を有する。アクチュエータ装置が、出力放射と表面との間の相対運動を生成するために設けられていて、各々の強度極大が、複数の溝のうちの一つの溝を生成する。
Claims (15)
- 表面内に複数の溝を生成するレーザ加工装置において、前記レーザ加工装置は、
レーザ放射を受け取り、引き続き出力放射を生成するように取り付けられている光学回折装置と、
前記出力放射と前記表面との間に相対運動を生成するアクチュエータ装置と
を備え、前記出力放射は、複数の強度極大を有し、各々の強度極大は、前記複数の溝のうちの一つの溝を生成する、
レーザ加工装置。 - 前記光学回折装置は、少なくとも一つの光学素子を有し、特に、前記少なくとも一つの光学素子は、前記出力放射の複数の部分の間に位相差を生成するように取り付けられている、請求項1に記載のレーザ加工装置。
- 前記少なくとも一つの光学素子は、反射で動作するように取り付けられている、請求項2に記載のレーザ加工装置。
- 前記少なくとも一つの光学素子は、金属又は半導体材料からなる本体を有する、請求項2又は3に記載のレーザ加工装置。
- 前記本体は、少なくとも部分的に、金属、特に耐腐食性金属、例えば耐腐食性合金又は貴金属で被覆されている、請求項4に記載のレーザ加工装置。
- 前記少なくとも一つの光学素子は、回折光学素子である、請求項2から5までのいずれか一項に記載のレーザ加工装置。
- 前記複数の強度極大は、少なくとも10の強度極大、特に少なくとも50の強度極大又は少なくとも200の強度極大を含む、請求項1から6までのいずれか一項に記載のレーザ加工装置。
- 前記出力放射が前記表面に向かうように取り付けられている放射経路をさらに備え、
前記相対運動は、直線的運動であり、
前記光学回折装置及び/又は前記放射経路は、前記複数の溝のうちのそれぞれ二つの溝がそれ自体の間に一つのリブを形成するように取り付けられている、請求項1から7までのいずれか一項に記載のレーザ加工装置。 - 前記レーザ放射は、CO2レーザ放射である、請求項1から8までのいずれか一項に記載のレーザ加工装置。
- 前記レーザ放射の平均出力は、少なくとも500W、特に少なくとも1kWである、請求項1から9までのいずれか一項に記載のレーザ加工装置。
- 前記レーザ放射を生成するレーザ源をさらに備える、請求項1から10までのいずれか一項に記載のレーザ加工装置。
- 前記光学回折装置を冷却する冷却剤流路、特に液状冷却剤用の冷却剤流路をさらに備える、請求項1から11までのいずれか一項に記載のレーザ加工装置。
- 表面内に複数の溝を生成する方法において、前記方法は、
レーザ放射を、出力放射を生成する光学回折装置に向けるステップと、
前記出力放射を前記表面に向けるステップと、
前記出力放射と前記表面との間に相対運動を生成するステップと
を含み、前記出力放射は、複数の強度極大を有し、各々の強度極大は、複数の溝のうちの一つの溝を生成する、表面内に複数の溝を生成する方法。 - 前記出力放射の生成は、前記光学回折装置でのレーザ放射の反射を含む、請求項13に記載の方法。
- 前記表面上に複数の平行のリブ、特にリブレットを製造するための、請求項1から12までのいずれか一項に記載のレーザ加工装置又は請求項13若しくは14に記載の方法の使用。
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DE202019101652.3U DE202019101652U1 (de) | 2019-03-22 | 2019-03-22 | Laserbearbeitungsvorrichtung zum Erzeugen einer Vielzahl von Furchen |
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PCT/EP2020/057615 WO2020193366A1 (de) | 2019-03-22 | 2020-03-19 | Vorrichtung und verfahren zur erzeugung einer vielzahl von furchen |
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DE102021201655A1 (de) | 2021-02-22 | 2022-08-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Bauelement mit einer Oberfläche, die von einem Partikel enthaltenden Gasstrom angeströmt oder umströmt und mit der ein Anhaften von Partikeln verhindert oder reduziert wird sowie ein Herstellungsverfahren |
DE102021106412A1 (de) * | 2021-03-16 | 2022-09-22 | 4Jet Microtech Gmbh | Interferenzstrukturierung von Glasoberflächen |
DE102022100262A1 (de) | 2022-01-07 | 2023-07-13 | Gebr. Heller Maschinenfabrik Gmbh | Beschichtungsverfahren und beschichtetes Bauteil |
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US5073007A (en) | 1990-06-11 | 1991-12-17 | Holo-Or Ltd. | Diffractive optical element |
CN1157929A (zh) * | 1996-10-31 | 1997-08-27 | 汪凌志 | 控制表面形貌改变镜面反射的光学元件及其制作方法 |
JP2004264347A (ja) | 2003-02-06 | 2004-09-24 | Sumitomo Electric Ind Ltd | 回折型光学部品およびそれを用いたレーザ加工装置 |
EP2336810A1 (de) * | 2009-12-18 | 2011-06-22 | Boegli-Gravures S.A. | Verfahren und Vorrichtung zur Erzeugung von Farbmustern mittels Beugungsgitter |
US20160097885A1 (en) * | 2014-10-03 | 2016-04-07 | Corning Incorporated | Mirror substrates with highly finishable corrosion-resistant coating |
JP6407841B2 (ja) * | 2015-11-18 | 2018-10-17 | ファナック株式会社 | クーラントを循環させるための循環路を備えるレーザ加工ヘッド |
US10569365B2 (en) * | 2015-11-23 | 2020-02-25 | The Boeing Company | Method for preparing a fluid flow surface |
DE102017206968B4 (de) | 2017-04-26 | 2019-10-10 | 4Jet Microtech Gmbh & Co. Kg | Verfahren und Vorrichtung zum Herstellen von Riblets |
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EP3941679A1 (de) | 2022-01-26 |
US20220152741A1 (en) | 2022-05-19 |
CA3134472A1 (en) | 2020-10-01 |
BR112021017371A2 (pt) | 2021-11-16 |
AU2020246943A1 (en) | 2021-10-07 |
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