JP2022144121A - Teacher data creation support device and teacher data creation support method - Google Patents

Abstract

To provide a teacher data creation support device and a teacher data creation support method capable of easily creating teacher data for performing inspection with high accuracy.SOLUTION: An abnormal data acquisition part 41 acquires abnormal data showing an image of an inspection object determined to have a defect in advance. A normal data acquisition part 42 acquires normal data showing an image of a normal inspection object so as to correspond to the abnormal data acquired by the abnormal data acquisition part 41. A difference data generation part 43 generates difference data showing a difference between the abnormal data acquired by the abnormal data acquisition part 41 and the normal data acquired by the normal data acquisition part 42 so as to correspond to the abnormal data. A presentation part 44 presents an image of a part of an inspection object on the basis of the difference data generated by the difference data generation part 43.SELECTED DRAWING: Figure 2

Description

The present invention relates to a teacher data creation support device and a teacher data creation support method for assisting creation of teacher data.

Products or commodities such as foods are appropriately inspected to determine whether they are non-defective in each process from mid-manufacture to before distribution. For example, Patent Literature 1 describes a defect inspection apparatus for inspecting various defects that occur in the manufacturing process of semiconductor wafers.

In this defect inspection apparatus, a plurality of SEM (Scanning Electron Microscope) images showing a plurality of wafers to be inspected are generated. A user designates an SEM image showing a non-defective wafer from the generated SEM images as a template. By calculating the difference between each of a plurality of SEM images (inspection images) other than the template and the template, defects on the circuit pattern of the wafer indicated by the inspection images are detected.

JP 2011-119471 A

In the defect inspection apparatus, it may be determined that there is a defect even in an inspection object having no defect. In this case, even though there is no defect, the inspected object is discarded because an erroneous inspection result is obtained, resulting in a decrease in yield. Therefore, it is desired that the inspection be performed with higher accuracy.

SUMMARY OF THE INVENTION An object of the present invention is to provide a training data generation support apparatus and a training data generation support method that can easily generate training data for performing inspections with high accuracy.

(1) A teaching data creation support device according to a first aspect of the present invention is a teaching data creation support device for assisting creation of teacher data used for reinspection of an object to be inspected, which is determined to be defective in advance. an abnormal data acquisition unit for acquiring abnormal data representing an image of an inspection object; and normal data for acquiring normal data representing an image of a normal inspection object so as to correspond to the abnormal data acquired by the abnormal data acquisition unit. an acquisition unit, a difference data generation unit configured to generate differential data indicating a difference between the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit so as to correspond to the abnormal data; a presentation unit that presents an image of a portion of the inspection object based on the difference data generated by the difference data generation unit.

In this teaching data creation support device, based on the difference data indicating the difference between the abnormal data indicating the image of the inspection object judged to be defective in advance and the normal data indicating the image of the normal inspection object, , an image of a portion of the inspected object is presented. A portion of the inspection object in the image shown based on the difference data is likely to require re-inspection. Therefore, by checking the presented image, the user can create training data for re-examination of the relevant portion. This makes it possible to easily create teacher data for performing inspections with high accuracy.

(2) The training data creation support device may further include a reception unit that receives selection of difference data presented by the presentation unit, and a registration unit that registers the difference data, the selection of which is received by the reception unit, as training data. . In this case, difference data selected by the user are registered as teacher data. This makes it possible to create teacher data more easily.

(3) The reception unit may further receive correction of the difference data presented by the presentation unit, and the registration unit may register the corrected difference data as teacher data. In this case, it is possible to more appropriately correct the portion of the inspection object that requires re-inspection in the image based on the difference data. As a result, it is possible to create teacher data for performing inspections with higher accuracy.

(4) The normal data acquisition unit acquires a plurality of normal data corresponding to the abnormal data, and the difference data generation unit generates a plurality of normal data based on the abnormal data and the normal data corresponding to the abnormal data. Difference data may be generated. In this case, a large number of differential data are generated from one abnormal data. As a result, it is possible to improve the working efficiency of creating teacher data.

