JP2022119065A5 - - Google Patents
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- JP2022119065A5 JP2022119065A5 JP2021016038A JP2021016038A JP2022119065A5 JP 2022119065 A5 JP2022119065 A5 JP 2022119065A5 JP 2021016038 A JP2021016038 A JP 2021016038A JP 2021016038 A JP2021016038 A JP 2021016038A JP 2022119065 A5 JP2022119065 A5 JP 2022119065A5
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- 239000000758 substrate Substances 0.000 claims 19
- 230000001133 acceleration Effects 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000036461 convulsion Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021016038A JP2022119065A (ja) | 2021-02-03 | 2021-02-03 | 露光装置、および物品製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021016038A JP2022119065A (ja) | 2021-02-03 | 2021-02-03 | 露光装置、および物品製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022119065A JP2022119065A (ja) | 2022-08-16 |
| JP2022119065A5 true JP2022119065A5 (fr) | 2024-02-08 |
Family
ID=82845099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021016038A Pending JP2022119065A (ja) | 2021-02-03 | 2021-02-03 | 露光装置、および物品製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022119065A (fr) |
-
2021
- 2021-02-03 JP JP2021016038A patent/JP2022119065A/ja active Pending
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