JP2022120303A - Coating device and blade measurement equipment - Google Patents

Abstract

To provide a coating device capable of precisely adjusting coating film thickness with a minute unit without trouble, and capable of keeping the uniformity of the coating film thickness.SOLUTION: A coating device 11 is equipped with a slide base 12 capable of sliding on a plane, a head portion 13 attached to an upper part of the slide base 12, and a platy blade 14 that is held by a lower part of the head portion 13 through a slide cam 21 and a cam spacer 22 provided in the head portion 13, and is located between a left leg portion 12a and a right leg portion 12b of the slide base 12. The blade 14 forms an edge portion 14a with a lower end pointed downward, and forms a clearance with a fixed height between the blade 14 and a placing surface of the slide base 12. The blade 14 is provided with a height adjusting portion 17 capable of adjusting the height of the edge portion 14a of the blade 14 to a placing surface of the slide base 12, and a parallelism adjusting portion 18 capable of adjusting the parallelism of the edge portion 14a of the blade 14 to the placing surface of the slide base 12.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to a coating device and a blade measuring device, and more particularly, a device capable of coating a substrate with a coating agent using a blade and adjusting the coating film thickness in units of 1 μm, and measuring the height and parallelism of the blade. It relates to a measurable measuring instrument.

Conventionally, in order to apply a coating agent to a flat base material such as a film or metal foil with a uniform thickness, there is a uniform gap between the ground surface and the coating agent, which is applied evenly. A coating apparatus has been proposed which has a blade and is formed so as to be slidable on a substrate, and in which the height of the blade can be adjusted (see Patent Document 1).

JP 2020-138134 A

However, in the coating apparatus as disclosed in Patent Document 1, it was only possible to adjust the height of the blade with accuracy according to the scale of the micrometer. Therefore, it is difficult to finely change the coating film thickness in μm units. It was not possible to meet the needs of adjusting to

In addition, depending on how the blade is attached, the blade may not be kept parallel to the mounting surface because the blade may be tilted, so that the coating film thickness may not be uniform.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a coating apparatus capable of precisely adjusting the coating film thickness in minute units without trouble and maintaining the uniformity of the coating film thickness.

In order to achieve the above object, the coating apparatus of the present invention comprises a slide base having a pair of legs slidable on a flat surface, a head mounted on the top of the slide base, and a head held below the head. and a blade located between both legs of the slide base, the blade forming an edge portion with a downwardly sharpened lower end and being coated with a predetermined film thickness between the mounting surface of the slide base and the blade. A coating apparatus arranged to form a workable gap, comprising: a height adjusting unit capable of adjusting the height of the edge portion with respect to the mounting surface of the slide base; It is characterized by comprising a parallelism adjusting section capable of adjusting the parallelism of the edge portion.

In addition, the height adjusting portion is arranged inside the head portion, and is movable in parallel along the left-right direction, and has a slide cam with an inclined bottom surface. a cam spacer that is inclined at the same angle in the same direction and is in close contact with the lower surface of the slide cam; It is characterized by comprising a micrometer head for

Further, the parallelism adjusting section is provided on one leg of the slide base and on the other leg of the slide base, and a hinge that connects the head section so as to be vertically rotatable about an axis in the front-rear direction. and a parallelism adjusting micrometer head that is fixed to the side surface of the head portion, the spindle portion abuts against the pedestal portion, and changes the degree of inclination of the head portion according to the amount of rotation. It is characterized by

Further, a blade measuring device for measuring the blade height of the above coating apparatus, comprising a planar top plate on which the slide base can be placed, and an object positioned above the top plate with respect to the top plate a plurality of displacement gauges for detecting heights; and a display section for displaying the heights obtained by the plurality of displacement gauges, wherein the plurality of displacement gauges are arranged along the edge portion of the blade at predetermined It is characterized in that they are arranged on the top plate at intervals.

