JP2022517511A - 極端紫外線リソグラフィ用途におけるフォトマスクからの取付具取り外し - Google Patents
極端紫外線リソグラフィ用途におけるフォトマスクからの取付具取り外し Download PDFInfo
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- JP2022517511A JP2022517511A JP2021532390A JP2021532390A JP2022517511A JP 2022517511 A JP2022517511 A JP 2022517511A JP 2021532390 A JP2021532390 A JP 2021532390A JP 2021532390 A JP2021532390 A JP 2021532390A JP 2022517511 A JP2022517511 A JP 2022517511A
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- JP
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- Prior art keywords
- fixture
- pellicle
- photomask
- stud
- puller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
- G03F7/343—Lamination or delamination methods or apparatus for photolitographic photosensitive material
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Environmental & Geological Engineering (AREA)
- Library & Information Science (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Chemical & Material Sciences (AREA)
- Robotics (AREA)
- Inorganic Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (15)
- フォトマスクを処理するための取付具取り外し装置であって、
取付具プーラーを備え、前記取付具プーラーが、
アクチュエータ、
前記アクチュエータに連結されたクランプであって、取付具を把持するように適合されたクランプ、および
前記取付具に隣接して配置されたコイルアセンブリ、
をさらに備える、取付具取り外し装置。 - 前記取付具プーラーが、ペリクルスタッドグリッパをさらに備え、前記クランプが、前記ペリクルスタッドグリッパ内に画定された開口部内に連結されている、請求項1に記載の取付具取り外し装置。
- 前記ペリクルスタッドグリッパが、底部によって接続された一対の側壁をさらに備え、前記開口部が、前記一対の側壁の間に画定されている、請求項2に記載の取付具取り外し装置。
- ペリクルスタッドグリッパが、絶縁材料から製造されている、請求項1に記載の取付具取り外し装置。
- 導電性材料が、耐熱材料から製造されている、請求項4に記載の取付具取り外し装置。
- 前記クランプが、前記ペリクルスタッドグリッパの前記側壁に当接して配置されている、請求項3に記載の取付具取り外し装置。
- 前記クランプが、耐熱材料から製造されている、請求項1に記載の取付具取り外し装置。
- 前記取付具プーラーが、加熱デバイスを備える取付具取り外し装置内に配置されている、請求項1に記載の取付具取り外し装置。
- 前記取付具取り外し装置が、加熱プレートを備える、請求項8に記載の取付具取り外し装置。
- 前記取付具取り外し装置が、1つ以上の取付具プーラーを備える、請求項8に記載の取付具取り外し装置。
- フォトマスクから取付具を取り外す方法であって、
前記フォトマスク上に配置された取付具を囲むように取付具プーラーを位置決めすることと、
誘導加熱によって前記取付具を加熱することと、
前記取付具を把持するように前記取付具プーラーを移動させることと、
前記取付具プーラーへ機械的な力を加えることと、
前記フォトマスクから前記取付具を取り外すことと、
を含む方法。 - 前記取付具が、前記フォトマスク上に配置された接着層上に配置されたペリクルスタッドをさらに備える、請求項11に記載の方法。
- 前記取付具を加熱することが、
前記取付具プーラーの近くに配置されたコイルアセンブリに電力を印加することを、さらに含み、前記コイルアセンブリが、前記取付具の周りに配置されている、請求項11に記載の方法。 - 前記取付具内の接着層を軟化させることを、さらに含む、請求項13に記載の方法。
- 前記取付具プーラーを位置決めすることが、
前記取付具プーラー内に配置されたペリクルスタッドグリッパによって前記取付具を把持することを、さらに含む、請求項11に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862777557P | 2018-12-10 | 2018-12-10 | |
US62/777,557 | 2018-12-10 | ||
PCT/US2019/057470 WO2020123038A1 (en) | 2018-12-10 | 2019-10-22 | Attachment feature removal from photomask in extreme ultraviolet lithography application |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022517511A true JP2022517511A (ja) | 2022-03-09 |
JP7104856B2 JP7104856B2 (ja) | 2022-07-21 |
Family
ID=70971681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021532390A Active JP7104856B2 (ja) | 2018-12-10 | 2019-10-22 | 極端紫外線リソグラフィ用途におけるフォトマスクからの取付具取り外し |
Country Status (6)
Country | Link |
---|---|
US (1) | US10928724B2 (ja) |
JP (1) | JP7104856B2 (ja) |
KR (1) | KR20210091345A (ja) |
CN (1) | CN113169047A (ja) |
TW (1) | TWI818107B (ja) |
WO (1) | WO2020123038A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220043268A (ko) * | 2020-09-29 | 2022-04-05 | 삼성전자주식회사 | 온도/압력이 독립으로 제어되는 스터드 부착 장치 및 스터드 부착 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11202476A (ja) * | 1998-01-14 | 1999-07-30 | Oki Electric Ind Co Ltd | ペリクルの取付構造 |
JP2011186032A (ja) * | 2010-03-05 | 2011-09-22 | Shin-Etsu Chemical Co Ltd | ペリクルハンドリング治具 |
WO2014142125A1 (ja) * | 2013-03-15 | 2014-09-18 | 旭化成イーマテリアルズ株式会社 | ペリクル膜及びペリクル |