(5) The normal data acquisition unit acquires a plurality of normal data corresponding to the abnormal data, and the differential data generation unit acquires the abnormal data and the average of the plurality of normal data corresponding to the abnormal data Difference data may be generated. According to this configuration, even if noise components unrelated to defects are accidentally mixed in any of the plurality of normal data, the plurality of normal data are averaged. have little effect on the value. Therefore, it is possible to create training data for performing inspection with higher accuracy.

(6) The normal data acquisition unit acquires normal data corresponding to a plurality of abnormal data, and the difference data generation unit generates difference data based on each abnormal data and the normal data corresponding to the abnormal data. may be generated. In this case, teacher data can be created at high speed using common normal data.

(7) The normal data acquired by the normal data acquisition unit may include image data representing an image of an inspection object that was not previously determined to have a defect. In this case, normal data representing an image of a normal inspection object can be easily obtained.

(8) The normal data acquired by the normal data acquisition unit may include master data indicating the blueprint of the inspection object. In this case, normal data representing an image of a normal inspection object can be easily obtained.

(9) The normal data acquisition unit may acquire, as the normal data, master data corrected based on the processing accuracy of the object to be inspected. According to this configuration, it is possible to easily acquire normal data representing an image of a normal inspection target even when the inspection target area is minute.

(10) A non-inspection area is set in the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit, and the difference data generation unit excludes the set non-inspection area. may be used to generate difference data. In this case, the image indicated by the difference data is prevented from including a portion outside the inspection target area. As a result, it is possible to create teacher data for performing inspections with higher accuracy.

(11) The abnormal data acquisition unit further acquires defect information indicating the type of defect in the inspection object corresponding to the acquired abnormal data, and the difference data generation unit acquires the defect information acquired by the abnormal data acquisition unit. may be added to the generated difference data. In this case, the user does not need to add defect information to the teacher data. As a result, it is possible to reduce the burden on the user and improve the working efficiency of creating teacher data. In addition, since mistakes caused by the user's work do not occur, it is possible to create more accurate training data.

(12) The abnormal data acquisition unit may acquire binarized abnormal data, and the normal data acquisition unit may acquire binarized normal data. In this case, since the amount of abnormal data and normal data is reduced, teacher data can be created at high speed.

(13) A teacher data creation support method according to a second invention is a teacher data creation support method for assisting creation of teacher data to be used for reinspection of an inspection object, in which it is determined that there is a defect in advance. acquiring abnormal data representing an image of an inspection object; acquiring normal data representing an image of a normal inspection object corresponding to the acquired abnormal data; acquiring the acquired abnormal data; generating difference data indicating a difference between the abnormal data and correspondingly acquired normal data; and presenting an image of the portion of the inspection object based on the generated difference data.

According to this teacher data creation support method, based on the difference data indicating the difference between the abnormal data indicating the image of the inspection object judged to have defects in advance and the normal data indicating the image of the normal inspection object, Then an image of the portion of the inspection object is presented. A portion of the inspection object in the image shown based on the difference data is likely to require re-inspection. Therefore, by checking the presented image, the user can create training data for re-examination of the relevant portion. This makes it possible to easily create teacher data for performing inspections with high accuracy.

According to the present invention, it is possible to create accurate teacher data while reducing the burden on the user.

1 is a diagram showing the configuration of a processing system including a support device according to a first embodiment of the present invention; FIG. FIG. 2 is a diagram showing a configuration of a support device in FIG. 1; FIG. 4 is a diagram showing various data used to create teacher data; FIG. 10 is a diagram showing an example of a display screen of a display device in creating teacher data; 3 is a flowchart showing support processing by the support device of FIG. 2; FIG. 10 is a diagram showing various data used for creating teacher data in the first modified example; FIG. 10 is a diagram showing various data used for creating teacher data in the second modified example; FIG. 10 is a diagram showing various data used for creating teacher data in the third modification; FIG. 10 is a diagram showing various data used for creating teacher data in the second embodiment; FIG. FIG. 10 is a diagram showing various data used for creating teacher data in the third embodiment; FIG. FIG. 10 is a diagram showing various data used for creating teacher data in the fourth embodiment; FIG.

[1] First Embodiment (1) Processing System Hereinafter, a teacher data creation support device and a teacher data creation support method according to an embodiment of the present invention will be described with reference to the drawings. In the following description, the teaching data creation support device is abbreviated as support device. FIG. 1 is a diagram showing the configuration of a processing system including a support device according to the first embodiment of the present invention. As shown in FIG. 1, processing system 100 includes processing device 10 , inspection device 20 and database storage device 30 .