Further, the top plate is provided with a guide member for positioning the blade directly above the plurality of displacement gauges by abutting the slide base of the coating device placed on the top plate. is characterized by

According to the coating apparatus of the present invention, the blade held in the head portion of the coating apparatus is finely adjusted in height and parallelism of the edge portion by the height adjusting portion and the parallelism adjusting portion without replacing the blade. Adjustable.

In addition, since the height adjustment unit includes a slide cam, a cam spacer, and a micrometer head for height adjustment, by moving the slide cam in parallel according to the amount of rotation of the micrometer head for height adjustment, The height of the blade can be adjusted more precisely because it allows for finer scale adjustment than direct height adjustment with a micrometer head.

In addition, the parallelism adjustment unit is equipped with a hinge, a pedestal, and a micrometer head for parallelism adjustment. Uniformity can be adjusted in minute units.

In addition, by using a blade measuring instrument, the height of the edge of the blade can be detected by multiple displacement gauges while the coating device is placed on the top plate, and the detected values can be visually confirmed on the display. , edge height and parallelism can be precisely adjusted.

Since the guide member is provided on the top plate, the blade can be reliably positioned directly above the displacement gauge, which facilitates preparation for measurement and prevents measurement errors due to misalignment.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view of the coating device which is an example of one form of this invention. It is also a side view. FIG. 2 is a cross-sectional view taken along line III-III in FIG. 1; FIG. 2 is a sectional view along IV-IV in FIG. 1; FIG. 4 is a front view of a blade measuring instrument for measuring the height and parallelism of the edge portion of the blade of the coating device; It is also a plan view. It is also a side view. FIG. 4 is a front view showing how a blade measuring device measures the height and parallelism of an edge portion of a blade of a coating device. It is also a side view.

FIG. 1 is a plan view of a coating device 11 that is one embodiment of the present invention, and FIG. 2 is a side view of the coating device 11. As shown in FIG. Hereinafter, regarding the coating device 11, the F direction in FIG. 1 is defined as the front, the B direction is defined as the rear, the L direction is defined as the left, and the R direction is defined as the right.

As shown in FIGS. 1 and 2, the coating device 11 includes a slide base 12 having a pair of left and right legs that can slide on a plane, and a hollow box attached to the top of the slide base 12 and having an open bottom. It is held below the head portion 13 via the head portion 13 of the mold and a later-described slide cam 21 and a cam spacer 22 provided in the head portion 13, and a left leg portion 12a and a right leg portion 12b of the slide base 12. and a plate-like blade (doctor blade) 14 located between the .

The head portion 13 is composed of an upper plate 13a that covers the upper surface and peripheral walls 13b that surround the front, rear, left, and right sides. Although not shown, the upper plate 13a is fixed to the peripheral wall 13b by screwing.

The blade 14 has a left-right length X of a predetermined value (100 mm in this embodiment), and the lower end of the blade 14 forms an edge portion 14a that is pointed downward, and has a constant height between itself and the mounting surface of the slide base 12. They are arranged so as to form a gap of length Y (maximum 0.4 mm).

Therefore, the coating device 11 is placed on a planar base material, and the base material positioned in the space S forward of the head part 13 between the left leg part 12a and the right leg part 12b of the slide base 12 is placed. When the coating agent 11 is slid forward, the blade 14 thinly spreads the coating agent with a film thickness corresponding to the height Y of the edge portion 14a with respect to the mounting surface. and coated on the substrate.

On the rear surface of the peripheral wall 13b of the head portion 13, vertically extending deep counterbore holes 13d are provided at positions overlapping the left leg portion 12a and the right leg portion 12b of the slide base 12, respectively. Base connection pins 15 (15a, 15b) with heads and threaded ends are passed through the left and right counterbore holes 13d and screwed to the left leg 12a and right leg 12b of the slide base 12. is fixed.

