JP2022120619A - 発光素子 - Google Patents
発光素子 Download PDFInfo
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- 229910002704 AlGaN Inorganic materials 0.000 claims description 13
- 230000031700 light absorption Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 description 30
- 239000011777 magnesium Substances 0.000 description 22
- 230000004888 barrier function Effects 0.000 description 12
- 230000007547 defect Effects 0.000 description 11
- 230000000903 blocking effect Effects 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 5
- 230000005641 tunneling Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- USZGMDQWECZTIQ-UHFFFAOYSA-N [Mg](C1C=CC=C1)C1C=CC=C1 Chemical compound [Mg](C1C=CC=C1)C1C=CC=C1 USZGMDQWECZTIQ-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
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- Led Devices (AREA)
Abstract
【解決手段】n型コンタクト層12と、深紫外光を発する発光層13と、Mgを含むAlGaInNからなるp型層15と、p型層15にトンネル接合する、n型半導体からなるn型コンタクト層16と、n型コンタクト層12に接続されたn電極18と、n型コンタクト層16に接続されたp電極17と、を備え、p型層15及びn型コンタクト層16のバンドギャップが、発光層13のバンドギャップより大きく、p型層15のn型コンタクト層16に接触する部分のMg濃度と、n型コンタクト層16のp型層15に接触する部分のドナー濃度が高い、発光素子1を提供する。
【選択図】図1
Description
[2]前記n型層に含まれるドナーがSiである、上記[1]に記載の発光素子。
[3]前記p型層に含まれるアクセプターがMgである、上記[1]又は[2]に記載の発光素子。
[4]前記ドナー高濃度層と前記アクセプター高濃度層の合計厚さが5nm以上、100nm以下である、上記[1]~[3]のいずれか1項に記載の発光素子。
[5]前記ドナー高濃度層の厚さが2.5nm以上、40nm以下であり、前記アクセプター高濃度層の厚さが3nm以上、50nm以下である、上記[4]に記載の発光素子。
図1は、本発明の実施の形態に係る発光素子1の垂直断面図である。発光素子1は、フリップチップ実装型の深紫外光を発するトンネルジャンクション発光ダイオード(LED)である。ここで、深紫外とは、210~365nmの波長域をいうものとする。
以下に、本発明の実施の形態に係る発光素子1の製造方法の一例について説明する。気相成長法による発光素子1の各層の形成においては、Ga原料ガス、Al原料ガス、N原料ガスとしては、例えば、それぞれトリメチルガリウム、トリメチルアルミニウム、アンモニアを用いる。また、n型ドーパントであるSiの原料ガス、p型ドーパントであるMgの原料ガスとしては、例えば、それぞれシランガス、ビス(シクロペンタジエニル)マグネシウムガスを用いる。また、キャリアガスとしては、例えば、水素ガスや窒素ガスを用いる。
上記の本発明の実施の形態によれば、発光層13よりもバンドギャップが大きいp型層15とn型コンタクト層16をトンネル接合させ、n型コンタクト層16をp電極17のコンタクト層として用いることにより、p電極17の材料に仕事関数の低いアルミニウムなどの深紫外光に対する反射率が高い材料を用いることができる。
10 基板
11 バッファ層
12 n型コンタクト層
13 発光層
14 電子ブロック層
15 p型層
151 アクセプター高濃度層
152 アクセプター低濃度層
16 n型コンタクト層
161 ドナー高濃度層
162 ドナー低濃度層
17 p電極
18 n電極
Claims (5)
- 第1のn型コンタクト層と、
前記第1のn型コンタクト層の上の、210nm以上、365nm以下の波長を有する光を発する発光層と、
前記発光層の上の、AlGaInNからなるp型層と、
前記p型層の上の、前記p型層にトンネル接合する、AlGaNからなる第2のn型コンタクト層と、
前記第1のn型コンタクト層に接続されたn電極と、
前記第2のn型コンタクト層に接続されたp電極と、
を備え、
前記p型層及び前記第2のn型コンタクト層のバンドギャップが、前記発光層のバンドギャップより大きく、
前記p型層が、前記第2のn型コンタクト層に接触するアクセプター高濃度層と、前記アクセプター高濃度層の下の、前記アクセプター高濃度層よりもアクセプター濃度が低いアクセプター低濃度層を有し、
前記第2のn型コンタクト層が、前記p型層に接触するドナー高濃度層と、前記ドナー高濃度層の上の、前記ドナー高濃度層よりもドナー濃度が低いドナー低濃度層を有し、
前記ドナー高濃度層のSi濃度が、3.0×1019cm-3cm-3以上、1.0×1021以下であり、