The processing device 10 includes a CPU (central processing unit) 11, a RAM (random access memory) 12, a ROM (read only memory) 13, a storage device 14, an operation unit 15, a display device 16, and an input/output I/F (interface). 17. CPU 11 , RAM 12 , ROM 13 , storage device 14 , operation unit 15 , display device 16 and input/output I/F 17 are connected to bus 18 .

RAM 12 is used as a work area for CPU 11 . A system program is stored in the ROM 13 . The storage device 14 includes a storage medium such as a hard disk or a semiconductor memory, and stores a teacher data creation support program (hereinafter abbreviated as support program). The support program may be stored in ROM 13 or other external storage device. The CPU 11, RAM 12, and ROM 13 constitute a support device 40 for executing teacher data creation support processing (hereinafter abbreviated as support processing). In the support processing, creation of teacher data is supported.

The operation unit 15 is an input device such as a keyboard, mouse or touch panel. A user can give a predetermined instruction to the support device 40 by operating the operation unit 15 . The display device 16 is a display device such as a liquid crystal display device, and displays a GUI (Graphical User Interface) or the like for receiving instructions from the user. The input/output I/F 17 is connected to the inspection device 20 .

The inspection apparatus 20 is, for example, an AOI (Automated Optical Inspection) apparatus, and generates a plurality of image data respectively representing images of a plurality of inspection objects by sequentially capturing images of the inspection objects. memorize Each stored image data is given a unique identification number.

Although the inspection apparatus 20 will be described below using a substrate as an example of an inspection object, the inspection object is not limited to a substrate. In addition, the substrate is a semiconductor substrate, a substrate for FPD (Flat Panel Display) such as a liquid crystal display device or an organic EL (Electro Luminescence) display device, an optical disk substrate, a magnetic disk substrate, a magneto-optical disk substrate, a photomask A substrate, a ceramic substrate, a solar cell substrate, or the like.

The inspection apparatus 20 inspects the board corresponding to each image data by performing processing based on a predetermined algorithm on each stored image data. The inspection apparatus 20 may inspect the substrate corresponding to each image data based on deep learning. In the inspection, it is determined whether or not the substrate has defects. Also, for a substrate determined to have a defect, the type of the defect is determined.

In the inspection apparatus 20, even a substrate without defects may be determined to have defects. If a substrate is discarded due to an erroneous decision even though it is free of defects, yield will be reduced. Therefore, a board determined to have a defect is re-inspected by supervised learning. The support device 40 supports creation of teacher data used for reexamination. The database storage device 30 includes a large-capacity storage device such as a server. The created teacher data is registered in the database storage device 30 . Details of the support device 40 will be described below.

(2) Support Device FIG. 2 is a diagram showing the configuration of the support device 40 in FIG. FIG. 3 is a diagram showing various data used to create teacher data. FIG. 4 is a diagram showing an example of a display screen of the display device 16 when creating teacher data. As shown in FIG. 2, the support device 40 includes an abnormal data acquisition unit 41, a normal data acquisition unit 42, a difference data generation unit 43, a presentation unit 44, a reception unit 45, and a registration unit 46 as functional units. The functional units of the support device 40 are realized by the CPU 11 of FIG. 1 executing the support program stored in the ROM 13, the storage device 14, or the like. A part or all of the functional units of the support device 40 may be realized by hardware such as an electronic circuit.

The abnormality data acquisition unit 41 acquires from the inspection device 20 image data (hereinafter referred to as abnormality data) representing an image of each substrate that has been determined to be defective in advance by the inspection device 20 . The image data may indicate an image of the entire substrate, or may indicate a partial image of the substrate in the same area. The upper left part of FIG. 3 shows a part of the image of the board based on the abnormal data acquired by the abnormal data acquisition unit 41 .

The normal data acquisition unit 42 acquires image data representing an image of a normal substrate (hereinafter referred to as normal data) so as to correspond to each abnormal data acquired by the abnormal data acquisition unit 41 . In this example, the normal data is predetermined image data representing an image of a substrate that was not previously determined to be defective by the inspection device 20 , and is acquired from the inspection device 20 . A part of the image of the substrate based on the normal data acquired by the normal data acquisition unit 42 is shown in the lower left part of FIG.