Base pull-up springs 16 (16a, 16b), which are coil-shaped elastic members, are fitted into the left and right counterbore holes 13d, respectively, and are in contact with the heads of base connection pins 15 (15a, 15b) from below. The head portion 13 is crimped to the slide base 12 by urging the base connection pins 15 (15a, 15b) upward.

The coating device 11 also includes a height adjusting unit 17 capable of adjusting the height of the edge portion 14a of the blade 14 with respect to the mounting surface of the slide base 12, and the edge portion of the blade 14 with respect to the mounting surface of the slide base 12. A parallelism adjuster 18 is provided to adjust the parallelism of 14a.

Further, a front lever 19 is attached to the front of the slide base 12 and a rear lever 20 is attached to the rear of the slide base 12 so that the coating device 11 can be easily gripped and slid.

FIG. 3 is a cross-sectional view taken along line III-III in FIG. As shown in FIG. 3 , the height adjustment portion 17 includes a slide cam 21 and a cam spacer 22 provided inside the head portion 13 and a height adjustment portion inserted from the left side of the peripheral wall 13 b of the head portion 13 . and a micrometer head 23 for adjustment.

The height adjusting micrometer head 23 is attached so that the spindle portion 23a protrudes inside the head portion 13, and the protruding length of the spindle portion 23a can be adjusted by turning the thimble portion 23b. .

The lower surface of the slide cam 21 is inclined at a predetermined angle in the left-right direction, and the upper surface of the cam spacer 22 is also inclined at the same angle in the same direction. there is Further, the blade 14 is screwed to the lower surface of the cam spacer 22 so as to be detachably fixed.

The inner space of the peripheral wall 13b of the head portion 13 is formed so that the slide cam 21 can move in the left-right direction, and a slide cam restraint spring 24, which is a coil-shaped elastic member, is attached to the right end of the space. . The slide cam restraint spring 24 is inserted into the recess 21b at the left end of the slide cam 21 and biases the slide cam 21 leftward. Further, the tip of the spindle portion 23a of the height adjusting micrometer head 23 abuts against the left end of the inner space of the peripheral wall 13b to restrict the leftward movement of the slide cam 21. As shown in FIG.

The cam spacer 22 is connected to the head portion 13 by a head connection pin 25 which penetrates the upper plate 13 a of the head portion 13 and the slide cam 21 and which has a head and a threaded end.

The upper plate 13a is provided with a deep counterbored hole 13c so that the head connection pin 25 can be inserted therethrough. A cam pull-up spring 25a, which is a coil-shaped elastic member, is fitted in the counterbored hole 13c and contacts the head portion of the head connection pin 25 from below to urge the head connection pin 25 upward.

Further, the slide cam 21 is provided with a through hole 21a through which the head connection pin 25 is passed. The through hole 21a is formed so that the left and right width W is longer than the diameter of the head connection pin 25 so as to allow play in the left and right direction. It can be shifted left and right.

Since the lower surface of the slide cam 21 is inclined, when the slide cam 21 is displaced in the horizontal direction, the horizontal movement is converted into the vertical direction by the inclination. is shifted vertically.

Therefore, the height adjuster 17 moves the slide cam 21 horizontally in accordance with the amount of rotation of the height adjusting micrometer head 23, and the cam spacer 22 moves vertically in accordance with the parallel movement of the slide cam 21. By moving the blade 14 up and down, the height Y of the edge portion 14a of the blade 14 can be adjusted.

The number of graduations engraved on the thimble portion 23b of the height adjusting micrometer head 23 is 100, and is set so that the slide cam 21 translates 1 mm in 10 rotations.

The inclination angle between the slide cam 21 and the cam spacer 22 is set so that the cam spacer 22 moves up and down by 0.1 mm per 1 mm of parallel movement of the slide cam 21 .

