JP2022115300A - 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡 - Google Patents
発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡 Download PDFInfo
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Abstract
Description
[発光素子の構成例]
[発光素子の製造例]
[作用効果]
[発光素子の応用例]
[変形例]
Claims (16)
- 蛍光に対する透明性を有するファイバオプティクプレート基板と、
量子井戸構造を有する窒化物半導体層からなる発光層と、を備え、
前記ファイバオプティクプレート基板と前記発光層とが直接接合されている発光素子。 - 前記ファイバオプティクプレート基板と前記発光層とは、熱圧着によって接合されている請求項1記載の発光素子。
- 前記ファイバオプティクプレート基板と前記発光層とは、常温接合によって接合されている請求項1記載の発光素子。
- 前記発光層の構成元素は、前記ファイバオプティクプレート基板内に拡散している請求項1又は2記載の発光素子。
- 前記発光層は、GaN層とInGaN層とが交互に積層された積層構造を有している請求項1~4のいずれか一項記載の発光素子。
- 前記発光層において、前記ファイバオプティクプレート基板と前記発光層との接合面と反対側の面には、金属層が設けられている請求項1~5のいずれか一項記載の発光素子。
- 前記ファイバオプティクプレート基板と前記発光層との接合面において、前記ファイバオプティクプレート基板及び前記発光層の少なくとも一方には、前記蛍光に対する屈折率が前記ファイバオプティクプレート基板と前記発光層との間の屈折率となる中間層が設けられている請求項1~6のいずれか一項記載の発光素子。
- 前記中間層は、SiN層、Ta3O5層、HfO2層、又はこれらの組み合わせによって構成されている請求項7記載の発光素子。
- 請求項1~8のいずれか一項記載の発光素子と、
前記発光素子に対して前記ファイバオプティクプレート基板側に配置された光検出器と、を備える光検出モジュール。 - 前記光検出器は、固体検出素子又は電子管デバイスによって構成されている請求項9記載の光検出モジュール。
- バッファ層と、量子井戸構造を有する窒化物半導体層からなる発光層とを補助基板上に結晶成長させる発光層形成工程と、
蛍光に対する透明性を有するファイバオプティクプレート基板と、前記補助基板上の前記発光層とを直接接合して接合体を形成する接合工程と、
前記接合体から前記補助基板及び前記バッファ層を除去する除去工程と、を備える発光素子の製造方法。 - 前記発光層は、GaN層とInGaN層とが交互に積層された積層構造を有し、
前記バッファ層は、GaN層によって構成されている請求項11記載の発光素子の製造方法。 - 前記発光層における前記ファイバオプティクプレート基板と前記発光層との接合面と反対側の面に金属層を形成する金属層形成工程を、前記除去工程の後に備える請求項11又は12記載の発光素子の製造方法。
- 前記ファイバオプティクプレート基板及び前記発光層の少なくとも一方に前記蛍光に対する屈折率が前記ファイバオプティクプレート基板と前記発光層との間の屈折率となる中間層を形成する中間層形成工程を、前記発光層形成工程と前記接合工程との間に備える請求項11~13のいずれか一項記載の発光素子の製造方法。
- 前記中間層は、SiN層、Ta3O5層、HfO2層、又はこれらの組み合わせによって構成されている請求項14記載の発光素子の製造方法。
- 一次電子線を試料に向けて出射する電子線源と、
前記一次電子線の照射によって前記試料で発生する二次電子線の入射によって蛍光を発生させる請求項1~8のいずれか一項記載の発光素子と、
前記発光素子で発生した前記蛍光を検出する検出光学系と、を備える走査型電子顕微鏡。
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JP2021011835A JP7548833B2 (ja) | 2021-01-28 | 2021-01-28 | 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡 |
KR1020237018090A KR20230140552A (ko) | 2021-01-28 | 2021-11-25 | 발광 소자, 광 검출 모듈, 발광 소자의 제조 방법, 및 주사형 전자 현미경 |
PCT/JP2021/043178 WO2022163101A1 (ja) | 2021-01-28 | 2021-11-25 | 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡 |
US18/270,008 US20240063328A1 (en) | 2021-01-28 | 2021-11-25 | Light-emitting element, optical detection module, manufacturing method for light-emitting element, and scanning electron microscope |
CN202180078066.0A CN116472328A (zh) | 2021-01-28 | 2021-11-25 | 发光元件、光检测模块、发光元件的制造方法、及扫描型电子显微镜 |
IL303645A IL303645A (en) | 2021-01-28 | 2021-11-25 | A light-emitting element, an optical detection module, a manufacturing method for a light-emitting element and a scanning electron microscope |
TW110146955A TW202246463A (zh) | 2021-01-28 | 2021-12-15 | 發光元件,光檢測模組,發光元件的製造方法,及掃描型電子顯微鏡 |
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JPH0766856B2 (ja) * | 1986-01-24 | 1995-07-19 | 株式会社小松製作所 | 薄膜el素子 |
BE1007781A3 (nl) * | 1993-11-25 | 1995-10-17 | Philips Electronics Nv | Werkwijze voor het met elkaar verbinden van twee optische oppervlakken, aldus gevormd optisch samenstel en deeltjes-optisch toestel met zo'n samenstel. |
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JP4365255B2 (ja) * | 2004-04-08 | 2009-11-18 | 浜松ホトニクス株式会社 | 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置 |
JP2009295753A (ja) * | 2008-06-04 | 2009-12-17 | Showa Denko Kk | Iii族窒化物半導体発光素子の製造方法及びiii族窒化物半導体発光素子、並びにランプ |
JP6519195B2 (ja) | 2015-01-23 | 2019-05-29 | コニカミノルタ株式会社 | シンチレータパネル及び放射線検出器 |
JP6576257B2 (ja) * | 2016-01-29 | 2019-09-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子検出器、及び荷電粒子線装置 |
JP6695461B1 (ja) | 2019-02-20 | 2020-05-20 | 浜松ホトニクス株式会社 | 蛍光体パネルの製造方法、蛍光体パネル、イメージインテンシファイア、及び走査型電子顕微鏡 |
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