Abnormal data and normal data correspond to each other. For example, when abnormal data is acquired by the abnormal data acquisition unit 41, image data having an identification number immediately preceding the identification number of the abnormal data and showing an image of a normal board is taken as normal data by the normal data acquisition unit. 42. Alternatively, when abnormal data is acquired by the abnormal data acquisition unit 41, image data having an identification number one after the identification number of the abnormal data and showing an image of a normal board is taken as normal data by the normal data acquisition unit. 42.

The difference data generation unit 43 calculates the difference in each pixel value between the abnormal data acquired by the abnormal data acquisition unit 41 and the normal data acquired by the normal data acquisition unit 42 so as to correspond to the abnormal data. generates new image data. The image data generated by the difference data generator 43 is called difference data. The right part of FIG. 3 shows an image of the board based on the difference data generated by the difference data generation unit 43 . The difference data represents an image of a portion of the board that is likely to require re-inspection. As such, the difference data can serve as a label indicating the portion of the board that requires re-inspection.

The presentation unit 44 presents each difference data to the user by causing the display device 16 to display a GUI 50 ( FIG. 4 ) including an image based on each difference data generated by the difference data generation unit 43 . As shown in FIG. 4, the GUI 50 includes an image display area 51, a registration button 52 and a correction button 53. FIG. A plurality of images of the object to be measured are displayed in the image display area 51 . In this example, the image based on the difference data is displayed in the image display area 51 so as to be superimposed on the image based on the abnormal data, but only the image based on the difference data may be displayed in the image display area 51 .

The receiving unit 45 receives an instruction to register difference data. Specifically, the reception unit 45 receives from the operation unit 15 a selection of difference data to be registered as teacher data on the GUI 50 displayed by the presentation unit 44 . While viewing the image displayed in the image display area 51, the user selects an arbitrary image using the operation unit 15 and operates the registration button 52 to obtain difference data representing the image as training data. A selection instruction can be given to the reception unit 45 . The registration unit 46 registers the differential data, the selection of which is accepted by the acceptance unit 45, in the database storage device 30 as teacher data.

Further, the receiving unit 45 can receive correction of difference data. The user can select an arbitrary image in the image display area 51 using the operation unit 15 and operate the correction button 53 to instruct the reception unit 45 to correct the difference data corresponding to the image. can. In addition, the user can use the operation unit 15 to specify, for example, filling in a portion of the selected image that requires re-examination.

When the acceptance unit 45 accepts the designation, the difference data generation unit 43 gives the selected difference data a label indicating the portion for which the designation has been accepted. This corrects the differential data. When the registration button 52 is operated after the difference data is corrected, the registration unit 46 registers the corrected difference data in the database storage device 30 as teacher data.

(3) Support Processing FIG. 5 is a flowchart showing support processing by the support device 40 of FIG. The support processing of FIG. 5 is performed by the CPU 11 of FIG. The support processing will be described below using the support device 40 in FIG. 2 and the flowchart in FIG.

First, the abnormal data acquisition unit 41 acquires each abnormal data from the inspection device 20 (step S1). Next, the normal data acquisition unit 42 acquires normal data corresponding to each abnormal data acquired in step S1 from the inspection device 20 (step S2). Steps S1 and S2 may be performed simultaneously.

Subsequently, the difference data generation unit 43 generates each difference data based on the abnormal data and the normal data corresponding to each other acquired in steps S1 and S2 (step S3). After that, the presentation unit 44 presents each difference data to the user by causing the display device 16 to display an image based on each difference data generated in step S3 (step S4).

Next, the reception unit 45 determines whether or not correction of any difference data among the difference data presented in step S4 has been received (step S5). If the correction of the difference data is not accepted, the accepting unit 45 proceeds to step S7. If correction of any of the difference data is accepted, the difference data generation unit 43 corrects the difference data by adding a label indicating the part for which the specification of correction has been accepted to the difference data (step S6), Go to step S7.

In step S7, the reception unit 45 determines whether registration of any of the difference data presented in step S4 or the difference data corrected in step S6 has been instructed (step S7). If the registration of the difference data is not instructed, the reception unit 45 proceeds to step S9. When registration of any difference data is instructed, the registration unit 46 registers the instructed difference data in the database storage device 30 as teacher data (step S8), and proceeds to step S9.