Therefore, the amount of vertical movement of the blade 14 for one rotation amount of the height adjusting micrometer head 23 is 0.1 mm/10 rotations/100 scale=0.0001 mm=0.1 μm. On the other hand, it is set to move up and down by 0.1 μm in the range of 0.0 to 0.4 mm.

FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. As shown in FIG. 4, the parallelism adjusting portion 18 includes a hinge 26 that connects the head portion 13 to the left leg portion 12a of the slide base 12 so that the head portion 13 can rotate vertically about the front-rear axis, and the head portion 13. an L-shaped plate member 27 attached to the right side surface of the peripheral wall 13b and having a lower portion protruding rightward; It is composed of a parallelism adjusting micrometer head 29 passing through the lower part of the plate member 27 .

In the parallelism adjusting micrometer head 29, the lower end of the spindle portion 29a is in contact with the upper surface of the pedestal portion 28, and the length of the spindle portion 29a projecting downward from the lower portion of the plate member 27 can be adjusted by turning the thimble portion 29b. Adjustable.

Further, when the length of the spindle portion 29a protruding from the lower portion of the plate member 27 changes, the right side of the head portion 13 slightly rotates about the hinge 26 as a fulcrum, causing a change in the inclination of the head portion 13 in the left-right direction. , the parallelism of the edge portion 14a of the blade 14 held by the head portion 13 also changes.

A pin hole 30 is provided in the right leg portion 12b of the slide base 12, and a positioning pin 31 extending downward from the lower right portion of the head portion 13 is loosely inserted into the pin hole 30. As shown in FIG. As a result, the horizontal movement of the head portion 13 with respect to the slide base 12 is restricted, so that the horizontal displacement of the head portion 13 is prevented.

5 is a front view of a blade measuring device 32 for measuring the height and parallelism of the blade 14 of the coating apparatus 11 of FIG. 1, FIG. 6 is a plan view, and FIG. 7 is a side view. Hereinafter, regarding the blade measuring device 32, the F direction in FIG. 6 is defined as the front, the B direction is defined as the rear, the L direction is defined as the left, and the R direction is defined as the right.

As shown in FIGS. 5 to 7, the blade measuring instrument 32 has a rectangular housing 33, and the upper surface of the housing 33 is a planar top plate 34 on which the slide base 12 can be placed. , two displacement gauges 35 (35a, 35b) for detecting the height of an object positioned above the top plate 34 with respect to the top plate 34 and two displacement gauges 35 (35a, 35b) are provided inside the housing 33. It has two display units 36 (36a, 36b) that respectively display the obtained distances.

The two displacement gauges 35 (35a, 35b) each have terminals 37 (37a, 37b) that expand and contract. and its displacement, both of which are configured to be detectable with an accuracy of 0.1 μm.

Further, the displacement gauge 35a and the displacement gauge 35b are separated in the left-right direction by an interval (80 mm) shorter than the length X (100 mm) of the edge portion 14a of the blade 14 of the coating device 11 in FIG. It is arranged inside the housing 33 with the terminals 37a and 37b facing vertically upward.

In addition, protruding holes 38 (38a, 38b), which are through holes, are provided at the positions of the displacement gauges 35 (35a, 35b) of the top plate 34, so that the displacement gauges 35 (35a, 35b) are located. Terminals 37 (37a, 37b) are configured to protrude above top plate .

Further, the distances between the objects located above the projecting holes 38 (38a, 38b) and the top plate 34 detected by the displacement gauges 35 (35a, 35b) are displayed on the display units 36 (36a, 36b), respectively. configured to be

The slide base 12 of the coating device 11 is mounted on the top plate 34 so that the blade 14 can be easily positioned directly above the projecting holes 38 (38a, 38b) when the coating device 11 of FIG. 1 is placed. A block-shaped guide member 39 against which the .