前記ドナー高濃度層のC濃度が4×1018cm-3以下であり、
前記ドナー低濃度層のドナー濃度が9.5×1018cm-3以上、4×1019cm-3以下であり、
前記ドナー低濃度層のC濃度が、前記ドナー低濃度層の前記ドナー濃度の10%以下と4×1018cm-3以下の少なくともいずれか一方を満たす、
発光素子。 - 前記n型層に含まれるドナーがSiである、
請求項1に記載の発光素子。 - 前記p型層に含まれるアクセプターがMgである、
請求項1又は2に記載の発光素子。 - 前記ドナー高濃度層と前記アクセプター高濃度層の合計厚さが5nm以上、100nm以下である、
請求項1~3のいずれか1項に記載の発光素子。 - 前記ドナー高濃度層の厚さが2.5nm以上、40nm以下であり、
前記アクセプター高濃度層の厚さが3nm以上、50nm以下である、
請求項4に記載の発光素子。
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JP2021017635A JP2022120619A (ja) | 2021-02-05 | 2021-02-05 | 発光素子 |
CN202111601264.9A CN114883457A (zh) | 2021-02-05 | 2021-12-24 | 发光元件 |
US17/590,428 US20220254954A1 (en) | 2021-02-05 | 2022-02-01 | Light-emitting element |
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JP2021017635A JP2022120619A (ja) | 2021-02-05 | 2021-02-05 | 発光素子 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013191776A (ja) * | 2012-03-14 | 2013-09-26 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
US20180076354A1 (en) * | 2015-03-27 | 2018-03-15 | Ohio State Innovation Foundation | Ultraviolet light emitting diodes with tunnel junction |
JP2019087710A (ja) * | 2017-11-10 | 2019-06-06 | 学校法人 名城大学 | 窒化物半導体発光素子の製造方法、及び窒化物半導体発光素子 |
JP2019106494A (ja) * | 2017-12-14 | 2019-06-27 | 学校法人 名城大学 | 窒化物半導体発光素子 |
JP2019121757A (ja) * | 2018-01-11 | 2019-07-22 | 日機装株式会社 | 窒化物半導体発光素子 |
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TW201501357A (zh) * | 2013-06-25 | 2015-01-01 | Hon Hai Prec Ind Co Ltd | 發光二極體晶粒及其製造方法 |
JP7262965B2 (ja) * | 2018-10-17 | 2023-04-24 | スタンレー電気株式会社 | 半導体発光素子 |
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- 2021-02-05 JP JP2021017635A patent/JP2022120619A/ja active Pending
- 2021-12-24 CN CN202111601264.9A patent/CN114883457A/zh active Pending
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- 2022-02-01 US US17/590,428 patent/US20220254954A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013191776A (ja) * | 2012-03-14 | 2013-09-26 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
US20180076354A1 (en) * | 2015-03-27 | 2018-03-15 | Ohio State Innovation Foundation | Ultraviolet light emitting diodes with tunnel junction |
JP2019087710A (ja) * | 2017-11-10 | 2019-06-06 | 学校法人 名城大学 | 窒化物半導体発光素子の製造方法、及び窒化物半導体発光素子 |
JP2019106494A (ja) * | 2017-12-14 | 2019-06-27 | 学校法人 名城大学 | 窒化物半導体発光素子 |
JP2019121757A (ja) * | 2018-01-11 | 2019-07-22 | 日機装株式会社 | 窒化物半導体発光素子 |
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CN114883457A (zh) | 2022-08-09 |
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