In step S9, the registration unit 46 determines whether or not an instruction to end is given (step S9). The user can instruct termination or continuation by performing a predetermined operation using the operation unit 15 . If the end is not instructed, the registration unit 46 returns to step S5. When registering additional difference data, the user instructs continuation without instructing termination. When the end is instructed, the registration unit 46 ends the support processing.

(4) Effect In the support device 40 according to the present embodiment, the abnormal data acquisition unit 41 acquires the abnormal data representing the image of the inspection target that has been determined to have a defect in advance. A normal data obtaining unit 42 obtains normal data representing an image of a normal inspection object so as to correspond to the abnormal data obtained by the abnormal data obtaining unit 41 . A difference data generating unit 43 generates difference data indicating a difference between the abnormal data obtained by the abnormal data obtaining unit 41 and the normal data obtained by the normal data obtaining unit 42 so as to correspond to the abnormal data. A portion of the inspection object in the image shown based on the difference data is likely to require re-inspection.

Therefore, based on the difference data generated by the difference data generation unit 43, the presentation unit 44 presents the image of the portion of the inspection object. Selection of difference data presented by the presentation unit 44 is accepted by the acceptance unit 45 . The difference data whose selection is accepted by the accepting unit 45 is registered in the database storage device 30 by the registering unit 46 as teacher data. In this case, the user can register the selected difference data as teacher data by selecting the difference data corresponding to the desired image while viewing the presented image. This makes it possible to create teacher data more easily.

In addition, the reception unit 45 further receives correction of the difference data presented by the presentation unit 44 . The registration unit 46 registers the corrected difference data as teacher data. In this case, the user can more appropriately correct the portion of the inspection object requiring re-inspection in the image based on the difference data. As a result, it is possible to create teacher data for performing inspections with higher accuracy.

(5) Modification FIG. 6 is a diagram showing various data used to create teacher data in the first modification. In the first modification, the user can register in the inspection device 20 in advance a non-inspection target area indicating an area outside the inspection target area. When the non-inspection target area is registered, the inspection apparatus 20 sets the non-inspection target area in the generated image data.

Therefore, as shown in the upper left part of FIG. 6, a non-inspection target area is set in the abnormal data acquired by the abnormal data acquisition unit 41. FIG. Similarly, as shown in the lower left part of FIG. 6, a non-inspection target area is set in the normal data acquired by the normal data acquisition unit 42 . In this case, as shown in the right part of FIG. 6, the difference data generation unit 43 generates the pixel values of the abnormal data and the normal data corresponding to the abnormal data while excluding the set non-inspection target area. difference data is generated by calculating the difference between The pixel value of the non-inspection area in the difference data may be set to 0.

In this case, a label indicating a portion requiring re-inspection is prevented from being attached to the portion outside the inspection target area. As a result, it is possible to create teacher data for performing inspections with higher accuracy. In addition, since the portion outside the inspection target area is not reinspected, the board can be reinspected at high speed by using the created teacher data.

FIG. 7 is a diagram showing various data used for creating teacher data in the second modification. As shown in the upper left part of FIG. 7, the abnormality data acquisition unit 41 acquires defect information indicating the type of the substrate defect in the image indicated by the abnormality data together with the abnormality data. As shown in the right part of FIG. 7, the difference data generation unit 43 adds the defect information acquired by the abnormal data acquisition unit 41 to the generated difference data. In the image display area 51 of the GUI 50, the image based on the difference data may be displayed in a mode (for example, color) indicating the type of defect.

In this case, the user does not need to add defect information to the training data. As a result, it is possible to reduce the burden on the user and improve the working efficiency of creating teacher data. In addition, since mistakes caused by the user's work do not occur, it is possible to create more accurate training data.

FIG. 8 is a diagram showing various data used for creating teacher data in the third modification. In the third modification, the user can preset the inspection apparatus 20 to perform binarization processing on the image data. When the binarization process is set, the inspection apparatus 20 generates binarized image data.