Moreover, it is desirable that the reference position of the terminal 37 of the displacement gauge 35 is calibrated to be equal to the height position of the upper surface of the top plate 34 before measurement. For this calibration, for example, a reference block (not shown) having a flat bottom surface is placed on the top plate 34 so as to block the projecting holes 38 (38a, 38b), and the displacement meters 35 (35a, 35b) are ) and setting the detected value to 0 points.

FIG. 8 is a front view showing how the blade measuring device 32 measures the height and parallelism of the edge portion 14a of the blade 14 of the coating device 11, and FIG. 9 is a side view thereof.

As shown in FIGS. 8 and 9, when measuring the height and parallelism of the edge portion 14a of the blade 14 of the coating device 11, the top plate 34 of the blade measuring device 32 with the coating device 11 turned on The front part of the slide base 12 abuts against the guide member 39 to position the blade 14 directly above the projecting hole 38 .

When measurement is started in this state, the terminals 37 (37a, 37b) are extended upward from the displacement gauges 35 (35a, 35b) and protrude above the top plate 34 through the projecting holes 38 (38a, 38b). 37 (37a, 37b) contact the edge portion 14a of the blade 14 of the coating device 11

Thereby, the displacement gauges 35 (35a, 35b) detect the height Y from the top plate 34 to the edge portion 14a at the left and right positions, respectively, and display the detected values on the display portions 36 (36a, 36b).

At this time, the height YL of the left side of the edge portion 14a is displayed on the display portion 36a, and the height YR of the right side of the edge portion 14a is displayed on the display portion 36b. ) becomes numerically comprehensible. Also, the difference between the height YL on the left side of the edge portion 14a and the height YR on the right side of the edge portion 14a is compared, and whether the difference is within a certain range determines whether or not the proper parallelism is maintained. judgment becomes possible.

In this state, when the height adjustment micrometer head 23 or the parallelism adjustment micrometer head 29 is turned to change the height Y (YL, YR) of the edge portion 14a, the displacement meter 35 (35a, 35b) Since the terminals 37 (37a, 37b) expand and contract following the change, the changed height Y (YL, YR) of the edge portion 14a is reflected on the display portion 36 (36a, 36b).

Thus, according to the coating device 11 of the present invention, the blade 14 held by the head portion 13 of the coating device 11 can be adjusted by the height adjusting portion 17 and the parallelism adjusting portion 18 without replacing the blade. The height and parallelism of the edge portion 14a can be finely adjusted.

Further, since the height adjusting portion 17 includes the slide cam 21, the cam spacer 22, and the height adjusting micrometer head 23, the slide cam 21 is adjusted according to the amount of rotation of the height adjusting micrometer head 23. By translating the , the height of the blade 14 can be adjusted more precisely because it allows adjustment on a smaller scale than direct height adjustment with a micrometer head.

In addition, since the parallelism adjusting portion 18 includes a hinge 26, a base portion 28, and a parallelism adjusting micrometer head 29, the parallelism of the edge portion 14a can be adjusted separately from the height adjustment. The thickness and uniformity of the film thickness can be adjusted in minute units.

Moreover, the height adjuster 17 can adjust the height of the edge portion 14a with respect to the blade 14 in increments of 0.1 μm, and the parallelism adjuster 18 can adjust the parallelism of the edge portion 14a in increments of 1 μm. The thickness and uniformity of the film thickness can be adjusted in minute units.

Further, by using the blade measuring device 32 of the present invention, the left and right heights of the edge portion 14a of the blade 14 can be measured with two displacement gauges 35 (35a, 35b) while the coating device 11 is placed on the top plate 34. , and the detected values can be visually confirmed on the display section 36 (36a, 36b), so that the height and parallelism of the edge section 14a can be precisely adjusted.

In addition, since the guide member 39 is provided on the top plate 34, the blade 14 can be reliably positioned directly above the displacement meter 35, which facilitates preparation for measurement and prevents errors in measurement due to misalignment. can be prevented.