Family Cites Families (20)
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EP0843352A1 (en) * | 1996-11-15 | 1998-05-20 | Montpellier Technologies | Method for removing a semiconductor chip bonded to a wire-bonded multichip module |
KR100563774B1 (ko) | 2000-08-25 | 2006-03-24 | 에이에스엠엘 네델란즈 비.브이. | 마스크 조작장치, 리소그래피 투영장치, 디바이스제조방법 및 그것에 의하여 제조된 디바이스 |
JP4455749B2 (ja) * | 2000-12-25 | 2010-04-21 | 株式会社日本マイクロニクス | プローブ要素の固着装置 |
JP2005505945A (ja) | 2001-10-12 | 2005-02-24 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | リソグラフィック装置及びデバイス製造方法 |
FR2854169B1 (fr) | 2003-04-28 | 2005-06-10 | Commissariat Energie Atomique | Procede destine a eviter le depot de particules contaminatrices sur la surface d'un micro-composant, dispositif de stockage d'un micro-composant et dispositif de depot de couches minces. |
US6972420B2 (en) | 2004-04-28 | 2005-12-06 | Intel Corporation | Atomic beam to protect a reticle |
US20050275835A1 (en) | 2004-06-15 | 2005-12-15 | Nikon Corporation | Method and apparatus for protecting an EUV reticle from particles |
JP4584754B2 (ja) * | 2005-04-06 | 2010-11-24 | 株式会社日立産機システム | ナノプリント金型、その製造方法及びこの金型を用いたナノプリント装置並びにナノプリント方法 |
US7367138B2 (en) | 2005-10-11 | 2008-05-06 | Nikon Corporation | Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles |
US20070139855A1 (en) * | 2005-12-21 | 2007-06-21 | Asml Netherlands B.V. | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
KR100809428B1 (ko) * | 2006-07-28 | 2008-03-05 | 삼성전기주식회사 | 인쇄회로기판 제조방법 및 제조장치 |
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JP2010261987A (ja) * | 2009-04-30 | 2010-11-18 | Shin-Etsu Chemical Co Ltd | フォトマスク |
JP2013526004A (ja) | 2010-03-12 | 2013-06-20 | エーエスエムエル ネザーランズ ビー.ブイ. | 汚染粒子を除去するシステム、リソグラフィ装置、汚染粒子を除去する方法、及びデバイス製造方法 |
JP5762819B2 (ja) * | 2010-05-19 | 2015-08-12 | Hoya株式会社 | マスクブランクの製造方法及び転写用マスクの製造方法、並びにマスクブランク及び転写用マスク |
US10558129B2 (en) * | 2014-11-17 | 2020-02-11 | Asml Netherlands B.V. | Mask assembly |
US9607907B2 (en) * | 2014-12-01 | 2017-03-28 | Industrial Technology Research Institute | Electric-programmable magnetic module and picking-up and placement process for electronic devices |
CA2975806A1 (en) * | 2015-02-03 | 2016-08-11 | Asml Netherlands B.V. | Mask assembly and associated methods |
-
2019
- 2019-10-22 WO PCT/US2019/057470 patent/WO2020123038A1/en active Application Filing
- 2019-10-22 CN CN201980079405.XA patent/CN113169047A/zh active Pending
- 2019-10-22 JP JP2021532390A patent/JP7104856B2/ja active Active
- 2019-10-22 KR KR1020217021340A patent/KR20210091345A/ko not_active Application Discontinuation
- 2019-10-23 US US16/661,541 patent/US10928724B2/en active Active
- 2019-10-25 TW TW108138537A patent/TWI818107B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11202476A (ja) * | 1998-01-14 | 1999-07-30 | Oki Electric Ind Co Ltd | ペリクルの取付構造 |
JP2011186032A (ja) * | 2010-03-05 | 2011-09-22 | Shin-Etsu Chemical Co Ltd | ペリクルハンドリング治具 |
WO2014142125A1 (ja) * | 2013-03-15 | 2014-09-18 | 旭化成イーマテリアルズ株式会社 | ペリクル膜及びペリクル |
Also Published As
Publication number | Publication date |
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JP7104856B2 (ja) | 2022-07-21 |
KR20210091345A (ko) | 2021-07-21 |
TW202027134A (zh) | 2020-07-16 |
CN113169047A (zh) | 2021-07-23 |
US20200183268A1 (en) | 2020-06-11 |
WO2020123038A1 (en) | 2020-06-18 |
US10928724B2 (en) | 2021-02-23 |
TWI818107B (zh) | 2023-10-11 |
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