Therefore, as shown in the upper left part of FIG. 8, the abnormal data acquisition unit 41 acquires binarized abnormal data. Similarly, as shown in the lower left part of FIG. 8, the normal data acquisition unit 42 acquires binarized normal data. As shown in the right part of FIG. 8, the difference data generation unit 43 calculates the difference in each pixel value between the binarized abnormal data and the binarized normal data corresponding to the abnormal data. to generate differential data.

In this case, since the amount of image data is reduced, teacher data can be created at high speed. Also, by using the created teacher data, it is possible to re-inspect the board at high speed.

[2] Second Embodiment In the first embodiment, the normal data acquisition unit 42 acquires normal data so that one normal data corresponds to one abnormal data. is not limited to this. In the following, differences between the support processing in the second to fourth embodiments and the support processing in the first embodiment will be described.

FIG. 9 is a diagram showing various data used for creating teacher data in the second embodiment. In the present embodiment, as shown in the lower left part of FIG. 9, a plurality of normal data are acquired such that a plurality of normal data correspond to one abnormal data. The difference data generation unit 43 generates difference data by calculating the difference in each pixel value between one abnormal data and each normal data corresponding to the abnormal data. Therefore, as shown in the right part of FIG. 9, a plurality of differential data are generated corresponding to one abnormal data.

According to this configuration, a large number of differential data are generated from one piece of abnormal data. As a result, it is possible to improve the working efficiency of creating teacher data.

[3] Third Embodiment FIG. 10 is a diagram showing various data used for creating teacher data in the third embodiment. In the present embodiment, as shown in the lower left part of FIG. 10, a plurality of normal data are acquired such that a plurality of normal data correspond to one abnormal data. The difference data generation unit 43 generates difference data by calculating the difference in each pixel value between one abnormal data and the average of a plurality of normal data corresponding to the abnormal data. Therefore, as shown in the right part of FIG. 10, one differential data is generated corresponding to one abnormal data.

According to this configuration, even if noise components unrelated to defects are accidentally mixed in any of the plurality of normal data, the plurality of normal data are averaged. have little effect on the value. Therefore, by using normal data after averaging, it is possible to create teaching data for performing an examination with higher accuracy.

[4] Fourth Embodiment FIG. 11 is a diagram showing various data used to create teacher data in the fourth embodiment. In the present embodiment, as shown in the upper left part of FIG. 11, normal data are obtained so that one normal data corresponds to a plurality of abnormal data. The difference data generator 43 generates difference data based on each abnormal data and normal data corresponding to the abnormal data. Therefore, as shown in the right part of FIG. 11, a plurality of pieces of differential data corresponding to the pieces of abnormal data are generated.

According to this configuration, since it is not necessary to acquire normal data each time abnormal data is acquired, teacher data can be generated at high speed using common normal data. In the present embodiment, image data representing an image of a normal substrate prepared in advance may be acquired by the normal data acquisition unit 42 as normal data. In this case, step S2 in the support process may be executed before step S1.

The image data prepared in advance may be any image data generated by the inspection apparatus 20, or may be master data such as CAD data indicating the design drawing of the board. Here, depending on the processing accuracy of the substrate by etching or the like, the image data generated by the inspection apparatus 20 and the master data differ in the pattern width of the substrate in the image or the radius of curvature of the corners of the pattern. Therefore, the master data may be modified based on the processing accuracy of the substrate so that the width of the pattern in the image or the radius of curvature of the corner of the pattern is changed.

Also in the first to third embodiments, the image data representing the image of the substrate that was not previously determined to be defective by the inspection device 20 is acquired from the inspection device 20 as normal data. The form is not limited to this. At least one of the normal data may be master data prepared in advance or corrected master data.

[5] Other Embodiments In the above embodiment, support device 40 includes reception unit 45 and registration unit 46, but the embodiment is not limited to this. Support device 40 may not include reception unit 45 and registration unit 46 . Even in this case, by checking the image presented on the GUI 50, the user can create teacher data for re-examination of the relevant portion. This makes it possible to easily create teacher data for performing inspections with high accuracy.

[6] Correspondence between each constituent element of the claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each element of the embodiment will be described. is not limited to Various other elements having the structure or function described in the claims can be used as each component of the claims.