It should be noted that the present invention is not limited to the above embodiments, and various modifications are possible within the scope of the invention. For example, in this embodiment, the blade measuring device uses two contact-type displacement gauges as sensors for detecting the height and parallelism of the blade. A sensor such as a dial gauge, a digital micrometer, or a depth meter may be used, or two or more sensors may be used. Further, the contact type displacement gauge is not necessarily required, and a non-contact type displacement gauge such as a laser type, air type, optical type, or eddy current type may be used.

In addition, in the coating apparatus of this embodiment, the left-right length X of the blade is set to 100 mm, and the maximum height Y between the edge portion and the mounting surface of the slide base is set to 0.4 mm. However, the maximum values of the length X and the height Y are not limited to these, and both may be changed to different set values depending on the application.

Reference Signs List 11 Coating device 12 Slide base 12a Left leg 12b Right leg 13 Head 13a Top plate 13b Peripheral wall 13c Counterbore 13d Counterbore 14 Blade , 14a... Edge part 15 (15a, 15b)... Base connection pin 16 (16a, 16b)... Base lifting spring 17... Height adjustment part 18... Parallelism adjustment part 19... Front lever 20... Rear lever 21 Slide cam 21a Through hole 21b Recess 22 Cam spacer 23 Micrometer head for height adjustment 23a Spindle 23b Thimble 24 Slide cam restraint spring 25 Head connection pin 25a Cam lifting spring 26 Hinge 27 Plate member 27a Screw hole 28 Pedestal 29 Parallelism adjusting micrometer head 29a Spindle 29b Thimble 30... Pin hole, 31... Positioning pin, 32... Blade measuring instrument, 33... Housing, 34... Top plate, 35 (35a, 35b)... Displacement meter, 36... Display unit, 37 (37a, 37b)... Terminal, 38 (38a, 38b)... Protrusion hole 39... Guide member S... Space

Claims (5)

A slide base having a pair of legs slidable on a flat surface, a head attached to the top of the slide base, and a blade held below the head and positioned between the legs of the slide base. wherein the blade has a downwardly pointed edge portion and is disposed so as to form a gap between the blade and the mounting surface of the slide base so that coating can be performed with a predetermined film thickness. There is
a height adjusting unit capable of adjusting the height of the edge portion with respect to the mounting surface of the slide base; and a parallelism adjusting unit capable of adjusting the parallelism of the edge portion with respect to the mounting surface of the slide base. A coating device characterized by: The height adjustment part is
a slide cam disposed inside the head portion, movable in parallel along the left-right direction, and having an inclined lower surface;
a cam spacer having a lower surface on which the blade is fixed and an upper surface which is inclined in the same direction and at the same angle as the lower surface of the slide cam and which is in close contact with the lower surface of the slide cam;
2. The coating apparatus according to claim 1, further comprising a height-adjusting micrometer head which is inserted into the inside from the side surface of the head portion and which translates the slide cam in accordance with the amount of rotation. The parallelism adjusting section is
a hinge that connects the head portion to one leg portion of the slide base so as to be rotatable in the vertical direction about the front-rear direction;
a pedestal provided on the other leg of the slide base;
and a parallelism adjusting micrometer head fixed to the side surface of the head portion, the spindle portion abutting the pedestal portion, and changing the degree of inclination of the head portion according to the amount of rotation. The coating device according to claim 1 or 2. A blade measuring device for measuring the blade height of the coating device according to any one of claims 1 to 3,
A planar top plate on which the slide base can be placed, a plurality of displacement gauges for detecting the height of an object positioned above the top plate with respect to the top plate, and the heights obtained by the plurality of displacement gauges and a display unit that respectively displays
A blade measuring instrument, wherein the plurality of displacement gauges are arranged on the top plate at predetermined intervals along the edge portion of the blade. A guide member is attached to the top plate to position the blade directly above the plurality of displacement gauges by abutting the slide base of the coating device placed on the top plate. 5. The blade measuring instrument according to claim 4.

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