In the above embodiment, the support device 40 is an example of a teaching data creation support device, the abnormal data acquisition unit 41 is an example of an abnormal data acquisition unit, and the normal data acquisition unit 42 is an example of a normal data acquisition unit. . The difference data generation unit 43 is an example of a difference data generation unit, the presentation unit 44 is an example of a presentation unit, the reception unit 45 is an example of a reception unit, and the registration unit 46 is an example of a registration unit.

DESCRIPTION OF SYMBOLS 10... Processing apparatus, 11... CPU, 12... RAM, 13... ROM, 14... Storage device, 15... Operation unit, 16... Display device, 17... Input/output I/F, 18... Bus, 20... Inspection device, 30 ... database storage device, 40 ... support device, 41 ... abnormal data acquisition section, 42 ... normal data acquisition section, 43 ... differential data generation section, 44 ... presentation section, 45 ... reception section, 46 ... registration section, 50 ... GUI, 51... Image display area, 52... Registration button, 53... Correction button, 100... Processing system

Claims (13)

A teacher data creation support device for assisting creation of teacher data used for re-inspection of an inspection object,
an anomaly data acquisition unit that acquires anomaly data representing an image of an inspection object that has been determined to have a defect in advance;
a normal data acquisition unit for acquiring normal data representing an image of a normal inspection object so as to correspond to the abnormal data acquired by the abnormal data acquisition unit;
a difference data generation unit that generates difference data indicating a difference between the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit so as to correspond to the abnormal data;
A teacher data creation support device, comprising: a presentation unit that presents an image of a portion of an inspection object based on the difference data generated by the difference data generation unit. a reception unit that receives a selection of differential data presented by the presentation unit;
2. The teaching data creation support device according to claim 1, further comprising a registering unit for registering, as teaching data, the differential data whose selection is accepted by said accepting unit. The reception unit further receives correction of the difference data presented by the presentation unit,
3. The teaching data creation support device according to claim 2, wherein said registration unit registers the corrected difference data as teaching data. The normal data acquisition unit acquires a plurality of normal data so as to correspond to the abnormal data,
The teacher data creation support according to any one of claims 1 to 3, wherein the difference data generation unit generates a plurality of difference data based on abnormal data and a plurality of normal data corresponding to the abnormal data. Device. The normal data acquisition unit acquires a plurality of normal data so as to correspond to the abnormal data,
The teacher data creation support according to any one of claims 1 to 3, wherein the difference data generation unit generates difference data based on abnormal data and an average of a plurality of normal data corresponding to the abnormal data. Device. The normal data acquisition unit acquires normal data so as to correspond to a plurality of abnormal data,
4. The teaching data creation support device according to claim 1, wherein said difference data generation unit generates difference data based on each abnormal data and normal data corresponding to said abnormal data. The teacher data according to any one of claims 1 to 6, wherein the normal data acquired by the normal data acquisition unit includes image data representing an image of an inspection object that was not previously determined to have a defect. Creation support device. 8. The teacher data creation support device according to claim 1, wherein the normal data acquired by said normal data acquisition unit includes master data indicating a blueprint of an object to be inspected. 9. The teacher data creation support device according to claim 8, wherein said normal data acquisition unit acquires master data corrected based on the processing accuracy of the object to be inspected as normal data. A non-inspection area is set in the abnormal data acquired by the abnormal data acquisition unit and the normal data acquired by the normal data acquisition unit,
10. The teacher data creation support device according to claim 1, wherein said difference data generation unit generates difference data by excluding a set non-inspection target area. The abnormal data acquisition unit further acquires defect information indicating a defect type of the inspection object corresponding to the acquired abnormal data,
11. The teaching data creation support device according to claim 1, wherein said difference data generation unit adds the defect information acquired by said abnormal data acquisition unit to the generated difference data. The abnormal data acquisition unit acquires binarized abnormal data,
12. The teacher data creation support device according to claim 1, wherein said normal data acquisition unit acquires binarized normal data. A teacher data creation support method for assisting creation of teacher data used for reinspection of an inspection object,
obtaining anomaly data indicative of an image of an inspection object previously determined to be defective;
obtaining normal data representing an image of a normal test object, corresponding to the obtained abnormal data;
generating difference data indicating a difference between the acquired abnormal data and normal data acquired corresponding to the abnormal data;
and presenting an image of a portion of the inspection object based on the generated difference data.

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